• Proceedings of KOSOMES biannual meeting
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• 2017.11a
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• pp.159-159
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• 2017

• Journal of Sensor Science and Technology
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• v.11 no.6
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• pp.350-357
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• 2002

Micro gas sensor with single electrode was proposed for improving stability and sensitivity. Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass substrate and a $SnO_2$ sensing material was thermally evaporated on Pt electrode. $SnO_2$ was patterned by lift-off process and then thermally oxidized in $O_2$ condition for 1 hr., $600^{\circ}C$. The size of fabricated sensor was $1.9{\times}2.1\;mm^2$. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearity for wide range($0{\sim}10,000\;ppm$) of gas concentrations. And the sensor shows a good recovery characteristics of 1% deviation compared to initial resistance.

• Journal of Convergence for Information Technology
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• v.8 no.5
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• pp.95-100
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• 2018

The metal oxide/graphene nanocomposites are promising functional materials for high capacitive electrode material of secondary batteries, and high sensitive material of high performance gas sensors. In this study, vanadium dioxide($VO_2$) nanostructrures were grown on CVD graphene which was synthesized on Cu foil by thermal CVD, and exfoliated graphene which was exfoliated from highly oriented pyrolytic graphite(HOPG) using a vapor transport method. As results, $VO_2$ nanostructures on CVD graphene were grown preferential growth on abundant functional groups of graphene grain boundaries. The functional groups are served to nucleation site of $VO_2$ nanostructures. On the other hand, 2D & 3D $VO_2$ nanostructures were grown on exfoliated graphene due to uniformly distributed functional groups on exfoliated graphene surface. The characteristics of morphology controlled growth of $VO_2$/graphene nanocomposites would be applied to fabrication process for high capacitive electrode materials of secondary batteries, and high sensitive materials of gas sensors.

• Journal of Sensor Science and Technology
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• v.29 no.3
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• pp.211-214
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• 2020

Chlorine dioxide is very effective gas for sterilization or disinfection (in manufacturing), and does not produce harmful by-products after use. However, if its concentration exceeds 10 %, it become explosive and cannot be compressed or stored. Therefore, it is necessary to measure its concentration. In this study, the concentration of chlorine dioxide with a high oxidizing strength was measured using a metal oxide sensor. The sensor was a commercially available TGS series from Figaro. The sensitivity of the sensor was inversely proportional to a low concentration of chlorine dioxide gas below 6 ppm and returned to the initial resistance at about 6 ppm. When the gas concentration reached multiples of 10 ppm, resistance of the sensor increased to several megaohms.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.8 s.350
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• pp.13-18
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• 2006

[ $SnO_2$ ] and ZnO nanostructures were grown on the surface of thin film by heat treatment of metal Sn, Zn under Ar gas flow and $O_2$ at atmospheric pressure, respectively. The sensitivity of the $SnO_2$ thin film device on which grown nanowires to CO gas(5,000 ppm) was 50 % at the operating temperature of $200^{\circ}C$. In case of using Pt as catalysts, the sensitivity was enhanced and operating temperature was reduced(73 % at $150^{\circ}C$ ). The sensitivity of the ZnO nanorods device using Cu as catalysts to NOx gas was 90 % at the operating temperature of $200^{\circ}C$. It was found that the sensitivity to CO and NOx gases for the device on which grown nanostructures was much higher than those for general thin film device.

• Journal of Sensor Science and Technology
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• v.28 no.6
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• pp.377-384
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• 2019

People currently spend more than 80% of their time indoors; therefore, the management of indoor air quality has become an important issue. The contamination of indoor air can cause sick house syndrome and various environmental diseases such as atopy and nephropathy. Formaldehyde gas, which is the main contaminant of indoor air, is lethal even with microscopic exposure; however, it is commonly used as an adhesive and waterproofing agent for indoor building materials. Therefore, there is a need for a gas sensor capable of detecting trace amounts of formaldehyde gas. In this review, we summarize recent studies on metal oxide-based semiconductor gas sensors for formaldehyde gas detection, methods to improve the gas-sensing properties of metal oxides of various dimensions, and the effects of catalysts for the detection of parts-per-billion level gases. Through this, we discuss the necessary characteristics of the metal oxidebased semiconductors for gas sensors for the development of next-generation sensors.

• Journal of Sensor Science and Technology
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• v.24 no.1
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• pp.29-34
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• 2015

This study aimed to evaluate the characterization of a metal oxide semiconductor and electrochemical gas sensor array for measuring wastewater odor. The sensitivity of all gas sensors observed in sampling method by stripping was 6.7 to 20.6 times higher than that by no stripping, except sensor D (electrochemical gas sensor). The average reduction ratio of sensor signal as a function of initial dilution rate of wastewater was in the order of food plant > food waste reutilization facility > plating plant. The sensitivity of gas sensors was dependent on both the type of wastewater and the dilution rate. The sensor signals observed by the gas sensor array were correlated with the dilution factor (OU) calculated by the air dilution sensory test with several wastewater ($r^2=0.920{\sim}0.997$), except the sensor signals of sensor D measured in the plating plant wastewater. It seems likely that the gas sensor array plays a role in the evaluation of odor in wastewater and is useful tool for on-site odor monitoring in the wastewater facilities.

• Journal of Sensor Science and Technology
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• v.7 no.5
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• pp.319-326
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• 1998

Anodic half-reaction in the $Na^+$ ionic sensors using $Na_2CO_3$ and $MCO_3$ ($M=Cs_2,K_2,Li_2,Ca$) as a sensitive membrane is derived in continuous flow system to explain $CO_2$ sensing characteristics. For various gas-sensitive membranes, a well known overall reaction, $MCO_3\;=\;MO\;+\;CO_2$, cannot be applied for the EMF behaviors of these kinds of sensors. So, the anodic reaction is found to involve $Na_2CO_3$ and $M^{++}$-containing oxide phases by employing the ion exchange reaction at the interface of solid electrolyte and the sensitive membrane to maintain ionic balance in the whole cell. Based on the electrode reaction derived in flow system, differences of cell potentials between continuous and discontinuous flow systems were also discussed. These EMF differences were considerably caused by the partial pressures of oxygen and $CO_2$ as well as irreversible chemical reactions between electrode materials and $CO_2$ atmosphere.

• Korean Journal of Metals and Materials
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• v.49 no.5
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• pp.395-399
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• 2011

In this study, micro gas sensors for ammonia gas were prepared by adopting MEMS technology and using a sol-gel process. Three types of sensors were prepared via different synthesis routes starting with W sol and Ru sol mixture. This mixture was deposited on a MEMS platform and the platform was subsegueny heated to a temperature of $350^{\circ}C$. The topography and crystal structure of the sensing film were studied using FE-SEM and XRD. The response of the gas sensor to $NH_3$ gas was examined at various operating temperatures and gas concentrations. The sensor response increased almost linearly with gas concentration and the best sensing response was obtained at $333^{\circ}C$ for 5.0 ppm $NH_3$ for the specimen prepared by coating $WO_3$ powders with the Ru sol mixture.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.96-96
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• 2016

나노섬유(nanofiber), 나노선(nanowire), 그리고 나노튜브(nanotube)와 같은 1차원 구조의(one-dimensional structure) 나노재료는 벌크(bulk) 및 박막(film) 재료와는 다르게 물리적, 화학적으로 특이한 성질을 가지고 있으며, 이러한 성질은 나노재료의 구조, 형상, 크기 등에 큰 영향을 받는다. 첫 째, 전기방사(electrospinning) 공정을 이용한 나노섬유의 합성; 용액의 특성, 전기장 세기, 방사시간 등의 변수를 조절하게 되면 방출되는 재료의 형상을 입자 혹은 섬유상의 형태로 얻을 수 있으며, 전기방사를 통해 합성된 나노재료의 소결 온도 및 시간을 달리함으로써 나노입자의 크기를 조절할 수 있다. 또한, 템플레이트 합성법(template synthesis) 및 이중노즐(coaxial nozzle)을 이용해 속이 빈 형태인 중공(hollow) 구조의 나노섬유를 얻을 수 있으며, 전기방사에 사용되는 전구물질에 원하는 금속 및 산화물을 첨가함으로써 복합체(composite) 나노섬유를 얻을 수 있다. 둘 째, VLS(Vapor-Liquid-Solid) 공정을 이용한 나노선의 성장; 온도, 압력, 전구물질의 양, 그리고 시간 등의 변수를 조절하게 되면 원하는 직경 및 길이를 갖는 나노선을 성장시킬 수 있다. 그리고 ALD(Atomic Layer Deposition)를 이용해 나노선에 추가적인 층을 형성함으로써 코어-셀 구조를 형성할 수 있으며, 감마선, UV와 같은 공정을 이용해 귀금속 촉매를 나노선에 기능화 시킬 수도 있다. 코어-셀 구조를 갖는 나노선/나노섬유는 코어 혹은 셀 층의 전자나 홀의 이동을 유발하여 전자공핍층(electron depletion layer) 또는 정공축적층(hole accumulation layer)을 확대 및 축소시켜 센서의 초기저항을 증가시키거나 감소시키는 역할로써 이용되고 있으며, 특히, 셀 층의 두께가 셀 층 재료의 Debye length와 유사한 크기를 갖게 되면, 셀 층은 완전공핍층(fully depleted layer)을 형성해 최대의 감도를 나타낼 수 있다. 본 연구에서는 다양한 제조 공정을 통해 제작될 수 있는 1차원 나노-구조물을 가스센서에 적용하는 사례들을 소개하고, 이러한 가스센서의 감응성능을 향상시키기 위한 방법의 한 가지로 원자층증착법으로 나노선/나노섬유의 표면에 셀층을 형성하여 감응성 향상 메커니즘 및 관련 주요 변수들을 조사하고자 한다.