• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.297.1-297.1
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• 2016

높은 굴절률(n_H) 의 ITO films 위에 homoepitaxial 성장 기술로 낮은 굴절률(n_L) 의 ITO를 이중으로 증착한 반사방지막을 연구하였다. 우리는 기판 상에 vapor flux 입사 각도 및 columnar 성장막과 경사각 사이의 상관 관계에 기초하여 낮은 굴절률의 ITO 박막을 Oblique-angle sputtering을 사용하여 증착하였다. Oblique-angle 증착동안 columns 경사각이 incident flux angle 의 증가에 따라 linear 하게 증가했다. 반대로 incident flux angle 이 증가할때 ITO 박막의 굴절률은 현저하게 감소하였는데, 이는 원자의 shadowing effect와 표면 diffusion으로 인하여 필름내의 porosity를 증가시킨 것으로 보여진다. 이러한 결과로 homoepitaxial으로 성장시킨 ITO 이중층 구조 반사방지막 특성이 향상되었으며, 유리 기판 위에서 weight average reflectance가 n_L=1.72, n_H=1.90 에서 6.57%를 달성하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.221-222
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• 2009

SiN 박막을 Pulsed-PECVD를 이용하여 증착하였다. 박막특성으로는 굴절률, 플라즈마의 특성으로는 이온 에너지 분포를 duty ratio의 함수로 분석하였다. 50-100%의 범위에서 duty ratio의 감소에 따라 고 이온 에너지는 크게 증가하였으며, 반대로 저 이온 에너지는 감소되었다. 굴절률은 duty ratio의 감소에 따라 증가되었으며, 모든 duty ratio의 변화에서 1.75-1.81 사이에서 변화하였다. 40-90%의 duty ratio에서 저 이온 에너지 플럭스보다 고 이온 에너지 플럭스가 높았다. 한편, 굴절률의 변화는 $N_h$의 변화에 가장 밀접하게 연관되어 있음을 확인할 수 있었다.

• Journal of Korean Ophthalmic Optics Society
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• v.5 no.2
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• pp.151-155
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• 2000

We calculated a refractive index of the lens surface by measuring a spectral reflectance for a tinted time on manufacturing of the color lens. The longer a tinted time, the larger a reflectance and reflective index. The refractive index increased for a time up to the colorant's saturation state on the lens surface. The refractive index's change curve of blue color lens for a time depended on the Boltzmann growth curve. then we obtained the parameter's values of $n_{min}=1.482$, $n_{max}=1.497$, $t_c=11.53$ and $d_0=2.287$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.90-93
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• 1997

고주파 반응성 스퍼터링 방법을 사용하여 희토류가 첨가된 SiO$_2$ 박막을 제작하여 특성을 조사하여, 양질의 희토류 원소가 첨가된 SiO$_2$ 박막의 최적의 제작조건을 도출하고 Er-Al:SiO$_2$ 박막의 소자웅용 가능성에 대하여 조사하였다 열처리전의 Er의 농도는 EDS(Energy dispersing x-ray spectrometer)로 측정한 결과 0.77% 로 농도를 나타내었고 코아층 첨가된 Er은 균일하게 분포되었다 크레드층의 굴절률은 633nm의 파장에서 측정하였을때 1.458이였고 코아층의 굴절률은 동일 파장에서 1.757이였다. 굴절률 분포도 (Refractive Index Profile)는 계단형 굴절률 분포로 코아층/클래드 굴절률 차 $\Delta$n$_{ESI}$ = 0.1였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.123-124
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• 2011

플라즈마 화학적 기상 증착(plasma enhanced chemical vapor deposition)공정 중 NH3 gas flow rate, RF power, SiH4 gas flow rate을 고정시키고 N2O gas flow rate을 0 sccm부터 250 sccm까지 변화시키는 조건 하에 SiON박막을 증착한 후 그 투과율, 굴절률을 측정하고 분석하였다. N2O gas flow rate조건별 시편들은 증착율을 계산하여 350 nm 두께로 동일하게 SiON을 증착하였고, borofloat위에 SiON을 증착한 샘플은 투과율을, 실리콘기판 위에 SiON을 증착한 샘플로는 굴절률을 측정하였다. 투과율의 경우는 UV/Vis spectrometer를 이용해 633 nm, 1550 nm 두 가지 파장 대 모두에서 N2O gas flow rate이 가장 큰 250 sccm일 때 가장 높은 것을 알 수 있었고 N2O gas flow rate이 낮아질수록 투과율 또한 작아지는 경향을 보였다. 굴절률은 ellipsometer를 이용해 측정하였으며 633 nm 파장에서 N2O gas flow rate가 가장 낮은 0 sccm일 때 굴절률이 가장 큰 값을 가지고 N2O gas flow rate이 커질수록 굴절률은 지수함수적으로 감소되었다(n=1.837~1.494). 이는 N2O gas flow rate이 낮을수록 SiN계열에 커질수록 SiO2계열에 가까워지는 현상으로 이해된다. 이러한 실험분석 결과는 향후 실리카 도파로의 설계 및 최적화를 위해 사용될 수 있다.

• Polymer(Korea)
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• v.34 no.6
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• pp.588-593
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• 2010

New seven acrylic monomers with covalently bonded silicon, germanium, and tin were prepared for high refractive index materials. The monomers were copolymerized with a cross-linkable comonomer (Trimer) to prepare UV-films for optical characterization. The refractive index of the copolymers increased in proportion to the monomer content and extrapolated to determine that of homopolymer. $Ph_3Si$, $Ph_3Ge$, and $Ph_3Sn$ groups contributed to increase the refractive index of acrylic polymer, in which $Ph_3Sn$ was more effective than $Ph_3Ge$. The index increment confidently occurred with $Bu_3Sn$ attachment in comparison with aliphatic acrylic polymers. $Ph_3SnS$-attached acrylate polymer showed a refractive index of 1.671 at 589 nm. The index change was similarly observed at various different wavelengths (656, 830, 1310, and 1550 nm).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.5
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• pp.565-570
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• 2017

The various techniques proposed previously to obtain a good antireflection(AR) coating induce a scattering of incident light by nanoparticles or control the refractive index by using different materials. This paper compares a suggested graded index profile with the quintic index profile previously suggested for producing an index profile that gives good performance from an AR coating. We assume the structure of the AR coating has three, six, and nine layers with 180 nm total thickness. The wavelength of incident light ranges from 300 nm to 1100 nm. We use the transfer matrix theory for a single layer to obtain the reflectivity of three, six, and nine layers. The reflectivity of two different index profiles with three, six, and nine layers is compared. As a result, the suggested graded index profile shows lower reflectivity than the quintic index profile with three layers, especially in the wavelength range from about 600 nm to 1100 nm. Therefore, we expect that these results can be applied to optical devices and filters in the range from visible(red) to near infrared.

• Korean Journal of Optics and Photonics
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• v.14 no.6
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• pp.594-599
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• 2003

By using the spectroscopic ellipsometry, we have measured and analyzed the optical characteristics of P $r^3$$^{+}$-doped selenide glasses of Ge-Sb-Se system, a strong candidate material for U band fiber amplifiers. The ellipsometric spectra measured in the transparent wavelengths range of the material were all fitted to a model consisting of ambient/roughness/thin fil $m_strate structures to obtain simultaneously the optical properties such as refractive index, in terms of Sellmeier parameters and film structure of P $r^3$$^{+}$-doped selenide glasses. Repeated measurements on different positions in both polished faces rendered to verify positional dependence of measured spectre-ellipsometric data. Hence, the model made possible the analysis of the optical characteristics of the glasses. Even though surface roughness was mainly responsible for the position dependencies, the averaged refractive indexes were as precise as to reflect the minute compositional change tantamount to 1 mol%. The measured refractive indexes are useful for design of core and clad compositions of single-mode selenide optical fibers.

• Korean Journal of Optics and Photonics
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• v.28 no.5
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• pp.221-228
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• 2017

We measured the refractive index of a mixed polymer (NOA61, NOA84) in the liquid and solid states. First we made a hollow prism and filled it with UV (ultraviolet) epoxy. Measurement of the apex angle and the minimum-deviation angle gave the refractive index of the liquid polymer. To measure the refractive index of the solid polymer, an additional structure was included in the hollow prism, and the UV epoxy filling in the hollow prism was hardened. In both cases of liquid and solid polymers, the refractive index of the mixed polymer turned out to be proportional to the mix ratio. These results provide a method to vary the focal length of a double stacked cylindrical microlens array using UV epoxy.

• Korean Journal of Optics and Photonics
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• v.31 no.6
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• pp.321-327
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• 2020

We investigated the light reflection from thin films coated on substrates. Using a prism with a high refractive index as the incident medium, the phenomena of the total internal reflection (TIR) of the prism/film/substrate system and the light coupling into the optical waveguide formed by the air/film/substrate system were comprehensively studied and compared. If the refractive index of the thin film is greater than that of the substrate, within the TIR region of the substrate, sharp reflection minima occur at specific angles where the waveguide modes are excited, that can be used to accurately measure the refractive index and thickness of a thin film. On the other hand, if the refractive index of the thin film is smaller than that of the substrate, such waveguide modes do not exist. In this case, although not so distinct as a bulk medium, the TIR effect of the thin film is still observable, accompanied by an interference pattern. In this study we analyzed the overall reflection phenomena occurring from prism/film/substrate structures, to investigate the possibility of measuring the refractive index of a thin film in both cases.