• Title/Summary/Keyword: 구조진동

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AlSb 화합물 반도체 유전함수의 온도의존성 연구

  • Jeong, Yong-U;Byeon, Jun-Seok;Hwang, Sun-Yong;Kim, Tae-Jung;Kim, Yeong-Dong;Sin, Sang-Hun;Son, Jin-Dong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.136-136
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    • 2011
  • AlSb는 광전자 소자응용에 매우 유용한 재료이며 이를 이용한 반도체소자 설계 및 밴드갭 엔지니어링을 위해서는 화합물 반도체의 전자밴드구조를 포함한 광학적 특성이 반드시 요구된다. 본 연구는 이러한 요구의 해결방안으로서 AlSb 화합물의 유전함수 온도의존성을 0.7~5.0 eV의 에너지 영역에서 타원편광분석법을 이용하여 분석하였다. AlSb는 산소와 급격히 반응하기 때문에, 대기 중에서 물질 고유의 광특성이 유지되기 어려울 뿐만 아니라, 박막 위에 생성되는 산화막 때문에 순수한 AlSb의 유전함수 측정이 불가능하다. 따라서 박막의 산화 효과를 최소화하기 위하여 초고진공 상태의 molecular beam epitaxy 챔버 안에서 800 K의 온도로 성장한 1.5 ${\mu}m$ 두께의 AlSb 박막을 상온 300 K 까지 온도를 단계적으로 변화시켜가며 타원편광분석기를 이용하여 실시간으로 측정하였다. 각 온도에서 측정된 AlSb의 유전함수를 2차 미분하여 전이점(critical point)을 분석한 결과 $E_0$, $E_0+{\Delta}_0$, $E_1$, $E_1+{\Delta}_1$, $E_0'$, $E_0'+{\Delta}_0'$, $E_2$, $E_2+{\Delta}_2$에 해당하는 각 전이점들의 온도 의존성을 확인할 수 있었다. 실험에서 측정된 특정 온도를 포함하여 임의의 온도에서의 AlSb의 유전함수를 유도하기 위하여 변수화모델을 사용하였고 이를 통하여 각 변수들의 온도 의존 궤적을 분석하였다. 2차 미분법을 이용한 전이점들의 온도의존성 분석결과를 기준으로 변수화 모델링을 진행하였으며 그 결과 각 온도에서 실제 유전함수와 근소한 차이를 갖는 AlSb의 유전함수 모델을 만들 수 있었다. 따라서 본 연구결과는 반도체 물성에 대한 학술적 측면뿐 아니라 고온에서의 소자공정 실시간 모니터링 및 반도체 소자 설계 등의 산업적 측면에서 매우 유용하게 사용될 것으로 기대된다.

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Preparation of Kenyaite/epoxy Nanocomposite from Pulverization of Kenyaite (분쇄된 Kenyaite를 이용한 Kenyaite/epoxy 나노복합체 제조)

  • Joo, Eul-Rea;Jeong, Soon-Yong;Oh, Seong-Geun;Kwon, Oh-Yun
    • Applied Chemistry for Engineering
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    • v.18 no.1
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    • pp.48-53
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    • 2007
  • Pulverization characteristics of H-kenyaite in vibration mill and exfoliation property in epoxy of pulverized H-kenyaite was investigated by using XRD, SEM, TEM. and particle size analyzer. Pulverization was conducted for 0.5~5 h. The particle morphology of sample pulverized for 1 h preserved plate-shape. However, this plate-shape disappeared in the sample pulverized for 3 h. The XRD pattern of sample pulverized for 1 h showed the characteristic peak of H-kenyaite. However, the peak disappeared in samples pulverized above 3 h, indicating severe destruction of H-kenyaite structure. TEM analysis for the kenyaite/epoxy nanocomposites exhibited only gallery expansion of 3~5 nm in non-pulverized sample, but dramatical large expansion of 5~10 nm in the samples pulverized during 1 h. This results confirm that the pulverization of wide plates composed of H-kenyaite particle have largely affect on the formation of an exfoliated kenyaite-polymer nanocomposite.

Failure analysis of a turbo molecular pump in semiconductor equipments (반도체 장비에서 터보 분자 펌프의 파손 사례 연구)

  • Jeong, Jin-Yong;Ju, Jeong-Hun;O, Sam-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.120-120
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    • 2018
  • 반도체 소자나 디스플레이 패널 제조 공정에 가장 많이 사용되는 진공 펌프인 터보 분자 펌프는 오일을 사용하지 않고, 설치 방향이 자유로우며 넓은 작동 압력 영역을 가지고 있어서 고가임에도 불구하고 점점 더 사용 영역을 넓혀 가고 있다. 상하의 두 곳에 회전축을 지지하는 베어링이 필요한데, 기계식 금속 베어링을 채용하는 경우에는 반드시 윤활유를 공급해 주어야 하고, 고온, 부식성 또는 산화성 가스의 배기 시에는 퍼지 가스로 비활성인 질소나 알곤등을 이용하여 보호를 해주어야 한다. 반면, 자기 베어링을 채택한 모델은 윤활의 걱정에서 자유로울 수 있기 때문에 채용이 늘어나고 있다. 동일극의 반발력이나 반대극의 인상력을 이용한 구조를 갖게 되는데 갑작스러운 입구 쪽 압력의 증가 시에는 자석 끼리 부딪치는 일이 발생하고 이로 인해서 로터 모듈 전체에 큰 손상을 갖게 되므로 한 곳 정도에 비상용 터치 다운 베어링을 기계식으로 윤활제 없이 설치하기도 한다. 기본적으로 자기 베어링 방식은 로터 모듈의 부상과 제어를 위해서 3축 또는 5축 제어를 하게 되는데 여기에는 전자석의 전류를 미세하게 조정하여 피드백 하는 시스템을 활용하기 때문에 외부에서의 자기장이 일정값 이상 침투하게 되면 제어 회로의 기능에 문제를 일으키게 된다. 또한 축 방향에 수직인 자기장의 강도가 높아지면 고속으로 회전하는 금속 블레이드가 자속을 자르게 되므로 표면에 와전류가 발생하여 문제가 된다. 터보 분자 펌프는 회전자와 고정자 간격이 1 mm 이내로 작아서 약간의 진동이라도 발생하면 회전자와 고정자 간에 충돌이 일어나고 이는 곧 파손으로 이어진다. 그림 1에는 파손 원인 분석을 위한 회전자 모듈의 수치 해석용 모델의 일부를 나타내었고, 그림 2에는 실제로 외부 자기장에 의한 파손이 발생한 사례의 자기 베어링 모듈의 사진을 나타내었다. 본 발표에서는 외부 자기장의 형태에 따라 제어 자기장에 미치는 영향을 CFD-ACE+(ESI corp)를 활용하여 해석하였다.

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Geophysical Survey in the Taran Area on the Central Kalimantan, Indonesia (인도네시아 중부 칼리만탄 타란지역에서의 물리탐사)

  • 조진동;김인준;박인화
    • Economic and Environmental Geology
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    • v.35 no.2
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    • pp.155-162
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    • 2002
  • There are many typical epithermal deposits scattering in the Taran of central Kalimantan. Indonesia. To get the shallow geological information, we carried out the geophysical exploration: spontaneous potential survey, in-suite magnetic susceptibility measurement and relistivity survey method in this area for a few weeks from September 30th to October 27th in 1997. SP survey (Fluke 27 multimeter)/magnetic susceptibility (EK -7 meter) measurement was carried out with a 250m$\times$10m lattice net in N45$^{\circ}$W direction. The dipole-dipole array resistivity survey was conducted with an electrode spacing of ${\alpha}$=30 m and electrode separation index n=7 at the line 5. The result shows that was the gold bearing quartz vein area can be divided into two type lone: low sulfidation type and high sulfidation type zone. The low resistivity value in the survey line 5 indicated a fracture Bone associated with the high sulfidation zone.

Performance Characteristics of Thrust Measurement System for Hot-Firing Test of Small Liquid Propulsion Engines (소형 액체 추진기관 연소 시험을 위한 추력 측정 장치의 성능 특성 연구)

  • Kim, In-Tae;Huh, Hwan-Il;Kim, Jeong-Soo;Jang, Ki-Won;Lee, Jae-Won
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.32 no.9
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    • pp.122-129
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    • 2004
  • An accurate thrust measurement is one of the critical paths to the successful test and evaluation program of small liquid propulsion engines. This study describes the design factors for the development of thrust measurement system (TMS) as well as manufacturing practice of TMS hardware. We investigate characteristics of the TMS and its performance through hot-firing test of small liquid engine in a vacuum test cell which is capable of simulating 100,000 ft of altitude or higher. For performance test of TMS, we measure thrusts by changing propellant injection pressure at steady state firing mode as well as at pulse firing mode. Measured eigen frequency of the TMS is 67 Hz. Linearity test of the TMS shows good performance with less than 0.5% of linearity error.

Real-time impact location monitoring using the stabilized Bragg grating sensor system (안정화된 광섬유 브래그 격자 센서 시스템을 이용한 실시간 충격위치검출에 관한 연구)

  • Bang, Hyung-Joon;Hong, Chang-Sun;Kim, Chun-Gon
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.32 no.7
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    • pp.37-42
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    • 2004
  • In order to monitor the impact locations in smart structures, multipoint ultrasonic sensors are to be employed. In this study, a multiplexing demodulator with wide dynamic range was proposed to detect the impact locations using FBG sensors, and a stabilization controlling system was also developed for the maintenance of maximum sensitivity of sensors. Two FBG sensors were attached on the bottom side of the aluminum beam specimen and low velocity impact tests were performed to detect the one-dimensional impact locations. As a result, multiplexed in-line FBG sensors could detect the moment of impact precisely, and found the impact locations with the average location error below 0.58mm.

Mechanical System Design and Development of the HAUSAT-1 Picosatellite (초소형위성 HAUSAT-1의 기계시스템 설계 및 개발)

  • Hwang, Ki-Lyong;Min, Myung-Il;Moon, Byoung-Young;Chang, Young-Keun
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.32 no.9
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    • pp.103-113
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    • 2004
  • The satellite is exposed to the severe vibration environments such as random vibration environments such as random vibration, acceleration, shock, and acoustics during launch ascent and transportation. It is also faced with various space environments such as thermal vacuum, radiation and microgravity during the mission life. The satellite should be designed, manufactured, assembled and tested to be able to endure in these harsh environments. This paper addresses the results of the structural and thermal design and analyses for the HAUSAT-1 picosatellite which is scheduled to launch in the first quarter of 2005 by Russian launch vehicle "Dnepr". The qualification vibration and thermal vacuum tests have been conducted and passed at the satellite level to ensure that the HAUSAT-1 mechanical system was designed to be stable with enough margin.

On the vibration influence to the running power plant facilities when the foundation excavated of the cautious blasting works. (S 화력발전소 3, 4호기 증설에 따르는 정밀발파작업으로 인한 인접가동발전기 및 구조물에 미치는 진동영향조사)

  • Huh Ginn
    • Explosives and Blasting
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    • v.9 no.4
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    • pp.3-12
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    • 1991
  • The cautious blasting works had been used with emulsion explosion electric M /S delay caps. Drill depth was from 3m to 6m with Crawler Drill 70mm on the calcalious sand stone (soft-moderate-semi hard Rock) . The total numbers of feet blast were 88. Scale distance were induces 15.52-60.32. It was applied to Propagation Law in blasting vibration as follows .Propagtion Law in Blasting Vibration V=k(D/W/sup b/)/sup n/ where V : Peak partical velocity(cm/sec) D : Distance between explosion and recording sites(m) W ; Maximum Charge per delay -period of eight milliseconds or more(Kg) K : Ground transmission constant, empirically determind on the Rocks, Explosive and drilling pattern ets. b : Charge exponents n : Reduced exponents Where the quantity D/W/sup b/ is known as the Scale distance. Above equation is worked by the U.S Bureau of Mines to determine peak particle velocity. The propagation Law can be catagrorized in three groups. Cabic root Scaling charge per delay Square root Scaling of charge per delay Site-specific Scaling of charge delay Charge and reduction exponents carried out by multiple regressional analysis. It's divided into under loom and over loom distance because the frequency is varified by the distance from blast site. Empirical equation of cautious blasting vibration is as follows. Over 30m--under 100m----V=41(D/ W)/sup -1.41/-----A Over l00m---------V=121(D/ W)/sup -1.56/-----B K value on the above equation has to be more specified for furthur understand about the effect of explosives. Rock strength, And Drilling pattern on the vibration levels, it is necessary to carry out more tests.

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Effect of Pressure on the Magnetic Properties of Magnetite Nanoparticles Synthesized Using a High Pressure Homogenizer (고압 균질기의 압력이 마그네타이트 나노입자의 자기 특성에 미치는 영향)

  • Ji, Sung Hwa;Kim, Hyun Hyo;Kim, Hyojin
    • Journal of the Korean Magnetics Society
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    • v.26 no.6
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    • pp.190-195
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    • 2016
  • We report the effect of pressure varying from 0 to 1500 bar on the magnetic properties of magnetite nanoparticles synthesized from $Fe(OH)_2$ suspension using a high pressure homogenizer without any dispersing agent and oxidant. The observed X-ray diffraction (XRD) patterns showed that all the synthesized nanoparticles had the inverse spinel structure of magnetite. It was found from transmission electron microscopy (TEM) and XRD analysis that the average size of the synthesized magnetite particles could be controlled by the pressure of the high pressure homogenizer. The average particle size was found to range from 21 to 26 nm and decrease with increasing pressure. Magnetic hysteresis measurements performed at room temperature using a vibrating sample magnetometer (VSM) revealed the appearance of a superparamagnetic behavior in the magnetite nanoparticles synthesized at a pressure of 1500 bar.

A Study on Input Multiplexer for Ku-Band Satellite Transponder (Ku 대역 위성 중계기용 입력 멀티플렉서에 관한 연구)

  • 이주섭;엄만석;염인복;이성팔
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.14 no.4
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    • pp.393-400
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    • 2003
  • This paper deals with the design and manufacturing technique of EQM(Engineering Qualification Model) of input multiplexer(IMUX) for the Ku-band satellite transponder. Channel dropping method by circulator chain structure is adopted for demultiplexing each channel. External equalizers are attached behind channel filters fur reduction of group delay variation and amplitude variation simultaneously. Both channel filters and equalizers adopted dual-mode technique in design f3r mass and volume reduction. Channel filters are designed to have 8-pole elliptic response and equalizers to be of 2-pole reflection type. For good temperature stability characteristics, INVAR36 material is used for channel filters and external equalizers. Vibration test, Thermal Vacuum Test, and EMC test have been performed on input multiplexer and it is shown to be suitable for Ku-band satellite transponder.