• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.260-260
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• 2012

최근 IT산업의 급속한 발달로 모바일 제품과 반도체 및 IC 패키지 등의 전자제품의 소형화, 경량화 및 고성능화되어 가고 있다. 따라서 반도체 공정에서 단위소자의 고속화를 구현하기 위한 금속배선공정에 사용되는 금속재료가 최근에 최소 선폭을 갖는 디바이스에서는 구리를 배선 재료로 전환하고, 향후에는 모든 디바이스가 구리를 주요 배선재료로 사용할 것으로 예측되고 있다. 반도체 소자 공정 중 시료 표면 위에 형성되는 오염물은 파티클, 유기오염물, 금속 불순물 그리고 자연 산화막으로 나눌 수 있다. 구리 표면에 생성되는 부식생성물의 종류에는 CuO, $Cu_2O$, $Cu(OH)_2$, $CuCO_3{\cdot}Cu(OH)_2$와 같은 생성물들이 있다. 이러한 부식생성물이 구리박막 표면에 형성이 되면 성장된 구리박막의 특성을 저하시키게 된다. 이러한 다양한 오염물들을 제거하기 위해서 여러 가지 전처리 공정에 대한 연구가 보고되고 있다. 본 연구에서, 스퍼터 방식으로 구리를 증착한 웨이퍼 (Cu/Ti/Si) 를 대기 중에 노출시켜 자연 산화막을 성장시키고, 이 산화막과 대기로부터 흡착된 불순물을 제거하기 위해 계면 활성제인 TS-40A와 $NH_4OH$ 수용액을 사용하여 이들 수용액이 구리 표면층에 미치는 영향에 대해 조사 분석하였다. 사용된 TS-40A는 알칼리 탈지제로서 웨이퍼 표면의 유기물을 제거하는 역할을 하며, $NH_4OH$는 구리를 제거하는 부식액으로 산업현장에서 널리 사용되고 있다. 다양한 표면 전처리 조건에 따른 구리박막 표면의 형상 및 미시적 특성변화를 SEM과 AFM을 이용하여 관찰하였고, 표면의 화학구조 및 성분 변화를 관찰하기 위해 XPS를 측정하였으며, 전기적 특성변화를 관찰하기 위해 4-point prove를 사용하여 박막의 면저항을 측정하였다.

• Journal of the Korean Geosynthetics Society
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• v.14 no.4
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• pp.139-146
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• 2015

This paper describes a effect of nano-bubble on removal of complex heavy metals, in order to remove pollutants of soil with copper (Cu) and lead (Pb) based on column test. It was conducted column test considering inflow and fine soil contents condition, and then it was analyzed removal effect of nano-bubble on Cu and Cu/Pb. The test result showed that the removal effect of the nano-bubble was higher than that of distilled water regardless of fine soil contents in case of Cu pollutant, and the removal effect of nano-bubble on heavy metals was found to have a significant impact on Pb than Cu in case of Cu/Pb pollutants. It was also analyzed that engineering properties (like a flow path and permeability) of soil due to void ratio has influenced a significant impact the pollutants removal of nano-bubble. The test results determined that nano-bubble can be applied as a flushing agent for priority target pollutant in complex heavy metals.

• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.6-11
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• 2012

In order to understand a process of contaminants removal on surface of Cu seed layer (Cu seed/Ti/Si) by sputter deposition, we investigated the changed morphology and states of Cu seed surface after pretreatment in alkali degreasing Metex TS-40A solution according to dipping time. After TS-40A pretreatment, the surface morphology with clearer grains was observed by Field emission scanning electron microscope and the changed surface chemical states and impurities on surface of samples were checked by X-ray photoelectron spectroscopy. Dipping time in TS-40A solution had very little effect on surface of Cu seed layer. After pretreatment, much carbons and little oxygens on surface of Cu seed were eliminated and the decrease of peaks corresponded to O=C and $Cu(OH)_2$ was estimated. However, Si content (=silicate) was detected on sample surface. We think that the silicate impurity forms on Cu seed by chemical reaction of TS-40A solution included silicate component. By pretreatment of alkali degreasing Metex TS-40A solution, it showed an excellent effect in removal of O=C and $Cu(OH)_2$ on Cu seed layer, but the silicate was formed on surface of Cu seed. Therefore, another cleaning process such as acid cleaning is required for removal of this silicate in use of this alkali degreasing.

• Korean Journal of Materials Research
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• v.8 no.9
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• pp.837-842
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• 1998

As the size of the integrated circuit is scaled down the importance of Si cleaning has been emphasized. One of the major concerns is abut the removal of metallic impurities such as Cu and Fe on Si surface. In this study, we intentionally contaminated Cu and Fe on the Si wafers and cleaned the wafer by cleaning splits of the chemical mixture of $\textrm{H}_2\textrm{O}_2$ and HF and the combination of HF treatment with UV/$\textrm{O}_3$ treatment. The contamination level was monitored by TXRF. Surface microroughness of the Si wafers was measured by AFM. The Si wafer surface was examined by SEM. AES analysis was carried out to analyze the chemical composition of Cu impurities. The amount of Cu impurities after intentional contamination was abut the level of $\textrm{10}^{14}$ atoms/$\textrm{cm}^2$. The amount of Cu was decreased down to the level of $\textrm{10}^{10}$ atoms/$\textrm{cm}^2$ by cleaning splits. The repeated treatment exhibited better Cu removal efficiency. The surface roughness caused by contamination and removal of Cu was improved by repeated treatment of the cleaning splits. Cu were adsorbed on Si surface not in a thin film type but in a particle type and its diameter was abut 100-400${\AA}$ and its height was 30-100${\AA}$. Cu was contaminated on Si surface by chemical adsorption. In the case of Fe the contamination level was $\textrm{10}^{13}$ atoms/$\textrm{cm}^2$ and showed similar results of above Cu cleaning. Fe was contaminated on Si surface by physical adsorption and as a particle type.

• Korean Journal of Ecology and Environment
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• v.43 no.1
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• pp.11-18
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• 2010

The contamination of a suite of heavy metals were evaluated in water and sediments of urban stream, Tancheon down the stream. Tancheon is a urban stream which goes all the way across the urban area where various pollution sources are present. The sixteen study sites from seven different areas were designated down the stream. The heavy metal levels of the streams were detected in the order of Zn>Cu>Ni>Pb>Cd>Cr>Sb. There was a difference in the relative order of the concentration ranking in lake sediments. There is a trend that the heavy metal levels are higher at the sites where the construction causes inflow of soil particles to stream. Toxicity tests using pore-water in sediments were conducted for samples collected in some study sites, and pore-water in one site was proven to be toxic to Japanes medaka (Oryzias latipes). The reason may be the fecal pollution rather than heavy metal effect. Strong odor was detected in the sediment whose pore-water samples showed ecotoxicity. We did not observed the increasing concentration of heavy metals down to stream since the soil texture varied in the stream area of our study. Further study is needed to find quantitative relations between the level of contamination and its eco-effect.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.167-167
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• 2009

결정질실리콘 태양전지를 제조함에 있어 실리콘 기판 내의 금속 불순물들은 소자제작 시에 성능 저하의 원인으로 작용한다. 따라서 본 연구에서는 실리콘 기판에 Cr, Cu, Ni 불순물을 강제 오염시킨 후 태양전지를 제작하여 각각의 불순물에 대한 특성을 조사 하였다. p-type 실리콘 기판을 오염시키기 위해 일정 시간동안 표준용액에 담근 후 질소 분위기에서 열처리 하여 불순물을 확산시켰다. 이후 상용 공정을 이용하여 태양전지를 제작하고 기판내 금속불순물 농도에 따른 태양전지의 동작특성을 분석하였다.

• The Korean Journal of Ecology
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• v.27 no.1
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• pp.43-47
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• 2004

This research was investigated to prepare basic data in a study on the copper tolerance of herbaceous plants through the growth rate and the elimination rate dependent on Cu concentration of 6 species; Commelina communis, Medicago sativa, Echinochloa frumentancea, Zea mays, Helianthus annuus and Abutilon avicennae, We examined the germination rate, root and shoot growth of seedling and fresh biomass of 6 species (Commelina communis, Medicago sativa, Echinochloa frumentancea, Zea mays, Helianthus annuus and Abutilon avicennae) painted to Cu contaminated soil (50, 100, 200, 300-CuCl₂/㎏) and control for 14 days. The germination rate of H. annuus, E. frumentancea and C. communis were not affected by Cu concentration. However, root and shoot growth of H. annuus was about 7% of control and the biomass was 35% of control at 300 ㎎-CuCl₂/㎏. E. frumentancea and C. communis that showed good growth rate at higher Cu contaminated soil (>200 -CuCl₂/㎏), were the most tolerant plant to Cu concentration. Especially, E. frumentancea eliminated over 30% of Cu in soil and the amount of Cu uptake increased with increasing Cu concentration; 1,020㎎ Cu per 1 ㎏ of soil at 300 ㎎-CuCl₂/㎏. From these results, we concluded that E. frumentancea would be used for phytoremediation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.2
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• pp.385-394
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• 2007

To study long-term characteristics of the heavy metal contamination, soil and sediment samples were collected at 14 sites in highway roadside during 6 years. The total concentrations of metals including Zn, Ni, Cu. Pb, Cr, Cd, and As in those samples were investigated. The results indicate that concentrations of Zn, Ni, and Cu in highway roadside soils are much higher than the metal concentrations in background soils and appear to be increased gradually. Strong linear relationships between the cumulative traffic and the contents of the metals in highway roadside soils were obtained. Therefore, they might be used to predict the heavy metal concentrations in the future highway roadside soils for establishing the countermeasure of soil and sediment contamination.

• Korean Journal of Mineralogy and Petrology
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• v.33 no.4
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• pp.377-389
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• 2020

In this study, pollution characteristics were investigated for the Andong Dam sediments in the Nakdong River. Sediment samples were collected from the middle, left, and right points of the lake up to 40km upstream of the Andong Dam at intervals of about 5km by stratification and turnover period. In the case of nutrients and total organics such as loss of ignition, total nitrogen, and phosphorus, the degree of contamination is low, but heavy metals of arsenic and cadmium is very high. The contamination level of sediments in the dam area is higher than that of the branch of river and the control group, and concentration of chromium, copper, and lead are higher in the stratification period, and that of zinc is higher in turnover period. Arsenic, cadmium, manganese, and zinc showed contamination variation between upstream and downstream but chromium, copper, mercury, iron and lead didn't show the variation.

• Korean Journal of Ecology and Environment
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• v.41 no.1
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• pp.66-72
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• 2008

Total metals, soluble metals, and bioavailable metals were monitored at the sediments of urban lakes located in Seoul, Korea during spring season 2006. The metals measured were zinc, arsenic, chromium, copper, nickel, and cadmium, which are known to be toxic to human health and ecosystems. The main sources of heavy metals in the lakes were urban runoff and atmospheric deposition associated with air pollution in urban areas. Extraction by using a weak electrolyte solution (0.1 M $Ca(NO_3)_2$) was used to predict bioavailability of the metals. Among the six heavy metals studied, copper was the most bioavailable, based the weak electrolyte extraction techniques. Since metal toxicity is related to metal bioavailability, the results were consistent with the high ecotoxicity of copper, compared to other heavy metals. Overall results suggest that there was no direct relationship between total and bioavailable metal concentration, although zinc, copper and cadmium show some relationships.