• Title/Summary/Keyword: 광학주사장치

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A study on optical measurement system with high precision and product of Near-Field Scanning Optical Microscope (고정밀 광계측 시스템 연구 및 근접장 주사 광학현미경의 제작)

  • Sin, Dong-Min;HwangBo, Soung
    • Proceedings of the KIEE Conference
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    • 2008.07a
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    • pp.1743-1744
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    • 2008
  • NSOM(Near-field Scanning Optical Microscopy) 조화 진동자(Tuning fork)와 광섬유 탐침을 결속시켜 미소신호를 검출하여 증폭과 잡음을 제거하기 위한 Pre-amplifier의 설계 및 제작과 더불어 시료-탐침간 거리를 파장보다 짧게 유지시키는 Shear force 검출, 효율적인 시료-탐침 거리유지 알고리즘 구연 및 탐침을 시료 표면에서 일정한 거리를 안정적으로 유지하도록 제어 및 시료의 높이 정보를 얻어내는 시스템을 설계 및 제작하였다. 또한 ����$CO_2Laser$를 이용한 Heat Pulling 장치개발을 통해 탐침을 제작, LabVIEW를 통해 개별적인 시스템을 하나로 통합하여 AFM 테스트 시료인 SiO 샘플의 표면 형상을 측정하였다.

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Structural, Morphological, and Optical Properties of AlN Thin Films Subjected to Oxygen Flow Ratio (산소 유량비 변화에 따른 AlN 박막의 구조, 표면 및 광학적 특성)

  • Cho, Shin-Ho;Kim, Moon-Hwan
    • Journal of the Korean Vacuum Society
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    • v.19 no.4
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    • pp.287-292
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    • 2010
  • We have investigated the effects of oxygen flow ratios on the structural, morphological, and optical properties of AlN thin films grown by using radio-frequency reactive magnetron sputtering. The AlN thin films were deposited at $300^{\circ}C$ of substrate temperature, and the reactive gas were supplied with both nitrogen and oxygen. The oxygen flow ratio was varied by controlling the amount of oxygen with respect to the total mixed gases, 0%, 10%, 15%, 20%, 25%, and 30%. The structural, morphological, and optical properties of the deposited AlN thin films were examined by using X-ray diffractometer, scanning electron microscopy, and ultraviolet-visible spectrophotometer. The AlN thin film grown at 10% of oxygen flow ratio indicated an average transmittance of 91.3% in the wavelength range of 350~1,100 nm and an optical band gap of 4.30 eV. The experimental results suggest that AlN thin films can be deposited optionally by varying the oxygen flow ratio.

Surface Measurement of Microstructures Using Optical Pick-up Based Scanner (광픽업 스캔 장치를 이용한 미소 구조물의 표면 측정)

  • Kim, Jae-Hyun;Park, Jung-Yul;Lee, Seung-Yop
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.34 no.1
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    • pp.73-76
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    • 2010
  • The issue of inspection and characterization of microstructures has emerged as a major consideration in design, fabrication, and detection of MEMS devices. However, the conventional measurement techniques, including scanning electron microscopy (SEM) imaging, atomic force microscopy (AFM) scanning, and mechanical surface profiler, require often destructive process or may be difficult to measure with a wafer scale. In this paper, we characterize the surface profiles of microstructures using an optical scanner based on a DVD pick-up module. Scanning images of the microstructures are successfully generated using the intensity of reflected light from different depths of the surface profiles, based on the focus error signal (FES) from photodiodes. It is shown that the proposed optical scanner can be used as an alternative measurement system with high performance and low cost, compared to conventional measurement techniques.

Ultrastructural study of Glandular Trichomes in Pelargonium peltatum (Pelargonium peltatum 분비모의 미세구조 연구)

  • Cho, Bum-Suk;Ko, Kyoung-Nam;Kim, Eun-Soo
    • Applied Microscopy
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    • v.29 no.1
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    • pp.125-136
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    • 1999
  • The ultrastructure of glandular trichomes in Pelargonium peltatum has been studied with a light microscope, transmission, and scanning electron microscope. Two types of the glands, long-stalked and short-stalked capitate glands, are distinguished with their shape and size of the total glands. Both glands are extreamly abundant in the leaf veins and petioles. These glandular trichomes are consisted of one secretory cell, three stalk cells, and one basal cell. The secretory cells contain a large amount of smooth endoplasmic reticulum. They have also much plastids, vacuoles, Golgi apparati, and mitochondria. High electron-dense deposits are frequently present in vacuoles of secretory cells. It seems to be phenolic compounds which is thought as the major secretory precursors.

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Synthesis and Photoluminescence Properties of Blue Phosphor Y1-xBO3:Cex3+ (청색 형광체 Y1-xBO3:Cex3+의 합성과 발광 특성)

  • Cho, Shin-Ho
    • Journal of the Korean Vacuum Society
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    • v.20 no.3
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    • pp.176-181
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    • 2011
  • $Y_{1-x}BO_3:Ce_x^{3+}$ ceramic phosphors were synthesized with changing the concentration of $Ce^{3+}$ ion by using a solid-state reaction method. The crystal structure, surface morphology, and optical properties of the blue phosphors were investigated by using X-ray diffractometer (XRD), scanning electron microscopy, and photoluminescence and photoluminescence excitation spectrophotometry, respectively. The XRD results showed that the main peak of the phosphor powders occurs at (401)와 ($31\bar{2}$) planes. As for the optical properties, the excitation spectrum occurred at 243 nm and the value of blue emission intensity peaking at 469 nm reached the maximum when the concentration of $Ce^{3+}$ ion was 0.10 mol.

Growth and Optical Properties of PbSnSe Epilayers Grown on BaF2(111) (PbSnSe 단결정 박막의 성장과 광학적 특성)

  • Lee, Il-Hoon
    • Journal of Korean Ophthalmic Optics Society
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    • v.9 no.1
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    • pp.35-41
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    • 2004
  • This study investigated the crystal growth, crystalline structure and the basic optical properties of $PbSnSe/BaF_2$ epilayers. The PbSnSe epilayer was grown on $BaF_2$(111) insulating substrates using a hot wall epitaxy (HWE) technique. It was found from the analysis of X-ray diffraction patterns that $PbSnSe/BaF_2$ epilayer was grown single crystal with a rock-salt structure oriented along [111] the growth direction. Using Rutherford back scattering, the atomic ratios of the PbSnSe was found to be proper stoichiometric. The best values for the full width at half maximum (FWHM) of the DCXRD was 162 arcsec for PbSnSe epilayer. The epilayer-thickness dependence of the FWHM of the DCXRD shows that the quality of the $PbSnSe/BaF_2$ is as expected. The dielectric function ${\varepsilon}(E)$ of a semiconductor is closely related to its electronic energy band structure and such relation can be drawn from features around the critical points(CPs) in the optical spectra. The real and imaginary parts(${\varepsilon}1$ and ${\varepsilon}2$) of the dielectric function ${\varepsilon}$ of PbSe were measured, and the observed spectra reveal distinct structures at energies of the E1, E2 and E3 CPs. These data are analyzed using a theoretical model known as the model dielectric function (MDF). The optical constants related to dielectric function such as the complex refractive index ($n^*=n+ik$), absorption coefficient (${\alpha}$) and normal-incidence reflectivity (R) are also presented for $PbSnSe/BaF_2$.

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The Electrical, Optical and Structural Characteristics of ITO Films Formed by RF Reactive Magnetron Sputtering (저온 스퍼터링법으로 증착된 ITO박막의 온도 변화에 따른 구조, 표면 및 전기적 특성)

  • Lee, Seok-Ryoul;Choi, Jae-Ha;Kim, Ji-Soo;Jung, Jae-Hak;Lee, Lim-Soo;Kim, Jae-Yeal
    • Journal of the Korean Vacuum Society
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    • v.20 no.1
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    • pp.30-34
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    • 2011
  • We investigated the structural, electrical and optical characteristics of thin films with ITO deposited by a low temperature RF reactive magnetron sputtering. The deposited thin films were annealed for 2 hours at various temperatures of $50^{\circ}C$, $100^{\circ}C$, $150^{\circ}C$, $200^{\circ}C$ and $250^{\circ}C$ and were analyzed by using X-ray diffractometer, scanning electron microscopy and 4 point probe. The films annealed at temperatures higher than $150^{\circ}C$ were found to be crystallized and their electrical resistance were decreased from $40{\Omega}cm$to $18{\Omega}cm$. The optical transmittance of the film annealed at $150^{\circ}C$ was increased by over 87% in the 450 nm ~ 900 nm wavelength range. Our results indicate that the films with ITO deposited at even a low temperature can show better optical and electrical properties through a proper heat treatment.

Some opal phytoliths diagnostic characters of Oryza leaves (벼속(Oryza) 잎의 식물규소체 표징형질)

  • Whang, Sung Soo;Kim, Kyungsik
    • Korean Journal of Plant Taxonomy
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    • v.31 no.4
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    • pp.321-341
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    • 2001
  • Phytoliths of leaf blades of Oryza were studied by light and scanning electron microscopy in order to assign the diagnostic character and taxonomic key for the genus. Some phytoliths such as stomatal apparatus, long-cell and short-cell, existing at the same position on the abaxial side of leaf blade, were intensively investigated because of their various forms documented in a previous study. These characters have value either for testing infrageneric classification or for identifying taxa within the genus. Stomatal phytolith is formed by integration of several kinds of sources, such as the guard and subsidiary cell and the papillae. The stomatal phytolith, characterized by not only the absence and presence of phytolith originated by the papillae developed on the guard and subsidiary cell but also their pattern of arrangement, shows various morphologies, and these features have congruent with the infrageneric classification such as section and/or series. Long-cell phytolith is characterized by the absence/presence, arrangement and morphology of phytoliths originated by the papillae on the cell surface. These features may hardly have any systematic relevance within the genus, but contain some informations for identifying of species. All of short-cell phytoliths found are silica body. They form various shapes like cross, bilobate, saddlelike and trilobate, and these features are consistent with infrageneric classification such as section and/or series. Also, some characters, the absence/presence of band of short cell phytolith within costal strip, the absence/presence of saddlelike phytolith within intercostal strip and the number of band of short cell phytolith within costal strip are various according to taxa, but these features do not fall into infrageneric classification. Some taxonomic keys on the phytoliths of stomatal, long-cell and short-cell were developed by their features, and the agreement between these characters and infrageneric classifications was also discussed.

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Characteristics of Electrochemical and Cavitation Damage after Sealing Treatment for Arc Thermal Sprayed Coating Layer (후처리된 아크 용사코팅 층의 전기화학적 및 캐비테이션 손상 특성)

  • Kim, Seong-Jong;Han, Min-Su;Park, Il-Cho
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.300-300
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    • 2014
  • 해양환경 하에서 대형 강구조물의 경우 장기간 부식손상을 방지하기 위해 아크 용사코팅 기술이 오래전부터 유용하게 이용되어 왔다. 아크 용사코팅 기술은 타 용사코팅 기술에 비해 경제성과 생산성이 뛰어나 대형 강구조물에 적용되고 있다. 용사재료로는 Al, Zn 또는 그 합금들이 주로 사용되어 강재에 대해 희생양극 방식효과를 나타낸다. 그러나 아크용사에 의해 적층된 코팅 층은 용사공정 중 불가피하게 수많은 기공과 산화물이 포함되어 내식성 및 내구성에 악영향을 미치게 된다. 따라서 본 연구에서는 알루미늄 합금의 용사코팅 층에 대하여 다양한 후처리를 통해 내식성과 더불어 내구성을 향상시키고자 하였다. 용사코팅은 알루미늄 합금 선재(1.6 ${\varnothing}$)를 사용하여 아크용사를 실시하였다. 용사 시 용사거리는 200 mm, 공기압력은 약 $7kg/cm^2$ 정도로 유지하면서 용사코팅을 실시하여 약 $200{\mu}m$ 두께로 코팅 층을 형성시켰다. 이후 용사코팅 층의 표면에 다양한 후처리재를 적용하였으며, 내구성을 평가하기 위하여 후처리 적용 전후 시험편에 대하여 캐비테이션 실험을 실시하였다. 캐비테이션 실험은 ASTM G32-92에 의거하여 주파수 20 kHz의 초음파 진동 장치(ultrasonic vibratory device)를 사용하였다. 그리고 시험편 표면과 발진 혼에 부착된 팁(tip)과의 거리는 1 mm로 일정하게 유지시킨 뒤, 캐비테이션 발생 시간을 변수로 하여 실험을 실시하였다. 손상된 용사코팅 층의 표면은 주사전자현미경과 광학현미경으로 관찰하였으며, 시험편 손상깊이는 3D 현미경으로 비교 분석하였다. 또한 캐비테이션 실험 전후의 무게를 측정하여 무게 감소량을 상호 비교하였다. 그리고 전기화학적 실험은 천연해수 속에서 자체 제작한 홀더(holder)를 이용하여 $0.33183cm^2$의 용사코팅 층만을 노출시켜 실시하였다. 그리고 기준전극은 은/염화은 전극을, 대극은 백금전극을 사용하였다. 분극실험을 통해 후처리 적용에 따른 용사코팅 층의 부식전위 및 부식전류밀도를 비교 평가하였다. 그 결과, 용사코팅 층에 의하여 강재에 대한 희생양극 방식전위가 확보되었으며, 후처리재가 적용된 용사코팅 층에서 내식성 및 캐비테이션 저항성이 향상되었다.

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Advanced LWIR Thermal Imaging Sight Design (원적외선 2세대 열상조준경의 설계)

  • Hong, Seok-Min;Kim, Hyun-Sook;Park, Yong-Chan
    • Korean Journal of Optics and Photonics
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    • v.16 no.3
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    • pp.209-216
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    • 2005
  • A new second generation advanced thermal imager, which can be used for battle tank sight has been developed by ADD. This system uses a $480\times6$ TDI HgCdTe detector, operating in the $7.7-10.3{\mu}m$ wavelength made by Sofradir. The IR optics has dual field of views such as $2.67\times2^{\circ}$ in NFOV and $10\times7.5^{\circ}$ in WFOV. And also, this optics is used for athermalization of the system. It is certain that our sensor can be used in wide temperature range without any degradation of the system performance. The scanning system to be able to display 470,000 pixels is developed so that the pixel number is greatly increased comparing with the first generation thermal imaging system. In order to correct non-uniformity of detector arrays, the two point correction method has been developed by using the thermo electric cooler. Additionally, to enhance the image of low contrast and improve the detection capability, we have proposed the new technique of histogram processing being suitable for the characteristics of contrast distribution of thermal imagery. Through these image processing techniques, we obtained the highest quality thermal image. The MRTD of the LWIR thermal sight shows good results below 0.05K at spatial frequency 2 cycles/mrad at the narrow field of view.