• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.42 no.8
• /
• pp.701-706
• /
• 2014

In these days, there have been numerous researches on nano and micro satellites under the slogan of "Faster, Smaller, Better, Cheaper". Since optical structure occupies large portion of satellite volume, research on deployable optical structure gains great attention to reduce total volume of the satellite. In this paper, we establish the requirement of deployable optical structure based on specification of conventional optical structure and propose two candidate mechanisms which can satisfy the degree of deployment precision. Then, in order to evaluate the degree of deployment precision, we carry out kinematic analysis on de-space among tilt, de-space and de-center which influences optical characteristic of a satellite.

• Korean Chemical Engineering Research
• /
• v.46 no.4
• /
• pp.686-691
• /
• 2008

There are no many research reports on the preparation of ZnO by electrochemical oxidation since the zinc oxide is very easily dissolved in an acidic or basic environment, even though zinc oxides have attracted many attentions because of their optical/electrical properties. In this paper, we describe the fabrication of self-ordered stripes of ZnO by anodization of Zn in an ethanolic sulfuric acid. The formation of stripes of ZnO originating from Zn is attributed to water-selective dissolution of ZnO during anodization. We study in detail the effects of concentration of $H_2SO_4$, applied potential, anodization time, and addition of a small amount of water on the fabrication of stripes of ZnO. Mechanisms for the fabrication of ZnO stripes are discussed in terms of the above-mentioned effects.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.34 no.11
• /
• pp.1637-1642
• /
• 2010

In this paper, we present the fabrication of a high-quality diffractive-lens mold having submicron patterns, which is suitable for an ultra-slim optical system. In order to fabricate high-quality diffractive lens with a variety of submicron patterns, the multi-alignment method was used; high-resolution electron-beam lithography and FAB plasma etching were carried out to obtain the patterns. The most important key technology in the multi-alignment method is to reduce alignment error, lithography error, and etching error. In this paper, these major fabrication errors were minimized, and a high-quality diffractive lens with a diameter of $267\;{\mu}m$ (NA = 0.25), minimum pattern width of 226 nm, and thickness of 819 nm was successfully fabricated.

• Korean Journal of Optics and Photonics
• /
• v.4 no.1
• /
• pp.15-21
• /
• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• ETRI Journal
• /
• v.11 no.4
• /
• pp.139-149
• /
• 1989

Excimer laser를 이용한 투영노광기술은 '80년대 초 $0.5\mum$ 이하의 패턴 형성에 시도된 이래 점진적인 발전을 이루어 왔으며 기존 광노광기술의 연장선상에서 64M bit DRAM 제조를위한 핵심 노광기술이 될 것이다. 본 논문에서는 차세대 노광장비로서의 excimer stepper가 갖는 중요성을 고찰하고 대량생산을 위한 노광장비의 개발방향을 제시하였다. 먼저단파장화에 의한 투과도 저하로 인하여 발생하는 투영광학계의 문제점을 살펴보고 이에 따른 광원의 요구조건을 도출하였다. 그리고excimer stepper를 광원, 조명계, 투영계, 정렬계, stage계 및 제어계등 기능별로 분류한 후 각각의 문제점 및 설계조건을 제시하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.05a
• /
• pp.266-266
• /
• 2004

광통신 커넥터 핵심 부품인 페룰(Ferrule)은 광통신의 주요한 커넥터 부품으로 사용되며 슬리브내에서 페룰을 서로 맞대어 광섬유론 정렬하는데 사용이 된다. 광섬유의 맞대기가 정확하고 광학 특성에 영향을 주지 않도록 하기 위해서는 페룰의 외경과 표면의 초정밀 가공이 주요한 품질 특성이 된다. 페룰은 고경도 난삭재의 소구경 세라믹 재질이며 이의 가공을 위해서는 다이아몬드 연삭숫돌을 이용한 무심연삭(centerless grinding) 장치를 사용한다.(중략)

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2004.05a
• /
• pp.169-173
• /
• 2004

Rotating Compensator Ellipsometry에 회전하는 시편 홀더를 갖추었을 때 uniaxial한 시편의 광축과 retardance를 측정하는 것이 매우 간단해진다. 이것은 Dual Rotating Compensator Transmission Ellipsometry의 self-calibration과정과 흡사하기 때문이다. 기존의 ellipsometry가 광학 부품들의 입사면에 대한 방위각을 찾는 복잡한 calibration과정과 비등방성 시편의 고속축의 방향을 찾아야 하는 수고를 필요로 하지만 rotating sample and compensator ellipsometry는 self-calibration과 자동으로 고속축의 방향을 찾기 때문에 매우 편리하다. 우리는 이 기술를 정렬된 액정display panel에 적용하여 ~$0.4^{\circ}$ 의 작은 retardance 간을 측정할 수 있었다.

• Korean Journal of Optics and Photonics
• /
• v.16 no.1
• /
• pp.56-62
• /
• 2005

Because of the wide plane and the curved field of CRT rear projection high definition television, its MTF(modulation transfer function) can't be easily measured by the usual forward testing method. Then we propose a backward testing method for the MTF so that the object plane and the image analyzer of forward testing are located at positions opposite each other. We prefer to use the backward testing method because the forward testing method has poor accuracy caused by very small numerical aperture, low spatial resolutions, and long depth of focus. We found that the backward testing method was very easy to align and had high repeatability. We confirmed the confidence of results obtained by the backward testing method in comparison with designed results.

• Proceedings of the Optical Society of Korea Conference
• /
• 2002.07a
• /
• pp.132-133
• /
• 2002

아조벤젠 고분자는 가역적 광이성화 과정에 의한 광유도 복굴절을 일으키는 물질로 광정보저장용 및 광소자용 매질로서 많은 연구가 이루어져 왔다. 일반적으로 아조벤젠 고분자는 rod-like 형태의 안정한 trans 상과 banana-like 형태의 준 안정한 cis 상의 이성체가 존재하고 이 두 이성체는 광에 의해 여기 되어 서로 다른 이성체로의 이성화가 일어나는데, 특히 막대 모양의 trans 상의 분자가 여기 시키는 광의 편광 방향에 수직으로 정렬하면서 복굴절이 유도되며 cis 상의 분자는 복굴절의 유도와 무관하다고 알려져 있다. (중략)

• Korean Journal of Optics and Photonics
• /
• v.7 no.3
• /
• pp.287-294
• /
• 1996

An optical phase modulator is fabricated in GaAs/AlGaAs doble heterostructure wafer grown by MOCVD. A self-aligned process, in which the same photoresist pattern is used for both the waveguide etching and the insulation layer formation, is developed and is found to be very useful, Fabry-Perot interference technique is applied to the measurement and the phase modulation efficiency is measured to be 22.5$^{\circ}$/Vmm at 1.31 ${\mu}{\textrm}{m}$ for TE polarization.