• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.24.1-24.1
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• 2011

CMP (Chemical Mechanical Planarization)는 고직접도의 다층구조의 소자를 형성하기 위한 표면연마 공정으로 사용되며, pattern 크기의 감소에 따른 공정 중요도는 증가하고 있다. 반도체 소자 제조 공정에서는 낮은 비용으로 초기재료를 만들 수 있고 우수한 성능의 전기 절연성질을 가지는 산화막을 만들 수 있는 단결정 실리콘 웨이퍼가 주 재료로 사용되고 있으며, 반도체 공정에서 실리콘 웨이퍼 표면의 거칠기는 후속공정에 매우 큰 영향을 미치므로 CMP 공정을 이용한 평탄화 공정이 필수적이다. 다결정 실리콘 박막은 현재 IC, RCAT (Recess Channel Array Transistor), 3차원 FinFET 제조 공정에서 사용되며 CMP공정을 이용한 표면 거칠기의 최소화에 대한 연구의 필요성이 요구되고 있다. 본 연구에서는 알칼리성 슬러리를 이용한 단결정 및 다결정 실리콘의 식각 및 연마거동에 대한 특성평가를 실시하였다. 화학적 기계적 연마공정에서 슬러리의 pH는 슬러리의 분산성, removal rate 등 결과에 큰 영향을 미치고 연마대상에 따라 pH의 최적조건이 달라지게 된다. 따라서 단결정 및 다결정 실리콘 연마공정의 최적 조건을 확립하기 위해 static etch rate, dynamic etch rate을 측정하였으며 연마공정상의 friction force 및 pad의 온도변화를 관찰한 후 removal rate을 계산하였다. 실험 결과, 단결정 실리콘은 다결정 실리콘보다 static/dynamic etch rate과 removal rate이 높은 것으로 나타났으며 슬러리의 pH에 따른 removal rate의 증가율은 다결정 실리콘이 더 높은 것으로 관찰되었다. 또한 다결정 실리콘 연마공정에서는 friction force 및 pad의 온도가 단결정 실리콘 연마공정에 비해 상대적으로 더 높은 것으로 나타났다. 결과적으로 단결정 실리콘의 연마 공정에서는 화학적 기계적인 거동이 복합적으로 작용하지만 다결정 실리콘의 경우 슬러리를 통한 화학적인 영향보다는 공정변수에 따른 기계적인 영향이 재료 연마율에 큰 영향을 미치는 것으로 확인되었으며, 이를 통한 최적화된 공정개발이 가능할 것으로 예상된다.

• Journal of Digital Contents Society
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• v.18 no.3
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• pp.465-473
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• 2017

An experiment was conducted to investigate the relationship between the DVEs and subtitles provided with anchor speech in TV news and the news evaluation, trust and agenda recognition. 120 university students were asked to watch four types of news that differed in the contents of their DVEs and subtitles, and then they evaluated the fairness, sensibility, and irritability of the news. The content of DVEs and subtitles were related to the irritability evaluation and trust of the news, and it was not related with the fairness and sensibility evaluation. When the DVEs and subtitles emphasizing the stimulating aspects of the issue were given, the irritability was highly evaluated and the trust was low. The evaluation on news fairness affected the news trust. The more they rated news as fair, the greater the trust in news. Unlike the assumption in this study, DVEs and subtitles were not the main factors influencing the news agenda perception, and the viewers tended to perceive the agenda based on the news content itself.

• Clean Technology
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• v.13 no.3
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• pp.228-234
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• 2007

In this study, the productivity and environmental effects of laser aided direct metal deposition (LADMD) process which is one of promising rapid manufacturing technology is evaluated. The production time predicted using PowerMill shows that the productivity of LADMD is superior to that of conventional milling process. Though LADMD is known as an environment-friendly technology, it has a disadvantage to utilize much energy to generate laser beam. Considering both productivity and environmental effects, LADMD is expected to be widely used in remanufacturing industry.

• Clean Technology
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• v.23 no.4
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• pp.388-392
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• 2017

In this study, a quantitative environmental impact assessment for the production process of breathable film was conducted employing Life Cycle Assessment (LCA) methodology. Among the various categories, Global Warming (GW) accounted for the highest impact (97%) followed by Human Toxicity (HT). And the key substances of various impact categories included HDPE, PP, and electricity. In the production process, the high impact resulted from mixing process (57%), lamination process (29%), and extruder process (10%). To improve environmental impact, it is necessary to design a new process system that reduces the amount of electricity used and that increases production yields, if raw materials such as HDPE and PP owe excluded.

• Resources Recycling
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• v.27 no.1
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• pp.64-73
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• 2018

This study aims to analysis the environmental impact on waste catalyst recycling technology using entire life cycle assessment. Environmental impacts consist of the five categories of impacts: global warming, resource depletion, acidification, eutrophication, and photochemical oxide production. The waste catalyst recycling presently have a GWP 3.53 ton $CO_2$ equivalent/ton, a ADP 0.017 ton Sb equivalent/ton, a AP 0.051 $SO_2$ equivalent/ton, a EP 0.0092 $PO{_4}^{3-}$ equivalent/ton, a 0.0019 ton $C_2H_4$ equivalent/ton. The smelting reduction process is the greatest contributor to all categories of environmental impacts in waste catalyst recycling. Electricity used in the smelting reduction process is the major contributor of all impact categories.

• The Journal of the Korea Contents Association
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• v.17 no.5
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• pp.209-220
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• 2017

This study explores what are the factors which influence the perception of press professionalism and fairness of journalist in the process of their news production. This study focused on how the difference between mainstream media and online media, the political tendency and the degree of freedom during working effected on the judgement of the freedom of press based on the model of Shoemaker and Reese' hierarchical model. As a result, Research finding is as follows: First, online media journalist evaluated the fairness of press higher than offline media journalists. Second, the consistency of political tendency of offline media is different from online media. Online media journalists evaluated the fairness of the press higher than offline media journalists. Finally, the degree of freedom during performance is the most importance factor which affects the evaluation of press fairness. This study highlights the factors which influence the perception of journalists on the quality of the press based on the survey data which have conducted by Korean press foundation This study implicates how working environment is importance in journalist's writing as a journalist. The freedom of press is very important in the process of news production because the factors which influence the evaluation of the fairness and the professionalism of press reveals the quality of press.

• Journal of Korean Society of Environmental Engineers
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• v.38 no.11
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• pp.589-595
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• 2016

This study evaluated the environmental impacts for landfill treatment of the wastewater treatment sludge (WTS) from petrochemical firms by life cycle assessment (LCA) and reviewed the impact reduction by landfill gas (LFG) utilization. The functional unit was 'landfill of 1 ton of WTS', and the system boundary included the process of input and treatment for WTS in landfill site. The impacts were high at landfill process (LP) and leachate treatment process (LTP). Global warming (GWP) and photochemical oxidants creation (POCP) were high at LP, while abiotic depletion (ADP), acidification (AP), eutrophication (EP), ozone depletion (ODP) were high at LTP. The major substances of various impact categories were crude oil (ADP), $NO_X$ (AP, EP), $CH_4$ (GWP, POCP), $Cl_2$ (ODP), respectively. The major factor of ADP, AP, EP was attributed from the generation of electricity used in LTP, and the methane within uncollected LFG was main factor of GWP and POCP. Therefore, electricity consumption reduction is identified to be an impact improvement option, and the flaring system installation or enhanced LFG recovery could be an alternative to reduce impacts. Among the various categories, GWP accounted the highest impact (${\geq}90%$) followed by ADP, POCP. In the avoidance impact resulted from the utilization of LFG, to substitute B-C oil or LNG showed the impact reduction of 32.7% and 12.0%, respectively.

• Journal of Environmental Impact Assessment
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• v.3 no.2
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• pp.9-14
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• 1994

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.33.2-33.2
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• 2011

CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

• Asia-Pacific Journal of Business Venturing and Entrepreneurship
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• v.16 no.5
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• pp.143-158
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• 2021

The purpose of this study is to suggest a direction for enhancing the mutual trust level between employees and managers by examining the effect of job satisfaction of electric power companies's employees and performance-oriented remuneration paid to them on awareness level of organizational justice and a trust in manager. Based on a significant positive relationship between employee's job satisfaction and trust in a manager, a significant positive relationship between employee's job satisfaction and perception of organizational justice, and a positive relationship between organizational justice and trust in manager, it was possible to confirm the mediating role of organizational justice between job satisfaction and a trust in manager. In addition, although performance-oriented remuneration did not have a significant effect on trust in manager directly, it was found to have a significant negative effect on distributive justice and procedural justice, but for interactional justice did not appear to have a significant influence. Because the autonomy of the labor budget is quite limited due to the government's total regulation on the size of the labor budget for public enterprises and due to the government's evaluation of management of public enterprises, it can be explained as having a negative effect on the perception of organizational justice. In addition, since the partial mediating effect of distributive justice and interactional justice was confirmed in the relationship between job satisfaction and trust in manager, the mediating effect of procedural justice was insignificant, it was confirmed that the need to establish and operate an internal HR management system based on smooth communication that employees can satisfy and accept can have a significant impact on trust in manager. On the other hand, because the negative complete mediating effect of distributive justice and procedural justice between performance-oriented remuneration and trust in manager was significantly confirmed, It is showing that employees' negative perceptions of performance distribution procedures and distribution results had a negative effect on trust in manager. The results of this study suggest that employees will perceive the organization as fair, and trust the manager who is the decision maker, when they are fully rewarded for their performance, with job satisfaction, a fair evaluation of their efforts, even if there are various factors that can influence managers to be trusted by their employees.