• Title/Summary/Keyword: 공정열

Search Result 2,216, Processing Time 0.034 seconds

Milling of NiCo Composite Silicide Interconnects using a FIB (FIB를 이용한 니켈코발트 복합실리사이드 미세 배선의 밀링 가공)

  • Song, Oh-Sung;Yoon, Ki-Jeong
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.9 no.3
    • /
    • pp.615-620
    • /
    • 2008
  • We fabriacted thermal evaporated $10nm-Ni_{1-x}Co_x$(x=0.2, 0.6, and 0.7) films on 70 nm-thick polysilicon substrate with $0.5{\mu}m$ line width. NiCo composite silicide layers were formed by rapid thermal annealing (RTA) at the temperatures of $700^{\circ}C$ and $1000^{\circ}C$. Then, we checked the microstructure evaluation of silicide patterns. A FIB (focused ion beam) was used to micro-mill the interconnect patterns with low energy condition (30kV-10pA-2 sec). We investigated the possibility of selective removal of silicide layers. It was possible to remove low resistance silicide layer selectively with the given FIB condition for our proposed NiCo composite silicides. However, the silicides formed from $Ni_{40}Co_{60}$ and $Ni_{30}Co_{70}$ composition showed void defects in interconnect patterns. Those void defects hinder the selective milling for the NiCo composite silicides.

Analysis of Furnace Conditions with Waste Plastics Injection into Blast Furnace (폐플라스틱의 吹入에 따른 高爐 爐況解析)

  • 허남환;백찬영;임창희
    • Resources Recycling
    • /
    • v.9 no.6
    • /
    • pp.23-30
    • /
    • 2000
  • Since most of the waste plastics are incinerated and landfilled for the plastic treatment, the environmental friendly processes must be introduced. The plastic utilization of plastic to the blast furnace as a substitutional fuel was developed as a useful recycling method of waste plastics, and commercialized in several ironmaking company in Europe and Japan. Present study was carried out to understand the effect of plastic injection on blast furnace process continuously by using the foundry blast furnace in POSCO. The coke replacement ratio turned out to be 0.98 with the waste plastic injection up to 13.8 kg/thm of injection rate, and there were no significant effect of the kinds of injection plastics on the replacement ratio in this test operation. The permeability in the furnace became worse and the heat load in the lower part of blast furnace was increased with increasing the injection rate of waste plastics. As the rate of plastic injection were increased, the top gas utilization and shaft efficiency were also decreased from the Rist diagram analysis.

  • PDF

Preparation of Vanadium Dioxide by Hydrogen Reduction of Vanadium Pentoxide and its Thermochromic Properties (오산화바나듐의 수소 환원에 의한 이산화바나듐의 제조 및 열변색 특성)

  • Choi, Seung Hoon;Lee, Chun Boo
    • Resources Recycling
    • /
    • v.26 no.5
    • /
    • pp.61-66
    • /
    • 2017
  • Vanadium Dioxide has been investigated for use as a "spectrally-selective" window coating to block infrared transmission and reduce the loss of building interior heat through windows. The preparation of thermochromic $VO_2$ powder by the reductive reaction with hydrogen was studied. The reductive reaction method has many advantages of easy and mass production of $VO_2$ powder according to controlled reaction without semi-conductor equipments like sputter and beam evaporator. The reaction temperature, time, concentration of reductive gas, post-annealing condition and W addition as dopant would affect the characterization of $VO_2$ powder and its thermochromism. Many applications for electrical device and energy-saving technologies is expected.

Ag가 코팅된 ZnO nanorod 구조의 광학적 특성 연구

  • Go, Yeong-Hwan;Lee, Dong-Hun;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.209-209
    • /
    • 2010
  • 금(Au) 또는 은(Ag) 금속 나노입자의 모양, 크기, 분포 상태를 조절하여 가시광선과 적외선, 자외선 영역에서 강한 표면 플라즈몬 효과을 이용할 수 있는데, 최근 이러한 금속 나노입자의 표면플라즈몬 효과를 이용하여 태양광 소자의 성능을 향상시키는 연구가 매우 활발하게 이루어지고 있다. 그 중, 높은 효율과 낮은 제작비용 그리고 간단한 공정과정의 장점을 갖고 있어서 크게 주목 받고 있는 염료감응태양전지에서도 금(Au) 또는 은(Ag) 금속 나노입자을 이용하기 위한 많은 연구가 진행되고 있다. 그 예로, Au가 코팅된 $TiO_2$ 기반의 염료감응태양전지구조를 제작하여, 입사된 빛이 표면플라즈몬 효과를 통해, Au에서 여기된 전자들이 Au/$TiO_2$ 사에의 schottky 장벽을 통과하여 $TiO_2$의 전도대 전자들의 밀도가 증가하여, charge carrier generating rate을 높여 소자의 광변환 효율의 향상을 증명하였다. 이에 본 연구에서는, $TiO_2$보다 높은 전자 이동도(mobility)와 직선통로(direct path way)의 장점을 갖고 있는 ZnO nanorod에서의 charge carrier generating rate을 높일 수 있도록, 비교적 가격이 저렴한 Ag nanoparticle을 코팅하였다. ZnO nanorod 제작은 낮은 온도에서 간단하게 성장시킬 수 있는 hydrothermal 방법을 이용하였다. 기판위에 RF magnetron 스퍼터를 이용하여 AZO seed layer를 증착한 후, zinc nitrate $Zn(NO_3)_2{\cdot}6H_2O$과 hexamethylentetramines (HMT)으로 혼합된 용액을 사용해 ZnO nanorods를 성장시켰다. 이 후, Ag를 형성할 수 있도록 열증기증착법을 이용하여 코팅하였다. Ag의 증착시간에 따른 ZnO nanorods에서의 코팅된 구조와 형태를 관찰하기 위해 field emission scanning electron microscopy (FE-SEM)을 이용하여 측정하였으며, 결정성을 조사하기 위해 X-ray diffraction (XRD)을 이용하여 분석하였다. 또한 입사된 빛에 의해, 여기된 ZnO 전도대 전자들이 다시 재결합을 통해 방출되는 photoluminescence 양을 scanning PL 장비를 통해 측정하여 Ag가 코팅된 ZnO nanorod의 광특성을 분석하였다.

  • PDF

Stabilization of PAN Nanofibers Using Electron Beam Irradiation and Thermal Compression Technique (전자선 조사와 열압축공정을 이용한 PAN 나노섬유의 안정화 및 특성분석)

  • Kim, Du Yeong;Jeun, Joon Pyo;Shin, Hye Kyoung;Kang, Phil Hyun
    • Journal of Radiation Industry
    • /
    • v.6 no.1
    • /
    • pp.55-59
    • /
    • 2012
  • Polyacrylonitrile (PAN)-based carbon fibers have been widely used due to their unique chemical, electrical, and mechanical properties. Electron beam irradiation has been extensively employed as means of altering properties of polymeric materials. Electron beam irradiation can induce chemical reactions in materials without any catalyst. Electron beam irradiation may be useful in accelerating the thermal compression stabilization of PAN nanofibers. To investigate the irradiation effect on PAN fibers, PAN nanofibers were irradiated by electron beam at 1,000~5,000 kGy. Irradiated and non-irradiated PAN nanofibers were heated at 180 and $220^{\circ}C$ without applying pressure for 15 min. Then 1 metric ton has been applied for 5 min. SEM images have been found that the fiber kept its morphological behavior after the hot pressing up to electron beam irradiated 1,000 kGy. DSC thermograms showed that the peak temperatures of the exothermic reactions were found to decrease with increasing electron beam irradiation doses and temperature. FT-IR spectra have been found to decrease $C{\equiv}N$ stretch band with increasing the electron beam irradiation dose. These results indicate that the modification of PAN via reactions such as cyclization is significantly enhanced by electron beam irradiation and thermal compression technique.

Design of a Low-Power and Low-Area EEPROM IP of 256 Bits for an UHF RFID Tag Chip (UHF RFID 태그 칩용 저전력, 저면적 256b EEPROM IP 설계)

  • Kang, Min-Cheol;Lee, Jae-Hyung;Kim, Tae-Hoon;Jang, Ji-Hye;Ha, Pan-Bong;Kim, Young-Hee
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2009.05a
    • /
    • pp.671-674
    • /
    • 2009
  • We design a low-power and low-area asynchronous EEPROM of 256 bits used in a passive UHF RFID tag chip. For a low-power solution, we use a supply voltage of 1.8V and design a Dickson charge pump using N-type Schottky diodes with a low-voltage characteristic. And we use an asynchronous interface and a separate I/O method for a low-area solution of the peripheral circuit of the designed EEPROM. And we design a Dickson charge pump using N-type Schottky diodes to reduce an area of DC-DC converter. The layout area of the designed EEPROM of 256 bits with an array of 16 rows and 16 columns using $0.18{\mu}m$ EEPROM process is $311.66{\times}490.59{\mu}m^2$.

  • PDF

The development of an EPC Code Auto-Writing and Fault Detection Algorithm for Manufacturing Process of a RFID TAG (RFID 태그 생산 공정 자동화를 위한 부적합품의 자동 검출 및 EPC Code Auto-Writing 알고리즘 개발)

  • Jung, Min-Po;Hwang, Gun-Yong;Cho, Hyuk-Gyu;Lee, Won-Youl;Jung, Deok-Gil;Ahn, Gwi-Im;Park, Young-Sik;Jang, Si-Woong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
    • /
    • 2009.05a
    • /
    • pp.321-325
    • /
    • 2009
  • The detection process of defective tags in most of Korean domestic RFID manufacturing companies is handled or treated by on-hand processing after the job of chip bonding, so it has been requesting to reduce the time and cost for manufacturing of RFID tags. Therefore, in this paper, we design and implement the system to perform the functionality of detection of defective tags after the process of chip bonding, and so provide the basis of a related software to establish the foundation of a automation system for the detection of defected RFID tags which is requested in the related Korean domestic industrial field. The developed system in this paper shows the enhancement of 700% in processing speed and 100% in detection rate of defective tags, comparing to the method of on-hand processing.

  • PDF

Development of On-board Computer Module for Formation Flying and Cluster Operation Nano-satellites (초소형 위성의 편대 및 군집 운용을 위한 모듈형 온보드 컴퓨터 개발)

  • Oh, Hyungjik;Kim, Do-hyun;Park, Ki-Yun;Lee, Ju-in;Jung, Insun;Lee, Seonghwan;Park, Jae-Pil
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.47 no.10
    • /
    • pp.728-737
    • /
    • 2019
  • In this study, the minimized on-board computer (OBC) module for integrated navigation is developed, which provides satellites' relative position information in formation flying and cluster operation situations. The scalability is considered to apply the user-selected wireless communication module and Global Positioning System (GPS) receiver for navigation, while considering to meet the structural design standard of nano-satellites. As a result of the product development and production, the processing speed of integrated navigation and real-time data synchronization is satisfied for cluster operation nano-satellites by using micro controller unit (MCU). From a heat/vacuum, vibration and radiation test, the OBC was confirmed to be operated in space environments. From these results, a mass production system of OBC was made which is a key part of development on satellite formation flying and cluster/constellation missions that the community demands are increasing.

Study on the Quality Characteristics of High-strength Concrete Using LCD Industrial Waste (LCD 산업부산물을 이용한 고강도 콘크리트의 품질 특성에 관한 연구)

  • Kim, Dong-Jin;Park, Seung-Hee;Choi, Sung;Han, Yang-Su
    • Journal of the Korean Recycled Construction Resources Institute
    • /
    • v.9 no.4
    • /
    • pp.650-657
    • /
    • 2021
  • Alkali activators that stimulate mineral compounds are expensive materials, but in order to replace industrial products of high alkali in gredien ts, both product an d econ omic feasibility must be satisfied. In this study, alkali in dustrial waste(LW) from the LCD man ufacturin g process were used for the purpose of alkali active reaction of GGBFS for high stren gth concrete over 50MPa. Concrete mixed with LW had reduced workability, but it had the characteristic of increasing compressive strength. Analysis using ACI 209 Compressive Strength Model Equation was made to compare the changes in strength coefficients according to LW mixing. The durability test of concrete, such as Chloride Penetration Resistance and carbonation resistance, also showed excellent performance. In the Adiabatic temperature rise test results, the concrete mixed with LW had the effect of accelerating the initial hydration heat. However, the final Adiabatic temperature rise was not significantly affected by the mixing of LW.

Preparation of Zeolite Coated with Metal-Ferrite and Adsorption Characteristics of Cu(II) (금속 페라이트가 코팅된 제올라이트의 제조와 Cu(II)의 흡착 특성)

  • Baek, Sae-Yane;Nguyen, Van-Hiep;Kim, Young-Ho
    • Applied Chemistry for Engineering
    • /
    • v.30 no.1
    • /
    • pp.54-61
    • /
    • 2019
  • In this study, a magnetic adsorbent was synthesized by growing ferrite nanoparticles substituted with metals (Me = Co, Mn, Ni) on zeolite 4A for the efficient separation of waste adsorbents present in the solution after the adsorption of Cu(II). The metal ferrite grown on the surface of zeolite was prepared by solvothermal synthesis. Characteristics of the magnetic adsorbent were analyzed by X-ray diffractometer (XRD), scanning electron microscopy (SEM) and physical property measurement system (PPMS). The saturation magnetization of the A type zeolite coated with Co-ferrite (CFZC) was the highest at 5 emu/g and the Cu(II) adsorption performance was also excellent. The adsorption results of Cu(II) on CFZC were well fitted by the Langmuir model at 298 K. Also, the adsorption of Cu(II) on CFZC follows a pseudo-second order kinetic. The Gibbs free energy values (${\Delta}G^0$) ranging from -4.63 to -5.21 kJ/mol indicates that the Cu(II) adsorption is spontaneous in the temeprature range between 298 and 313 K.