• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.83-84
• /
• 2008

• Journal of the Korean Society for Precision Engineering
• /
• v.30 no.12
• /
• pp.1321-1325
• /
• 2013

In this paper, we proposed an air bearing stage with active magnetic preloads in vertical directions compensating motion errors and attenuating vibrations to improve dynamic characteristics. This preloaded design gives simpler configuration of the stage, and active control of preload can be used for compensating motion errors by feedforward method. To improve dynamic characteristics, vibration of the table is monitored by an accelerometer, and controlled by a DSP based digital controller with integrator and band pass filters for suppressing roll and pitch vibration modes. The modes were evaluated by measuring frequency response functions, and compared with compensated responses. This showed effective results for suppressing poorly damped regenerative vibration of air bearings.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.7
• /
• pp.185-194
• /
• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurred inside the pads. In this paper, a motion error analysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi fad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed qualitatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.141-142
• /
• 2006

This paper describes estimation method for 2D position error of planar XY stage from measured profiles of guide-ways. The XY stage usually moves along its guide ways. The motion error of each stage has effect on 2D position errors of XY stages and affected mainly by profiles of guide-ways. To estimate 2D position error and flatness of stages, the profiles of guide-ways were measured and used in motion error estimation.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.912-915
• /
• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2006.10a
• /
• pp.145-149
• /
• 2006

반도체의 고집적화와 LCD의 대형화로 인해 웨이퍼 및 LCD 검사용 스테이지의 성능 향상이 요구된다. 본 논문에서는 고속의 검사속도, 서브마이크론의 검사 정밀도, 그리고 대행정 구동을 위한 이중 서보 시스템을 제안하였다. 이중 서보 시스템은 선형모터로 구동되고 공기베어링으로 가이드 되는 조동 구동부와 보이스 코일 모터(VCM)로 구동되고 공기베어링으로 가이드 되는 미세 구동부로 구성된다. 검사 효율을 향상시키기 위한 고속 세틀링을 위한 제어기로서 시간 최적 제어 기법과 시간 지연 제어기를 결합한 모드 변경 제어기를 제안하고 이중 서보 시스템에 구현하여 성능을 평가하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.11a
• /
• pp.175-178
• /
• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.2
• /
• pp.109-117
• /
• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• Tribology and Lubricants
• /
• v.36 no.2
• /
• pp.68-74
• /
• 2020

In this study, the effect of the shape error of a guideway on the movement of a stage that uses an air bearing is analyzed. The shape error of moving parts supported by the air bearing is known not to affect the vibrations of moving parts as much as the magnitude of the shape error. This is called the "averaging effect." In this study, the effect of shape error on a guideway, as well as the averaging effect of an air-bearing system, is analyzed theoretically using a dynamic-analysis program. The dynamic-analysis program applies a commercially available code in COMSOL and solves the Reynolds equation between the stage and the guideway, along with the equation of motion of the stage. The stage is modeled as a two-degree-of-freedom system. The shape error is applied to the film thickness function in the form of a sine wave. The stage movement is analyzed using the fast Fourier transform process. The eccentricity and tilting are found to be proportional to the amplitude of the shape error of the guideway. Stage vibrations are less than 10% of the amplitude of the shape error on the guideway. This means that the averaging effect of the air bearing is verified quantitatively. Moreover, if the air supply position matches the shape error in the guideway, there is a notable change in eccentricity and tilting.

• Tribology and Lubricants
• /
• v.37 no.4
• /
• pp.129-135
• /
• 2021

An air-bearing stage uses externally pressurized air as the lubricant between the stage and the rail. The supporting force generated by the supplied air makes the stage rise and move smoothly with extremely low friction. Mechanical contacts rarely happen, the bearing surfaces do not produce wear particles, and dust is not generated. It also has the advantage of having low energy loss and high precision. Because of its advantages, an air-bearing stage is used in several types of machines that require high precision. In this article, the effect of the pocket depth on the hammering phenomena of the air bearing is studied. An analysis program is developed to calculate the dynamic behavior of the stage by solving the Reynolds equation between the stage and the guideway and the equations of motion on the stage. The acceleration, constant movement, and deceleration are applied to the stage. The stage is modeled as a five-degree-of-freedom system. In the course of the dynamic behavior, the hammering phenomena occur under some special conditions. The deeper the pocket, the more unstable the behavior of the stage, and air hammering occurs when it exceeds a certain depth. In addition, the higher the supply pressure, the more unstable the behavior of the stage. However, hammering occurs even with a shallow pocket depth. Other conditions that affect the hammering phenomena are calculated and discussed.