• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.583-584
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.541-542
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• 2011

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.88-88
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• 2011

복합분자펌프는 기존의 터보분자펌프 turbine blade에 spiral grooved를 추가하여 초고진공(10-8 Pa)에서 저진공(330Pa)까지 넓은 압력범위에서 사용할 수 있고 이 펌프를 사용함으로서 완전 oil free한 진공시스템을 만들 수 있는 특징을 가지고 있다. 특히, 회전체를 비접촉으로 지지하는 자기베어링 방식을 적용함으로써, 진동은 극히 작고 베어링수명은 길면서 중저진공에 대한 배기속도가 크고 임의의 방향으로 접속이 가능하여 반도체 및 디스플레이 제조 공정과 같은 첨단산업의 다양한 분야에 쉽게 적용되고 있으며, 그 적용 분야와 시장은 계속 성장하고 있다. 고 진공과 배기 속도의 달성을 위해서, 고속으로 이동하는 격면과 기체분자를 충돌시켜, 기체 분자를 원하는 방향으로 유도하는 작동원리를 가지고 있다. 특히 공기분자의 밀도가 매우 낮은 희박가스 상태에서 고속 회전하는 blade로 공기분자를 쳐 내면서 작동됨으로써 날개의 상하 압력차에 의한 공기력보다도 날개의 고속회전이 매우 중요시 되고 압력으로는 10-1 Pa 이하의 분자영역에서 그 성능을 최고로 발휘 할 수 있다. 이러한 복합 펌프의 주요 장점은 다음과 같다. 1. 10-8 Pa (10-10torr)~10 Pa (1 torr) 까지 넓은 영역에서 배기가 가능하다. 2. 탄화수계의 대하여 높은 압축특성을 가지고 있고, 윤활유를 사용하지 않으므로 얻을 수 있는 진공상태가 고청정하다(oil free). 3. 정밀 5축제어 자기베어링으로 완전히 부상하여 회전함으로서 마모가 없고 진동이 최소화하였을 뿐만 아니라, 또한 운전음도 거의 없다. 4. 설치조건에 제한이 없고 고장이 거의 없다. 본 논문에서는 이러한 복합분자펌프의 개발을 위하여, 상기 연구기관에서 수행된 내용을 소개하고 있으며, 펌프 시스템의 기본 설계 및 자기베어링 시스템의 설계 결과 및 수치해석 결과를 나타내었다.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
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• pp.191-198
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• 2002

Oil-free turbo-compressor supported by compliant foil bearings which remove oil-contamination by elimination of the conventional ball bearing and oil lubrication systems is presented. Turbo-compressor makes two individual air compression with two impellers at operating speed, 39,000rpm. In this study, the rotordynamic effects caused by aerodynamic instability were investigated with variable mass flow rate. Correlation between frequencies of pressure fluctuation in two diffusers and those of excitation forces on rotor were clearly developed in aerodynamic unsteady region. Thus, these results show that it is beneficial to design high speed rotating turbomachinery considering coupling effect between aerodynamic instability and rotordynamic force.

• 한국정밀공학회지
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• 제17권3호
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• pp.129-135
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• 2000

Air-dynamic bearings are increasingly used in supporting small high-speed rotating bodies. This study investigates the effects of design parameters on the axial stiffness of spiral-grooved air bearings of various curvatures. Design parameters are fundamental clearance, groove depth, and bearing number. The pressure distribution at the clearance between the stator and rotor of the bearing is obtained by solving the Reynolds equation, and the supporting load and the axial linear stiffness are calculated from the pressure distribution. It is found that a larger curvature increases the axial linear stiffness more and that there exist an optimal groove depth for the linear stiffness of the air bearing. It is also found that the linear stiffness has a linear relationship with the bearing number.

• 한국유체기계학회 논문집
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• 제6권2호
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• pp.62-69
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• 2003

An oil-free turbo-compressor supported by compliant foil bearings which remove oil-contamination by elimination of a conventional ball bearing and oil lubrication systems is presented. Turbo-compressor makes two individual air compressions with two impellers at a operating speed of 39,000 rpm. In this study, the rotordynamic effects caused by aerodynamic instability were investigated with variable mass flow rates. Correlations between frequencies of pressure fluctuation in two diffusers and those of excitation forces on rotor were clearly observed in an aerodynamic unsteady region. Thus, these results show that it is beneficial to design high-speed rotating turbomachinery by considering coupling effect between aerodynamic instability and rotordynamic force.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.824-827
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• 2003

The study of Sealless Cylinder is presented. The cylinder has a piston with air bearing. The piston has a partly cylindrical and partly conical shape. The description of system geometry is follows by the flow rate equations. Then pressure distribution and Bearing force equations are derived. Several non dimensional parameters are suggested. The relationship among bearing force, leakage flow and geometry of the bearing is investigated by simulation. And determination method for optimal design of sealless cylinder is given. A prototype of seatless cylinder which had rod bearing with four pockets, five pockets, and six pockets was built respectively.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1911-1915
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• 2003

The study of Sealless Cylinder is presented. The cylinder has a piston with air bearing. The piston has a partly cylindrical and partly conical shape. The description of system geometry is follows by the flow rate equations. Then pressure distribution and Bearing force equations are derived. Several non dimensional parameters are suggested. The relationship among bearing force, leakage flow and geometry of the bearing is investigated by simulation. And determination method for optimal design of sealless cylinder is given. A prototype of sealless cylinder which had rod bearing with four pockets, five pockets, and six pockets was built respectively.

• 대한기계학회논문집A
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• 제27권4호
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• pp.608-613
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• 2003

In this paper, the effect of interconnected boundary between journal and thrust bearings on the performance of self-acting air-lubricated bearings is investigated. When journal and thrust bearings have common boundary, conventional boundary condition which assumes that the boundary pressure is equal to atmosphere is no more valid. Instead, new boundary condition by mass conservation at interconnected boundary is needed. To do this, a duct model satisfying mass conservation at interconnected boundary is developed. Using this model, pressure distribution at interconnected boundary is numerically analyzed with changing the volume of interconnecting part. As a result, it is shown that load capacity of thrust bearing can be greatly increased when journal and thrust have a common boundary.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.961-966
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• 2004

The cylinder without seal has a piston with air bearing which is partly cylindrical and conical shape. The description of system geometry is deviation by the flow rate equation. Then pressure distribution and bearing force equations are derived. Several non-dimensional parameters are suggested. The relationship among bearing force, leakage flow and geometry of the bearing is investigated by simulation. And determination method for optimal design of sealless cylinder is given. A prototype of sealless cylinder which had rod bearing with four pockets, five pockets, and six pockets was built respectively. As a result of leakage flow test, it is evaluation to air bearing in sealless cylinder.