• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.11
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• pp.1721-1725
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• 2010

This paper reports the fabrication of geometry-controlled carbon microneedles by a backside exposure method and pyrolysis. The SU-8 microneedles are a polymer precursor in a carbonization process, which geometries such as base diameter, spacing, and aspect ratio can be controlled in a photolithography step. Using this fabrication method, highly reproducible carbon microneedles, which have high aspect ratios of more than 10 and very sharp nanotips, can be realized. The quartz surface with carbon microneedles becomes very hydrophilic and its wettability is adjusted by carrying out the silane treatment. In the carbon microneedle array ($3\;{\mu}m{\times}3\;{\mu}m$), the contact angle is extremly enhanced (${\sim}180^{\circ}$); this will be advantageous in developing low-drag microfluidics and labs-on-a-chip as well as in other bio-applications.

• Electronics and Telecommunications Trends
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• v.24 no.6
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• pp.32-40
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• 2009

탄소나노튜브(CNT)는 나노 기술의 대표적인 물질로, 나노 크기의 팁 반경과 100:1 이상의 높은 종횡비, 그리고 물리 화학적 안정성 등으로 인해 이상적인 전자 방출원 재료로 여겨져 많은 연구기관들이 CNT를 이용한 응용 소자를 개발하고 있다. 나노 기술을 바탕으로 한 CNT 백 라이트 유닛(BLU)은 CNT에 인가된 전기장에 의해 전자가 방출되고 방출된 전자가 고전압으로 가속되어 형광체를 때려서 발광하는 원리로 작동되며, 면광윈으로서 고정세의 로컬 디밍, 고속 순간 발광에 의한 잔상 제거 등의 장점으로 고품질의 LCD TV에 적용될 수 있으며, 냉음극형광램프와 발광다이오드를 대체할 만한 차세대 BLU로서 뛰어난 특성을 가지고 있다.