• Journal of the Microelectronics and Packaging Society
• /
• v.25 no.3
• /
• pp.7-12
• /
• 2018

The effects of Ru deposition temperature and post-annealing conditions on the interfacial adhesion energies of atomic layer deposited (ALD) Ru diffusion barrier layer and Cu thin films for the advanced Cu interconnects applications were systematically investigated. The initial interfacial adhesion energies were 8.55, 9.37, $8.96J/m^2$ for the sample deposited at 225, 270, and $310^{\circ}C$, respectively, which are closely related to the similar microstructures and resistivities of Ru films for ALD Ru deposition temperature variations. And the interfacial adhesion energies showed the relatively stable high values over $7.59J/m^2$ until 250h during post-annealing at $200^{\circ}C$, while dramatically decreased to $1.40J/m^2$ after 500 h. The X-ray photoelectron spectroscopy Cu 2p peak separation analysis showed that there exists good correlation between the interfacial adhesion energy and the interfacial CuO formation. Therefore, ALD Ru seems to be a promising diffusion barrier candidate with reliable interfacial reliability for advanced Cu interconnects.

• Journal of Adhesion and Interface
• /
• v.4 no.2
• /
• pp.30-36
• /
• 2003

• Journal of Adhesion and Interface
• /
• v.3 no.3
• /
• pp.41-50
• /
• 2002

• Journal of Adhesion and Interface
• /
• v.10 no.4
• /
• pp.199-206
• /
• 2009

• Journal of Adhesion and Interface
• /
• v.20 no.4
• /
• pp.162-168
• /
• 2019

• Journal of Adhesion and Interface
• /
• v.4 no.3
• /
• pp.41-51
• /
• 2003

• Journal of Adhesion and Interface
• /
• v.19 no.1
• /
• pp.30-35
• /
• 2018

• Journal of Adhesion and Interface
• /
• v.8 no.3
• /
• pp.34-45
• /
• 2007

• Proceedings of the KIEE Conference
• /
• 2005.07c
• /
• pp.1868-1869
• /
• 2005

이 논문은 반도전 실리콘 고무 표면에 코로나 방전 처리하여 이종의 실리콘 고무와의 접착 특성을 나타낸 것이다. 반도전 실리콘 고무 표면 상태를 발수성 등급에 따른 분류와 FTIR(Fourier Transform Infrared Spectroscopy)를 사용하여 평가하였다. 표면 상태 변화에 따른 반도전 실리콘 고무의 접착 특성은 T-peel test로 접착강도를 시험하였다. 실험 결과 고에너지의 코로나 방전으로 반도전 실리콘 고무의 결합쇄가 절단되었고 이 부분에 산소가 결합되어 극성 관능기를 생성하여 표면을 산화시켰다. 이러한 표면 상태 변화에 따른 접착강도는 초기 상태일 때 보다 코로나 방전 처리 후 증가하는 것을 확인 할 수 있었다. 이 논문을 통하여 코로나 방전 처리는 이종 계면의 접착 특성을 향상시킬 수 있으며, 이종 계면에서 발생하는 절연 파괴 전압을 높여 전기절연 성능을 향상시키는데 도움이 될 것이다.

• Journal of Adhesion and Interface
• /
• v.4 no.1
• /
• pp.18-27
• /
• 2003

Interfacial properties and microfailure degradation mechanisms of the oxygen-plasma treated biodegradable poly(p-dioxanone) (PPDO) fiber/poly(L-lactide) (PLLA)composites were investigated for the orthopedic applications as implant materials using micromechanical technique and surface wettability measurement. PPDO fiber reinforced PLLA composite can provide good mechanical performance for long hydrolysis time. The degree of degradation for PPDO fiber and PLLA matrix was measured by thermal analysis and optical observation. IFSS and work of adhesion, $W_a$ between PPDO fiber and PLLA matrix showed the maximum at the plasma treatment time, at 60 seconds. Work of adhesion was lineally proportional to the IFSS. PPDO fiber showed ductile microfailure modes at We initial state, whereas brittle microfailure modes appeared with elapsing hydrolysis time. Interfacial properties and microfailure degradation mechanisms can be important factors to control bioabsorbable composites performance because IFSS changes with hydrolytic degradation.