• 한국생산제조학회지
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• 제19권2호
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• pp.267-274
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• 2010

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

• 한국광학회지
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• 제12권4호
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• pp.334-338
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• 2001

피조 간섭계의 측정 정밀도를 향상시키기 위해서 광 분할기를 제거한 형태의 피조 간섭계를 구현했다. 단일 모드 광섬유를 구면파 광원으로 사용했고 끝 단을 반사면으로 만들기 위해서 경면 가공했다. 반사면은 적당한 각도로 경사지게 가공되어 있는데 이것은 간섭무늬의 CCD관찰을 용이하게 한다. 경사 단면 광섬유 광원을 이용한 피조 간섭계는 기존의 피조 간섭계에서 구면파를 왜곡시키는 광 분할기를 제거함으로써 측정 정밀도를 향상시킬 수 있었다 또한 동일한 시편의 측정결과를 비교함으로써 기존의 피조 간섭계로부터 개선된 정밀도를 정량적으로 구할 수 있었다. 그리고 경사 단면 광섬유 광원의 구면파정도를 알아보기 위해서 PS/PDI(Phase Shifting/Point Diffraction Interferometer)를 구현함으로써 광원의 구면파 정도를 실험적으로 검증했다.

• 한국세라믹학회지
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• 제46권1호
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• pp.102-107
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• 2009

This study has been focused on an effective surface finishing method combining ELID (ELectrolytic In-process Dressing) and MAP (Magnetic Assisted Polishing) for the nano-precision mirror grinding of glass-lens molding mould. ELID grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP has been used as polishing method due to its high polishing efficiency and superior surface quality. It also presents some techniques for achieving the nanometer roughness of the hard material such as WC-Co, which are extensively used in precision tooling material.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.646-650
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• 1996

In this paper, A hydrostatic bearing spindle for high precision machining and a motor built-in spindle for high speed machining are developed toobtain the high precision machining accuracy of the prototype lathe. The sliding bearing with fluoric resin (turcite) pad is adopted for improving the damping charateristics of guide ways. The funning accuracy of moving elements isestimated to confirm the validity of application on the prototype; the high precision CNC lathe. The surface roughness of Cupper and Aluminum machined by the hydrostatic spindle are 0.07 .mu. m and 0.10 .mu. mRmax. The surface roughness of Aluminium machined by the built-in spindle are 0.10 .mu. mRmax. From this results, it is venified that the prototype lathe is effective to high precision maching.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.416-421
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• 2003

To obtain the surface roughness with range from l0nm to In n need a ultra-Precision machine, cutting condition and the study of materials. And n have to also consider the chip and vibration of diamond tool during processing. In this paper, the cutting conditions for getting mirror surface of aluminum alloy have been examined experimentally by using ultra-precision turning and single crystal diamond tool. In generally, the cutting conditions have effect on the surface roughness in ultra-precision turning. The result of surface roughness was measured by the ZYGO New View 200.

• 한국세라믹학회지
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• 제49권1호
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• pp.90-94
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• 2012

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for metal matrix ceramic composites using in high precision mirror for optics. The experimental studies have been carried out to get mirror surface by grinding for composites, Al-SiC, Al-graphite and Mg-SiC. Grinding process is carried out with varying abrasive mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester and SEM measurement system. ELID grinding technology could be applied successfully for the mirror-surface manufacturing processes in spite of ductility of metal matrix material. As the results of experiments, surface roughness of Al-SiC(45 wt%) has been the most superior in these experimental work-pieces as 0.021 ${\mu}m$ Ra.

• 한국세라믹학회지
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• 제47권4호
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 추계학술대회 논문집
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• pp.76-81
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• 1995

MgO single crystal is widely used as a the material of high temperature resistance, but is difficult to grind because of brittleness and crack generation. Therefore, superabrasive diamond wheel is required for mirror like grinding of this material. This study describes a newly proposed optimum in-process electrolytic dressing system for carrying out effective dressing of superbrasive diamond wheel. Using this system the grinding surface of MgO single crystal was improved, the grinding force was very l9ow and crack was removed. In conclusion, this system is good to obtain the efficient grinding and mirror-like grinding without crack of MgO single crystal.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.273-278
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• 1994

The surface finishing systems using the micro abrasive film were designed and manufactured to make the mirror surface of the cylindrical workpiece. An experimental study of surface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness of stainless steel was about Rmax 0.2~0.25 .mu.m, Ra 0.02~0.04 .mu.m in abrasive grain size 12, 9 .mu.m. the surface roughness of chrome coated workpiece was about Rmax 0.07~ 0.11 .mu. m, Ra 0.01 in abrasive grain size 3 .mu. m. Also, to measure the mirror finishing time by mirror surface finishing system, the experiment was carried out on the chrome coated and ground roller of diameter 76mm and length 650mm. The finishing time and surface roughness were 40min and Rmax 0.1~0.13 .mu.m, Ra 0.01 .mu.m.

• 한국결정성장학회지
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• 제10권1호
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• pp.42-47
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• 2000

일반적인 쵸크랄스키(CZ)방법으로 성장된 실리콘 단결정봉(Ingot)을 가공하여 경면 연마한 후 RTA법으로 수소 분위기에서 열처리하여 실리콘 웨이퍼 표면 및 표면 근처의 특성 변화에 대하여 고찰하였다 수소 열처리를 통하여 표면의 COP (결정결함)가 현저히 감소하는 것을 확인하였고 깊이 5um까지의 영역에서도 결정결함의 밀도가 감소하였다. 또한 수소 열처리에 의해 실리콘 웨이퍼 표면이 에칭 및 실리콘의 재배열에 의해 형성되는 테라스(Terrace) 형태도 관찰되었다.