• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.2
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• pp.267-274
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• 2010

Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. This method uses MR fluids which contains micro abrasives as a polishing media, and can. It is possible to obtain nano level surface roughness under suitable process conditions, however, required polishing time is highly dependent on the applied pre-polishing methods due to its very small material removal rate. Thus, in this study, a combined polishing method is presented to reduce total polishing time for SUS304. First, the electropolishing (EP) method was applied to obtain fine surface roughness, and the MR polishing was followed. Surface roughness variations were investigated according to the process conditions. As the results of this study, it was possible to reduce total polishing time for SUS304 using the proposed combined polishing method.

• Korean Journal of Optics and Photonics
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• v.12 no.4
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• pp.334-338
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• 2001

A Fizeau interferometer without beam splitter was constructed. Single-mode optical fiber was used as a spherical wave source and the face of fiber end was polished and coated to be a reflecting surface. The reflecting surface was angled so that interference fringe could be detected by CCD camera. Beam splitter in front of a spherical wave source could distort the wave front and that was one of the component error sources. With the proposed configuration there was no need to place beam splitter in the system. Improvement of phase measuring accuracy was evaluated quantitatively by comparing the result of this setup with that of a conventional Fizeau interferometer. Wave front of the angled end-face optical fiber source was also measured to verify its sphericity by PS/PDI (Phase Shifting/Point Diffraction Interferometer). The principle of this technique was presented and the experimental results and its applications were discussed. ussed.

• Journal of the Korean Ceramic Society
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• v.46 no.1
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• pp.102-107
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• 2009

This study has been focused on an effective surface finishing method combining ELID (ELectrolytic In-process Dressing) and MAP (Magnetic Assisted Polishing) for the nano-precision mirror grinding of glass-lens molding mould. ELID grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP has been used as polishing method due to its high polishing efficiency and superior surface quality. It also presents some techniques for achieving the nanometer roughness of the hard material such as WC-Co, which are extensively used in precision tooling material.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.646-650
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• 1996

In this paper, A hydrostatic bearing spindle for high precision machining and a motor built-in spindle for high speed machining are developed toobtain the high precision machining accuracy of the prototype lathe. The sliding bearing with fluoric resin (turcite) pad is adopted for improving the damping charateristics of guide ways. The funning accuracy of moving elements isestimated to confirm the validity of application on the prototype; the high precision CNC lathe. The surface roughness of Cupper and Aluminum machined by the hydrostatic spindle are 0.07 .mu. m and 0.10 .mu. mRmax. The surface roughness of Aluminium machined by the built-in spindle are 0.10 .mu. mRmax. From this results, it is venified that the prototype lathe is effective to high precision maching.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.416-421
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• 2003

To obtain the surface roughness with range from l0nm to In n need a ultra-Precision machine, cutting condition and the study of materials. And n have to also consider the chip and vibration of diamond tool during processing. In this paper, the cutting conditions for getting mirror surface of aluminum alloy have been examined experimentally by using ultra-precision turning and single crystal diamond tool. In generally, the cutting conditions have effect on the surface roughness in ultra-precision turning. The result of surface roughness was measured by the ZYGO New View 200.

• Journal of the Korean Ceramic Society
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• v.49 no.1
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• pp.90-94
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• 2012

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for metal matrix ceramic composites using in high precision mirror for optics. The experimental studies have been carried out to get mirror surface by grinding for composites, Al-SiC, Al-graphite and Mg-SiC. Grinding process is carried out with varying abrasive mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester and SEM measurement system. ELID grinding technology could be applied successfully for the mirror-surface manufacturing processes in spite of ductility of metal matrix material. As the results of experiments, surface roughness of Al-SiC(45 wt%) has been the most superior in these experimental work-pieces as 0.021 ${\mu}m$ Ra.

• Journal of the Korean Ceramic Society
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• v.47 no.4
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• pp.290-295
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• 2010

This study has been focused on properties of mirror surface grinding technology by ELID(Electrolytic In-process Dressing) for structural ceramics using in high precision structural parts as like semi-conductor manufacturing processes. The experimental studies have been carried out to get mirror surface for grinding of structural ceramics, SiC, $Al_2O_3$ and AlN. Grinding process of the ceramics is carried out with varying mesh type, depth of cut and feed rate using diamond wheel. The machining result of the surface roughness and condition of ground surface, have been analyzed by use of surface roughness tester, SEM, AFM and three dimensional surface profiler measurement system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1995.10a
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• pp.76-81
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• 1995

MgO single crystal is widely used as a the material of high temperature resistance, but is difficult to grind because of brittleness and crack generation. Therefore, superabrasive diamond wheel is required for mirror like grinding of this material. This study describes a newly proposed optimum in-process electrolytic dressing system for carrying out effective dressing of superbrasive diamond wheel. Using this system the grinding surface of MgO single crystal was improved, the grinding force was very l9ow and crack was removed. In conclusion, this system is good to obtain the efficient grinding and mirror-like grinding without crack of MgO single crystal.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.273-278
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• 1994

The surface finishing systems using the micro abrasive film were designed and manufactured to make the mirror surface of the cylindrical workpiece. An experimental study of surface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness of stainless steel was about Rmax 0.2~0.25 .mu.m, Ra 0.02~0.04 .mu.m in abrasive grain size 12, 9 .mu.m. the surface roughness of chrome coated workpiece was about Rmax 0.07~ 0.11 .mu. m, Ra 0.01 in abrasive grain size 3 .mu. m. Also, to measure the mirror finishing time by mirror surface finishing system, the experiment was carried out on the chrome coated and ground roller of diameter 76mm and length 650mm. The finishing time and surface roughness were 40min and Rmax 0.1~0.13 .mu.m, Ra 0.01 .mu.m.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.10 no.1
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• pp.42-47
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• 2000

The surface structure and the crystalline features in the near surface region have been investigated for CZ(Czochralski) grown Si wafers. Si wafers were annealed by RTA (Rapid Thermal Annealing) method in H$_2$ambient after mirror polished process. The densities of COPs (Crystal Originated Particles) after RTA process were remarkably decreased at the surface and in the region of 5um depth from the surface as well. terrace type surface structure which was formed by etching and re-arrangement of Si atoms during $H_2$annealing process also has been observed.