A study on dynamic design for the sub-micro vibration control of substructure in semi-conductor factory (반도체공장에서 미진동제어를 위한 격자보의 동적 설계에 관한 연구)
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- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 1994.10a
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- pp.52-57
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- 1994