• Clean Technology
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• v.2 no.1
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• pp.80-95
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• 1996

A mathematical model has been developed for simulating the spray dryer absorber (SDA) used in semi-dry flue gas desulfurization process. Fundamental equations include the component mass and heat balances in both gas and droplet phases and the equation of motion for a single droplet. The model developed described the pilot-plant data much better than the existing SPRAYMOD-M model. The effect of the process variables, whose values were chosen within the operation limits of the actual pilot plants, on % $SO_2$ removal or conversion of the sorbent were calculated, and discussed in terms of $SO_2$ absorption rate, the residence time of flue gas, the velocity and drying time of droplets. Finally, the % $SO_2$ removal was calculated with two independent process variables and the results were shown on three-dimensional or two-dimensional diagrams with the lines of constant % $SO_2$ removal, so that they can be easily applied to preliminary design of the SDA.

• Journal of the Korean Vacuum Society
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• v.7 no.2
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• pp.88-93
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• 1998

The fabrication process and emission characteristics of gated silicon field emitter arrays(FEAs) using chemical-mechanical-polishing (CMP) method are described. Novel fabrication techniques consisting of two-step dry etching with oxidation of silicon and CMP processes were developed for the formation of sharp tips and clear-cut edged gate electrodes, respectively. The gate height and aperture could be easily controlled by varying the polishing time and pressure in the CMP process. We obtained silicon FEAs having self-aligned and clear-cut edged gate electrode opening by eliminating the dishing problem during the CMP process with an oxide mask layer. The tip height of the finally fabricated FEAs was about 1.1 $\mu$m and the end radius of the tips was smaller than 100 $\AA$. The emission current meaured from the fabricated 2809 tips array was about 31 $\mu$A at a gate voltage of 80 V.

• Composites Research
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• v.20 no.5
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• pp.49-55
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• 2007

Nanocomposite blade for dicing semiconductor wafer is investigated for micro/nano-device and micro/nano-fabrication. While metal blade has been used for dicing of silicon wafer, polymer composite blades are used for machining of quartz wafer in semiconductor and cellular phone industry in these days. Organic-inorganic material selection is important to provide the blade with machinability, electrical conductivity, strength, ductility and wear resistance. Maintaining constant thickness with micro-dimension during shaping is one of the important technologies fer machining micro/nano fabrication. In this study the fabrication of blade by wet processing of mixing conducting nano ceramic powder, abrasive powder phenol resin and polyimide has been investigated using an experimental approach in which the thickness differential as the primary design criterion. The effect of drying conduction and post pressure are investigated. As a result wet processing techniques reveal that reliable results are achievable with improved dimension tolerance.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.5
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• pp.356-362
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• 2013

An attempt has been made to optimize elongated rotating arc plasma $NH_3$ scrubber. Among diverse semiconductor processes, diffusion and implantation process inevitably produce $NH_3$ as byproduct and efficient dry process for the decomposition of $NH_3$ is required. Plasma process does not produce NOx that is commonly produced in combustion process and there is no problem of deactivation, usually experienced in catalyst process. However, plasma process uses electrical energy and needs to be optimized to achieve feasibility of application. In this work, mode control of rotating arc is presented as tentative solution for the possible optimization of the process. Based on existing rotating arc, scale-up and following mode mapping was tried. Proposed reactor design was evaluated in the $NH_3$ decomposition process and revealed that optimization scheme is at hand. In the experiment of full scale scrubber including heat exchanger, the process gave more stable and efficient process of $NH_3$ decomposition.

• Proceedings of the Korean Fiber Society Conference
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• 2003.04a
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• pp.382-383
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• 2003

정전방사란 고분자 용융체 또는 고분자 용액에 전기적인 힘을 이용하여 나노크기의 직경을 가지는 섬유를 제조하는 공정이다. 정전방사에서는 전기적인 힘을 이용하여 기존의 건식 및 습식 방사기술로서 섬유화가 어려웠던 재료들을 간단한 방법으로 섬유화 시킬 수 있으며, 매우 적은 양으로 방사가 불가능했던 재료들에 대해서도 방사가 가능하며, 부직포 형태로 제조된다는 특징이 있다. 본 연구에서는 PVdF계 공중합체 폴리머로서 PVdF-HFP 공중합체를 아세톤 용매에 다양한 농도로 용해시켜 고분자 용액을 제조한 후, 정전방사에 의한 나노크기의 직경의 섬유를 제조하는 방사조건을 고찰하였다. (중략)

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2008.04a
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• pp.127-130
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.19 no.11
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• pp.211-220
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.57-63
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• 2007

Wire drawing process of the high carbon steel with a high speed is usually conducted at room temperature using a number of passes or reductions through consequently located dies. In the multi-pass drawing process, temperature rise in each pass affects the mechanical properties of the final product such as bending, torsion, and tensile property, etc. This temperature rise during the deformation promotes the occurrence of delamination, and deteriorates the torsion property and durability of wire. This study investigates the occurrence of delamination in the wire through the torsion test and the evaluation of wire temperature. The excessive wire temperature leads to the occurrence of the delamination. Based on the calculation of the wire temperature, a new pass schedule, which can prevent the delamination due to the excessive wire temperature rise, is designed through the isothermal pass schedule.

• Journal of Powder Materials
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• v.11 no.4
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• pp.314-321
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• 2004

The elastic moduli of simulated dry process fuels with varying composition and density were measured in order to analyze the mechanical properties of a dry process fuel pellet. Resonant ultrasound spectroscopy(RUS) which can determine all elastic moduli with one set of measurements for a rectangular parallelepiped sample was used to measure the elastic moduli of UO$_{2}$ and simulated dry process fuel. The simulated dry process fuel showed a higher value of Young's modulus than UO$_2$ due to the presence of metallic precipitates and solid solution elements in the UO$_{2}$ matrix. The correlation between Young's modulus and porosity(P) of simulated dry process fuel was found to be 231.4-651.8 P (GPa) at room temperature. Dry process fuel with a higher burnup showed higher Young's modulus because total content of fission product element was increased.

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2005.10a
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• pp.158-162
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• 2005