Journal of Korean Society of Environmental Engineers (대한환경공학회지)

Korean Society of Environmental Engineers (대한환경공학회)
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Characteristics of NH3 Decomposition according to Discharge Mode in Elongated Rotating Arc Reactor

신장 회전아크 반응기에서 방전모드에 따른 암모니아 분해특성

  • Kim, Kwan-Tae (Department of Plasma Engineering, Korea Institute of Machinery & Materials) ;
  • Kang, Hee Seok (Department of Plasma Engineering, Korea Institute of Machinery & Materials) ;
  • Lee, Dae Hoon (Department of Plasma Engineering, Korea Institute of Machinery & Materials) ;
  • Jo, Sung Kwon (Department of Plasma Engineering, Korea Institute of Machinery & Materials) ;
  • Song, Young-Hoon (Department of Plasma Engineering, Korea Institute of Machinery & Materials) ;
  • Kim, In Myoung (Enercons Tech. Ltd.)
  • 김관태 (한국기계연구원 플라즈마연구실) ;
  • 강희석 (한국기계연구원 플라즈마연구실) ;
  • 이대훈 (한국기계연구원 플라즈마연구실) ;
  • 조성권 (한국기계연구원 플라즈마연구실) ;
  • 송영훈 (한국기계연구원 플라즈마연구실) ;
  • 김인명 (에너콘스테크)
  • Received : 2013.01.30
  • Accepted : 2013.05.09
  • Published : 2013.05.30
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Abstract

An attempt has been made to optimize elongated rotating arc plasma $NH_3$ scrubber. Among diverse semiconductor processes, diffusion and implantation process inevitably produce $NH_3$ as byproduct and efficient dry process for the decomposition of $NH_3$ is required. Plasma process does not produce NOx that is commonly produced in combustion process and there is no problem of deactivation, usually experienced in catalyst process. However, plasma process uses electrical energy and needs to be optimized to achieve feasibility of application. In this work, mode control of rotating arc is presented as tentative solution for the possible optimization of the process. Based on existing rotating arc, scale-up and following mode mapping was tried. Proposed reactor design was evaluated in the $NH_3$ decomposition process and revealed that optimization scheme is at hand. In the experiment of full scale scrubber including heat exchanger, the process gave more stable and efficient process of $NH_3$ decomposition.

암모니아 처리용 플라즈마 스크러버 공정 최적화 연구를 수행하였다. 여러 반도체공정 중 확산과 이온주입공정에서는 불가피하게 부산물로서 암모니아가 배출되며, 따라서 효율적인 건식처리공정기술이 필요하다. 플라즈마 처리공정은 연소공정에서 배출되는 NOx가 발생하지 않으며, 촉매공정에서 나타나는 비활성문제가 없다. 그러나 전기에너지를 사용하기 때문에 실제 적용을 위한 최적화 연구가 필요하며, 본 연구에서는 공정 최적화를 위한 해결책으로 회전아크 반응기의 모드제어에 대한 연구를 수행하였다. 기존 회전아크 반응기에 대한 스케일 업 및 그에 대한 모드 매핑을 수행하였다. 설계 반응기를 이용하여 암모니아 분해특성을 평가하였고, 최적화 설계가 가능한 것으로 나타났다. 또한 열교환기를 포함한 전체 스케일의 스크러버 실험에서 암모니아 분해공정이 보다 안정적이고, 효율적인 것으로 나타났다.

Keywords

References

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