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http://dx.doi.org/10.4491/KSEE.2013.35.5.356

Characteristics of NH3 Decomposition according to Discharge Mode in Elongated Rotating Arc Reactor  

Kim, Kwan-Tae (Department of Plasma Engineering, Korea Institute of Machinery & Materials)
Kang, Hee Seok (Department of Plasma Engineering, Korea Institute of Machinery & Materials)
Lee, Dae Hoon (Department of Plasma Engineering, Korea Institute of Machinery & Materials)
Jo, Sung Kwon (Department of Plasma Engineering, Korea Institute of Machinery & Materials)
Song, Young-Hoon (Department of Plasma Engineering, Korea Institute of Machinery & Materials)
Kim, In Myoung (Enercons Tech. Ltd.)
Publication Information
Journal of Korean Society of Environmental Engineers / v.35, no.5, 2013 , pp. 356-362 More about this Journal
Abstract
An attempt has been made to optimize elongated rotating arc plasma $NH_3$ scrubber. Among diverse semiconductor processes, diffusion and implantation process inevitably produce $NH_3$ as byproduct and efficient dry process for the decomposition of $NH_3$ is required. Plasma process does not produce NOx that is commonly produced in combustion process and there is no problem of deactivation, usually experienced in catalyst process. However, plasma process uses electrical energy and needs to be optimized to achieve feasibility of application. In this work, mode control of rotating arc is presented as tentative solution for the possible optimization of the process. Based on existing rotating arc, scale-up and following mode mapping was tried. Proposed reactor design was evaluated in the $NH_3$ decomposition process and revealed that optimization scheme is at hand. In the experiment of full scale scrubber including heat exchanger, the process gave more stable and efficient process of $NH_3$ decomposition.
Keywords
Elongated Rotating Arc; $NH_3$; Specific Energy Density; NOx;
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Times Cited By KSCI : 3  (Citation Analysis)
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