Fabrication of Organic-Inorganic Nanocomposite Blade for Dicing Semiconductor Wafer
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Jang, Kyung-Soon
(국민대학교 기계자동차공학부 기계설계 대학원)
Kim, Tae-Woo (국민대학교 기계자동차공학부 기계설계 대학원) Min, Kyung-Yeol (주식회사 동신) Lee, Jeong-Ick (인하공업전문대학 기계설계) Lee, Kee-Sung (국민대학교 기계자동차공학부 기계설계 대학원) |
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