• Title/Summary/Keyword: 가스누출확산

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A Study on Measures to Prevent Leakage of Process Fluid from the VCR Fitting used in the Semiconductor Manufacturing Process (반도체 제조 공정에서 사용되는 이송배관 연결부위(VCR Fitting)로부터 공정유체 누출사고 예방 대책에 관한 연구)

  • Dae Joon Lee;Sang Ryung Kim;Sang Gil Kim;Chung Sang Kang;Joon Won Lee
    • Journal of the Korean Institute of Gas
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    • v.27 no.2
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    • pp.79-85
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    • 2023
  • Recently, in the semiconductor process, large companies are seeking process changes from memory semiconductors to the foundry due to the increase in demand due to the 4th industry. industry is expanding. The characteristics of special gases and precursors, which are raw materials used to produce these semiconductor chips, are toxic, pyrophoric, inflammable, and corrosive. These semiconductor raw materials are operated in a closed system and do not leak to the outside during normal times, but when leaked, they spread to the inside of the gas box, and when proper ventilation is not provided inside the gas box, they spread to the outside, causing fires, explosions, or toxic substances. It can lead to major accidents such as leakage. Recently, there have been cases of accidents in which hazardous materials leaked from the closed system of the semi conductor process and spread to the inside and outside of the gas box. . In this study, we propose preventive measures based on the case of an accident in which raw material leaked from the VCR fitting, which is the connection part of the semiconductor raw material transfer pipe, and spread to the outside of the gas box.

A Study on Flow Analysis according to the Cause of Gas Leakage in the Specialty Gas Supply Device for Semiconductors (반도체용 특수가스 공급장치 내부에서의 가스누출 원인에 따른 유동해석에 관한 연구)

  • Kim, Jung-Duck;Kwon, Ki-sun;Rhim, Jong-Guk;Yang, Won-Baek
    • Journal of the Korean Institute of Gas
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    • v.25 no.2
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    • pp.42-51
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    • 2021
  • Facilities that supply specialty gases used in semiconductor manufacturing mainly handles with hazardous and dangerous substances with flammable, toxic, and corrosive properties, and gas cabinets are mainly used as such supply facilities. The effects of the supply facilities were analyzed for each leak through the rupture disk in the gas cabinet and a leak where the leak hole. In this case, gas leaked to the outside depending on the leak area. It is a factor that creates a risk depending on the concentration of the leaked gas. Depending on the risk of leakage, all measures such as safe operation procedures should be reviewed again.

A study on numerical analysis of the accidental gas explosion (수치해석에 의한 가스폭발사고 분석)

  • ;V.M.Poutchcov
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1998.05a
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    • pp.145-152
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    • 1998
  • 실내에서 가스폭발시 피해를 예측하기 위해서 폭발 화염면의 전파를 수치해석을 통해 해석했다. 확산방정식에 의해 가스누출에 의한 실내의 가스확산분포를 구했으며 문헌에서 선택한 누출의 초기조건을 사용했다. 화염온도를 계산하기 위해 각 가스 혼합비에 따른 엔탈피와 화학식에 대한 reduced mechanism을 사용했으며 문헌에서 찾은 각 가스의 농도별 층류 연소속도를 혼합가스의 층류연소속도에 적용시켰다. k-$\varepsilon$ 모델에서 turbulance energy를 층류연소속도와 결합시켜 난류화염 전파속도를 모델링 했다. 화염면의 전파를 분석하기 위해 실내의 위치에는 직각, 화염면의 전파에는 원통좌표계를 사용했다. 유리창의 파손에 의한 화염전파면의 변화에 따른 압력상승 요인을 해석하였으며 창문의 크기에 따라서 점화위치에 따른 실내 압력상승의 영향이 서로 다르게 나타나는 결과를 얻었다.

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Development of Emergency Response System for Toxic Gas Facilities Using Quantitative Risk Analysis (독성가스 시설의 정량적 위험성 평가를 이용한 비상대응시스템 구축)

  • Yoo Jin Hwan;Kim Min Seop;Ko Jae Wook
    • Journal of the Korean Institute of Gas
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    • v.9 no.2 s.27
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    • pp.43-49
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    • 2005
  • Today toxic gas has various uses. If there is a release accident, the gas rapidly disperse into the atmosphere. The extent of damage due to toxic gas accident is very wide and fatal to human being. So, it is necessary for toxic gas facilities which have high risk to construct an emergency response system that prepare to toxic release and make immediate response to be possible at accident appearance. In this study accident scenario were selected and frequency analysis was executed using FTA technique. Dispersion effect of toxic gas release was analyzed using DNV company's PHAST(Ver. 6.2). Finally, an emergency response system was developed using results of quantitative risk analysis.

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Dispersion Characteristics of Hydrogen Gas by the Effect of Leakage Hole Size in Enclosure Space (누출공 크기에 따른 밀폐공간 내 수소 가스의 확산 특성)

  • Choi, Jinwook;Li, Longnan;Park, Chul-Woo;Lee, Seong Hyuk;Kim, Daejoong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.5
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    • pp.26-35
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    • 2016
  • As a potential clean energy resource, the production and consumption of hydrogen gas are expected to gradually increase, so that hydrogen related studies are also increasing. The thermal and chemical properties of hydrogen result in its high flammability; in particular, there is a high risk if leaks occur within an enclosed space. In this study, we applied the computational fluid dynamics method to conduct a numerical study on the leakage behavior of hydrogen gas and compared these numerical study results with an experimental study. The leakage hole diameter was selected as an important parameter and the hydrogen gas dispersion behavior in an enclosed space was investigated through various analytical methods. Moreover, the flammable regions were investigated as a function of the leakage time and leakage hole size. We found that the growth rate of the flammable region increases rapidly with increasing leakage hole size. We also investigated the relation between the mass flow rate and the critical time when the hydrogen gas reaches the ceiling. The analysis of the monitoring points showed that the hydrogen gas dispersion behavior is isotropic and independent of the geometry. We found that the concentration of gas in an enclosed space is affected by both the leakage flow rate and amount of gas accumulated in the enclosure.

Analysis of Mechanism for Diffusion of Incomplete Combustion Gas Released from Domestic Gas Boiler (가정용 보일러의 불완전연소가스 누출확산 메커니즘 해석)

  • Kang, Seung-Kyu;Choi, Kyung-Suhk;Yoon, Joon-Yong
    • Proceedings of the KSME Conference
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    • 2008.11b
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    • pp.2868-2873
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    • 2008
  • Carbon Monoxide(CO) poisoning accident is higher than any other gas accident in the rate of deaths/incidents. In the last five years, 36 people died and 104 were wounded because of carbon monoxide poisoning accident. Most of these CO poisoning accidents were caused by defective exhaust tube in the old gas boiler and multi-use facility. In this study, the spread of incomplete combustion gas(CO) released from leakage hole of exhaust tube was analyzed by computational flow modeling and concentration measuring test. CO gas leaked form exhaust tube in a building was highest concentrated near the ceiling and formed the circular currents along the walls. Through these experiments and simulation, the reasonable installation location of carbon monoxide alarm was made certain and suggested.

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EXPERIMENTAL AND COMPUTATIONAL PREDICTION OF CONCENTRATION OF CARBON MONOXIDE GAS RELEASED FROM EXHAUST TUBE OF GAS BOILER (가스보일러 배기통 이탈에 의한 CO가스 누출확산 실험 및 수치해석)

  • Kang, Seung-Kyu;Choi, Kyung-Suhk;Yoon, Joon-Yong
    • 한국전산유체공학회:학술대회논문집
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    • 2008.03b
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    • pp.172-175
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    • 2008
  • In the last five years, 45 people died and 104 were wounded because of carbon monoxide poisoning accident. CO poisoning accident is higher than any other gas accident in the rate of deaths/incidents. Most of these CO poisoning accidents were caused by defective exhaust tube in the old gas boiler and multi-use facility. In this study, the spread of CO gas released from leakage hole of exhaust tube was analyzed by computational flow modeling and concentration measuring test. CO gas leaked form exhaust tube in a building was highest concentrated near the ceiling and formed the circular currents along the walls. Through these experiments and simulation, the reasonable installation location of CO alarm was made certain and suggested.

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A Study on the Improvement of Emergency Block and Diffusion Prevention System for Hazardous Chemicals Leakage (화학물질 누출에 따른 긴급 확산 방재시스템 개선 방안 연구)

  • Lee, Deok-Jae;Yun, Jeong Hyeon;Yoo, Byung-Tae
    • Journal of the Korean Institute of Gas
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    • v.22 no.5
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    • pp.89-99
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    • 2018
  • In the case of medium and small-sized businesses handling hazardous chemicals, emergency disaster prevention by workers, rather than a disaster prevention system using a safety device equipped with an automation system in case of a leak accident, is highly likely to occur. In order to solve these limitations, in this study investigated an emergency disaster prevention system that can be easily removed and adhered to the expected point of leakage according to the occurrence frequency of the leak during the chemical handling process.