• Title/Summary/Keyword: [O]/[$N_2$] ratio

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Effect of the O2/N2 Ratio on the Growth of TiO2 Nanowires via Thermal Oxidation (열 산화를 이용한 TiO2 나노선의 성장에 미치는 O2/N2 가스비의 영향)

  • Lee, Geun-Hyoung
    • Korean Journal of Materials Research
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    • v.25 no.10
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    • pp.543-546
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    • 2015
  • $TiO_2$ nanowires were grown by thermal oxidation of TiO powder in an oxygen and nitrogen gas environment at $1000^{\circ}C$. The ratio of $O_2$ to $N_2$ in an ambient gas was changed to investigate the effect of the gas ratio on the growth of $TiO_2$nanowires. The oxidation process was carried out at different $O_2$/$N_2$ ratios of 0/100, 25/75, 50/50 and 100/0. No nanowires were formed at $O_2$/$N_2$ ratios of less than 25/75. When the $O_2$/$N_2$ ratio was 50/50, nanowires started to form. As the gas ratio increased to 100/0, the diameter and length of the nanowires increased. The X-ray diffraction pattern showed that the nanowires were $TiO_2$ with a rutile crystallographic structure. In the XRD pattern, no peaks from the anatase and brookite structures of $TiO_2$were observed. The diameter of the nanowires decreased along the growth direction, and no catalytic particles were detected at the tips of the nanowires which suggests that the nanowires were grown with a vapor-solid growth mechanism.

Effects of $N_2O$/$SiH_4$Flow Ratio and RF Power on Properties of $SiO_2$Thick Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD법에 의해 증착된 $SiO_2$후막 특성에서 $N_2O$/$SiH_4$Flow Ratio와 RF Power가 미치는 영향)

  • 조성민;김용탁;서용곤;임영민;윤대호
    • Journal of the Korean Ceramic Society
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    • v.38 no.11
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    • pp.1037-1041
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    • 2001
  • Silicon diosixde thick film using silica optical waveguide cladding was fabricated by Plasma Enhanced Chemical Vapor Deposition (PECVD) method, at a low temperature (32$0^{\circ}C$) and from (SiH$_4$+$N_2$O) gas mixtures. The effects of deposition parameters on properties of SiO$_2$thick films were investigated by variation of $N_2$O/SiH$_4$flow ratio and RF power. As the $N_2$O/SiH$_4$flow ratio decreased, deposition rate increased from 2.9${\mu}{\textrm}{m}$/h to maximum 10.1${\mu}{\textrm}{m}$/h. As the RF power increased from 60 W to 120 W, deposition rate increased (5.2~6.7 ${\mu}{\textrm}{m}$/h) and refractive index approached at thermally grown silicon dioxide (n=1.46).

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Metal Plasma-Etching Damages of NMOSFETs with Pure and $N{_2}O$ Gate Oxides (게이트 산화막에 따른 nMOSFET의 금속 플라즈마 피해)

  • Jae-Seong Yoon;Chang-Wu Hur
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.3 no.2
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    • pp.471-475
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    • 1999
  • The metal plasma-etch damage immunity of nMOSFET with $N{_2}O$ gate oxide is found to be improved comparing to that with regular pure oxide of similar thickness. With increasing the antenna ratio (AR), the characteristics of nMOSFETs with $N{_2}O$ oxide shows tighter initial distribution and smaller degradation under constant field stress, which is explained by the effect of the nitrogen at the substrate $Si/SiO_2$ interface. Also, if $N{_2}O$ gate oxide is used, the maximum allowable size of metal AAR and PAR may be increased to the much larger values. These improvements of nMOSFETs with $N{_2}O$ gate oxide are attributed to the effect of the interface hardness improved by the nitrogen included at the substrate-Si/$N{_2}O$-oxide interface.

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Synthesis of AlN-SiO2-Al2O3 System (AlN-SiO2-Al2O3계로부터 AlN-Polytypes의 제조)

  • 박용갑;장병국
    • Journal of the Korean Ceramic Society
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    • v.26 no.1
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    • pp.31-36
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    • 1989
  • In order to synthesize AlN-polytypes from AlN-SiO2-Al2O3 system, composition A (AlN/SiO2/Al2O3=1/0.3/0.05, mole ratio) and composition B(AlN-SiO2-Al2O3=1/0.2/0.05, mole ratio) were used. AlN-polytypes were produced by nitriding the mixture at 175$0^{\circ}C$~190$0^{\circ}C$ under N2 atmosphere. For lower reaction temperature, 15R phase was produced and in the case of higher reaction temperature, AlN phase was only produced. As each composition was heated at 185$0^{\circ}C$ in N2 atmosphere, produced main phases were 15R phase for composition A and 21R phase for composition B respectively. The fracture surfaces of produced reactants showed porous skeleton structure.

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The Effect of RF Power and $SiH_4$/($N_2$O+$N_2$) Ratio in Properties of SiON Thick Film for Silica Optical Waveguide (실리카 광도파로용 SiON 후막 특성에서 RF Power와 $SiH_4$/($N_2$O+$N_2$) Ratio가 미치는 영향)

  • 김용탁;조성민;서용곤;임영민;윤대호
    • Journal of the Korean Ceramic Society
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    • v.38 no.12
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    • pp.1150-1154
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    • 2001
  • Silicon oxynitride (SiON) thick films using the core layer of silica optical waveguide have been deposited on Si wafer by PECVD at low temperature (32$0^{\circ}C$) were obtained by decomposition of appropriate mixture of (SiH$_4$+$N_2$O+$N_2$) gaseous mixtures under RF power and SiH$_4$/($N_2$O+$N_2$) ratio deposition condition. Prism coupler measurements show that the refractive indices of SiON layers range from 1.4663 to 1.5496. A high SiH$_4$/($N_2$O+$N_2$) of 0.33 and deposition power of 150 W leads to deposition rates of up to 8.67 ${\mu}{\textrm}{m}$/h. With decreasing SiH$_4$/($N_2$O+$N_2$) ratio, the SiON layer become smooth from 41$\AA$ to 6$\AA$.

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Degradation of Humic Acid Using N-Doped TiO2 (질소를 도핑한 TiO2를 이용한 부식산 분해)

  • So, Ji-Yang;Rhee, Dong-Seock
    • Journal of Industrial Technology
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    • v.31 no.B
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    • pp.119-125
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    • 2011
  • N-doped Titanium oxides were prepared by using urea as a source of nitrogen. The photoactivities of the doped $TiO_2$ were evaluated on the basis of degradation of humic acid in aqueous solutions with different light sources, ultraviolet lamp, fluorescent lamp and solar light. XRD analysis was conducted to identify the crystal structure of the synthesized photocatalysts. N-doped $TiO_2$ and $pure-TiO_2$ was anatase type. SEM results showed that spherical particles were formed, which are the characteristics of the anatase form. N doped $TiO_2$ showed higher $UV_{254}$ decrease ratio and DOC removal ratio compared to $pure-TiO_2$. The humic acid degradation reaction using the UV-A lamp and UV-C lamp was assigned to pseudo-first order reaction. For solar light, only $pure-TiO_2$ and $N-TiO_2$ exhibited the pseudo-first order reaction.

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Thin Film Characterization on Refractive Index of PECVD SiO2 Thin Films

  • Woo Hyuck Kong;In Cheon Yoon;Seung Jae Lee;Yun Jeong Choi;Sang Jeen Hong
    • Journal of the Semiconductor & Display Technology
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    • v.22 no.2
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    • pp.35-39
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    • 2023
  • Silicon oxide thin films have been deposited by plasma-enhanced chemical vapor deposition in SiH4 and N2O plasma along the variation of the gas flow ratio. Optical emission spectroscopy was employed to monitor the plasma and ellipsometry was employed to obtain refractive index of the deposited thin film. The atomic ratio of Si, O, and N in the film was obtained using XPS depth profiling. Fourier Transform Infrared Spectroscopy was used to analyze structures of the films. RI decreased with the increase in N2O/SiH4 gas flow ratio. We noticed the increase in the Si-O-Si bond angles as the N2O/SiH4 gas flow ratio increased, according to the analysis of the Si-O-Si stretching peak between 950 and 1,150 cm-1 in the wavenumber. We observed a correlation between the optical emission intensity ratio of (ISi+ISiH)/IO. The OES intensity ratio is also related with the measured refractive index and chemical composition ratio of the deposited thin film. Therefore, we report the added value of OES data analysis from the plasma related to the thin film characteristics in the PECVD process.

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Denitrifications of Swine Wastewater with Various Temperature and Initial CM Ratio in Anoxic Reactor (무산소조에서 온도 및 초기 C/N비에 따른 축산폐수의 탈질특성)

  • 김민호;김복현
    • Journal of Environmental Health Sciences
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    • v.29 no.1
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    • pp.62-66
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    • 2003
  • The biological denitrification batch tests were conducted to optimize the operating conditions with various temperature and initial SCO $D_{Cr}$ /N $O_3$-N ratio. and the denitrification rates were analyzed various SCO $D_{Cr}$ /N $o_3$-N ratio of influent with swine wastes fermented and temperature. The finishing time of denitrification was within 15 hours, 12 hours, and 6 hours as the temperature of denitrification applied were 15$\pm$1$^{\circ}C$, 25$\pm$1$^{\circ}C$, and 31$\pm$1$^{\circ}C$, respectively. From the batch tests, denitrification rate was operated with over 3 of SCO $D_{Cr}$ /N $O_3$-N ratio. Denitrification rate was increased as the temperature of denitrification, increased such as 2.40-3.90 mg N $O_3$-N/gMLVSSㆍhr, 6.10-7.60 mgN $O_3$-N/gMLVSSㆍhr, and 14.40-15.88 mgN $O_3$-N/gMLVSSㆍhr, respectively. The denitrification rate was increased as the ratio of initial SCO $D_{Cr}$ N $O_3$-N increased. However, it was found that the suitable ratio of SCO $D_{Cr}$ /N $O_3$-N for denitrification should be considered because the ratio of mg SCO $D_{Cr}$ , consumed per mg N $O_3$-N removed varied depend on the influent SCO $D_{Cr}$ /TKN ratios.

Reduction of Nitrous Oxide Emission by EGR Method on Diesel Engine (디젤엔진에서 배기가스 재순환 방법을 이용한 아산화질소의 배출률 저감)

  • Yoo, Dong-Hoon
    • Journal of Power System Engineering
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    • v.19 no.3
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    • pp.16-21
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    • 2015
  • Nitrous oxide($N_2O$) concentration in the atmosphere has been constantly increased by the human activities with industrial growth after the industrial revolution. One of factors to increase $N_2O$ concentration in the atmosphere is the $N_2O$ emission caused by the combustion of marine fuel. Especially, a sulfur component included in marine fuel oils is known as increasing the $N_2O$ formation in diesel combustion. Form this point of view, $N_2O$ emission from a ship is not negligible. On the other hand, Exhaust gas recirculation(EGR) that have thermal, chemical and dilution effect is effective method for reducing the NOx emission. In this study, an author investigated $N_2O$ reduction by using EGR on a direct injection diesel engine. The test engine was a 4-stroke diesel engine with maximum output of 12 kW at 2600rpm, and operating condition of the engine was a fixed load of 75%. The experimental oil was a blend-fuel that were adjusted with sulfur ratio of 3.5%, and EGR ratio of 0%, 10%, 20% and 30%. In conclusion, diesel fuel that contained 3.5% sulfur component increased $SO_2$ emission in exhaust gas, and increment of EGR ratio reduced NO emission. Moreover, $N_2O$ emission was decreased as over 50% at EGR ratio of 10% and reduced 100% at EGR ratio of 30% compared with $N_2O$ emission of 0% EGR ratio.

Synthesis of $Ni_2Y$ magnetic particles by coprecipitation method (공침법에 의한 $Ni_2Y$ 자성 분말의 합성)

  • 김한근;사공건
    • Electrical & Electronic Materials
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    • v.9 no.9
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    • pp.906-910
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    • 1996
  • Ferroxplana N $i_{2}$Y(B $a_{2}$N $i_{2}$F $e_{12}$ $O_{22}$ ) magnetic particles, which is one of the hexagonal ferrite were synthesized by a coprecipitation method. The coprecipitates were prepared by adding aqueous solution of BaC $I_{2}$ - 2 $H_{2}$O, NiC $I_{2}$ - 6 $H_{2}$O and FeC $I_{3}$ - 6 $H_{2}$O(of which the mole ratio is $Ba^{+2}$ : N $i^{+2}$ : F $e^{3+}$= 1 : 1 : 6) to a mixture of NaOH and N $a_{2}$C $O_{3}$. The shape of Ferroxplana N $i_{2}$Y magnetic particles obtained at 1, 100(.deg. C) was hexagonal plate-like, average particle size and aspect ratio were 2(.mu.m) and 7, respectively.y.

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