• 한국안광학회지
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• 제14권1호
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• pp.63-68
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• 2009

목적: Magnetron의 세기를 비대칭으로 한 unbalanced magnetron sputtering 장치를 설계 제작하고, 이 장치를 사용하여 sus304시편 위에 TiN을 코팅할 때 산소영향을 연구하고자 한다. 방법: 코팅막의 두께를 알기 위해 실리콘 웨이퍼 위의 코팅막을 SEM으로 단면을 관찰하였고, TiN 코팅박막표면의 성분을 분석하기 위하여 XPS를 사용하였으며, 표면안쪽의 성분을 관찰하기 위해 depth profile을 하였다. 결과: XPS depth profile 데이터로부터 티타늄과 질소 뿐만 아니라 산소가 일정한 양으로 존재하며, 산소의 양은 약 65 at.%의 큰 양이 존재한다는 것을 알 수 있었다. 두께에 따른 색상변화는 세 개의 피크가 모여서 형성이 된 Ti $ 2p_{3/2}$ 피크의 모양이 두께에 따라 약간 다르다는 것을 알 수 있었다. 결론: 코팅 중에 산소가 섞여 순수한 TiN보다는 $ TiO_2$, TiN, $ TiO_{x}N_{y}$ 세가지 조합에 의해 색이 결정되는 것을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2003년도 제25회 학술발표회 초록집
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• pp.98-98
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• 2003

• 한국진공학회지
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• 제5권2호
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• pp.99-106
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• 1996

Two types of regularization method (singular system and HMP approaches) for generating depth-concentration profiles from angle-resolved XPS data were evaluated. Both approaches showed qualitatively similar results although they employed different numerical algorithms. The application of the regularization method to simulated data demonhstrates its excellent utility for the complex depth profile system . It includes the stable restoration of depth-concentration profiles from the data with considerable random error and the self choice of smoothing parameter that is imperative for the successful application of the regularization method. The self choice of smoothing parameter is based on generalized cross-validation method which lets the data themselves choose the optimal value of the parameter.

• Journal of Korean Vacuum Science & Technology
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• 제6권1호
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• pp.5-7
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• 2002

For quantitative N depth profiling, N profiles were measured in a～3 m Si oxynitride by low energy O$\sub$2+/sputtering and the result was calibrated with MEIS analysis of the N thickness and areal density. The quantitative depth profile of nitrogen showed the pileup of nitrogen atoms at the interface of ultrathin oxynitride films.

• 한국토양비료학회지
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• 제42권2호
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• pp.139-143
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• 2009

인지질 지방산을 분석하여 특정 미생물군의 수직적 분포와 토층간 미생물 군집 패턴을 조사하였다. 경북 농업기술원에 위치하고, 질소, 인산, 가리의 화학비료만 장기 연용한 논과 밭 포장에서 15 cm 깊이까지 토양을 채취하였다. 인지질 지표 지방산을 주요인 분석으로 분석하여 토양 미생물 군집을 분석한 결과 논과 밭 토양의 미생물 군집은 뚜렷하게 구분되었으며, 토층간 차이보다 논과 밭의 차이가 더 컸다. 논보다 밭은 토층이 깊어짐에 따라 미생물 군집이 급격하게 변하였는데, 미생물 군집 측면에서 밭보다 논의 표층이 더 두껍다고 볼 수 있다. cyclopropyl/monoenoic precursor 비율과 전체 포화지방산/전체 불포화 지방산 비율은 토심이 깊어짐에 따라 증가하였는데, 이는 토심이 깊어질수록 탄소원과 통기가 부족하기 때문에 일어나는 현상으로 보인다. 대체로 표토는 그램음성균, 곰팡이 등의 상대적 비율이 높고 토심이 깊어질수록 세균과 방선균의 상대적 비율이 높아졌다.

• 대한방사선기술학회지:방사선기술과학
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• 제41권3호
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• pp.201-207
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• 2018

The purpose of this study is to evaluate the performance of a "stealth chamber" as a novel reference chamber for measuring percentage depth dose (PDD) and profile of 6, 8 and 10 MV photon energies. The PDD curves and dose profiles with fields ranging from $3{\times}3$ to $25{\times}25cm^2$ were acquired from measurements by using the stealth chamber and CC 13 chamber as reference chamber. All measurements were performed with Varian VitalBeam linear accelerator. In order to assess the performance of stealth chamber, PDD curves and profiles measured with stealth chamber were compared with measurement data using CC13 chamber. For PPDs measured with both chambers, the dosimetric parameters such as $d_{max}$ (depth of maximum dose), $D_{50}$ (PDD at 50 mm depth), and $D_{100}$ (PDD at 100 mm depth) were analyzed. Moreover, root mean square error (RMSE) values for profiles at $d_{max}$ and 100 mm depth were evaluated. The measured PDDs and profiles between the stealth chamber and CC13 chamber as reference detector had almost comparable. For PDDs, the evaluated dosimetric parameters were observed small difference (<1%) for all energies and field sizes, except for $d_{max}$ less than 2 mm. In addition, the difference of RMSEs for profiles at $d_{max}$ and 100 mm depth was similar for both chambers. This study confirmed that the use of stealth chamber for measuring commission beam data is a feasible as reference chamber for fields ranging from $3{\times}3$ to $20{\times}20cm^2$. Furthermore, it has an advantage with respect to measurement of the small fields (less than $3{\times}3cm^2$ field) although not performed in this study.

• 한국진공학회지
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• 제12권3호
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• pp.162-167
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• 2003

시료에 주입된 이온의 깊이방향에 따른 농도분포를 알아보기 위하여 시료표면을 sputtering 하면서 튀어나온 주입된 이온을 depth profiling한다. Depth profiling 측정 시에 깊이방향에 영향을 주는 sputtering rate가 변화하는 효과를 SRIM simulation을 이용하여 계산하였다. 시료에 이온이 주입하게 되면 시료의 원자밀도는 약간 증가하게 되는데, 그 결과로 sputtering yield가 변화하게 된다. 이러한 변화가 결과적으로 depth profile 측정시에 깊이방향에 영향을 줄 수 있는 sputtering rate를 변화시키는 원인이 된다. SRIM(Stopping and Range of Ions in Matter) Monte Carlo simulation code를 사용하여 이온주입에 의한 시료의 원자밀도의 변화에 따른 sputtering yield를 구하여 sputtering rate를 계산하고, 그 차이가 depth profiling 측정에서 깊이방향 분포에 영향을 줄 수 있다는 것을 확인하였다.

• 소성∙가공
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• 제28권4호
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• pp.183-189
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• 2019

Cylindrical worm reducers are generally used in various fields and forms throughout the industry, and demand is increasing due to their role as an integral part of the industry. Market trends require high-load, high-precision components, and small-sized reducers with large loads. When using a cylindrical worm reducer, a reducer designed with a reduced center distance while maintaining the same output torque results in gear wear. To overcome this difficulty, an enveloping worm gear reducer is introduced and studied. In this paper, three types of end mill tools are used to evaluate the tooth profile accuracy for each tool shape during machining of the tooth profile for a non-developed surface worm thread. The effect of the endmill shape on the accuracy of the tooth profile was analyzed by performing 3D modeling of the surrounding worm tooth profile based on the Hindley method. In this study, we analyzed tooth profile accuracy, tooth surface roughness, and tooth surface machining time, etc. Through the study, efficient machining conditions for the enveloping worm gears and the influence of parameters on the process were presented.

• 수산해양기술연구
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• 제35권3호
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• pp.237-241
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• 1999

It was investigated that the condition of fishing ground gave what kind of effect school type in relation to the property for the target school after the vertical temperature profile and school type were observed when tuna purse seiner for tuna purse seine was operated in the western pacific Ocean around the equator between December 12, 1993 and January 26, 1994. The results are as follows;1. This study divided fish schools associated with drift objects, a one targeted-operation, and the pelagic migrating fish schools that are another one for the property. The total of 23 operations were complected including 6 that targeted fish schools associated with drift objects and 17 that targeted pelagic migrating fish schools. It was known that the main operation was conducted on pelagic migrating fish school.2. Average and standard deviation of the depth of the surface mixing layer was 86.0m and 13.8m for fish schools associated with drift objects. 61.6m and 13.0m for pelagic migrating fish schools, respectively. The average depth of the surface mixing layer of the pelagic migrating fish schools was lower when compared to the fish schools associated with drift objects however the concentration of standard deviation was higher than those fish schools associated with drifted objects. Accordingly, it was assumed that the effect of vertical temperature profile for pelagic migrating fish school was higher than the fish schools associated with drift objects.

• 분석과학
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• 제10권5호
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• pp.357-361
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• 1997

Griemm 형태의 글로우방전셀을 상업용 사중극자 ICP-MS에 장착시켜 다층박막의 표면 분석을 시도하였다. 지름이 2.0mm인 양극과 적절한 실험 최적 조건을 사용한 결과 ${\mu}m$ 두께의 여러층들을 30여 분 이내에 분석할 수 있었다. Cu-Ni 및 Fe-Ni의 다층막을 GDMS로 분석한 결과 10nm정도의 분해능이 가능하였으며, 이는 바닥이 평평한 crater를 얻을 수 있는 실험조건에서 측정하였기 때문이다.