• 센서학회지
• /
• 제22권5호
• /
• pp.327-332
• /
• 2013

Nickel oxide films using RF sputter was formed on the $SiO_2/Si$ substrate at the room temperature controlled with water circulation system. The feasibility of nickel oxide film as a bolometric material was demonstrated. GIXRD spectrum on NiO(111), NiO(200), and NiO(220) orientation expected as the main peaks were appeared in the grown nickel oxide films. The typical resistivity acquired at the RF power of 100W was about $34.25{\Omega}{\cdot}cm$. And it was reduced to $18.65{\Omega}{\cdot}cm$ according to the increase of the RF power to 400W. The TCR of fabricated micro-bolometer with the resistivity of $34.25{\Omega}{\cdot}cm$ was $-2.01%/^{\circ}C$. The characteristics of fabricated nickel oxide film and micro-bolometer were analyzed with XRD pattern, resistivity, TCR, and SEM images.

• Nuclear Engineering and Technology
• /
• 제53권12호
• /
• pp.4052-4059
• /
• 2021

The microstructure of the fuel pellet plays an essential role in fission gas buildup and release and is critical for the safe and continued operation of nuclear power stations. Structural analysis of uranium dioxide (UO₂)-molybdenum (Mo) composite fuel pellets prepared at a range of sintering temperatures from 1300 to 1800 ℃ was performed. Mo micro and nanoparticles were used in making the composite pellets. A systematic investigation into the influence of processing parameters during Spark Plasma Sintering (SPS) of the pellets on the microstructure, texture, grain size, and grain boundary characters of UO₂-Mo is presented. UO₂-Mo composite show significant differences in the fraction of general boundaries and also special/coincident site lattice (CSL) boundaries. EBSD orientation maps demonstrated that <111> texturing was observed in the pellets fabricated at 1500 ℃. The experimental investigations suggest that UO₂-Mo composite pellets have favorable microstructural features compared to the UO₂ pellet.

• 한국분말재료학회지
• /
• 제28권4호
• /
• pp.325-330
• /
• 2021

In this study, a ZnS film of 8-mm thickness was prepared on graphite using a hot-wall-type CVD technique. The ZnS thick film was then hot isostatically pressed under different pressures (125-205 MPa) in an argon atmosphere. The effects of pressure were systematically studied in terms of crystallographic orientation, grain size, density, and transmittance during the HIP process. X-ray diffraction pattern analysis revealed that the preferred (111) orientation was well developed after a pressure of 80 MPa was applied during the HIP process. A high transmittance of 61.8% in HIP-ZnS was obtained under the optimal conditions (1010℃, 205 MPa, 6 h) as compared with a range of approximately 10% for the CVD-ZnS thick film under a 550-nm wavelength. In addition, the main cause of the improvement in transmittance was determined to be the disappearance of the scattering factor due to grain growth and the increase in density.

• 전기의세계
• /
• 제28권4호
• /
• pp.53-63
• /
• 1979

Interface recombination velocity in $Al_{x}$G $a_{1-x}$ As-GaAs and $Al_{0.85}$, G $a_{0.15}$ As-GaA $s_{1-y}$S $b_{y}$ heterojunction systems is studied as a function of lattice mismatch. The results are applied to the design of highly efficient III-V heterojunction solar cells. A horizontal liquid-phase epitaxial growth system was used to prepare p-p-p and p-p-n $Al_{x}$G $a_{1-x}$ As-GaA $s_{1-y}$S $b_{y}$-A $l_{x}$G $a_{1-x}$ As double heterojunction test samples with specified values of x and y. Samples were grown at each composition, with different GaAs and GaAs Sb layer thicknesses. A method was developed to obtain the lattice mismatch and lattice constants in mixed single crystals grown on (100) and (111)B oriented GaAs substrates. In the AlGaAs system, elastic lattice deformation with effective Poisson ratios .mu.$_{eff}$ (100=0.312 and .mu.$_{eff}$ (111B) =0.190 was observed. The lattice constant $a_{0}$ (A $l_{x}$G $a_{1-x}$ As)=5.6532+0.0084x.angs. was obtained at 300K which is in good Agreement with Vegard's law. In the GaAsSb system, although elastic lattice deformation was observed in (111) B-oriented crystals, misfit dislocations reduced the Poisson ratio to zero in (100)-oriented samples. When $a_{0}$ (GaSb)=6.0959 .angs. was assumed at 300K, both (100) and (111)B oriented GaAsSb layers deviated only slightly from Vegard's law. Both (100) and (111)B zero-mismatch $Al_{0.85}$ G $a_{0.15}$As-GaA $s_{1-y}$S $b_{y}$ layers were grown from melts with a weight ratio of $W_{sb}$ / $W_{Ga}$ =0.13 and a growth temperature of 840 to 820 .deg.C. The corresponding Sb compositions were y=0.015 and 0.024 on (100) and (111)B orientations, respectively. This occurs because of a fortuitous in the Sb distribution coefficient with orientation. Interface recombination velocity was estimated from the dependence of the effective minority carrier lifetime on double-heterojunction spacing, using either optical phase-shift or electroluminescence timedecay techniques. The recombination velocity at a (100) interface was reduced from (2 to 3)*10$^{4}$ for y=0 to (6 to 7)*10$^{3}$ cm/sec for lattice-matched $Al_{0.85}$G $a_{0.15}$As-GaA $s_{0.985}$S $b_{0.015}$ Although this reduction is slightly less than that expected from the exponential relationship between interface recombination velocity and lattice mismatch as found in the AlGaAs-GaAs system, solar cells constructed from such a combination of materials should have an excellent spectral response to photons with energies over the full range from 1.4 to 2.6 eV. Similar measurements on a (111) B oriented lattice-matched heterojunction produced some-what larger interface recombination velocities.ities.ities.s.

• 한국재료학회지
• /
• 제5권6호
• /
• pp.673-681
• /
• 1995

아황산금나트륨염을 이용하여 형성된 약 20$\mu\textrm{m}$ 금도금층의 표면형상 및 우선적 결정 성장 방향에 대하여 전류밀도, 온도, 농도, pH, 교만속도, 금이온농도가 미치는 영향에 대하여 연구하였다. 표면형상은 cathode 근처의 금이온농도가 증가하는 조건[전류밀도(13.0mA/$\textrm{cm}^2$2$\longrightarrow$4.6mA/$\textrm{cm}^2$)], 온도 (3$0^{\circ}C$$\longrightarrow$6$0^{\circ}C$), pH(12.0$\longrightarrow$9.0), 교반효과(Orpm$\longrightarrow$3200rpm), 금이온농도(10g /1$\longrightarrow$l4g/1)으로 갈수록 porous한 조직에서 미세한 조직으로의 변화가 관찰되었다. X선분석에 의하면 금도금층의 결정성장의 주방향은 표면형상과 밀접한 관계를 나타내었으며 표면형상이 미세화되는 조건인 전류밀도(13.0$\longrightarrow$14.6mA/$\textrm{cm}^2$), pH(12.0$\longrightarrow$9.0)는 감소 할수록, 온도(3$0^{\circ}C$$\longrightarrow$6$0^{\circ}C$), 교반속도(0rPm$\longrightarrow$3200rpm), 금이온농도(10g/1$\longrightarrow$g/1)]는 증가 할수록 결정성장의 주회절피크는 (111)에서 (220)으로 그 성장면이 변하고 있음이 조사되었다.

• 대한금속재료학회지
• /
• 제47권3호
• /
• pp.147-154
• /
• 2009

The effect of carbon addition on the microstructures and mechanical properties of $Ni_3Al$ and TiAl intermetallic alloys have been characterized. It is shown that carbon is not only an efficient solid solution strengthener in $Ni_3Al$ and TiAl, it is also an efficient precipitation strengthener by fine dispersion of carbide. Transmission electron microscope investigation has been performed on the particle-dislocation interactions in $Ni_3Al$ and TiAl intermetallics containing various types of fine precipitates. In an $L1_2$-ordered $Ni_3Al$ alloy with 4 mol.% of chromium and 0.2~3.0 mol.% of carbon, fine octahedral precipitates of $M_{23}C_6$ type carbide, which has the cube-cube orientation relationship with the matrix, appear during aging. Typical Orowan loops are formed in $Ni_3Al$ containing fine dispersions of $M_{23}C_6$ particles. In the L10-ordered TiAl containing 0.1~2.0 mol.% carbon, TEM observations revealed that needle-like precipitates, which lie only in one direction parallel to the [001] axis of the $L1_0$ matrix, appear in the matrix and preferentially at dislocations. Selected area electron diffraction (SAED) patterns analyses have shown that the needle-shaped precipitate is $Ti_3AlC$ of perovskite type. The orientation relationship between the $Ti_3AlC$ and the $L1_0$ matrix is found to be $(001)_{Ti3AlC}//(001)_{L10\;matrix}$ and $[010]_{Ti3AlC}//[010]_{L10\;matrix}$. By aging at higher temperatures or for longer period at 1073 K, plate-like precipitates of $Ti_2AlC$ with a hexagonal structure are formed on the {111} planes of the $L1_0$ matrix. The orientation relationship between the $(0001)_{Ti2AlC}//(111)_{L10\;matrix}$ is and $[1120]_{Ti2AlC}//[101]_{L10\;matrix}$. High temperature strength of TiAl increases appreciably by the precipitation of fine carbide. Dislocations bypass the carbide needles at further higher temperatures.

• 한국결정성장학회지
• /
• 제11권2호
• /
• pp.56-59
• /
• 2001

RF plasma CVD법에 의해 증착된 비정질 실리콘 박막은 Si(100)웨이퍼와 유리에 각각 증착되었다. 본 연구에서는 RF power가 미세결정 실리콘 박막의 광학적 밴드갭($E_g$),투과도 그리고 결정성에 미치는 영향을 조사하였다 라만 분광분석 결과 미세결정 실리콘은 480과 520$cm^{-1}$에서 두개의 피크 즉, 비정질과 미세결정의 혼상으로 구성되어 있음을 확인할 수 있었고 XRD분석에서도 (111)방향의 피크가 RF power 300Ｗ에서 관찰되었다. 또한, 박막의 투과도는 자외/가시부 분광 광도계를 이용하였으며, 적외 흡광 스펙트럼을 사용하여 실리콘과 결합하고 있는 수소의 형태를 고찰하였다.

• 한국진공학회지
• /
• 제7권3호
• /
• pp.255-260
• /
• 1998

Ionized magnetron sputtering은 high density plasma를 사용하여 스퍼터된 입자의 이온화율을 기판에서의 플럭스 기준으로 80%이상까지 증대시킬 수 있는 방법으로 반도체 소자의 아주 작은 홀이나 via contact등을 채울 수 있는 아주 유용한 수단이나 가스의 압력 이 30mTorr 이상으로 상당히 높아야만 이온화율이 높게 유지되어 스퍼터 증착 속도가 느려 지고 중성입자의 각도 분포가 넓어지는 단점이 있다. 그 원인이 스퍼터된 입자들에 의한 전 자 온도의 급격한 감소와 타겟 주변에서의 가스 희귀화 현상에 있다고 보고 이를 보완하고 자 스퍼터 전력을 펄스화 하는 방법을 고안하여 실험하였다. 그 결과 펄스의 on/off time이 10ms/10ms, 100ms/100ms에서 가장 높은 이온화율을 가시광 분광 결과에서 보였으며 실제 로 Ag의 XRD결과 (111)에서 (200)으로 우선 방위의 현격한 변화가 관찰되었다. 이를 고전 력 스퍼터링에 의한 중성 가스 가열과 냉각의 측면에서 해석하였다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 하계학술대회 논문집
• /
• pp.395-397
• /
• 2002

Dielectric thin films of Pb$\_$0.72/La$\_$0.28/Ti$\_$0.93/O$_3$(PLT(28)) have been deposited on Pt(111)/Ti/SiO$_2$/Si(100) substrates in-situ by pulsed laser deposition using different annealing and deposition processes. We have investigated the effect of hydrogen annealing on the ferroelectric properties of PLT thin films and found that the annealing process causes the diffusion of hydrogen into the ferroelectric film resulting in the destruction of polarization. Two-step process to grow PLT films was adopted and verified to be useful to enlarge the grain size of the film. Structural properties including dielectric constant, and ferroelectric characteristics of PLT thin films were shown to be strongly influenced by grain size. The film deposited by using two-step process including pre-annealing treatment has a strong (111) orientation. However, the films deposited by using single-step process with hydrogen annealing process shows the smallest grain size.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2001년도 하계학술대회 논문집 C
• /
• pp.1340-1342
• /
• 2001

ZnO thin films are Prepared on Si(111) substrate by RF magnetron sputtering. Two-step deposition method is proposed to obtain ZnO thin films with high c-axis (002) TC value and electrical resistivity. This method consists of the following two-step deposition procedures: 1st-deposition for 10$\sim$30 min without oxygen at 100W and 2nd-deposition with oxygen added in the range of $O_2/(Ar+O_2)$ = 10 $\sim$ 50%. SAW filters with IDT/ZnO/Si(111) configuration are also fabricated. From the frequency response characteristics, the insertion loss and the side-lobe rejection are estimated.