Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2001.07c
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- Pages.1340-1342
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- 2001
A study on the improvement of c-axis preferred orientation and electrical resistivity of ZnO thin films by two-step deposition method
2단계 증착 방법에 의한 ZnO 박막의 c-축 배향성 및 비저항 향상에 관한 연구
- Lee, Hye-Jung (Dept. of Electrical Eng., Hanyang University) ;
- Lee, Myung-Ho (Dept. of Electrical Eng., Hanyang University) ;
- Lee, Jin-Bock (Dept. of Electrical Eng., Hanyang University) ;
- Seo, Soo-Hyung (Center for Electronic materials and Components, Hanyang University) ;
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Park, Jin-Seok
(Dept. of Electrical Eng., Hanyang University)
- 이혜정 (한양대학교 전자전기제어계측 공학과) ;
- 이명호 (한양대학교 전자전기제어계측 공학과) ;
- 이진복 (한양대학교 전자전기제어계측 공학과) ;
- 서수형 (전자재료 및 부품 연구센터) ;
-
박진석
(한양대학교 전자전기제어계측 공학과)
- Published : 2001.07.18
Abstract
ZnO thin films are Prepared on Si(111) substrate by RF magnetron sputtering. Two-step deposition method is proposed to obtain ZnO thin films with high c-axis (002) TC value and electrical resistivity. This method consists of the following two-step deposition procedures: 1st-deposition for 10
Keywords