• Title/Summary/Keyword: $ZrO_2-8%Y_2O_3$

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Characteristics of Surface Micromachined Pyroelectric Infrared Ray Focal Plane Array

  • Ryu, Sang-Ouk;Cho, Seong-Mok;Choi, Kyu-Jeong;Yoon, Sung-Min;Lee, Nam-Yeal;Yu, Byoung-Gon
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.5 no.1
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    • pp.45-51
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    • 2005
  • We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single $SiO_{2}$ layer works as an IR absorbing plate and $Pb(Zr_{0.3}Ti_{0.7})O_{2}$ thin film served as a thermally sensitive material. There are some advantages of applying $SiO_{2}$ layer as an IR absorbing layer. First of all, the $SiO_{2}$ has good IR absorbance within $8{\sim}12{\mu}m$ spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. $SiO_{2}$ layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness Ito the structure.

A Geochemical Study on Pyrophyllite Deposits and Andesitic Wall-Rocks in the Milyang Area, Kyeongnam Province (경남 밀양지역 납석광상과 안산암질 모암의 지구화학적 연구)

  • Oh, Dae-Gyun;Chon, Hyo-Taek;Min, Kyoung-Won
    • Economic and Environmental Geology
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    • v.25 no.1
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    • pp.27-39
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    • 1992
  • Several pyrophyllite deposits occur around the Milyang area where Cretaceous andesitic rocks and spatially related granitic rocks are widely distributed. Pyrophyllite ores consist mainly of pyrophyllite, and quartz with small amount of sericite, pyrite, dumortierite, and diaspore. The andesitic rocks and spatially related granitic rocks in this area suggest that they could be formed from the same series of a calc-alkaline magma series. The contents of $SiO_2$, $Al_2O_3$, LOI(loss on ignition) are enriched, and $K_2O$, $Na_2O$, CaO, MgO, $Fe_2O_3$ are depleted in altered andesitic rocks and ores. Enrichment of As, Cr, Sr, V, Sb and depletion of Ba, Cs, Ni, Rb, U, Y, Co, Sc, Zn are characteristic during mineralization. The pyrophyllite ores can be discriminated from the altered-and unaltered wall-rocks by an increasing of $(La/Lu)_{cn}$ from 4.18~22.13 to 8.98~55.05. In R-mode cluster analysis, Yb-Lu-Y, La-Ce-Hf-Th-U-Zr, $TiO_2-V-Al_2O_3$, Sm-Eu, $CaO-Na_2O-MnO$, Cu-Zn-Ag, $K_2O-Rb$ are closely correlated. In the discriminant analysis of multi-element data, $P_2O_5$, As, Cr and $Fe_2O_3$, Sr are helpful to identify the ores from the unaltered-and altered wall-rocks. In the factor analysis, the factors of alteration of andesitic rocks and ore mineralization were extracted. In the change of ions per unit volume, $SiO_2$, $Al^{3+}$ and LOI are enriched and $Na^+$, $K^+$, $Ca^{2+}$, $Mg^{2+}$, $Mn^{2+}$ and $Fe^{3+}$ are depleted during the alteration processes. The Milyang and the Sungjin pyrophyllite deposits could be mineralized by hydrothermal alteration in a geochemical condition of low activity ratio of alkaline ions to hydrogen ion with reference to spatially related granitic rocks.

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The measurement of Ozone Concentration and Simulation of Electric Field Distribution at Dielectric Tube of one Layer with Globular Dielectric in Water (구형 유전체비드를 가지는 단층절연방전관의 수(水)오존농도측정 및 전계분포 시뮬레이션)

  • Lee, Dong-Hoon;Park, Jae-Youn;Park, Hong-Jae;Koh, Hee-Seog;Lee, Hyun-Su
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.44-47
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    • 2003
  • In this paper, the electric field distribution in dielectric tube with one layer and spherical dielectric($ZrO_2$) in water was simulated. The reactor was made up of the spherical dielectric that is diameter : 3.0[mm], $ZrO_2(\varepsilon_r:10)$ and one glass plate of thickness(2[mm]), $\varepsilon_r$(10) as electrode. The discharge gap was 8[mm]. To get more strong electric field, the dielectric constant should be higher comparatively. Using the spherical dielectric for water discharge in dielectric tube, the location of equipotential line was shifting from the interior to the exterior. At real water discharge experimental, ozone was measured higher dissolved ozone in water at condition of water rate(l[l/min]) and injector than condition of non-injector or 2~3[l/min].

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저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.11-11
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    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

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Novel Inorganic/Organic Hybrid Sol-Gel Films for the Corrosion Protection of Metal (AlOOH 나노 졸이 첨가된 유/무기 하이브리드 졸-겔 코팅막의 내부식성 특성)

  • 김재홍;석상일
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.130-130
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    • 2003
  • 현재, 메탈의 내부식성 코팅막 제조에 사용되고 있는 크로메이트 기반 코팅제는 유독성 물질에 대한 환경 규제에 따라 조만간 사용이 금지 될 예정이다. 본 연구에서는 이러한 유독성 금속 내부식성 코팅제를 대체할 새로운 환경 친화적인 코팅 재료로서 A1OOH 나노졸이 분산된 ZrOCl$_2$ㆍ8$H_2O$-GPS(3-Glycidoxypropyltrimethoxysilane)하이브리드 졸을 제조하고 이의 내 부식성 특성에 대하여 조사하였다. AlOOH 졸이 첨가된 유/무기 하이브리드 졸은 염화 알루미늄을 염기로 침전 시킨 수산화 알루미늄 침전물에ZrOCl$_2$ㆍ8$H_2O$를 10 ~ 20 wt% 첨가하고 열처리한 후 여기에 GPS를 AlOOH에 대하여 4 ~ 6몰 배 첨가하여 제조하였다. 제조된 하이브리드 형 졸은 가시관 투광성이 우수하며 시간에 따른 범도 변화가 거의 없었다. 이 코팅 졸을 아연 도금 강판에 딥 코팅법으로 코팅한 후, 상온~20$0^{\circ}C$에서 열처리하여 염수 시험법으로 하이브리드 졸의 조성 및 열처리 조건에 따른 코팅막의 내부식성 특성을 조사하였다. 또한, 코팅막의 두께를 전자 현미경으로 관찰하였고, 코팅막 경도는 연필 경도계로 조사하였다.

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Occurrence and Chemical Composition of Ti-bearing Minerals from Samgwang Au-ag Deposit, Republic of Korea (삼광 금-은 광상에서 산출되는 함 티타늄 광물들의 산상 및 화학조성)

  • Yoo, Bong Chul
    • Korean Journal of Mineralogy and Petrology
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    • v.33 no.3
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    • pp.195-214
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    • 2020
  • The Samgwang Au-Ag deposit has been one of the largest deposits in Korea. The deposit consists of eight lens-shaped quartz veins which filled fractures along fault zones in Precambrian metasedimentary rock, which feature suggest that it is an orogenic-type deposit. The Ti-bearing minerals occur in wallrock (titanite, ilmenite and rutile) and laminated quartz vein (rutile). They occur minerals including biotite, muscovite, chlorite, white mica, monazite, zircon, apatite in wallrock and white mica, chlorite, arsenopyrite in laminated quartz vein. Chemical composition of titanite has maximum vaules of 3.94 wt.% (Al2O3), 0.49 wt.% (FeO), 0.52 wt.% (Nb2O5), 0.46 wt.% (Y2O3) and 0.43 wt.% (V2O5). Titanite with 0.06~0.14 (Fe/Al ratio) and 0.06~0.15 (XAl (=Al/Al+Fe3++Ti)) corresponds with metamorphic origin and low-Al variety. Chemical composition of ilmenite has maximum values of 0.07 wt.% (ZrO2), 0.12 wt.% (HfO2), 0.26 wt.% (Nb2O5), 0.04 wt.% (Sb2O5), 0.13 wt.% (Ta2O5), 2.62 wt.% (As2O5), 0.29 wt.% (V2O5), 0.12 wt.% (Al2O3) and 1.59 wt.% (ZnO). Chemical composition of rutile in wallrock and laminated quartz vein has maximum values of 0.35 wt.%, 0.65 wt.% (HfO2), 2.52 wt.%, 0.19 wt.% (WO3), 1.28 wt.%, 1.71 wt.% (Nb2O3), 0.03 wt.%, 0.07 wt.% (Sb2O3), 0.28 wt.%, 0.21 wt.% (As2O5), 0.68 wt.%, 0.70 wt.% (V2O3), 0.48 wt.%, 0.59 wt.% (Cr2O3), 0.70 wt.%, 1.90 wt.% (Al2O3) and 4.76 wt.%, 3.17 wt.% (FeO), respectively. Rutile in laminated quartz vein is higher contents (HfO2, Nb2O3, As2O5, Cr2O3, Al2O3 and FeO) and lower content (WO3) than rutile in wallrock. The substitutions of rutile in wallrock and laminated quatz vein are as followed : rutile in wallrock [(Fe3+, Al3+, Cr3+) + Hf4+ + (W5+, As5+, Nb5+) ⟵⟶ 2Ti4+ + V4+, 2Fe2+ + (Al3+, Cr3+) + Hf4+ + (W5+, As5+, Nb5+) ⟵⟶ 2Ti4+ + 2V4+], rutile in laminated quartz vein [(Fe3+, Al3+) + As5+ ⟵⟶ Ti4+ + V4+, (Fe3+, Al3+) + As5+ ⟵⟶ Ti4+ + Hf4+, 4(Fe3+, Al3+) ⟵⟶ Ti4+ + (W5+, Nb5+) + Cr3+], respectively. Based on these data, titanite, ilmenite and rutile in wallrock were formed by resolution and reconcentration of cations (W5+, Nb5+, As5+, Hf4+, V4+, Cr3+, Al3+, Fe3+, Fe2+) in minerals of wallrock during regional metamorphism. And then rutile in laminated quartz vein was formed by reconcentration of cations (Nb5+, As5+, Hf4+, Cr3+, Al3+, Fe3+, Fe2+) in alteration minerals (white mica, chlorite) and Ti-bearing minerals reaction between hydrothermal fluid originated during ductile shear and Ti-bearing minerals (titanite, ilmenite and rutile) in wallrock.

Geochemical and Petrographical Studies on the Fergusonite Associated with the Nb-Y Mineralization Related to the Alkaline Granite, Kyemyeongsan Formation, Korea (계명산층내 알칼리 화강암 기원의 Nb-Y 광화작용에 수반되는 퍼구소나이트의 지구화학 및 산출특성 연구)

  • Park, Maeng-Eon;Kim, Gun-Soo;Choi, In-Sik
    • Economic and Environmental Geology
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    • v.30 no.5
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    • pp.395-406
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    • 1997
  • Some RE (Zr, Nb, REE) ore deposits are located in the middle part of the Korean peninsula. Geotectonically, the RE ore deposits situated on the Kyemyeongsan Formation of northern margin of the Okcheon geosynclinal belt and in the transitional zone between Kyeonggi massif and Okcheon belt. The rare metal deposits distributed in Kyemyeongsan Formation which consists of schist and alkaline granite. The alkali granite has suffered extensive post-magmatic metasomatism and hydrothermal processes. The ore contains mainly Ce-La, Ta-Nb, Y, Y-Nb, Ti-Nb-(U), Nd-Th group minerals. Fergusonite, one of Nb-Y rich REE minerals belonging to the A-B oxides, is most common mineral in the rare metal deposits. The fergusonite bearing rocks may be devided into four types by occurrence features and mineral association, that is, zircon type, allanite vein, feldspar type, and fluorite type. Fergusonites show wide variations in optical properties, due to part of differences in their chemical composition (depending on the types), but also the degree of crystalinity of the individual specimens. Fergusonite metamicts enclosed in biotite are generally surrounded by well developed pleochroic haloes. Usually, fergusonite is accompanied with zircon and other REE-bearing minerals. Petrographical and chemical data are presented for fergusonites which collected different types. $Nb_2O_3$ and $Y_2O_3$ contents range from 48.51 to 53.01 wt.% and 29.18 to 42.02 wt.% respectively. Also, $ThO_2$, (1.83~6.93), $UO_2$, (0.17~2.84), ${\sum}RE_2O_3$ (except to Y) (1.11~8.73), and $TiO_2$, (0.19~1.19 wt.%) contents show variational compositions according to fergusonite types. The ${\sum}RE_2O_3$ of fergusonites are positive relation with $Y_2O_3$ and negative relaton with $ThO_2$ and $({\sum}{RE_2O_3}-{Y_2O_3})$. The $Nb_2O_3$ is sightly negative relation with $Ta_2O_3$. Back-scattered electron microscope images (BEI) of fergusonite show the mineral composition and textural feature is very complicated. The variation of Nb, Th and REE content of fergusonite and the modes of occurrence of mineral, suggests that REE may have been mobilized during the circulation of hydrothermal fluids related to contact metamorphism (metasomatism). The chemical variation of the fergusonites with occurrences and mineral association can be related to metasomatism of alkaline fluid was probably the dominant ore-forming process in Chungju district.

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Electrical Properties and Temperature Stability of resonant Frequency with Zr/Ti ratio in PSN-PMN-PZT Ceramics (PSN-PMN-PZT 세라믹스의 Zr/Ti 비에 따른 전기적 특성과 공진주파수의 온도안정성)

  • 류주현;윤광희;민석규;이명수;서성재
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.8
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    • pp.675-680
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    • 2000
  • In this study the temperature coefficient of resonant frequency(TC $F_{r}$) dielectric and piezoelectric properties of Pb[(S $b_{1}$2//N $b_{1}$2/)$_{0.065}$)-(Z $r_{x}$, $Ti_{1-x}$ )$_{0.90}$] $O_3$ceramics were investigated with Zr/Ti ratio. The compositions near the morphotropic phase boundary (MPB) appeared when Zr/Ti ratio was 49.5/50.5 The dielectric constant and electromechanical coupling factor( $k_{p}$) also showed the highest values of 1,257, 0.653 respectively when the Zr/Ti ratio was 49.5/50.5 Moreover the mechanical quality factor( $Q_{m}$) showed th lowest value of 713 when the Zr/Ti ratio. The temperature coefficient of resonant frequency(TC $F_{r}$) abruptly change at the morphotropic phase boundary(MPB) which existed between the rhombohedral phase with highly negative TC $F_{r}$ of -106ppm/$^{\circ}C$ and the tetragonal phase with highly positive TC $F_{r}$ of +64pp $m^{\circ}C$ as Zr/Ti ratio varied from 50/50 to 49.5/50.5.50.5..50.5.

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Plasma spray coating of zirconia ceramic (용사법에 의한 질코니아 세라믹코팅에 대한 연구)

  • 이형근;김대훈;황선효;전계남;서동수
    • Journal of Welding and Joining
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    • v.7 no.2
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    • pp.25-34
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    • 1989
  • The purpose of this work is to coat ZrO$_{2}$ - 8Y$_{2}$O$_{3}$ ceramic on the Al cast alloy(AC-8A) by using the plasma spray method. Two types of coatings which were composed of two and three layer coating were examined. Each coating powder was analyzed for shape and size distribution and X-ray diffraction pattern. For the coated layers, microstructural analysis and performance estimation which was composed of static thermal test, thermal cyclic test and thermal shock test were conducted.

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Petrochemical Study on the Cretaceous Volcanic Rocks in Kageo island, Korea (가거도(소흑산도)의 백악기 화산암류에 대한 암석화학적 연구)

  • 김진섭;백맹언;성종규
    • The Journal of the Petrological Society of Korea
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    • v.6 no.1
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    • pp.19-33
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    • 1997
  • This study reports the results about the petrography and geochemical characteristics of 10 representative volacanic rocks. The Cretaceous volcanic rocks distributed in the vicinity of the Kageo island composed of andesitic rocks, dacitic welded tuff, and rhyolitic rocks in ascending order. Sedimentary rock is the basement in the study area covered with volcanic rocks. Andesitic rocks composed of pyroclastic volcanic breccia, lithic lapilli tuff and cryptocrystallin lava-flow. Most dacitic rocks are lapilli ash-flow welded tuff. Rhyolitic rocks consists of rhyolite tuff and rhyolite lava flow. Rhyolite tuff are lithic crystal ash-flow tuff and crystal vitric ash-flow tuff with somewhat accidental fragments of andesitic rocks, but dacitic rocks. The variation of major and trace element of the volcanic rocks show that contents of $Al_2O_3$, FeO, CaO, MgO, $TiO_2$ decrease with increasing of $SiO_2$. On the basis of Variation diagrams such as $Al_2O_3$ vs. CaO, Th/Yb vs. Ta/Yb, and $Ce_N/YB_N$ vs. $Ce_N$, these rocks represent mainly differentiation trend of calc-alkaline rock series. On the discriminant diagrams such as Ba/La and La/Th ratio, Rb vs. Y + Nb, the volcanic rocks in study area belongs to high-K Orogenic suites, with abundances of trace element and ternary diagram of K, Na, Ca. According to the tectonic discriminant diagram by Wood, these rocks falls into the diestructructive continental margin. K-Ar ages of whole rocks are from andesite to rhyolite $97.0{\pm}6.8~94.5{\pm}6.6,\68.9{\pm}4.8,\61.5{\pm}4.9~60.7{\pm}4.2$ Ma, repectively. Volcanic rocks in study area show well correlation to the Yucheon Group in terms of rock age dating and geochemcial data, and derived from andesitic calc-alkaline magma that undergone low pressure fractional crystallization dominated plagioclase at <30km.

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