• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.312.2-312.2
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• 2016

본 연구에서는 $HfO_2$와 $ZrO_2$의 구조적 차이를 통한 Dielectric layer의 특성 변화에 대한 분석을 진행하였다. $HfO_2$와 $ZrO_2$ layer는 용액 공정을 통해 만들고, 용액의 농도는 0.2 M로 제작하여 Spin Coating으로 소자를 제작하였다. 각 소자들의 구조적인 차이를 위해 $HfO_2$/$HfO_2$, $ZrO_2$/$HfO_2$, $HfO_2$/$ZrO_2$, $ZrO_2$/$ZrO_2$ 층 순서로 제작되었다. 각 소자들의 Capacitance 값은 245.72, 259.81, 294.23, $312.12nF/cm^2$으로 측정 되었고, Leakage current 값은 1.01, 1.79, 0.09, $0.0910-1A/cm^2$으로 다소 높은 값으로 확인되었다. 또한 dielectric constant, k 값이 16.6, 17.6, 19.9, 21.2로 각각의 측정값들 모두 substrate쪽의 dielectric layer에 따라 비슷한 특성을 갖게 되는 것을 확인했다. 이를 통해 Electrode 쪽의 layer보다 Substrate 쪽의 layer의 영향이 더 큰 것을 알 수 있다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.111-111
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• 2016

Two step PEO ceramic coatings were formed on AZ91 magnesium alloy in $ZrO_2$ nanoparticles and $K_2ZrF_6$ based colloidal electrolyte solution for various voltages. Surface and layers tructure of the coatings was analyzed using SEM (ScanningElectronMicroscope). Structure analysis revealed that surface of the coating was transferred from individual pancake or craters-based structure to cluster-based structure with increasing the voltage of the secondary step process. Further, it was confirmed that the cluster zone was richin Zr-based complexes and formed due to high intensives parks. Increase in the Zr contents as discovered from the EDS analysis confirmed the rise in amorphous form of the Zr-based species, which justified the results of XRD where no increase in the intensity of Zr-based species was observed with increase in voltage. Potentiodynamic polarizariotion and impedance spectroscopy techniques were used to evaluate the corrosion performance of the coatings. The highest corrosion resistance was found for coatings prepared at 240V. The same specimen was found having highest and uniform vickers hardness ~1070.5 HV. The superior mechanical and electrochemical properties of the said coating can be attributed to the defect-less microstructure and the optimal role of $ZrO_2$ nanoparticles in the secondary PEO process at 240V.

• 한국분말재료학회지
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• 제19권6호
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• pp.416-423
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• 2012

This paper introduces an effect of a preparing $ZrO_2$-Ag composite on its mechanical properties and microstructure. In present study, $ZrO_2$-Ag was prepared by reduction-deposition route and wetting dispersive milling method, respectively. Two type of Ag powders (nano Ag and micron Ag size, respectively) were dispersed into $ZrO_2$ powder during wetting dispersive milling in D.I. water. Each sample was sintered at $1450^{\circ}C$ for 2hr in atmosphere, and then several mechanical tests and analysis of microstructure were carried out by bending test, hardness, fracture toughness and fracture surface microstructure. As for microstructure, the Ag coated $ZrO_2$ showed homogeneously dispersed Ag in $ZrO_2$ in where pore defect did not appear. However, $ZrO_2$-nano Ag and $ZrO_2$-micro Ag composite appeared Ag aggregation and its pore defect, which carried out low mechanical property and wide error function value.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 춘계학술대회 논문집
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• pp.14-16
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• 1995

Pb($Zr_{0.52}Ti_{0.48}$)$O_3$ ceramic thin films were fabricated from an alkoxide-based solution by Sol-Gel method. Pb($Zr_{0.52}Ti_{0.48}$)$O_3$ co-ramic thin films were formed by spin coating method on Pt/$SiO_2$/Si substrate at 4000[rpm] for 30 [sec]. Coated specimens were dried on the hot-plate at 400[$^{\circ}C$] for 10[min]. The coating process was repeated 6 times and then sintered at temperature between 500 ~ 800[$^{\circ}C$] for 1 hour. The ferroelectric perovskite phases precipitated under the sintering of 700[$^{\circ}C$] for 1 hour. Pb($Zr_{0.52}Ti_{0.48}$)$O_3$ thin film sintered at 700[$^{\circ}C$] for 1hour showed good dielectric constant (2133) and dielectric loss (2.2[%]) Properties. The switching voltage, switching time and leakage currents density were 3.0[V], 1.7[${\mu}$sec] , 160[pA/$\textrm{cm}^2$] repectively.

• 한국정밀공학회지
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• 제26권9호
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• pp.121-126
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• 2009

Stainless steel 316L (STS 316L) is widely used as a material of biopsy needle. However it has a side effect that tissue can be damaged by electrochemical operation between tissue and STS 316L. Many studies have been made on the ceramic coating of biopsy needle to reduce the side effect. In this study, STS 316L was coated with three bioceramics, $Al_2O_3$, $SiO_2$ and $ZrO_2$ using a RF magnetron sputtering method. The effects of ceramic coating on the electrical conductivity and coating strength of ceramic-coated STS 316L were investigated. The results showed that the electrical conductivity of ceramic-coated STS 316L was much lower than that of uncoated STS 316L. The coating strength of $ZrO_2$-coated STS 316L was 30% and 70% higher, respectively than those of $Al_2O_3$-coated STS 316L and $SiO_2_3$-coated STS 316L.

• 한국세라믹학회지
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• 제32권5호
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• pp.617-625
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• 1995

In order to reduce reflectance of soda-lime glass having average reflectance of 7.35% and refractive index of 1.53, single (SiO2), double (SiO2/20SiO2-80ZrO2), and triple (SiO2/ZrO2/75SiO2-25ZrO2) layers were designed and fabricated on the glass substrate by Sol-Gel method. Stble sols of SiO2-ZrO2 binary system for antireflective (AR) coatings were synthesized with tetraethyl orthosilicate (TEOS) and zirconium n-butoxide as precursors and ethylacetoacetate (EAcAc) as a chelating agent in an atmosphere environment. Films were deposited on soda-lime glass at the withdrawal rates of 3~11 cm/min using the prepared polymeric sols by dip-coating and they were heat-treated at 45$0^{\circ}C$ for 10 min to obtain homogeneous, amorphous and crack-free films. In case of SiO2-ZrO2 binary system, refractive index of film increased with an increase of ZrO2 mol%. Designed optical constant of films could be obtained through varying the withdrawal rate. In the visible region (380~780nm), reflectance was measured with UV/VIS/NIR Spectrophotometer. Average reflectances of the prepared single-layer [SiO2 (n=1.46, t=103nm)], double-layer [SiO2 (n=1.46, t=1-4nm)/20SiO2-80ZrO2 (n=1.81, t=82nm)], and triple-layer [SiO2 (n=1.46, t=104nm)/ZrO2 (n=1.90, t=80nm)/75SiO2-25ZrO2 (n=1.61, t=94 nm)] were 4.74%, 0.75% and 0.38%, respectively.

• 한국세라믹학회지
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• 제43권8호
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• pp.463-468
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• 2006

Hydrothermal deposition of hydroxyapatite coatings on two types of $ZrO_2$ substrates (3 mol% $Y_2O_3$-doped and 13 mol% $CeO_2$-doped tetragonal $ZrO_2s$) was studied using aqueous solutions of $Ca(NO_3)_2\;4H_2O$ and $(NH_4)_2HPO_4$ containing EDTA (ethylene diamine tetra acetic acid) disodium salt as a chelating agent for $Ca^{2+}$ ions. For the precipitation of the coatings, the $EDTA-Ca^{2+}$ chelates were decomposed by oxidation with $H_2O_2$ at $90^{\circ}C$. The deposition behavior, morphology, and orientation of the coatings were investigated while varying the solution pH using scanning electron microscopy and X-ray diffractometry. For the two sub-strates, sparse deposition of the coating was obtained at pH 5.5, whereas a uniform deposition was obtained at pH 7.1, 9.8, and 11.4 with a denser microstructure for the higher pH. The coating consisted of thin needle-like or plate-like crystals ($1-2{\mu}m$ length or diameter) at pH 7.1, but fine rod-like crystals ($1-2{\mu}m$ length, $0.1{\mu}m$ diameter) at pH 9.8 and 11.4. The coatings were $1-3{\mu}m$ thick and showed a preferred orientation of the hydroxyapatite crystals with their c axis (i.e., the elongated direction) perpendicular to the substrate surface especially for pH 9.8 and 11.4.

• Bulletin of the Korean Chemical Society
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• 제28권9호
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• pp.1463-1466
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• 2007

Single phases of multi-component oxides films, ZrTiO4 and Ta2Zr6O17, could be synthesized by using the combinatorial approach through surface sol-gel route, coating the appropriate mole ratio of 100 mM zirconium butoxide, tantalum butoxide and titanium butoxide precursors on Pt/Ti/SiO2/Si (100) substrate, following pyrolysis at 450 oC, and annealing them at 770 oC. Both the films and bulks of ZrTiO4 and Ta2Zr6O17 showed very stable dielectric properties in temperature range, ?140 to 60 oC, and frequency range, 100 Hz to 1 MHz, promising their applications in wide range of temperatures and frequencies. The dielectric constants of the films were lower and a little more dependent on frequency than those of the bulks. The reduction of dielectric property in the film was mainly due to the interfacial effects that worked as series and parallel-connected capacitances toward the substantial film capacitance.

• 한국표면공학회지
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• 제35권2호
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• pp.101-106
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• 2002

The microstructural changes of $NiCrAlY/ZrO_2$-$Y_2$$O_3$ composite coatings that were manufactured by air-plasma-spraying were investigated using XRD and SEM/EDS. The as-sprayed microstructure consisted of (Ni,Cr)-rich regions, ($ZrO_2$-$Y_2$$O_3$)-rich regions, and $Al_2$$O_3$-rich layers that were formed during spraying owing to the oxidation of Al in NiCrAlY. During oxidation between 900 and $1100^{\circ}C$ in air, Cr in the (Ni,Cr)-rich regions diffused toward the $Al_2$$O_3$-rich layers, and oxidized to be dissolved in $A1_2$$O_3$-rich layers. The oxidation of Ni in the (Ni,Cr)-rich regions was less distinct, except at the outer surface of the coating.

• 한국재료학회지
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• 제29권12호
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• pp.757-763
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• 2019

A stacked high-voltage (900 V) Al electrolytic capacitor made with ZrO₂ coated anode foils, which has not been studied so far, is realized and the effects of Zr-Al-O composite layer on the electric properties are discussed. Etched Al foils coated with ZrO₂ sol are anodized in 2-methyl-1,3-propanediol (MPD)-boric acid electrolyte. The anodized Al foils are assembled with stacked structure to prepare the capacitor. The capacitance and dissipation factor of the capacitor with ZrO₂ coated anode foils increase by 41 % and decrease by 50 %, respectively, in comparison with those of Al anode foils. Zr-Al-O composite dielectric layer is formed between separate crystalline ZrO₂ with high dielectric constant and amorphous Al₂O₃ with high ionic resistivity. This work suggests that the formation of a composite layer by coating valve metal oxide on etched Al foil surface and anodizing it in MPD-boric acid electrolyte is a promising approach for high voltage and volume efficiency of capacitors.