• 제목/요약/키워드: $YBa_2Cu_3O_{7-x}$ (YBCO) films

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증류수 계면처리를 이용한 고온초전도체 죠셉슨 접합 제작 (HTS Josephson Junctions with Deionized Water Treated Interface)

  • 문승현;박완규;계정일;박주도;오병두
    • Progress in Superconductivity
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    • 제2권2호
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    • pp.76-80
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    • 2001
  • We have fabricated YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) ramp-edge Josephson junctions by modifying ramp edges of the base electrodes without depositing any artificial barrier layer. YBa$_2$Cu$_3$O/7-x//SrTiO$_3$ (YBCO/STO) films were deposited on SrTiO$_3$(100) by on-axis KrF laser deposition. After patterning the bottom YBCO/STO layer, the ramp edge was cleaned by ion-beam and then reacted with deionized water under various conditions prior to the deposition of counter-electrode layers. The top YBCO/STO layer was deposited and patterned by photolithography and ion milling. We measured current-voltage (I-V) characteristics, magnetic field modulation of the critical current at 77 K. Some showed resistively shunted junction (RSJ)-type I-V characteristics, while others exhibited flux-flow behaviors, depending on the dipping time of the ramp edge in deionized water. Junctions fabricated using optimized conditions showed fairly uniform distribution of junction parameters such as I$_{c}$R$_{n}$ values, which were about 0.16 mV at 77 K with 1$\sigma$~ 24%. We made a dc SQUID with the same deionized water treated junctions, and it showed the sinusoidal modulation under applied magnetic field at 77 K. 77 K.

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CeO$_2$ 완충층에 대한 고온 열처리가 CeO$_2$ 완충층을 지닌 R-cut 사파이어 기판 우에 성장된 YBa$_2Cu_3O_{7-{\delta}}$ 박막의 표면상태에 미치는 영향 (Effects of High-temperature Annealing of CeO$_2$ Buffer Layers on the Surface Morphology of YBa$_2Cu_3O_{7-{\delta}}$ Films on CeO$_2$-buffered R-cut Sapphire Substrates)

  • 이재훈;양우일;장정문;류재수;;이상영
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 1999년도 High Temperature Superconductivity Vol.IX
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    • pp.152-159
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    • 1999
  • YBa$_2Cu_3O_{7-{\delta}}$ (YBCO) films grown on CeO$_2$-buffered r-cut sapphire substrates (CbS's) were prepared and their structural and electrical properties were measured. Post-annealed CeO$_2$ films were used as buffer layers for the experiments. It turned out that the YBCO films grown on post-annealed CbS's had the rms roughness of less than 20 ${\AA}$ and peak-to-peak roughness of about 30 ${\AA}$ when the YBCO film thickness was 3000 ${\AA}$. Meanwhile, YBCO films on in-situ grown CeO$_2$ buffer layers on r-cut sapphire substrates appeared to have the peak-to-peak roughness of more than 450 ${\AA}$. X-ray diffraction data revealed that the YBCO flms were epitaxially grown along the c-axis with the typical FWHM of(005) ${\theta}$ -2 ${\theta}$ peak about 0. 16 $^{\circ}$ and ${\Delta}$ ${\omega}$ of the (005) peak about 0.5 $^{\circ}$. T$_c$ > 87 K, ${\Delta}$T < 1 K and R(look)/R(100K) ${\ge}$3 were observed from the YBCO films. Applicability of the YBCO films for high-frequency applications was described.

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MOCVD 법에 의해 제조된 YBCO 초전도 박막의 물성에 대한 완충층 템플릿의 영향 (Effect of the Buffered-template on the Property of YBCO Superconducting Film Deposited by MOCVD Method)

  • 전병혁;최준규;김찬중
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.27-32
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    • 2006
  • [$YBa_2Cu_3O_{7-x}$] thin films were deposited on various buffered-templates by a metal organic chemical vapor deposition(MOCVD). Three different templates of $CeO_2/YSZ/CeO_2/pure-Ni(CYC),\;CeO_2/YSZ/Y_2O_3/Ni-3at.%W(YYC)$ and $CeO_2/IBAD-YSZ$/stainless steel were used. The Ni and Ni-W alloy tapes were biaxially textured by cold rolling and annealing heat treatment. The dense YBCO films were grown on both the IBAD and YYC templates with no microcrack, while the YBCO films on the CYC templates were grown with the formation of microcracks and NiO. The YBCO film on the YYC template showed the higher $I_c$ than that on CYC template. Especially, the IBAD templates with a thin $CeO_2$(type I) and thick $CeO_2$(type II) top layer were used to compare the deposition nature of the YBCO on them. Comparing the current property of the YBCO films on IBAD templates, the YBCO film deposited on thick $CeO_2$ layer was better than the film on thin $CeO_2$ layer.

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연속 연료공급식 MOCVD법으로 증착시킨 YBCO 박막의 증착조건 (Deposition condition of YBCO films by continuous source supplying MOCVD method)

  • 김호진;주진호;최준규;전병혁;김찬중
    • 한국초전도ㆍ저온공학회논문지
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    • 제6권3호
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    • pp.6-11
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    • 2004
  • YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) films were deposited on MgO(100) and SrTiO$_3$(100) single crystal substrates by cold-wall type MOCVD method using continuous source supplying system. Under the deposition temperature of 740∼76$0^{\circ}C$, c-axis oriented YBCO films were obtained. In case of the YBCO films deposited on MgO (100) single crystal substrate, the critical temperature (T$_{c}$) was under 81 K regardless of the deposition conditions, whereas T$_{c}$ of the YBCO films deposited on SrTiO$_3$(100) single crystal substrate was 83∼84 K. The critical current (I$_{c}$) of the YBCO film deposited on SrTiO$_3$(100) single crystal substrate for 30 min was 49 A/cm-width and the critical current density (J$_{c}$) was 0.82 MA/$\textrm{cm}^2$ to film thickness of 0.6 ${\mu}{\textrm}{m}$. I$_{c}$ increased to 84.4 A/cm-width as the deposition time increased to 50 min, but J$_{c}$ decreased to 0.53 MA/$\textrm{cm}^2$ to film thickness of 1.8 ${\mu}{\textrm}{m}$.rm}{m}$.

MOD-TFA 공정으로 YBCO 박막제조 시 열처리 온도와 용매의 영향 (The effect of annealing temperature and solvent on the fabrication of YBCO thin films by MOD-TFA process)

  • 허순영;유재무;김영국;고재웅;이동철
    • Progress in Superconductivity
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    • 제5권1호
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    • pp.84-87
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    • 2003
  • $YBa_2$$Cu_3$$O_{7-x}$ (YBCO) thin films were fabricated by MOD-TFA process via dip-coating method on LaAlO$_3$, (LAO) single crystalline substrates. In this study, we investigated effect of annealing temperature and solvent on the microstructure and texture of YBCO thin films. The precursor films were annealed at various temperature to improve surface morphologies and phase purities. It was shown that the films annealed at relatively lower and higher temperature exhibit low phase purity and crystallinity. The effect of various solvents on surface morphologies and second phase has been investigated.

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레이저 공정을 이용한 초전도 통신소자 제작과 고주파특성 연구 (Study on the synthesis and the frequency response of HTS microwave device fabricated by pulsed laser deposition)

  • 박주형;정영식;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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    • pp.288-290
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    • 1997
  • Pulsed laser ablation has been used to fabricate superconducting $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The epitaxial YBCO thin films were grown at $750^{\circ}C$ and oxygen partial pressure of 200 mTorr. The electrical property and the characteristics of the YBCO thin films have been studied by R-T measurement. scanning electron microscopy (SEM) and X-ray diffraction (XRD). A microstrip line resonator has been fabricated using YBCO superconducting thin films by photolithography and wet-etch process. The resonator has linear microstrip line separated by a gap of 0.278 mm. We observed a fundamental resonance peak at the frequency of 10.007 GHz.

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Laser Ablation에 의한 $(Ba_{0.5}, Sr_{0.5}) Tio_3$박막의 제조와 전극에 따른 전기적 특성 (Prepatation of$(Ba_{0.5}, Sr_{0.5}) Tio_3$thin folms by Laser Ablation technique and their electrical properties with different electrodes)

  • 윤순길
    • 한국재료학회지
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    • 제4권4호
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    • pp.401-405
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    • 1994
  • Laser ablation기술에 의해 Pt와 $YBa_Cu_3O_{7-x}$(YBCO)전극위에 epitaxially성장된 BST박막의 조성과 전기적 특성이 연구되었다. RBS분석으로부터 Pt전극 위에 증착된 BST박막의 결정성이 YBCO전극 위에 증착된 것보다도 더 우수하였다. $600^{\circ}C$에서 Pt 전극위에 증착된 BST박막은 100kHz의 주파수에서 유전상수가 320, 유전손실이 0.023이었다. Pt전극위에 증착된 BST박막의 누설전류 밀도가 TBCO전극위에 증착된 것 보다도 더 작았다. 0.15MV/cm의 전기장 하에서 누설전류밀도는 약 0.8 $\mu \; A/ \textrm{cm}^2$이었다.

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사파이어 기판 위에 펄스-증착법으로 성장한 YBCO/CeO2박막의 초전도성과 표면 모폴러지 (Superconductivity and Surface Morphology of YBCO/CeO$_2$ Thin Films on Sapphire Substrate by Pulsed Laser Deposition)

  • Kang, Kwang-Yong;J. D. Suh
    • 한국초전도저온공학회:학술대회논문집
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    • 한국초전도저온공학회 2003년도 학술대회 논문집
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    • pp.88-91
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    • 2003
  • The crystal structure and properties of YBa$_2$Cu$_3$$O_{7-x}$(YBCO) and CeO$_2$ thin films deposited on r-plane (1(equation omitted)02) sapphire substrate by pulsed- laser deposition(PLD) have been investigated. C-axis oriented epitaxial YBCO thin films with critical temperature (Tc) of 88 K were routinely grown on (200) oriented CeO$_2$ buffer layers with thickness in the range between 20 to 80 nm. When the thickness of the (200)oriented CeO$_2$ buffer layer increases over than 80 nm, the superconducting properties of YBCO thin films on that were deteriorated. The decrease in Tc of YBCO thin films was explained by the microcrack formation in CeO$_2$ buffer layer. These results indicate that the thickness of the (200) oriented CeO$_2$ buffer layer is critical to the epitaxial YBCO thin nim growth on r-plane (1(equation omitted)02) sapphire substrate.e.

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고온 초전도 $\textrm{YBa}_{2}\textrm{Cu}_{3}\textrm{O}_{7-x}$ 계단형 모서리 접합의 이중접합 특성 (Characteristics of Double-junction of High-$\textrm{T}_{c}$ Superconducting $\textrm{YBa}_{2}\textrm{Cu}_{3}\textrm{O}_{7-x}$ Step-edge Junctions)

  • 황준식;성건용;강광용;윤순길;이광렬
    • 한국재료학회지
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    • 제9권1호
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    • pp.86-91
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    • 1999
  • (001) $\textrm{SrTiO}_3$(STO) 기판위에 고온초전도 $\textrm{YBa}_{2}\textrm{Cu}_{3}\textrm{O}_{7-x}$(YBCO)박막을 이용한 계단형 모서리 임계접합을 제조하였다. STO (100) 단결정 기판위에 계단형 모서리(step-edge)를 제작하기 위한 이온밀링 마스크로 plasma enhanced chemical vapor deposition방법으로 증착된 diamond-like carbon (DLC) 박막을 사용하였고, oxygen reactive ion etch 방법으로 건식식각하였다. 이렇게 제작된 계단형 모서리 기판위에 c-축 수직한 YBCO 박막과 STO박막을 pulsed laser deposition방법으로 에피텍셜하게 증착하였다. 계단의 상층과 하층에서 모두 임계가 형성되었으며 이 접합의 임계온도는 77 K 이상이었고 16K에서 $\textrm{I}_{c}\textrm{R}_{n}$products가 7.5mV, 77 K에서 0.3mV의 값을 나타내었다. 이들 전류-전압 특성은 two noisy resistively shunted Josephson junction 모델을 잘 만족하였다.

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