The effect of annealing temperature and solvent on the fabrication of YBCO thin films by MOD-TFA process

MOD-TFA 공정으로 YBCO 박막제조 시 열처리 온도와 용매의 영향

  • Published : 2003.10.01

Abstract

$YBa_2$$Cu_3$$O_{7-x}$ (YBCO) thin films were fabricated by MOD-TFA process via dip-coating method on LaAlO$_3$, (LAO) single crystalline substrates. In this study, we investigated effect of annealing temperature and solvent on the microstructure and texture of YBCO thin films. The precursor films were annealed at various temperature to improve surface morphologies and phase purities. It was shown that the films annealed at relatively lower and higher temperature exhibit low phase purity and crystallinity. The effect of various solvents on surface morphologies and second phase has been investigated.

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