• Title/Summary/Keyword: $TiO_2

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Degradation from Polishing Damage in Ferroelectric Characteristics of BLT Capacitor Fabricated by Chemical Mechanical Polishing Process (화학적기계적연마 공정으로 제조한 BLT Capacitor의 Polishing Damage에 의한 강유전 특성 열화)

  • Na, Han-Yong;Park, Ju-Sun;Jung, Pan-Gum;Ko, Pil-Ju;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.236-236
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    • 2008
  • (Bi,La)$Ti_3O_{12}$(BLT) thin film is one of the most attractive materials for ferroelectric random access memory (FRAM) applications due to its some excellent properties such as high fatigue endurance, low processing temperature, and large remanent polarization [1-2]. The authors firstly investigated and reported the damascene process of chemical mechanical polishing (CMP) for BLT thin film capacitor on behalf of plasma etching process for fabrication of FRAM [3]. CMP process could prepare the BLT capacitors with the superior process efficiency to the plasma etching process without the well-known problems such as plasma damages and sloped sidewall, which was enough to apply to the fabrication of FRAM [2]. BLT-CMP characteristics showed the typical oxide-CMP characteristics which were related in both pressure and velocity according to Preston's equation and Hernandez's power law [2-4]. Good surface roughness was also obtained for the densification of multilevel memory structure by CMP process [3]. The well prepared BLT capacitors fabricated by CMP process should have the sufficient ferroelectric properties for FRAM; therefore, in this study the electrical properties of the BLT capacitor fabricated by CMP process were analyzed with the process parameters. Especially, the effects of CMP pressure, which had mainly affected the removal rate of BLT thin films [2], on the electrical properties were investigated. In order to check the influences of the pressure in eMP process on the ferroelectric properties of BLT thin films, the electrical test of the BLT capacitors was performed. The polarization-voltage (P-V) characteristics show a decreased the remanent polarization (Pr) value when CMP process was performed with the high pressure. The shape of the hysteresis loop is close to typical loop of BLT thin films in case of the specimen after CMP process with the pressures of 4.9 kPa; however, the shape of the hysteresis loop is not saturated due to high leakage current caused by structural and/or chemical damages in case of the specimen after CMP process with the pressures of 29.4 kPa. The leakage current density obtained with positive bias is one order lower than that with negative bias in case of 29.4 kPa, which was one or two order higher than in case of 4.9 kPa. The high pressure condition was not suitable for the damascene process of BLT thin films due to the defects in electrical properties although the better efficiency of process. by higher removal rate of BLT thin films was obtained with the high pressure of 29.4 kPa in the previous study [2].

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A Numerical Analysis of the Pressure Drop according to the Shape of TiO2 Photocatalyst-coated Module in a HVAC Duct (HVAC 덕트 내에 설치된 광촉매코팅 모듈의 형상이 압력강하에 미치는 영향)

  • Hwang, Kwang-Il;Koo, Jae-Hyoek;Kim, Da-Hye;Lee, Hyun-In;Choi, Young-Guk
    • Journal of Advanced Marine Engineering and Technology
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    • v.35 no.8
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    • pp.1055-1062
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    • 2011
  • The purpose of this study is to develop the shape of photocatalyst-coated module for improve the IAQ, which is installed at inside of ductwork and detachable. Including 3 column types(square, circle, diamond) and 2 fin types(diamond and square), totally 5 types are previously declared for numerical analysis and comparison, 5 types are. As the results of numerical analysis, almost the velocity varied at the range of ${\pm}0.3m$ from the module, except the Type A-3(diamond column type) which is affected to ${\pm}0.4m$ range and shows the biggest velocity differences. Among the 5 types, the diamond fin type(Type B-1) is analyzed as the most stable in velocity. And the results of local pressure drop show that the difference of pressure coefficient of Type B-1 is computed as 0.59, and that of Type A-3 is 2.44. Meanwhile, from the effect analysis of the number of module, the flow conflict happens and the pressure difference between before and after the module increases if there are over 3 modules inserted.

Evaluation of Catalyst Deactivation and Regeneration Associated with Photocatalysis of Malodorous Sulfurized-Organic Compounds (악취유발 황화유기화합물질의 광촉매분해에 따른 촉매 비활성화와 재생 평가)

  • Jo, Wan-Kuen;Shin, Myeong-Hee
    • Journal of Korean Society of Environmental Engineers
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    • v.31 no.11
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    • pp.965-974
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    • 2009
  • This study evaluated the degradation efficiency of malodorous sulfurized-organic compounds by utilizing N- and Sdoped titanium dioxide under visible-light irradiation, and examined the catalyst deactivation and regeneration. Catalyst surface was characterized by employing Fourier-Transform-Infrared-Red (FTIR) spectra. The visible-light-driven photocatalysis techniques were able to efficiently degrade low-level dimethyl sulfide (DMS) and dimethyl disulfide (DMDS) with degradation efficiencies exceeding 97%, whereas they were not effective regarding the removal of high-level DMS and DMDS, with degradation efficiencies of 84 and 23% within 5 hrs of photocatalytic processes. As compared with DMS, DMDS which containes one more sulfur element revealed quick catalyst deactivation. Catalyst deactivation was confirmed by the equality between input and output concentrations of DMD or DMDS, the obsevation of no $CO_2$ generation during a photocatalytic process, and the FTIR spectrum peaks related with sulfur ion compounds, which are major byproducts formed on catalyst surfaces. The mineralization efficiency of DMS at 8 ppm, which was a peak value during a photocatalytic process, was calculated as 144%, exceeding 100%. The catalyst regenerated by high-temperature calcination exhibited higher catalyst recovery efficiency (53 and 58% for DMDS and DMS, respectively) as compared with dry-air and humid-air regeneration processes. However, even the calcined method was unable to totally regenerate deactivated catalysts.

New Liquid Crystal-Embedded PVdF-co-HFP-Based Polymer Electrolytes for Dye-Sensitized Solar Cell Applications

  • Vijayakumar, G.;Lee, Meyoung-Jin;Song, Myung-Kwan;Jin, Sung-Ho;Lee, Jae-Wook;Lee, Chan-Woo;Gal, Yeong-Soon;Shim, Hyo-Jin;Kang, Yong-Ku;Lee, Gi-Won;Kim, Kyung-Kon;Park, Nam-Gyu;Kim, Suhk-Mann
    • Macromolecular Research
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    • v.17 no.12
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    • pp.963-968
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    • 2009
  • Liquid crystal (LC; E7 and/or ML-0249)-embedded, poly(vinylidenefluoride-co-hexafluoropropylene) (PVdF-co-HFP)-based, polymer electrolytes were prepared for use in dye-sensitized solar cells (DSSCs). The electrolytes contained 1-methyl-3-propylimidazolium iodide (PMII), tetrabutylammonium iodide (TBAI), and iodine ($I_2$), which participate in the $I_3^-/I^-$ redox couple. The incorporation of photochemically stable PVdF-co-HFP in the DSSCs created a stable polymer electrolyte that resisted leakage and volatilization. DSSCs, with liquid crystal(LC)-embedded PVdF-co-HFP-based polymer electrolytes between the amphiphilic ruthenium dye N719 absorbed to the nanocrystalline $TiO_2$ photoanode and the Pt counter electrode, were fabricated. These DSSCs displayed enhanced redox couple reduction and reduced charge recombination in comparison to that fabricated from the conventional PVdF-co-HFP-based polymer electrolyte. The behavior of the polymer electrolyte was improved by the addition of optimized amounts of plasticizers, such as ethylene carbonate (EC) and propylene carbonate (PC). The significantly increased short-circuit current density ($J_{sc}$, $14.60\;mA/cm^2$) and open-circuit voltage ($V_{oc}$, 0.68 V) of these DSSCs led to a high power conversion efficiency (PCE) of 6.42% and a fill factor of 0.65 under a standard light intensity of $100\;mW/cm^2$ irradiation of AM 1.5 sunlight. A DSSC fabricated by using E7-embedded PVdF-co-HFP-based polymer electrolyte exhibited a maximum incident photon-to-current conversion efficiency (IPCE) of 50%.

THE EFFECT OF CASTING MACHINE AND INVESTMENT ON THE CASTABILITY OF TITANIUM ALLOY (주조기와 매몰재의 성분변화에 따른 티타늄의 주조성에 관한 연구)

  • Chung, Da-Woon;Yang, Hong-So
    • The Journal of Korean Academy of Prosthodontics
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    • v.44 no.5
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    • pp.654-664
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    • 2006
  • Statement of problem: There has been a eat interest in the use of titanium for fixed and removable prostheses in recent because of its excellent biocompatibility. However, the melting temperature and chemical reactivity of titanium necessities casting system different from those used in conventional casting. The current titanium casting systems are based on an electric-arc design for melting the metal in an argon atmosphere and its exclusive investment. Despite the new development in Ti casting system, inadequate mold filling and internal porosity are frequently observed casting defects. Purpose : The purposes of this study were to compare the castibility and reaction layer of the casting titanium under the two casting machines and their investment condition. Material and method: coping and machine-milled titanium coping according to the casting methods and the marginal configurations. The total 28 specimens were used, and these are divided into 4 groups according to 2 casting machines and 2 investments. The castings were analyzed using x-ray microanalysis and microhardness testing. The reaction layer between margin of titanium casting and the investments was observed and analyzed with scanning electron microscope. Result: 1. Castabiliy of casting titanium specimen was best in the group of centrifugal casting machine and Selevest $CB^{\circledR}$ and good that of Selevest CB and pressure differential casting machine, Rematitan plus and centrifugal casting machine, Rematitan plus and pressure differential casting machine in order. 2. There was no significanct correlation in titanium castability in respect of casting machine. However ANOVA indicated that Selevest $CB^{\circledR}$ groups had significantly better castability than Rematitan $plus^{\circledR}$ groups.(p<0.05) 3. There was a significant microhardness difference between centrifugal casting machine groups and pressure differential groups.(p<0.05) Titanium castings in centifugal groups had significantly harder than those in pressure differential groups. 4. The addition of zirconia decreased interfacial reactivity. Conclusion: above result revealed that of the castability of titanium casting specimens had little correlation in casting machines and was better in magnesia-based investment contained ZrO2 groups. However in order to practice casting titanium in clininic, its castability should be improved, also there should be more research on factor of castability so that long-span prothesis and removable partial denture metla frame may be casted completly.

Geochemical Characteristics of the Jurassic Chunyang Granites in Northeastern Part of the Yeongnam Massif (영남육괴에 분포하는 쥐라기 춘양화강암의 지화학적 특성)

  • Kang, Minyoung;Kim, Yunji;Wee, Soomeen
    • Journal of the Korean earth science society
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    • v.38 no.1
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    • pp.49-63
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    • 2017
  • The geochemical results of the Chunyang granites located in the northeastern part of the Yeongnam Massif, indicate that these rocks have characteristics of calc-alkaline series in the sub-alkaline field, I-type and peraluminous. Most of the geochemical features in major and trace elements show systematic trends, which are similar to differentiation trends of the general Jurassic granitoids in South Korea. The Chunyang granite is largely enriched in mobile LILE (Sr, K, Rb and Ba) relatively immobile HFSE. They show LREE enriched patterns [$(La/Lu)_{CN}=41.8-73.2$] with a slightly negative Eu anomaly [$(Eu/Eu^*)_{CN}=0.89-1.10$]. There are no meaningful correlations in major and trace elements between the Chunyang granites and the Buseok plutonic rock which is the main unit of the Yeongju batholith. This result may suggest that these two plutonic rocks be not derived from the same parent magma. Tectonic discrimination diagrams indicate that the Chunyang granite was formed in volcanic arc environments. These geochemical characteristics results suggest that the Chunyang granite must have been generated at the active continental margin during the subduction of the Jurassic proto-Pacific plate.

Removal of Volatile Organic Compounds (VOCs) of Deodorant by Adding a Metal Oxide to the Essential Oils (식물정유물질에 금속산화물을 첨가한 탈취제의 휘발성유기화합물질의 제거에 관한 연구)

  • Lim, You-Young;Lee, Min-Ho;Jeon, Soo-Bin;Yang, Kyeong-Soon;Jeong, Hae-Eun;Oh, Kwang-Joong
    • Clean Technology
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    • v.22 no.2
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    • pp.96-105
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    • 2016
  • VOCs emissions from industries cause the air pollution and odor. In the industrial facilities, the existing odor treatment techniques have limits and problems. In this study, the optimum essential oil and metal oxide selected by screening test. lavender oil, cypress oil and TiO2 were determined by deodorant materials and those were blended by 5%, 45%, 10%, respectively. In addition, the result of batch type experiments depending on the dilution rate, injection, rate, temperature showed that the optimum condition of deodorant is 6 mL of injection rate, and 200 times of dilution rate and the removal efficiency increased in proportion with temperature. In addition, the activation energy was calculated from the rate equation, which appeared in the 3-4 times lower than conventional deodorants.

Terahertz Generation and Detection Using InGaAs/InAlAs Multi Quantum Well

  • Park, Dong-U;Han, Im-Sik;No, Sam-Gyu;Ji, Yeong-Bin;O, Seung-Jae;Seo, Jin-Seok;Jeon, Tae-In;Kim, Jin-Su;Kim, Jong-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.205-205
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    • 2013
  • 테라헤르쯔(terahertz: THz)파는 0.1~10 THz 의 범위로 적외선과 방송파 사이에 광대역 주파수 스펙트럼을 차지하고 있으며 직진성, 투과성, 그리고 낮은 에너지 (meV)를 가지고 있어 비 파괴적이고 무해한 장점을 지니고 있다. Ti:sapphire laser와 같은 femto-pulse source 등이 많은 발전이 되어 현재 많은 연구와 발전이 이루어지고 있다. femto-pulse source를 이용한 THz 응용에서는 높은 저항, 큰 전자 이동도, 그리고 아주 짧은 전하수명의 기판을 요구하는데 저온에서 성장한 (low-temperature grown : LT) GaAs는 격자 내에 Gallium 자리에 Arsenic이 치환 하면서 AsGa antisite가 발생하여 전하수명을 짧아지는 것을 응용하여 가장 많이 이용되고 있다. 현재 THz 응용분야에서 보다 작고 가격경쟁력이 있는 광통신을 이용한 THz photomixer등이 활발히 연구 하고 있다. 광섬유 내에서 손실과 분산이 최소값을 가지는 부분이 1.55 ${\mu}m$ 부근이고 In0.53Ga0.47As 기판을 이용하였을 때 여기에 완벽하게 만족하게 된다. 하지만 LT-InGaAs 의 경우 AsGa antisite로 인하여 carrier lifetime은 짧아지지만 높은 n-type 전하밀도를 가지게 된다. 이때 Be을 doping하여 전하밀도를 보상하여 높은 저항을 유지해야 하는데 Be의 활성화를 위해서는 열처리를 필요로 한다. 하지만 열처리를 하면 carrier lifetime이 길어지기 때문에 carrier lifetime과 저항을 적절히 조율해야 한다. 이는 물질자체의 특성이기 때문에 InGaAs는 GaAs보다 낮은 amplitude와 짧은 cut-off frequency를 가진다. 본 연구에서는 보다 높은 저항을 얻기 위하여 molecular beam epitaxy를 이용하여 semi-insulating InP:Fe 기판위에 격자 정합된 InGaAs:Be/InAlAs multi quantum well (MQW)를 온도별 ($250{\sim}400^{\circ}C$), 주기별 (50~150)로 성장을 하였고 이때 InGaAs layer의 Be doping level은 $2{\times}1018\;cm^{-3}$, Ex-situ annealing은 $550^{\circ}C$에서 10분으로 고정 하였다. THz 발생 실험에서는 InGaAs/InAlAs MQW은 4000 pA로 1,000 pA를 가지는 InGaAs epilayer보다 4배 높은 전류 신호를 얻을 수 있었고 모든 샘플이 2 THz에서 cut-off frequency를 가지고 있었다. THz 검출 실험에서는 LT-InGaAs:Be epilayer LT-InGaAs:Be/InAlAs, HT-InGaAs/InAlAs 샘플이 각각 180, 9000, 12000 pA의 전류신호를 가지고 있었고 모든 샘플이 2 THz에서 cut-off frequency를 가지고 있었다. HT-InGaAs/InAlAs MQW를 이용한 검출실험에서는 InGaAs layer가 defect free이지만 LT-InGaAs:Be/ InAlAs MQW 보다 높은 전류 신호를 얻을 수 있었다. 이는 InAlAs layer가 저항만 높이는 것뿐만 아니라 carrier trapping layer로써의 역할도 하는 것으로 사료된다.

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Occurrence and Chemical Composition of White Mica from Wallrock Alteration Zone of Janggun Pb-Zn Deposit (장군 연-아연 광상의 모암변질대에서 산출되는 백색운모의 산상 및 화학조성)

  • Bong Chul, Yoo
    • Korean Journal of Mineralogy and Petrology
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    • v.35 no.4
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    • pp.469-484
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    • 2022
  • The Janggun Pb-Zn deposit has been known one of the four largest deposits (Yeonhwa, Shinyemi, Uljin) in South Korea. The geology of this deposit consists of Precambrian Weonnam formation, Yulri group, Paleozoic Jangsan formation, Dueumri formation, Janggum limestone formation, Dongsugok formation, Jaesan formation and Mesozoic Dongwhachi formation and Chungyang granite. This Pb-Zn deposit is hydrothermal replacement deposit in Paleozoic Janggum limestone formation. The wallrock alteration that is remarkably recognized with Pb-Zn mineralization at this deposit consists of mainly rhodochrositization and dolomitization with minor of pyritization, sericitization and chloritization. Wallrock alteration is divided into the five zones (Pb-Zn orebody -> rhodochrosite zone -> dolomite zone -> dolomitic limestone zone -> limestone or dolomitic marble) from orebody to wallrock. The white mica from wallrock alteration occurs as fine or medium aggregate associated with Ca-dolomite, Ferroan ankerite, sideroplesite, rutile, apatite, arsenopyrite, pyrite, sphalerite, galena, quartz, chlorite and calcite. The structural formular of white mica from wallrock alteration is (K0.77-0.62Na0.03-0.00Ca0.03-0.00Ba0.00Sr0.01)0.82-0.64(Al1.72-1.48Mg0.48-0.20Fe0.04-0.01Mn0.03-0.00Ti0.01-0.00Cr0.00As0.01-0.00Co0.03-0.00Zn0.03-0.00Pb0.05-0.00Ni0.01-0.00)2.07-1.92 (Si3.43-3.33Al0.67-0.57)4.00O10(OH1.94-1.80F0.20-0.06)2.00. It indicated that white mica from wallrock alteration has less K, Na and Ca, and more Si than theoretical dioctahedral micas. The white micas from wallrock alteration of Janggun Pb-Zn deposit, Yeonhwa 1 Pb-Zn deposit and Baekjeon Au-Ag deposit, and limestone of Gumoonso area correspond to muscovite and phengite and white mica from wallrock alteration of Dunjeon Au-Ag deposit corresponds to muscovite. Compositional variations in white mica from wallrock alteration of these deposits and limeston of Gumoonso area are caused by mainly phengitic or Tschermark substitution mechanism (Janggun Pb-Zn deposit), mainly phengitic or Tschermark substitution and partly illitic substitution mechanism (Yeonhwa 1 Pb-Zn deposit, Dunjeon Au-Ag deposit and Baekjeon Au-Ag deposit), and mainly phengitic or Tschermark substitution and partly illitic substitution or Na+ <-> K+ substitution mechanism (Gumoonso area).

Geochemistry and Genesis of the Guryonsan(Ogcheon) Uraniferous Back Slate (구룡산(九龍山)(옥천(決川)) 함(含)우라늄 흑색(黑色) 점판암(粘板岩)의 지화학(地化學) 및 성인(成因))

  • Kim, Jong Hwan
    • Economic and Environmental Geology
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    • v.22 no.1
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    • pp.35-63
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    • 1989
  • Geochemical characteristics of the Guryongsan (Ogcheon) uraniferous black slate show that this is an analogue to the conventional Chattanooga and Alum shales in occurrences. Whereas, its highest enrichment ratio in metals including uranium, among others, is explained by the cyclic sedimentation of the black muds and quartz-rich silts, and the uniform depositional condition with some what higher pH condition compared to the conditions of the known occurrences. The cyclic sedimentation, caused by the periodic open and close of the silled basin, has brought about the flush-out) of the uranium depleted water and the recharge with the new metal-rich sea water, which consequently contributed to the high concentration of metals in mud. The metal-rich marine black muds, which mostly occur in the early to middle Palaeozoic times, is attributed by the geologic conditions which related to the atmospheric oxygen contents, and these are scarcely met in the late Precambrian and/or with the onset of Palaeozoic era in the geologic evolution of the earth.

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