• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1478-1480
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• 2003

본 논문에서는 PTC 서미스터를 이용해서 히터와 기판을 일체화한 가스센서용 자기발열기판을 개발하였다. $BaTiO_3$, $PbTiO_3$를 기초원료로 하여 $Nb_2O_5$를 첨가해 (Ba, Pb)$TiO_3$ PTC 소자를 제조한 결과 $Nb_2O_5$ 첨가량이 증가할수록 낮은 상온 비저항 값을 나타내었으며, 첨가량이 0.11mol.%${\sim}$0.13mol.% 범위일 때 가장 균일하고 치밀한 구조가 얻어짐을 알 수 있었다. 상온에서 비저항 값은 $1280^{\circ}C$에서 10분간 소결하였을 때 가장 작았고, 또한 $N_2$ 분위기에서 소결한 시료가 낮은 비저항 값을 나타내었다. 제작된 PTC 소자의 표면온도 측정결과, 단위면적($1mm^3$)당 소비전력은 약 $50^{\sim}60$ mW 정도로 되었으며, 이것은 기존의 가스센서에 사용되고 있는 히터와 비교해 1/3${\sim}$1/4배 정도 낮은 값이다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.77-77
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• 2000

Titanium oxide (TiO2) thin films have valuable properties such as a high refractive index, excellent transmittance in the visible and near-IR frequency, and high chemical stability. Therefore it is extensively used in anti-reflection coating, sensor, and photocatalysis as electrical and optical applications. Specially, TiO2 have a high dielectric constant of 180 along the c axis and 90 along the a axis, so it is highlighted in fabricating dielectric capacitors in micro electronic devices. A variety of methods have been used to produce patterned self-assembled monolayers (SAMs), including microcontact printing ($\mu$CP), UV-photolithotgraphy, e-beam lithography, scanned-probe based micro-machining, and atom-lithography. Above all, thin film fabrication on $\mu$CP modified surface is a potentially low-cost, high-throughput method, because it does not require expensive photolithographic equipment, and it produce micrometer scale patterns in thin film materials. The patterned SAMs were used as thin resists, to transfer patterns onto thin films either by chemical etching or by selective deposition. In this study, we deposited TiO2 thin films on Si (1000 substrateds using titanium (IV) isopropoxide ([Ti(O(C3H7)4)] ; TIP as a single molecular precursor at deposition temperature in the range of 300-$700^{\circ}C$ without any carrier and bubbler gas. Crack-free, highly oriented TiO2 polycrystalline thin films with anatase phase and stoichimetric ratio of Ti and O were successfully deposited on Si(100) at temperature as low as 50$0^{\circ}C$. XRD and TED data showed that below 50$0^{\circ}C$, the TiO2 thin films were dominantly grown on Si(100) surfaces in the [211] direction, whereas with increasing the deposition temperature to $700^{\circ}C$, the main films growth direction was changed to be [200]. Two distinct growth behaviors were observed from the Arhenius plots. In addition to deposition of THe TiO2 thin films on Si(100) substrates, patterning of TiO2 thin films was also performed at grown temperature in the range of 300-50$0^{\circ}C$ by MOCVD onto the Si(100) substrates of which surface was modified by organic thin film template. The organic thin film of SAm is obtained by the $\mu$CP method. Alpha-step profile and optical microscope images showed that the boundaries between SAMs areas and selectively deposited TiO2 thin film areas are very definite and sharp. Capacitance - Voltage measurements made on TiO2 films gave a dielectric constant of 29, suggesting a possibility of electronic material applications.

• 한국재료학회지
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• 제20권5호
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• pp.235-240
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• 2010

We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based active layer with an embedded Pt/Ti electrode covered by the self-assembled Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of $500^{\circ}C$. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at $250^{\circ}C$ and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.

• 마이크로전자및패키징학회지
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• 제22권2호
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• pp.21-26
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• 2015

낮은 열전도도 및 높은 비표면적 특성으로 흡착제 및 가스센서 등 여러 응용 분야로 연구되고 있는 규칙적 메조기공 세라믹 소재는 폐기공 메조기공 구조와 개기공 메조기공 구조로 나뉜다. 이중 폐기공 메조기공 세라믹 소재는 개기공 메조기공 세라믹 소재보다 높은 기계적 특성을 가짐에도 내부에 존재하는 기공을 이용한 비표면적 증가에 한계가 있어 응용에 제약을 가지고 있다. 본 연구팀은 규칙적 폐기공 메조기공 타이타니아($TiO_2$)의 열처리 시간 변화에 따른 입자성장으로부터 폐기공 연결의 도입을 통하여 비표면적을 변화시키는 연구를 수행하고자 하였다. 열처리 시간 증가시 타이타니아 결정상의 변화는 없었으며 입자성장이 일어나게 되면서 기공구조의 무너짐 및 기공의 연결성 증가를 확인할 수 있었다. 24시간 열처리 시료의 경우, 기공률은 36.3%에 34.1%로 감소하였으나 기공의 연결도 증가로 인해 비표면적은 $48m^2/g$에서 $156m^2/g$으로 증가하였다. 이러한 비표면적의 증가는 CO 가스의 감응도 측정을 통하여 감응도가 약 7.4배 증가하는 것으로부터 확인될 수 있었다.

• 센서학회지
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• 제6권1호
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• pp.56-62
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• 1997

고주파 마그네트론 스펏터링법을 이용하여 La 성분비에 따른 PLT 박막을 제조하였다. 낮은 분위기압력하에서 PLT 박막은 높은 C 축 배향성을 보였다. PLT 박막의 C축 배향성은 분위기 압력과 La 성분비가 증가할수록 XRD 와 SEM 분석에서 감소함을 확인하였다. La의 성분비가 증가할수록 PLT 박막의 비유전율은 증가하였으며 잔류분극은 감소하였다.

• 센서학회지
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• 제6권4호
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• pp.265-273
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• 1997

RF 마그네트론 스펏터링 방법으로 ZnO 박막을 성장시켜 TMA 가스 센서를 제작하였다. ZnO 박막의 성장분위기 가스와 첨가불순물이 박막의 표면 캐리어(전자) 농도, Hall 전자 이동도, 전기저항률 및 감도에 미치는 영향을 동작온도와 TMA 가스 농도를 변화시켜가며 조사하였다. 산소분위기에서 성장된 박막이 아르곤의 경우보다, 촉매불순물이 첨가된 박막이 첨가되지 않은 경우보다, 각각 표면 캐리어 농도와 Hall 전자 이동도가 높았고, 높은 감도 및 낮은 전기저항률을 나타내었다. 산소분위기에서 성장되었고, 불순물로 4 wt.%의 $Al_{2}O_{3}$, 1 wt.%의 $TiO_{2}$ 및 0.2 wt.%의 $V_{2}O_{3}$를 첨가한 ZnO 박막으로 만든 센서가 가장 높은 표면 캐리어 농도 $5.95{\times}10^{20}cm^{-3}$ 및 Hall 전자 이동도 $177\;cm^{2}/V{\cdot}s$와 가장 낮은 전기저항률 $0.59{\times}10^{-4}{\Omega}{\cdot}cm$ 및 가장 높은 감도 12.1을 나타내었다. 이때 TMA 가스 농도는 8 ppm, 동작온도는 $300^{\circ}C$였다.

• 센서학회지
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• 제5권3호
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• pp.87-92
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• 1996

Pb과잉인 PLT 타겟을 이용하여 MgO(100) 단결정 기판위에 고주파 마그네트론 스펏터링법으로 PLT박막을 제조하였으며, c-축 배향에 따른 물리적 및 전기적 특성을 조사하였다. PLT박막의 c-축 배향성은 제조조건에 따라 변화하며, 본 연구에서의 제조조건은 기판온도가 $640^{\circ}C$, 분위기압이 10 mTorr, $Ar/O_{2}$비가 10 및 고주파 전력밀도가 $1.7 W/cm^{2}$이었다. 이러한 조건에서 제조된 PLT 박막은 표면에서의 Pb/Ti 비가 1/2, 저항률이 $8{\times}10^{11}{\Omega}{\cdot}cm$ 및 비유전률이 110 이었다. PLT박막을 이용하여 초전형 적외선 센서를 제조하였으며, 제조된 적외선 센서의 피크 대 피크 전압은 450 mV, 신호대 잡음비는 7.2 였다.

• 한국재료학회지
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• 제21권8호
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• pp.468-475
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• 2011

[ $LaMeO_3$ ](Me = Cr, Co) powders were prepared using the polymeric precursor method. The effects of the chelating agent and the polymeric additive on the synthesis of the $LaMeO_3$ perovskite were studied. The samples were synthesized using ethylene glycol (EG) as the solvent, acetyl acetone (AcAc) as the chelating agent, and polyvinylpyrrolidone (PVP) as the polymer additive. The thermal decomposition behavior of the precursor powder was characterized using a thermal analysis (TG-DTA). The crystallization and particle sizes of the $LaMeO_3$ powders were investigated via powder X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and particle size analyzer, respectively. The as-prepared precursor primarily has $LaMeO_3$ at the optimum condition, i.e. for a molar ratio of both metal-source (a : a) : EG (80a : 80a) : AcAc (8a) inclusive of 1 wt% PVP. When the as-prepared precursor was calcined at $700^{\circ}C$, only a single phase was observed to correspond with the orthorhombic structure of $LaCrO_3$ and the rhombohedral structure of $LaCoO_3$. A solid-electrolyte impedance-metric sensor device composed of $Li_{1.5}Al_{0.5}Ti_{1.5}(PO_4)_3$ as a transducer and $LaMeO_3$ as a receptor has been systematically investigated for the detection of NOx in the range of 20 to 250 ppm at $400^{\circ}C$. The sensor responses were able to divide the component between resistance and capacitance. The impedance-metric sensor for the NO showed higher sensitivity compared with $NO_2$. The responses of the impedance-metric sensor device showed dependence on each value of the NOx concentration.

• 센서학회지
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• 제32권3호
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• pp.140-146
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• 2023

Water quality is crucial for human health and the environment. Accurate measurement of the quantity of organic carbon in water is essential for water quality evaluation, identification of water pollution sources, and appropriate implementation of water treatment measures. Total organic carbon (TOC) analysis is an important tool for this purpose. Although other methods, such as chemical oxygen demand (COD) and biochemical oxygen demand (BOD) are also used to measure organic carbon in water, they have limitations that make TOC analysis a more favorable option in certain situations. For example, COD requires the use of toxic chemicals, and BOD is time-consuming and can produce inconsistent and unreliable results. In contrast, TOC analysis is rapid and reliable, providing accurate measurements of organic carbon content in water. However, common methods for TOC analysis can be complex and energy-intensive because of the use of high-temperature heaters for liquid-to-gas phase transitions and the use of acid, which present safety risks. This study focuses on a TOC analysis method using TiO₂ photocatalysis, which has several advantages over conventional TOC analysis methods, including its low cost and easy maintenance. For TiO₂, rutile and anatase powders are mixed with an inorganic binder and spray-coated onto a glass fiber substrate. The TiO₂ powder and inorganic binder solutions are adjusted to optimize the photocatalytic reaction performance. The TiO₂ photocatalysis method is a simple and low-power approach to TOC analysis, making it a promising alternative to commonly used TOC analysis methods. This study aims to contribute to the development of more efficient and cost-effective approaches for water quality analysis and management by exploring the effectiveness and reliability of the developed equipment.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.176.2-176.2
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• 2014

In this work, we demonstrated that the fabrication of flexible graphene-based chemical sensor with heaters by soft lithographic patterning method [1]. First, monolayer and multilayer graphene were prepared by thermal chemical vapor deposition transferred onto SiO2 / Si substrate in order to fabrication of patterned-sensor and -heater. Second, patterned-monolayer and multilayer graphene were detached through soft lithography process, which was transferred on top and bottom sides of PET film. Third, Au / Ti (Thickness : 100/30 nm) electrodes were deposited end of the patterned-graphene line by sputtering system. Finally, we measured sensor properties through injection of NO2 and CO2 gas on different temperature with voltage change of graphene heater.