• 제목/요약/키워드: $TiCl_4$ treatment

검색결과 82건 처리시간 0.031초

플라즈마 화학증착법(PACVD)에 의한 TiN증착시 증착변수가 미치는 영향(II) -TiCl4, N2의 입력분율을 중심으로- (Effects of Deposition Parameters on TiN Film by Plasma Assisted Chemical Vapor Deposition(II) -Influence of TiCl4, N2 inlet Fraction on the TiN Deposition-)

  • 이병호;신영식;김문일
    • 열처리공학회지
    • /
    • 제2권4호
    • /
    • pp.11-18
    • /
    • 1989
  • To investigate the influence of $TiCl_4$, $N_2$ inlet fraction on the TiN layer, TiN film was deposited onto the STC3 and STD11 steel from gas mixtures of $TiCl_4/N_2/H_2$ by the radio frequency plasma assisted chemical vapor deposition. The films were deposited at various $TiCl_4$, $N_2$ inlet fractions. The results showed that the film thickness was increased with $TiCl_4$ inlet fraction. However, while the thickness was increased with $N_4$ inlet fraction under 0.4 the thickness was decreased with increasing $N_2$ inlet fraction over 0.4. The density of deposited films was varied as $TiCl_4$, $N_2$ inlet fraction and its maximum value was about $5.6g/cm^3$. The contents of chlorine were increased with increasing $TiCl_4$ inlet fraction and nearly constant with increasing $N_2$ inlet fraction.

  • PDF

침전법으로 TiCl4 수용액의 산농도 조절을 통한 나노크기의 순수한 브루카이트상 이산화티타늄 분말 제조 (Synthesis of Pure Brookite-type TiO2 Nanoparticles from Aqueous TiCl4 Solution with controlled Acidity by Precipitation Method)

  • 이정훈;양영석
    • 공업화학
    • /
    • 제18권6호
    • /
    • pp.545-551
    • /
    • 2007
  • $TiCl_4$ 수용액의 침전반응으로 $TiO_2$를 제조할 때 침전용액의 염산농도와 반응온도 및 $Ti^{4+}$농도는 $TiO_2$ 침전물의 결정구조를 결정하는 중요한 인자이며, 이들의 조절을 통하여 브루카이트상의 부피분율 제어가 가능하다. 순수한 브루카이트상 이산화티타늄을 제조하기 위해서는 $Ti^{4+}$농도를 1.0 M 이하로 유지하고, 침전용액의 염산농도를 2.53~6.41 M이 되도록 조절한후 $70^{\circ}C$ 이하에서 20 h 침전반응 시켜야 한다. 한편, 순수한 브루카이트상 분말을 열처리한 결과 브루카이트상은 열처리 온도의 증가에 따라 아나타제상으로 상전이 된 후 최종적으로 루틸상으로 상변화가 진행되었다.

Sodium Flame Encapsulation 방법에 의한 초미립 Ti 분말 합성 및 공정개발 (Synthesis and Process Development of Ultrafine Ti Powder by Sodium Flame Encapsulation Method)

  • 맹덕영;이창규;김흥희
    • 한국재료학회지
    • /
    • 제12권5호
    • /
    • pp.391-397
    • /
    • 2002
  • Synthesis and process development of nano-size Ti powder by SFE(Sodium/halide Flame Encapsulation) method were investigated. Four concentric coflow burner was used and its flame configuration was $TiCl_4/Ar/Na/Ar$ in order from the center. Flame has been controlled by the various processing parameters such as temperature of burner and flow rates of both $TiCl_4$(g) precursor and Na(g). It was found that yellow-colored flame was shown in the flow rates of 70cc/min of $TiCl_4$(g) precursor and 2 $\ell$ /min of Na(g) which were regarded as optimum flame condition. The powders encapsuled by NaCl were produced having the average powder size of 250nm. The results of X-ray diffraction showed that powders from the optimized condition consisted of pure Ti and NaCl. TEM analysis confirmed that the several Ti powders of 20-100nm were encapsulated with NaCl. After removing sodium chloride by heat treatment, the spherical Ti powders with the size range of 80 to 150nm were obtained.

균일침전법에 의한 이산화티타늄 제조공정에서 TiOCl2 수용액의 Cl-total:Ti+4의 몰 비율이 TiO2 결정구조에 미치는 영향 (Influence of the Molar Ratio of Cl-total:Ti+4 on the Crystalline Structure in Preparation of TiO2 from Aqueous TiOCl2 Solution by Homogeneous Precipitation Method)

  • 이정훈;양영석
    • 공업화학
    • /
    • 제16권6호
    • /
    • pp.785-789
    • /
    • 2005
  • $TiCl_4$와 염산수용액을 사용하여 균일침전반응으로 브루카이트상과 루틸상의 혼합상 $TiO_2$ 분말을 제조하여 분말특성을 조사하였다. 분석결과로부터 순수한 루틸상과 혼합상이 합성되기 위한 침전용액의 ${Cl^-}_{total}:Ti^{+4}$의 몰 비율이 제시되었다. 또한, 혼합상이 얻어지는 조건에서는 염산의 농도가 증가할수록 브루카이트상의 부피분율이 증가하였으며, 이 분말을 열처리한 결과 브루카이트상은 루틸상으로 직접 상변화하지 않고 $800^{\circ}{\sim}850^{\circ}C$에서 아나타제상으로 상전이한 후 $1000^{\circ}C$에서 최종적으로 안정한 루틸상으로 상변화되었다.

Dynamic Response of Charge Transfer and Recombination at Various Electrodes in Dye-sensitized Solar Cells Investigated Using Intensity Modulated Photocurrent and Photovoltage Spectroscopy

  • Kim, Gyeong-Ok;Ryu, Kwang-Sun
    • Bulletin of the Korean Chemical Society
    • /
    • 제33권2호
    • /
    • pp.469-472
    • /
    • 2012
  • Intensity modulated photocurrent spectroscopy and intensity modulated photovoltage spectroscopy were investigated to measure the dynamic response of charge transfer and recombination in the standard, $TiCl_4$-treated and the combined scattering layer electrode dye-sensitized solar cells (DSSCs). IMPS and IMVS provided transit time ($\tau_n$), lifetime ($\tau_r$), diffusion coefficient ($D_n$) and effective diffusion length ($L_n$). These expressions are derived that generation, collection, and recombination of electrons in a thin layer nanocrystalline DSSC under conditions of steady illumination and with a superimposed small amplitude modulation. In this experimental, IMPS/IMVS showed that the main effect of $TiCl_4$ treatment is to suppress the recombination of photogenerated electrons, thereby extending their lifetime. And the Diffusion coefficient of combined scattering layer electrode is $6.10{\times}10^{-6}$ higher than that of the others, resulting in longer diffusion length.

Influence of a TiCl4 Treatment Condition on Dye-Sensitized Solar Cells

  • Kim, Jung-Kyu;Shin, Ka-Hee;Lee, Kun-Seok;Park, Jong-Hyeok
    • Journal of Electrochemical Science and Technology
    • /
    • 제1권2호
    • /
    • pp.81-84
    • /
    • 2010
  • In dye-sensitized solar cells (DSSCs), the back transfer of photo-generated electrons from FTO glass to triiodide ions in an electrolyte is an important loss mechanism, which leads to low cell efficiency. Recently, this back electron transfer was greatly suppressed by the introduction of a compact $TiO_2$ blocking layer, which was prepared by the treatment of $TiCl_4$ solution. In the present work, more detailed $TiCl_4$ treated surface conditions on FTO substrate were investigated and DSSC performances were correlated with the surface morphology as well as dark current behavior.

유기용매상에서 제조된 수소제조용 CdS-TiO2 나노복합 광촉매의 특성 연구 (Photoelectrochemical and Hydrogen Production Characteristics of CdS-TiO2 Nanocomposite Photocatalysts Synthesized in Organic Solvent)

  • 장점석;소원욱;김광제;문상진
    • 한국수소및신에너지학회논문집
    • /
    • 제13권3호
    • /
    • pp.224-232
    • /
    • 2002
  • CdS-$TiO_2$ nano-composite sol was prepared by the sol-gel method in organic solvents at room temperature and further hydrothermal treatment at various temperatures to control the physical properties of the primary particles. Again, CdS-$TiO_2$ composite particulate films were made by casting CdS-$TiO_2$ sols onto $F:SnO_2$ conducting glass and then heat-treatment at $400^{\circ}C$. Physical properties of these 61ms were further controlled by the surface treatment with $TiCl_4$, aqueous solution. The photo currents and hydrogen production rates measured under the experimental conditions varied according to the $CdS/[CdS+TiO_2]$ mole ratio and the mixed-sol preparation method. For $CdS-TiO_2$ composite sols prepared in IPA, CdS particles were homogeneously surrounded by $TiO_2$ particles. Also, the surface treatment with $TiCl_4$ aqueous solution caused a considerable improvement in the photocatalytic activity, probably as a result of close contacts between the primary particles by the etching effect of $TiCl_4$. It was found that the photoelectrochemical performance of these particulate films could be effectively enhanced by this approach.

수소제조에 관한 박막형 CdS-TiO2 복합 광촉매계의 표면처리 효과 (Effect of Surface Treatment of CdS-TiO2 Composite Photocatalysts with Film Type on Hydrogen Production)

  • 장점석;소원욱;김광제;문상진
    • 한국수소및신에너지학회논문집
    • /
    • 제13권1호
    • /
    • pp.34-41
    • /
    • 2002
  • CdS and $TiO_2$ nanoparticles were made by the precipitation method and sol-gel method, respectively, and they were mixed mechanically and then treated with the hydrothermal processing. CdS-$TiO_2$ composite particulate films were thus prepared by casting CdS-$TiO_2$ mixed sol onto $SnO_2$ conducting glass and a subsequent heat-treatment at $400^{\circ}C$. Again, the physico-chemical and photoelectrochemical properties of these films were controlled by the surface treatment with $TiCl_4$ aqueous solution. The photocurrents and the hydrogen production rates measured under the present experimental conditions varied in the range of $3.5{\sim}4.5mA/cm^2$ and $0.3{\sim}1.8cc/cm^2$-hr, respectively, and showed the maximum values at the $CdS/[CdS+TiO_2]$ mole ratio of 0.2. Also, the surface treatment with $TiCl_4$ aqueous solution caused a considerable improvement in the photocatalytic activity, Probably as a result of close contacts between the primary particles by the etching effect of $TiCl_4$ It was found that the photoelectrochemical performance of these particulate films could be effectively enhanced by this approach.

A Preponderant Enhancement of Conversion Efficiency by Surface Coating of $SnO_2$ Nanoparticles in Organic MK-2 Dye Sensitized Solar Cell

  • Son, Dae-Yong;Lee, Chang-Ryul;Park, Nam-Gyu
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
    • /
    • pp.218-218
    • /
    • 2012
  • Nanocrystalline $SnO_2$ colloids are synthesized by hydrolysis of $SnCl_4{\cdot}5H_2O$ in aqueous ammonia solution. The synthesized $SnO_2$ nanoparticles with ca. 15 nm in diameter are coated on a fluorinedoped thin oxide (FTO) conductive substrate and heated at $550^{\circ}C$. The annealed $SnO_2$ film is treated with aqueous $TiCl_4$ solution, which is sensitzied with MK-2 dye (2-cyano-3-[5'''-(9-ethyl- 9H-carbazol-3-yl)-3',3'',3''',4-tetra-n-hexyl-[2,2',5',2'',5'',2''']-quater thiophen-5-yl]). Compared to bare $SnO_2$ film, the conversion efficiency is significantly improved from 0.22% to 3.13% after surface treatment of $SnO_2$ with $TiCl_4$, which is mainly due to the large increases in both photocurrent density from 1.33 to $9.46mA/cm^2$ and voltage from 315 to 634 mV. It is noted that little change in the amount of the adsorbed dye is detected from 1.21 for the bare $SnO_2$ to $1.28{\mu}mol/cm^2$ for the $TiCl_{4-}$ treated $SnO_2$. This indicates that the photocurrent density increased by more than 6 times is not closely related to the dye loading concentration. From the photocurrent and voltage transient spectroscopic studies, electron life time increases by about 13 order of magnitude, whereas electron diffusion coefficient decreases by about 3.6 times after $TiCl_4$ treatment. Slow electron diffusion rate offers sufficient time for regeneration kinetics. As a result, charge collection efficiency of about 40% before $TiCl_4$ treatment is improved to 95% after $TiCl_4$ treatment. The large increase in voltage is due to the significant increase in electron life time, associated with upward shift of fermi energy.

  • PDF

염료감응 태양전지의 TiO2 전극의 다중층 및 TiCl4 처리에 따른 효과 (Effects of Multi-layer and TiCl4 Treatment for TiO2 Electrode in Dye-sensitized Solar Cell)

  • 김경옥;김기원;조권구;류광선
    • 공업화학
    • /
    • 제22권2호
    • /
    • pp.190-195
    • /
    • 2011
  • 다중층을 형성하여 광자를 가두는 효과와 산란층의 효과를 보고, $TiCl_4$ 처리를 통해 전극에서의 전자의 재결합이 줄어드는 정도와 그에 따른 효과를 알아보기 위하여 여러 가지 방법으로 $TiO_2$ 전극을 형성하고, 가장 최적의 전극 조건을 알아보았다. 각 전극의 특성을 알기 위해서 I-V 곡선, UV-VIS 분광기, EIS, IPCE를 측정하였다. 그 결과, I-V 곡선을 통해 한 층 보다는 다중층이 효율이 더 높은 것을 확인할 수 있었고, 기판 표면과 전극표면에 $TiCl_4$ 처리를 함으로써 EIS분석을 통해 반응저항이 감소하여 효율이 증가함을 확인할 수 있었다. 여러 전극 조건 중 산란층을 지닌 전극이 기본 한 층을 사용한 전극의 효율보다 약 19% 정도 높아짐을 확인하였다. 이러한 효율의 증가는 장파장을 투과하는 빛이 산란층을 통과할 때 전자 이동 경로가 길어지게 되어 단락전류의 값을 증가시키기 때문이다. 이에 따라, $J_{SC}$는 약 10% 정도 증가하였으며, IPCE는 최대 피크에서 약 12%가 향상되는 특성을 보였다.