Preparation and Characterization of $Ba_{x}Sr_{1-x}TiO_3$ thin films Using ECR-FEMOCVD
(ECR-PEMOCVD법을 이용한 $Ba_{x}Sr_{1-x}TiO_3$ 박막의 제조 및 특성평가)
-
- Proceedings of the Materials Research Society of Korea Conference
- /
- 1995.11a
- /
- pp.95-95
- /
- 1995