• 제목/요약/키워드: $SrTiO_3$$BaTiO_3$

검색결과 494건 처리시간 0.034초

기판온도에 따른 (Ba,Sr)TiO$_3$ 박막의 구조와 유전특성 (The Structure and Dielectric Properties of the (Ba,Sr)TiO$_3$ Thin Films with the Substrate Temperature)

  • 이상철;이문기;이영희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권11호
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    • pp.603-608
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    • 2000
  • $(Ba, Sr)TiO_{3}$[BST] thin films were fabricated on the Pt/TiO$_2$/SiO$_2$/Si substrate by the RF sputtering. The structure and dielectric properties of the BST thin films with the substrate temperature were investigated. Increasing the substrate temperature, The BST phase increased and barium multi titanate phases decreased. Increasing the frequency, the dielectric constant decreased and the dielectric loss increased. The dielectric constant and dielectric loss of the BST thin films deposited at 50$0^{\circ}C$ were 300 and 0.018, respectively at 1 kHz. The leakage current density of the BST thin films deposited at 50$0^{\circ}C$ was $10^{-9}$ A/$\textrm{cm}^2$ with applied voltage of 3V. Because of the high dielectric constant(300), low dielectric loss(0.018) and low leakage current($10^{-9}$ A/$\textrm{cm}^2$), BST thin films deposited at 50$0^{\circ}C$ is expecting for the application of DRAM.

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A study of the inorganic element contents for the ginsengs of Keumsan, Chungnam

  • 송석환
    • 고려인삼학회:학술대회논문집
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    • 고려인삼학회 2008년도 춘계 학술대회
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    • pp.74-75
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    • 2008
  • This study is for geochemical relationships between ginsengs and soils from three representative soil types from Keumsan, shale, phyllite and granite. For these study, ginsengs, with the field and weathered soils were collected from the three regions, and are analysed for the major and trace elements. In the weathered soils(avg.), the granite and phyllite areas are high in the most of elements while the shale area is low. In the correlation coefficients, negative correlations are shown in the $Al_2O_3$-MgO pair while positive correlations, are shown in the Ba-Sr, Zr, Sr-Zr and Cs-Ge pairs. In the field soils(avg.), the granite and phyllite areas are, generally, high in the most of elements while the shale area is low. In the shale area, the major elements are high in the 4 year soils, but low in the 2 year soils. The LFS(Ba, Sr, Cs) and transitional elements are high in the 2 year soils, but low in the 4 year soils. The HFS(Y, Zr) is high in the 4 year soils. In the correlation coefficients, most of the elements from the 4 year show positive relationships. Positive correlations are shown in the $Al_2O_3$-CaO, MnO-MgO, V-Tl, and Ba-Sr pairs in all localities. In the ginseng contents, clear chemical differences with the ages are shown in the shale and granite ares, but not clear in the phyllite area. In the shale area Mn, Mg, Ba, Sr, and Y contents, increase with ages but decrease in Al, Cs, Be and Cd. In the correlation coefficients, degrees of the correlations for the major elements become low with the ages. Positive correlations are shown in the Al-Mn, Ti, Mn-Ti, Mg-Ca, Ca-K, Ba-Cs, Y and Cs-Y pairs. Comparisons with ginsengs of the same ages from the different areas suggest that generally, the 2 years in the shale and 3 and 4 years in the granite area are distinctive. Relative ratios(granite/ shale area) of the ginsengs are below 1 in the major elements except Mn in the 2 year ginsengs and above 1 in the other elements except Mg and Na in the 4 year. Relative ratios(granite/ phyllite area) of the ginsengs are high in the 3 year from the phyllite area. In the relative ratios(weathered/field soils) of the soils, numbers of the elements showing the ratios of above 1 increase from the shale, to phyllite and granite in the case of the major elements, but decrease in the case of the trace elements. These results suggest that major elements are high in the granite while trace elements are high in the shale area. In the relative ratios between field soils and ginsengs(field soils/ginseng), the shale area, regardless of the ages, show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Y and Tl, of several ten times in the MnO, MgO and Ba and of several times in the CaO contents. These results suggest that ginseng contents are significantly different from the field soils in the $Al_2O_3$, $TiO_2$, Y and Tl, but similar in the CaO contents. The phyllite area, regardless of the ages, show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Y, Tl and Be, of several ten times in the MnO, MgO, $Na_2O$ and Ba, and of several times to ten times in the CaO, $K_2O$ and Sr contents. These results suggest that ginseng contents are significantly different from those of the field soils in the $Al_2O_3$, $TiO_2$, Y, Tl and Be, but similar in the CaO, $K_2O$ and Sr contents. The granite area, regardless of the ages, show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Tl and Be, of several ten times in the Ba, and of several times to ten times in the MgO and CaO contents. Of the other elements, differences of several times to ten times are shown in the MnO, $K_2O$ and Sr contents. These results suggest that ginseng contents are significantly different from those of the field soils in the $Al_2O_3$, $TiO_2$, Tl and Be, but similar in the $K_2O$ and Sr contents. Comparisons among the different ages from the same area suggest that, in the case of shale area, differences of several hundred times in the $Al_2O_3$ and $TiO_2$, of the several ten times in the MnO, MgO and Ba and several times in the CaO and $K_2O$ are shown in the 2 year ginsengs. Differences of several hundred times in the $Al_2O_3$, $TiO_2$, Cs, Y, Tl and Be, of above several ten times in the MnO, MgO, $K_2O$ and Ba, and of several times in the CaO and Sr are shown in the 3 year ginsengs. Differences of several hundred to thousand times in the $Al_2O_3$, of above several hundred times in the $TiO_2$, Cs and Y, and of several ten times in the MnO, MgO, $K_2O$ and Ba, and of several times in the $Na_2O$ are shown in the 4 year ginsengs. These relationships suggest that, regardless of the localities in the shale area, $Al_2O_3$ contents of the soils show big differences from those of the ginsengs. Regardless of the ages of ginsengs, comparisons with the overall average contents of each area show differences of several hundred times in the $Al_2O_3$, $TiO_2$, Cs and Tl and of several ten times in the MnO. These overall relationships suggest that the $Al_2O_3$, $TiO_2$, Cs and Tl contents of the soils are higher than those of the ginsengs, show big differences between two and low different contents are found in the MnO. In detail, differences of several hundred times in the Y, and ten times in the MgO and Sr, and of several times in the CaO, $Na_2O$, $K_2O$ in the case of shale area, are shown. These results suggest that the soils are higher than the ginsengs in the Y and significantly differences in Y, and moderately differences in the MgO and Sr, and low differences in the CaO, $Na_2O$ and $K_2O$ are shown between soils and ginsengs.

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Ar/$CF_4$ 고밀도 플라즈마에서(Ba,Sr)$TiO_3$ 박막의 식각 메카니즘에 관한 연구 (A Study on Etching Mechanism of (Ba,Sr)$TiO_3$ in Ar/$CF_4$ High Density Plasma)

  • 김승범;김창일
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1550-1552
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    • 1999
  • In this study, (Ba,Sr)$TiO_3$ thin films were etched with a magnetically enhanced inductively coupled plasma (MEICP) as a function $CF_4$/Ar gas mixing ratio. Experimental was done by varying the etching parameters such as rf power, dc bias and chamber pressure. The maximum etch rate of the BST films was $1700{\AA}$/min under $CF_4/(CF_4+Ar)$ of 0.1, 600W/350V and 5 mTorr. The selectivity of BST to Pt and PR was 0.6, 0.7, respectively. X-ray photoelectron spectroscopy (XPS) studies shows that there are surface reaction between Ba, Sr, Ti and C, F radicals during the (Ba,Sr)$TiO_3$ etching. To analysis the composition of surface residue remaining after the etching, films etched with different $CF_4$/Ar gas mixing ratio were investigated using XPS.

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$Dy_{2}O_{3}$가 첨가된 (Ba,Sr,Ca)$TiO_3$ 후막의 구조 및 유전 특성 (Structural and Dielectric Properties of (Ba,Sr,Ca)$TiO_3$ Thick films Doped with $Dy_{2}O_{3}$)

  • 윤상은;이성갑;박상만;노현지;이영희;배선기
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1275-1276
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    • 2007
  • For fabrication of $BaTiO_3$ system Ferroelectric thick films, (Ba,Sr,Ca)$TiO_3$ (BSCT) powders, prepared by using the alkoxide-based sol-gel method, were doped $MnCO_3$ as acceptor and $Dy_{2}O_{3}$ as donor. $MnCO_3$ and $Dy_{2}O_{3}$-doped (Ba,Sr,Ca)$TiO_3$ thick films were fabricated by screen printing techniques on high purity alumina substrates. The structure and dielectric properties were investigated with variation of $Dy_{2}O_{3}$ amount. As a result of the differential thermal analysis(DTA), exothermic peak was observed at around $670^{\circ}C$ due to the formation of the polycrystalline perovskite phase. All the BSCT thick films, sintered at $1420^{\circ}C$ for 2h, showed the typical XRD patterns of perovskite polycrystalline structure and no pyrochlore phase was observed. The average grain size and thickness of specimens no doped with $Dy_{2}O_{3}$ was 1.32mm, 52mm, respectively. The relative dielectric constant decreased and dielectric loss increased with increasing amount of $Dy_{2}O_{3}$ dopant, the values of the BSCT thick films no doped with $Dy_{2}O_{3}$ were 4043 and 0.4% at 1 kHz, respectively. The relative dielectric constant gradually decreased in the measured frequency range from 0.1 to 100 kHz

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Dielectric Properties of Continuous Composition Spreaded $BaTiO_3-SrTiO_3$ Thin Films Prepared by Off-Axis RF Magnetron Sputtering System

  • Kim, Yoon-Hoe;Jung, Keun;Yoon, Seok-Jin;Park, Kyung-Bong;Choi, Ji-Won
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.326-326
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    • 2010
  • The dielectric properties of continuous composition spreaded (CCS) $BaTiO_3-SrTiO_3$ (BST) thin filmsgrown at room temperature and annealed at different temperature ($350^{\circ}C$ and $550^{\circ}C$) were investigated. Moreover, electrical properties (leakage current and breakdown voltage) of CCS BST thin films were also investigated. The aluminum top-electrode, sized by $200{\times}200\;{\mu}m2$ and apart from each other by $300\;{\mu}m$, were deposited on the CCS BST thin films by the DC sputtering system. The dielectric properties of the CCS BST thin films were significantly influenced depending on the distance from $BaTiO_3$ and $SrTiO_3$ targets which was attributed to the $BaTiO_3-SrTiO_3$ composition ratio. The maps of dielectric constants and loss tangents were plotted via $1500\;{\mu}m$ - step measuring. The specific points showing the dielectric constant (k: ~300) and loss tangent (tand: ~0.008) at 1 MHz were found.

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저온소결용 (Ba, Sr)$TiO_3$-Glass계 세라믹스의 유전특성 (Dielectric properties of low temperature firing glass reacted (Ba, Sr)$TiO_3$$ ceramic capacitors)

  • 구자원;설용건;최승철
    • 한국재료학회지
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    • 제5권2호
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    • pp.151-156
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    • 1995
  • $(Ba, Sr)TiO_{3}$계에 저융점의 Glass물질을 첨가하여 저온소결이 가능하며, 고유전율을 갖는 유전체 재료를 제조하여, 그 특성을 조사하였다. 본 연구에서는 고유전율의 $(Ba, Sr)TiO_{3}$계에 PbO함량이 서로 다른 Glass물질을 첨가하여 조성변화에 따른 저온소결거동 및 유전특성을 조사하였으며, 적층형 세라믹 Capacitor(MLCC)에 응용하기 위하여 다양한 조성으로 제조하였다. $PbO-ZnO-B_{2}O_{2}$계 Glass 성분을 첨가하여 소결온도를 $1350^{\circ}C$에서 $1050^{\circ}C$까지 낮출수 있었으며, 4wt% glass 첨가로 $1150^{\circ}C$ 이하에서 2시간 소결한 저온소결용 재료는 실온에서 8000정도의 높은 비유전율과 0.005의 낮은 유전손실 그리고 광역온도범위에서 유전상수의 안정성을 가진 우수한 특성을 나타내며, 입자크기가 1~3 $\mu$m 정도로 치밀한 미세구조를 가지고 있다. 본 연구의 저온소결용 유전체 재료는 Z5U 규격을 만족시키고 기존의 $BaTiO_{3}$계 재료에 비해 낮은 소결온도를 가지므로 MLCC에 응용시 내부전극으로 Ag-Pd alloy 사용이 가능한 것으로 밝혀졌다.

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불순물 첨가에 따른 $(Ba,Sr,Ca)TiO_{3}$ 세라믹의 유전특성 (Dielectric Properties of $(Ba,Sr,Ca)TiO_{3}$ Ceramics with Additon of Dopant)

  • 이성갑;이영희;임성수;박인길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.42-45
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    • 2001
  • $(Ba_{0.6}Sr_{0.4}Ca_{x})TiO_{3}+yZrO_{2}$ wt% (x=0.10, 0.15, 0.20, y=0.5~3.0) specimens were fabricated by the mixed-oxide method and then the structural and dielectric properties as a function of the composition ratio and $ZrO_2$ contents were studied. All BSCT specimens showed dense and homogeneous structure without the presence of the seconds phase. The Curie temperature and the dielectric constant at room temperature decreased with increasing the Ca/Ba composition ratio and $ZrO_2$ content. The BSCT(50/40/10) specimens showed the excellent tunability property. And the tunability were increased with increasing the contents of $ZrO_2$.

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불순물 첨가에 따른 (Ba,Sr,Ca)$TiO_3$ 세라믹의 유전특성 (Dielectric Properties of (Ba,Sr,Ca)$TiO_3$ Ceramics with Addition of Dopant)

  • 이성갑;이영희;임성수;박인길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.42-45
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    • 2001
  • (Ba$_{0.6-x}$Sr$_{0.4}$Ca$_{x}$)TiO$_3$+yZrO$_2$wt% (x=1.10, 0.15, 0.20, y=0.5~3.0) specimens were fabricated by the mixed and ZrO$_2$ contents were studied. All BSCT specimens contents were studied. All BSCT specimens showed dense and homogeneous structure without the presence of the seconds phase. The Curie temperature and the dielectric constant at room temperature decreased with increasing the Ca/Ba composition ratio and ZrO$_2$ content. The BSCT(50/40/10) specimens showed the excellent tunability property. And the tunability were increased with increasing the contents of ZrO$_2$./TEX>.

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