• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.12
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• pp.1296-1300
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• 2004

SnO$_2$ is one of the most suitable gas sensor materials. The microstructure and surface morphology of films must be controlled because the electrical and optical properties of SnO$_2$ films depend on these characteristics. The effects of chemical mechanical polishing(CMP) on the variation of morphology of SnO$_2$ films prepared by RF sputtering system were investigated. The commercially developed ceria-based oxide slurry, silica-based oxide slurry, and alumina-based tungsten slurry were used as CMP slurry. Non-uniformities of all slurries met stability standards of less than 5 %. Silica slurry had the highest removal rate among three different slurries, sufficient thin film topographies and suitable root mean square(RMS) values.

• Korean Journal of Materials Research
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• v.4 no.3
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• pp.295-300
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• 1994

This paper is aimed to study the effect of Pd activator, the annealing temperature, and operating temperatures on the response characteristics of the $SnO_2/Al_2O_3$ sensor. The resistance of device has shown minimum value when annealing temperature and operating temperature of device are $550^{\circ}C$ and $350^{\circ}C$ respectively in ethanol gas. And the response characteristics of the device showed the best results when lwt% Pd was added to SnOz especially in low concentration of ethanol gas.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1410-1412
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• 2003

PTC 자기발열기판을 사용해서 저전력 방폭형 CO센서를 제작하고 그 특성을 고찰하였다. CO가스센서의 감지특성을 향상시키기 위하여 Pt가 island 형상을 갖는 다층 Pt/$SnO_2$ 박막구조를 도입하였으며, 이와 같은 구조는 Pt/$SnO_2$ 위에 다시 $SnO_2$ 및 Pt cluster 층들을 연속적으로 증착함으로서 제작되었다. 200ppm의 CO가스농도에서 측정된 다층 $Pt/SnO_2$박막 센서의 감도는 1.72($R_{air}/R_{CO}$)로, 단충 Pt/$SnO_2$ 박막 센서의 최대감도(1.23)보다 훨씬 더 높았다 이것은 Pt와 $SnO_2$사이의 계면적 증대에 기인하는 것으로 생각된다. 제작된 Pt/$SnO_2$ 가스센서의 평균 소비전력은 38.5mW이며, 측정농도범위($30{\sim}1,000ppm$)에서 매우 양호한 감지특성을 나타내었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.160-161
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• 2008

$SnO_2$는 n형 반도체로써 3.6 eV의 큰 밴드갭을 가지는 물질로 CO와 NOx 가스에 좋은 감도를 나타내는 것으로 보고되고 있다. 문헌에 따른 일반적인 $SnO_2$ 가스센서는 후막이나 벌크형태로 제작되었다. 근래에는 가스감응체가 $SnO_2$ 나노선 형태인 가스센서가 활발한 연구 중에 있다. 본 논문에서는 기판 위에 서로 분리된 전극 패턴에 Au를 촉매로 하여 네트워크 구조로 된 $SnO_2$ 나노선이 합성되었다. 제작된 가스센서에 Pd 도핑에 따른 영향을 알아보기 위하여 1.8 mM의 Pd 용액 ($PdCl_2{\cdot}xH_2O$ 3 mg + $H_2O$ 10 ml)을 이용하여 센서에 도핑하였다. 측정 시스템에서 $NO_2$ 가스에 대한 센서의 특성을 분석한 결과 도핑하지 않은 $SnO_2$ 센서보다 20%정도의 감도가 개선되었다.

• Journal of Integrative Natural Science
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• v.1 no.1
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• pp.54-57
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• 2008

This report examines the variation on structural properties of $SnO_2$ thin films. TEM studies shows some of the interfaces to be atomically faceted. Secondary X-ray photoelectron Spectroscopy Analysis(XPS) depth profiles show that films have a uniform composition along the depth.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.40-41
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• 2007

$SnO_2$ nanowires are used at the nanoscale level for the electrical transduction of the gas interaction with these sensing materials. We report on a study of high sensitivity and fast NOx gas sensor. We focused on improving the response time and refresh time by growth nanowires on the trench structure of Si substrate as air path. To improve refresh time we applied the trench structure with depth of $10\;{\mu}m$ by the inductively coupled plasma reactive ion etching(ICP-RIE). The fabricated device was measured at temperature of $200{\sim}300^{\circ}C$. The sensor exhibit ultra-fast and reversible electrical response (t90% ~4 s for response and ~3 s for recovery).

• Korean Journal of Materials Research
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• v.24 no.9
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• pp.451-457
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• 2014

We developed a high-performance methane gas sensor based on a $SnO_2$ hollow hemisphere array structure of nano-thickness. The sensor structures were fabricated by sputter deposition of Sn metal over an array of polystyrene spheres distributed on a planar substrate, followed by an oxidation process to oxidize the Sn to $SnO_2$ while removing the polystyrene template cores. The surface morphology and structural properties were examined by scanning electron microscopy. An optimization of the structure for methane sensing was also carried out. The effects of oxidation temperature, film thickness, gold doping, and morphology were examined. An impressive response of ~220% was observed for a 200 ppm concentration of $CH_4$ gas at an operating temperature of $400^{\circ}C$ for a sample fabricated by 30 sec sputtering of Sn, and oxidation at $800^{\circ}C$ for 2 hr in air. This high response was enabled by the open structure of the hemisphere array thin films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1217-1223
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• 2003

Nerve gas sensor based on tin oxide was fabricated and its characteristics were examined. Target gas is dimethyl methyl phosphonate(C$_3$ $H_{9}$ $O_3$P, DMMP) that is simulant gas of nerve gas. Sensing materials were Sn $O_2$ added a-Al$_2$ $O_3$ with 0∼20wt.% and were physically mixed each material. They were deposited by screen printing method on alumina substrate. The sensor device was consisted of sensing electrode with interdigit(IDT) type in front and a heater in back side. Total size of device was 7${\times}$10${\times}$0.6㎣. Crystallite size & phase identification and morphology of fabricated Sn $O_2$ powders were analyzed by X-ray diffraction and by a scanning electron microscope, respectively. Fabricated sensor was measured as flow type and resistance change of sensing material was monitored as real time using LabVIEW program. The best sensitivity was 75% at adding 4wt.% $\alpha$-Al$_2$ $O_3$, operating temperature 30$0^{\circ}C$ to DMMP 0.5ppm. Response and recovery time were about 1 and 3min., respectively. Repetition measurement was very good with $\pm$3％ in full scale.TEX>$\pm$3％ in full scale.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.476-482
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• 1997

A portable electronic nose system has been fabricated and characterized using an oxide semiconductor gas sensor array and pattern recognition techniques such as principal component analysis and back-propagation artificial neural network. The sensor array consists of six thick-film gas sensors whose sensing layers are Pd-doped $WO_{3}$, Pt-doped $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$-doped $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$-doped $SnO_{2}$ + Pd coated layer, $Al_{2}O_{3}$-doped ZnO and $PdCl_{2}$-doped $SnO_{2}$. The portable electronic nose system consists of an 16bit Intel 80c196kc as CPU, an EPROM for storing system main program, an EEPROM for containing optimized connection weights of artificial neural network, an LCD for displaying gas concentrations. As an application the system has been used to identify 26 carbon monoxide/hydrocarbon (CO/HC) car exhausting gases in the concentration range of CO 0%/HC 0 ppm to CO 7.6%/HC 400 ppm and the identification has been successfully demonstrated.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.4
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• pp.101-106
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• 2008

The $SnO_2$ thin films doped with Pd and CNT as $NO_2$ gas sensor were prepared by spin coating and then the $NO_2$ gas response of these films were evaluated under $1ppm{\sim}5ppm\;NO_2$ concentration and operating temperature of $200^{\circ}C$. It was found that the sensor resistance was increased with $NO_2$ exposure and $NO_2$ concentration. The 3wt% Pd doped sample showed a sensitivity of 26.5 which was 10 times higher than that of pure $SnO_2$. And also the sensitivity of CNT doped sample increased with CNT content and it had 72 when 0.225 wt% of CNT was added under 5ppm $NO_2$ concentration.