• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.5
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• pp.8-14
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• 2003

The characteristics of grinding and wear behavior of diamond wheel for grinding ceramic materials was investigated in this study. In case of $Si_3N_4$, the wear of wheel was large, the finding force was relatively stable and the fluctuation of surface roughness n small. On the other hand in case of $Al_2O_3$ and $ZrO_2$, the wear of wheel and surface roughness were decreasing, the grinding force was increasing. During grinding with vitrified bond wheel, $Si_3N_4$ shows renewal of cutting edge while $Al_2O_3$ and $ZrO_2$ show glazing phenomenon of cutting grains. We have found that it possible to observe the behavior of grinding wheel by grinding ratio, grinding resistance, surface roughness and cutting edge ratio. Through the grinding experiments, it was found that grinding life of diamond wheel is 20 times for $Si_3N_4$, and 40 times fir $Al_2O_3$ and $ZrO_2$.

• Journal of the Korean Ceramic Society
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• v.49 no.4
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• pp.325-327
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• 2012

Europium-doped $LaSi_3N_5$ phosphor was synthesized from LaSi/Si/$Si_3N_4/Eu_2O_3$ mixture by nitridation at $1390^{\circ}C$ and additional annealing at $1650^{\circ}C$ for 4 h. The phosphor shows emissions in the green light region with a maximum at 560 nm. With increasing europium content in the general formula $La_{1-z}Eu_zSi_3N_{5-z}O_{1.5z}$ from z = 0.01 to 0.06 there was a maximum emission for z = 0.04 followed by concentration quenching for the highest europium content (z = 0.06).

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.9
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• pp.957-962
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• 2009

Sialon was produced by hot-pressing the mixtures of $Si_3N_4$, AlN and $Y_2O_3$ powders. All fracture tests were performed on a three-point loading system with a 30 mm bending span. Fracture toughness and Vickers hardness of smooth specimen were average 7.05 $MPa{\cdot}m^{0.5}$ and Hv = 1580, respectively. Density of three kinds of specimens, smooth specimen, smooth and healed specimen, smooth with $SiO_2$ colloidal coating and healed specimen, had beyond 99 % of theoretical density. Bending strength of smooth healed specimens had high strength more than 1 GPa. Crack healed specimens recovered as strength as smooth specimen. That is, cracked specimen with $SiO_2$ colloidal coating on cracked part recovered strength by heat treatment, completely. Crack healing of $Si_3N_4$ composite ceramics had contributed glassy $SiO_2$ to strength recovery. Limiting high temperature for bending strength of heat treated smooth specimen for bending strength was about 1273 K.

• Journal of information and communication convergence engineering
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• v.5 no.3
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• pp.215-218
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• 2007

In this paper, amorphous semiconductor and insulator thin film are etched using reactive ion etcher. At that time, we experiment in various RIE conditions (chamber pressure, gas flow rate, rf power, temperature) that have effects on quality of thin film. The using gases are $CF_4,\;CF_4+O_2,\;CCl_2F_2,\;CHF_3$ gases. The etching of a-Si:H thin film use $CF_4,\;CF_4+O_2$ gases and the etching of $a-SiO_2,\;a-SiN_x$ thin film use $CCl_2F_2,\;CHF_3$ gases. The $CCl_2F_2$ gas is particularly excellent because the selectivity of between a-Si:H thin film and $a-SiN_x$ thin film is 6:1. We made precise condition on dry etching with uniformity of 5%. If this dry etching condition is used, that process can acquire high yield and can cut down process cost.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.6
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• pp.170-177
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• 2000

Dense $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramic tool materials with various grain size were produced by sintering-HIP treatment and by gas-pressure sintering. The fracture toughness was measured by indentation fracture and indentation strength method for both ceramics with various grain size. The effect of the grain size on the fracture toughness was evaluated, and the correlation between fracture toughness and mechanical properties such as hardness, Young\`s modulus and flexural strength of these ceramic were also investigated. The highest fracture toughness of around 6.7 MPa.m(sup)1/2 was obtained in Si$_3$N$_4$ ceramics with grain size of 1.58${\mu}{\textrm}{m}$. With a larger grain size of $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramics, the fracture toughness was generally increased. The increased fracture toughness of these ceramic also improved the flexural strength although the hardness decreased considerably. Similar results were obtained in grain size and mechanical properties on both $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramic tool materials.

• Journal of the Korean Ceramic Society
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• v.28 no.8
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• pp.625-625
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• 1991

The specimens for the corrosion test were made by hot-pressing of SiC power with 2 wt% Nl2O3 and 10wt% Al2O3 additions at 2000℃ and 2050℃. The specimens were corroded in 37 mole% NaCl and 63 mole% Na2SO4 salt mixture at 1000℃ up to 60 min. SiO2 layer was formed on SiC and then this oxide layer was dissolved by Na2O ion in the salt mixture. The rate of corrosion of the specimen containing 10 wt% Al2O3 was slower than that of the specimen containing 2 wt% Al2O3. This is due to the presence of continuous grain boundary phase in the specimen containing 10 wt% Al2O3. The oxidation of SiC produced gas bubbles at the SiC-SiO2 interface. The rate of corrosion follows a linear rate law up to 50 min. and then was accelerated. This acceleration is due to the disruption oxide layer by the gas evolution at SiC-SiO2 interface. Pitting corrosion has found at open pores and grain boundaries.

• Transactions on Electrical and Electronic Materials
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• v.15 no.5
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• pp.245-248
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• 2014

$Pt/Al_2O_3/Si_3N_4/SiO_2/Si$ charge trap flash memory structures with various thicknesses of the $Si_3N_4$ charge trapping layer were fabricated. According to the calculated and measured results, we depicted electron loss in a schematic diagram that illustrates how the trap to band tunneling and thermal excitation affects electrons loss behavior with the change of $Si_3N_4$ thickness, temperature and trap energy levels. As a result, we deduce that $Si_3N_4$ thicknesses of more than 6 or less than 4.3 nm give no contribution to improving memory performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.127-128
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• 2009

CCP방식의 식각에 있어서 CF4/O2 Plasma Etch에 Ar을 첨가함으로써 Etch특성이 어떻게 변화하는지를 조사하였다. FE-SEM를 이용하여 Etch Profile를 측정하였다. 또한 Elipsometer와 Nanospec을 이용하여 Etch rate를 측정하였다. Ar의 비율이 전체의 47%정도를 차지하였을 때까지 Etch Profile이 향상되었다가 그이후로는 다시 감소하는 것을 볼 수 있었다. Ar을 첨가할수록 etch rate은 계속 향상되었다. Ar을 첨가하는 것은 물리적인 식각으로 반응하여 Etch rate의 향상과 적정량의 Ar을 첨가했을 때 Etch profile이 향상되는 결과를 얻었다.

• Journal of Ceramic Processing Research
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• v.22 no.1
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• pp.66-73
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• 2021

Ceramics have high hardness, corrosion resistance, and abrasion resistance, but are easily fractured by micro crack. Many studies on self-healing have been conducted to eliminate the risk of micro crack on the surface. SiO2 is self-healing material, in which Si and O2 are combined. TiO2-added Si3N4/SiC composites were sintered. The SiO2 colloid was coated on the surface, and heat treated. The bending strength and abrasion characteristics were evaluated. The specimen with SiO2 colloid coating had higher strength than that of the uncoated specimen, and the strength of TiO2-added specimen also increased. The friction coefficient and wear loss of SiO2 colloid coated specimens were smaller than those of the uncoated specimens. The friction coefficient and wear loss of TiO2-added specimens were smaller than those without additives. The friction coefficient and wear loss decreased with increasing bending strength. Friction coefficient and wear loss according to the heat treatment temperature showed the reverse tendency to the bending strength. Therefore, TiO2-added ceramic will ensure economic efficiency.

• Korean Chemical Engineering Research
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• v.56 no.4
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• pp.600-606
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• 2018

The influence of acidity in MTT zeolite of different Si/Al molar ratio's on the catalyst activity in methanol-to-olefin (MTO) reaction has been investigated. The Si/Al ratio was controlled with the Al content in the gel when N,N,N',N'-tetramethyl-1,3-diaminopropane was used as a structure directing agent (SDA). The gel composition was controlled to $20SiO_2$ : 30SDA : x (=0.25~1.25)$NaAlO_2$ : 2NaOH : $624H_2O$, which was subject to the hydrothermal synthesis at 433 K for 4 days. As the composition of sodium aluminate decreased, the particle size of MTT zeolite increased, and also the amount of acid sites decreased. To investigate the catalytic performance, MTO reaction was carried out at 673 K with $1.2h^{-1}$ WHSV. It was found that the H-MTT (1.00Al) catalyst with a Si/Al molar ratio of 24 maintained the methanol conversion over 90% for 900 min.