• Title/Summary/Keyword: $SiO_x$

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a-Si:H Photodiode Using Alumina Thin Film Barrier

  • Hur Chang-Wu;Dimitrijev Sima
    • Journal of information and communication convergence engineering
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    • v.3 no.4
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    • pp.179-183
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    • 2005
  • A photodiode capable of obtaining a sufficient photo/ dark current ratio at both forward bias state and reverse bias state is proposed. The photodiode includes a glass substrate, an aluminum film formed as a lower electrode over the glass substrate, an alumina film formed as an insulator barrier over the aluminum film, a hydrogenated amorphous silicon film formed as a photo conduction layer over a portion of the alumina film, and a transparent conduction film formed as an upper electrode over the hydro-generated amorphous silicon film. A good quality alumina $(Al_2O_3)$ film is formed by oxidation of aluminum film using electrolyte solution of succinic acid. Alumina is used as a potential barrier between amorphous silicon and aluminum. It controls dark-current restriction. In case of photodiodes made by changing the formation condition of alumina, we can obtain a stable dark current $(\~10^{-12}A)$ in alumina thickness below $1000{\AA}$. At the reverse bias state of the negative voltage in ITO (Indium Tin Oxide), the photo current has substantially constant value of $5{\times}10^{-9}$ A at light scan of 100 1x. On the other hand, the photo/dark current ratios become higher at smaller thicknesses of the alumina film. Therefore, the alumina film is used as a thin insulator barrier, which is distinct from the conventional concept of forming the insulator barrier layer near the transparent conduction film. Also, the structure with the insulator thin barrier layer formed near the lower electrode, opposed to the ITO film, solves the interface problem of the ITO film because it provides an improved photo current/dark current ratio.

Solution-Processed Inorganic Thin Film Transistors Fabricated from Butylamine-Capped Indium-Doped Zinc Oxide Nanocrystals

  • Pham, Hien Thu;Jeong, Hyun-Dam
    • Bulletin of the Korean Chemical Society
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    • v.35 no.2
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    • pp.494-500
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    • 2014
  • Indium-doped zinc oxide nanocrystals (IZO NCs), capped with stearic acid (SA) of different sizes, were synthesized using a hot injection method in a noncoordinating solvent 1-octadecene (ODE). The ligand exchange process was employed to modify the surface of IZO NCs by replacing the longer-chain ligand of stearic acid with the shorter-chain ligand of butylamine (BA). It should be noted that the ligand-exchange percentage was observed to be 75%. The change of particle size, morphology, and crystal structures were obtained using a field emission scanning electron microscope (FE-SEM) and X-ray diffraction pattern results. In our study, the 5 nm and 10 nm IZO NCs capped with stearic acid (SA-IZO) were ligand-exchanged with butylamine (BA), and were then spin-coated on a thermal oxide ($SiO_2$) gate insulator to fabricate a thin film transistor (TFT) device. The films were then annealed at various temperatures: $350^{\circ}C$, $400^{\circ}C$, $500^{\circ}C$, and $600^{\circ}C$. All samples showed semiconducting behavior and exhibited n-channel TFT. Curing temperature dependent on mobility was observed. Interestingly, mobility decreases with the increasing size of NCs from 5 to 10 nm. Miller-Abrahams hopping formalism was employed to explain the hopping mechanism insight our IZO NC films. By focusing on the effect of size, different curing temperatures, electron coupling, tunneling rate, and inter-NC separation, we found that the decrease in electron mobility for larger NCs was due to smaller electronic coupling.

자기조립박막 증착법을 이용한 영구적인 친수성 표면의 플루이딕스칩 제작에 관한 연구

  • Kim, Dong-Jin;Lee, Mun-Gwon;Lee, Jeong-Hwan;Im, Hyeon-U;Park, Jin-Gu;Sin, Sang-Taek;Kim, Jeong-Ho;Jo, Byeong-Gi
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.49.2-49.2
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    • 2009
  • 최근, 플루이딕스칩 제작에 있어서 가격이 저렴하며 구조물 형성이 쉽다는 장점으로 인하여 유리 기판을 플라스틱 기판으로 대체하려는 연구가 많이 진행하고 있다. 하지만 플라스틱 기판은 유리 기판에 비하여 많은 장점을 갖고 있음에도 불구하고, 기판 표면이 소수성이기 때문에 유체의 흐름을 저하시키는 문제점이 있다. 기존의 플라스틱 기판을 친수성으로 개질하는 방법으로는 화학적처리, 자외선 조사, 산소플라즈마 처리 등의 방법이 있었으나, 화학적처리 방법은 공정의 민감성과 폐기물로 인한 양산적용의 한계가 있고, 자외선 조사법 및 산소 플라즈마 처리는 친수성이 영구적이지 않다는 결정적인 문제점이 있다. 이는 플라스틱 플루이딕스칩의 신뢰도를 크게 저해하여 상용화에 큰 문제점으로 작용한다. 이러한 문제점을 극복하기 위한 새로운 방법의 친수성 표면처리가 요구되어 지고 있다. 본 연구에서는, 기존 플라스틱 기판의 친수성 표면처리 방법들의 문제점들을 개선하고자 플라스틱 기판의 변형을 야기하지 않는 저온 PE-CVD 방식을 이용하여 균질한 두께의 $SiO_2$박막을 형성 하였으며, 형성된 박막을 liquid self-assembled monolayer(L-SAM)방식을 이용하여 아민 표면으로 개질하였다. 이를 통해, 플라스틱 채널 상에서 유체의 원활한 흐름, 형성된 아민 표면에 단백질 및 DNA와 같은 생체 물질 고정화의 용이성 및 영구적 표면개질의 특성을 얻을 수 있었다. 이뿐만 아니라, 플라스틱 기판 외에도 재료에 관계없이 모든 물질의 표면을 생체 안정성이 뛰어난 친수성 표면으로 개질 할 수 있으며, 알데히드 및 카르복시산 등의 다양한 작용기로 변형이 쉽다는 장점이 있다. 개질된 친수성 표면의 평가를 위하여 시간에 따른 접 촉각 및 형광 스캐너(Fluorescence Scanner)를 이용하여 영구적인 친수성 특성 및 생체물질 적합성을 파악하였다. 또한, L-SAM 조건에 따른 아민의 형성정도를 측정하기 위하여 XPS(X-ray Photoelectron Spectroscopy) 분석을 실시 하였다. 최적화된 표면처리를 실제 플라스틱 플루이딕스칩에 적용하여, 유체의 흐름을 관찰 하였다.

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Inductively Coupled Plasma Etching of GST Thin Films in $Cl_2$/Ar Chemistry ($Cl_2$/Ar 분위기에서 GST 박막의 ICP 에칭)

  • Yoo, Kum-Pyo;Park, Eun-Jin;Kim, Man-Su;Yi, Seung-Hwan;Kwon, Kwang-Ho;Min, Nam-Ki
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1438-1439
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    • 2006
  • $Ge_{2}Sb_{2}Te_5$(GST) thin film at present is a promising candidate for a phase change random access memory (PCRAM) based on the difference in resistivity between the crystalline and amorphous phase. PCRAM is an easy to manufacture, low cost storage technology with a high storage density. Therefore today several major chip in manufacturers are investigating this data storage technique. Recently, A. Pirovano et al. showed that PCRAM can be safely scaled down to the 65 nm technology node. G. T Jeonget al. suggested that physical limit of PRAM scaling will be around 10 nm node. Etching process of GST thin ra films below 100 nm range becomes more challenging. However, not much information is available in this area. In this work, we report on a parametric study of ICP etching of GST thin films in $Cl_2$/Ar chemistry. The etching characteristics of $Ge_{2}Sb_{2}Te_5$ thin films were investigated using an inductively coupled plasma (ICP) of $Cl_2$/Ar gas mixture. The etch rate of the GST films increased with increasing $Cl_2$ flow rate, source and bias powers, and pressure. The selectivity of GST over the $SiO_2$ films was higher than 10:1. X-ray photoelectron spectroscopy(XPS) was performed to examine the chemical species present in the etched surface of GST thin films. XPS results showed that the etch rate-determining element among the Ge, Sb, and Te was Te in the $Cl_2$/Ar plasma.

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Fundamental Characteristics of Activated Fly Ash-Slag Cement Exposed to 5℃ Seawater (5℃ 해수에 노출된 알칼리 활성 플라이애시-슬래그 시멘트의 기초 특성)

  • Kim, Taewan;Jun, Yubin
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.7 no.4
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    • pp.302-309
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    • 2019
  • This paper shows an experimental study for fundamental characteristics of alkali activated fly ash-slag cement paste exposed to seawater of 5℃. Fly ash and slag were blended in three different ratios; 6:4, 7:3, and 8:2. Activators (NaOH and Na2SiO3) used 5% of the binder weight. It was shown that as the fly ash substitution rate in creased, compressive strength and density decreased, and water absorption rate increased. The results of X-ray diffraction and thermogravimetry showed that hydration reactants formed in samples did not differ significantly, however, C-S-H gel increased as the slag substitution rate increased. It showed that mechanical properties of fly ash-slag cement pastes under 5℃ seawater condition were affected by the slag substitution rate rather than fly ash.

Fabrication of a robust, transparent, and superhydrophobic soda-lime glass

  • Rahmawan, Yudi;Kwak, Moon-Kyu;Moon, Myoung-Woon;Lee, Kwang-Ryeol;Suh, Kahp-Yang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.86-86
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    • 2010
  • Micro- and nanoscale texturing and control of surface energy have been considered for superhydrophobicity on polymer and silicon. However these surfaces have been reported to be difficult to meet the robustness and transparency requirements for further applications, from self cleaning windows to biochip technology. Here we provided a novel method to fabricate a nearly superhydrophobic soda-lime glass using two-step method. The first step involved wet etching process to fabricate micro-sale patterns on soda-lime glass. The second step involved application of $SiO_x$-incorporated DLC to generate high intrinsic contact angle on the surface using chemical vapor deposition (CVD) process. To investigate the effect of surface roughness, we used both positive and negative micro-scale patterns on soda-limeglass, which is relatively hard for surface texturing in comparison to quartz or Pyrex glasses due to the presence of impurities, but cheaper. For all samples we tested the static wetting angle and transparency before and after 100 cycles of wear test using woolen steel. The surface morphology is observed using optical and scanning electron microscope (SEM). The results shows that negative patterns had a greater wear resistance while the hydrophobicity was best achieved using positive patterns having static contact angle up to 140 deg. with about 80% transparency. The overall experiment shows that positive patterns at etching time of 1 min shows the optimum transparency and hydrophobicity. The optimization of micro-scale pattern to achieve a robust, transparent, superhydrophobic soda-lime glass will be further investigated in the future works.

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Crystal Structure of Dehydrated Cesium and Silver Exchanged Zeolite A,$ Cs_{7.3}Ag_{4.7}$-A

  • Yang Kim;Karl Seff
    • Bulletin of the Korean Chemical Society
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    • v.5 no.3
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    • pp.117-121
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    • 1984
  • The structure of $CS_{7.3}Ag_{4.7}Si_{12}Al_{12}O_{48}$, vacuum dehydrated zeolite A with all Na+ ions replaced by $Cs^+$ and $Ag^+$ as indicated, has been determined by single-crystal x-ray diffraction techniques in the cubic space group, Pm3m (a = 12.282 (1) ${\AA}$). The structure was refined to the final error indices $R_1$$R_2$ (weighted) = 0.099 using 347 independent reflections for whind intlch $I_0\;>\;3{\sigma}(I_0)$. Although deydration occurred at $360^{\circ}C$, no silver atoms or clusters have been observed. The 8-ring sites are occupied only by $Cs^+$ ion, and the 4-ring sites only by a single $Ag^+$ ion. The 6-ring sites contain $Ag^+$ and $Cs^+$ ions with $Ag^+$ nearly in 6-ring planes and $Cs^+$ well off them, one on the sodalite unit side. With regard to the 6-rings, the structure can be represented as a superposition of two types of unit cells: about 70 % have $4Ag^+$ and $4Cs^+$ ions, and the remaining 30 % have $3Ag^+$ and $5Cs^+$. In all unit cells, $3Cs^+$ ions lie at the centers of the 8-rings at sites of D4h symmetry; these ions are approximately 0.3 ${\AA}$ further from their nearest framework-oxygen neighbors than the sum of the appropriate ionic radii would indicate. To minimize electrostatic repulsions, the $Cs^+$ ions at Cs(1) are not likely to occupy adjacent 6-rings in the large cavity; they are likely to be tetrahedrally arranged when there are 4.

Change of phase transformation and bond strength of Y-TZP with various hydrofluoric acid etching

  • Mi-Kyung Yu;Eun-Jin Oh;Myung-Jin Lim;Kwang-Won Lee
    • Restorative Dentistry and Endodontics
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    • v.46 no.4
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    • pp.54.1-54.10
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    • 2021
  • Objectives: The purpose of this study was to quantify phase transformation after hydrofluoric acid (HF) etching at various concentrations on the surface of yttria-stabilized tetragonal zirconia polycrystal (Y-TZP), and to evaluate changes in bonding strength before and after thermal cycling. Materials and Methods: A group whose Y-TZP surface was treated with tribochemical silica abrasion (TS) was used as the control. Y-TZP specimens from each experimental group were etched with 5%, 10%, 20%, and 40% HF solutions at room temperature for 10 minutes. First, to quantify the phase transformation, Y-TZP specimens (n = 5) treated with TS, 5%, 10%, 20% and 40% HF solutions were subjected to X-ray diffraction. Second, to evaluate the change in bond strength before and after thermal cycling, zirconia primer and MDP-containing resin cement were sequentially applied to the Y-TZP specimen. After 5,000 thermal cycles for half of the Y-TZP specimens, shear bond strength was measured for all experimental groups (n = 10). Results: The monoclinic phase content in the 40% HF-treated group was higher than that of the 5%, 10%, and 20% HF-treated groups, but lower than that of TS-treated group (p < 0.05). The 40% HF-treated group showed significantly higher bonding strength than the TS, 5%, and 10% HF-treated groups, even after thermal cycling (p < 0.05). Conclusions: Through this experiment, the group treated with SiO2 containing air-borne abrasion on the Y-TZP surface showed higher phase transformation and higher reduction in bonding strength after thermal cycling compared to the group treated with high concentration HF.

Distribution and Exposure Characteristics of Pneumoconiosis Patients in Fuel Complexes (연료단지 진폐증 환자 분포현황 및 노출특성)

  • Jong-Hyeon Jung
    • Journal of Environmental Science International
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    • v.33 no.2
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    • pp.161-168
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    • 2024
  • This study was conducted to identify the pollutants generated by the fuel complex and to determine the health effects of the surrounding residents. In addition, based on the results of epidemiological surveys and health impact surveys of local residents, we analyze the distribution of patient groups and exposure characteristics according to the distance from the fuel complex boundary. Samples were collected from the briquette plant within the fuel complex and analyzed by SEM-EDXA, X-ray Fluorescence Spectrometer, and ICP. In addition, the distribution of patients and exposure characteristics were analyzed according to the distance from the fuel complex and yard boundaries. Analysis of briquette samples from the fuel complex showed that the average particle size was 10-30 ㎛, the shape was irregular, and SiO2 accounted for more than 50%. It is believed that silica, which causes pneumoconiosis, may have been scattered into the air. In particular, there was a large distribution of 5 ㎛ particles that affect respiratory diseases. According to the analysis of the residential addresses and distribution of pneumoconiosis cases, many pneumoconiosis cases were located in the area between 200 and 500 meters from the boundary of the fuel complex. In addition, 28 pneumoconiosis cases were identified as a result of the epidemiological survey and health impact survey at the fuel complex. In detail, there were 8 cases of occupational pneumoconiosis, 6 cases of environmental pneumoconiosis, and 14 cases of occupational and environmental pneumoconiosis. The confirmed pneumoconiosis cases were located between 0.3 and 1.1 kilometers from the fuel complex. It was found that environmental pollutants generated by the fuel complex adversely affect the health of local residents. In particular, there are many cases of pneumoconiosis in the area between 200 and 500 meters from the boundary of the fuel complex, and this distance is considered to be the direct and indirect impact zone of the briquette plant.

Surface Coating Treatment of Phosphor Powder Using Atmospheric Pressure Dielectric Barrier Discharge Plasma (대기압 유전체배리어방전 플라즈마를 이용한 형광체 분말 코팅)

  • Jang, Doo Il;Ihm, Tae Heon;Trinh, Quang Hung;Jo, Jin Oh;Mok, Young Sun;Lee, Sang Baek;Ramos, Henry J.
    • Applied Chemistry for Engineering
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    • v.25 no.5
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    • pp.455-462
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    • 2014
  • This work investigated the hydrophobic coating of silicate yellow phosphor powder in the form of divalent europium-activated strontium orthosilicate ($Sr_2SiO_4:Eu^{2+}$) by using an atmospheric pressure dielectric barrier discharge (DBD) plasma with argon as a carrier and hexamethyldisiloxane (HMDSO), toluene and n-hexane as precursors. After the plasma treatment of the phosphor powder, the lattice structure of orthosilicate was not altered, as confirmed by an X-ray diffractometer. The coated phosphor powder was characterized by scanning electron microscopy, fluorescence spectrophotometry and contact angle analysis (CAA). The CAA of the phosphor powder coated with the HMDSO precursor revealed that the water contact angle increased from $21.3^{\circ}$ to $139.5^{\circ}$ (max. $148.7^{\circ}$) and the glycerol contact angle from $55^{\circ}$ to $143.5^{\circ}$ (max. $145.3^{\circ}$) as a result of the hydrophobic coating, which indicated that hydrophobic layers were successfully formed on the phosphor powder surfaces. Further surface characterizations were performed by Fourier transform infrared spectroscopy and X-ray photoelectron spectrometry, which also evidenced the formation of hydrophobic coating layers. The phosphor coated with HMDSO exhibited a photoluminescence (PL) enhancement, but the use of toluene or n-hexane somewhat decreased the PL intensity. The results of this work suggest that the DBD plasma may be a viable method for the preparation of hydrophobic coating layer on phosphor powder.