• Journal of the Microelectronics and Packaging Society
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• v.1 no.1
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• pp.41-50
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• 1994

RuO2 분말의 비표면적이 후막저항체의 전기적 특성에 미치는 영향을 규명하기 위하 여 비표면적이 서로다른 RuO2 분말을 이용하여 RuO2 함량을 다양하게 후막저항을 형성하 고 그들의 전기적 특성을 저항체 막의 미세조직과 관련하여 고찰하였다. 그 결과 후막저항 체의 전기적 특성은 소성과정에서 RuO2 의 비표면적과 함량에 따라 도전통로를 통하여 발 달하여 소결접촉과 비소결접촉의 수와 그 비에 크게 의존함을 확인하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.12
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• pp.1016-1020
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• 2002

Ru thin films were etched using CF/$_4$O$_2$ plasma in an ICP (inductively coupled plasma etching) system. The maximum etch rate of Ru thin films was 168 nm/min at a CF$_4$/O$_2$ gas mixing ratio of 10 %. The selectivity of SiO$_2$ over Ru was 1.3. From the OES (optical emission spectroscopy) analysis, the optical emission intensity of the O radical had a maximum value at 10% CF$_4$ gas concentration and drcrease with further addition of CF4 gas, but etch slope was enhanced. From XPS (x-ray photoelectron spectroscopy) analysis, the surface of the etched Ru thin film in CF$_4$/O$_2$ chemistry shows Ru-F bonds by the chemical reaction of Ru and F. RuF$_{x}$ compounds were suggested as a surface passivation layer that reduces the chemical reactions between Ru and O radicals. From a FE-SEM (field emission scanning electron microscope) micrograph, we had an almost perpendicular taper angle of 89$^{\circ}$.>.

• Analytical Science and Technology
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• v.26 no.1
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• pp.42-50
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• 2013

This paper describes the electrocatalytic activity for the oxidation of small biomolecules on the surface of Pt-Ru nanoparticles supported by $TiO_2$-hollow sphere prepared for use in sensor applications or fuel cells. The $TiO_2$-hollow sphere supports were first prepared by sol-gel reaction of titanium tetraisopropoxide with poly(styrene-co-vinylphenylboronic acid), PSB used as a template. Pt-Ru nanoparticles were then deposited by chemical reduction of the $Pt^{4+}$ and $Ru^{3+}$ ions onto $TiO_2$-hollow sphere ($Pt-Ru@TiO_2-H$). The prepared $Pt-Ru@TiO_2-H$ nanocomposites were characterized by transmission electron microscopy (TEM), X-ray diffraction (XRD), and elemental analysis. The electrocatalytic efficiency of Pt-Ru nanoparticles was evaluated via ethanol, methanol, dopamine, ascorbic acid, formalin, and glucose oxidation. The cyclic voltammograms (CV) obtained during the oxidation studies revealed that the $Pt-Ru@TiO_2-H$ nanocomposites showed high electrocatalytic activity for the oxidation of biomolecules. As a result, the prepared Pt-Ru catalysts doped onto $TiO_2$-H sphere nanocomposites supports can be used for non-enzymatic biosensor or fuel cell anode electrode.

• Korean Journal of Materials Research
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• v.21 no.8
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• pp.419-424
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• 2011

Pt nanoparticle catalysts incorporated on $RuO_2$ nanowire support were successfully synthesized and their electrochemical properties, such as methanol electro-oxidation and electrochemically active surface (EAS) area, were demonstrated for direct methanol fuel cells (DMFCs). After fabricating $RuO_2$ nanowire support via an electrospinning method, two different types of incorporated Pt nanoparticle electrocatalysts were prepared using a precipitation method via the reaction with $NaBH_4$ as a reducing agent. One electrocatalyst was 20 wt% Pt/$RuO_2$, and the other was 40 wt% Pt/$RuO_2$. The structural and electrochemical properties of the Pt nanoparticle electrocatalysts incorporated on electrospun $RuO_2$ nanowire support were investigated using a bright field transmission electron microscopy (bright field TEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and cyclic voltammetry. The bright field TEM, XRD, and XPS results indicate that Pt nanoparticle electrocatalysts with sizes of approximately 2-4 nm were well incorporated on the electrospun $RuO_2$ nanowire support with a diameter of approximately 50 nm. The cyclic voltammetry results showed that the Pt nanoparticle catalysts incorporated on the electrospun $RuO_2$ nanowire support give superior catalytic activity in the methanol electro-oxidation and a higher electrochemically active surface (EAS) area when compared with the electrospun Pt nanowire electrocatalysts without the $RuO_2$ nanowire support. Therefore, the Pt nanoparticle catalysts incorporated on the electrospun $RuO_2$ nanowire support could be a promising electrode for direct methanol fuel cells (DMFCs).

• Applied Chemistry for Engineering
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• v.31 no.1
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• pp.108-114
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• 2020

In this study, NH₃-selective catalytic oxidation (SCO) efficiencies according to calcination/reduction conditions were compared when preparing various Ru[1]/TiO₂ catalysts. The Ru[1]/TiO₂ red catalyst had better NH₃ conversion and NH₃ to N₂ conversion than those of Ru[1]/TiO₂ cal. Physico-chemical properties of Ru[1]/TiO₂ catalysts were confirmed by Brunauer Emmett Teller (BET), X-ray diffraction (XRD), transmission electron microscope (TEM), X-ray photoelectron spectroscopy (XPS) and temperature programmed reduction (H₂-TPR) analyses, and the properties were shown to affect the dispersion and surface adsorption oxygen species (O_β) ratio of the active metal.

• The Korean Journal of Ceramics
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• v.2 no.1
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• pp.43-47
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• 1996

$RuO_2$ thin films deposited directly on Si substrate by RF magnetron sputtering method using $RuO_2$ target have been investigated. Special interest was focused on the effect of process parameter on the surface roughness of $RuO_2$ films. Crystallization behavior and electrical properties of the films deposited at $300^{\circ}C$ were superior to those deposited at room temperature. Metallic Ru phase was formed in pure Ar and this phase had resulted poor adhesion after post annealing process in oxidizing ambient. Microstructural analysis reveals that the size of the $RuO_2$ crystallites gets smaller and the surface becomes smoother as the $O_2$ partial pressure or film thickness decreases. Irrespective of the $O_2/Ar$ ratio, resistivity of $RuO_2$ films ranged in $50~70 {\mu}{\Omega}-cm$. As the film thickness decreases, there is a thickness where the resistivity rises abruptly. Such an onset thickness turned out to be dependent n the $O_2$/Ar ratio.

• Journal of the Korean Ceramic Society
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• v.34 no.10
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• pp.1021-1026
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• 1997

RuO2 thin film has reasonably good conductivity and stiffness and it is thought to substitute for the cantilever beam made up of Pt and Si3N4 double layers in microactuators. Therefore, anisotopic Si etching was performed using RuO2 thin film as a mask layer in 25 wt. % TMAH water solution. In the etching temperature ranging from 6$0^{\circ}C$ to 75$^{\circ}C$, the etch rates of all the crystallographic directions increased linearly as the etching temperature increased. The etch rate ratio(selectivity) of [111]/[100] which varied from 0.08 to 0.14, was not sensitive to temperature. The activation energies for [110] direction, [100] direction and [111] direction were 0.50, 0.66 and 1.04eV, respectively. RuO2 cantilever beam with a clean surface was formed at the etching temperatures of 6$0^{\circ}C$ and $65^{\circ}C$. But the damages due to formation of pin holes on RuO2 surface were observed beyond 7$0^{\circ}C$. The tensile stress of RuO2 thin films caused the cantilever bending upward. As a result, it was demonstrated that the formation of conducting oxide RuO2 cantilever beam which can replace the role of an electrode and supporting layer could be possible by TMAH solution.

• Corrosion Science and Technology
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• v.2 no.5
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• pp.238-242
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• 2003

The characteristics of Ru etching using $O_2/Cl_2$ plasmas were investigated by employing inductively coupled plasma (ICP) etcher. The changes of Ru etch rate, Ru to $SiO_2$ etch selectivity and Ru electrode etching slope with the gas flow ratio, bias power, total gas flow rate, and source power were scrutinized. A high etching slope (${\sim}86^{\circ}$) and a smooth surface after etching was attained using $O_2/Cl_2$ inductively coupled plasma.

• Nuclear Engineering and Technology
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• v.16 no.2
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• pp.58-63
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• 1984

Paper electrophoretic separation of octahedrally bonded (Ruc $l_{6}$ )$^{3-}$ has been carried out by using the specially designed migration apparatus. The supporting electrolyte solutions are as follows: 0.1M-HCl $O_4$, 0.05 M-HCl+0.09M-KCl, 0.1M-HCl, 5$\times$10$^{-3}$ M-NTA, 0.01M-HCl, 0.01M-HCl $O_4$, 0.01M-citric acid, 0.01M-K $H_2$P $O_4$+0.01M-N $a_2$HP $O_4$, 0.05M-borax, 0.025M-N $a_2$C $O_3$+0.025M-NaHC $O_3$, 0.01M-N $a_3$P $O_4$, 0.01M-NaOH and 0.1 M-NaOH. The (Ruc $l_{6}$ )$^{3-}$ appears in 2 to 4 peaks and is found in several chemical species such as (RuCl ($H_2O$)$_{5}$ )$^{2+}$, cis and trans (RuC $l_2$($H_2O$)$_4$)$^{1+}$, (RuC $l_3$($H_2O$)$_3$)$^{0}$ , (RuC $l_4$($H_2O$)$_2$)$^{1-}$, (RuC $l_{5}$ ($H_2O$))$^{2-}$ and (RuC $l_{6}$ )$^{3-}$. The retention value has been found to be highest in the 0.025M-N $a_2$C $O_3$+0.025M-NaHC $O_3$ electrolyte solution.n.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.87-92
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• 2006

The steam reforming of methane over Ru-promoted $Ni/Al_2O_3$ was carried out. Compared with $Ni/Al_2O_3$, which needs pre-reduction by $H_2$, $Ru/Ni/Al_2O_3$ catalysts exhibited relatively higher activity than conventional $Ni/Al_2O_3$. According to $H_2-TPR$ of reduced or used catalysts and $CH_4-TPR$, it was revealed that the reduction of $RuO_x$ by $CH_4$ decomposition begins at a lower temperature ($220^{\circ}C$) and the reduced Ru facilitates the reduction of NiO, and leads to self-activation. To improve metal dispersion, the catalyst was soaked in 7 M aqueous $NH_4OH$ for 2 h at $45^{\circ}C$ while stirring. As a result, $Ru/Ni/Al_2O_3$ catalysts with aqueous $NH_4OH$ treatment have higher activity, larger metal surface area (by $H_2$-chemisorption), and small particle size (by XRD and XPS). It is noted that the amount of noble metal could be reduced by aqueous $NH_4OH$ treatment.