• 제목/요약/키워드: $Pt/CeO_2$

검색결과 64건 처리시간 0.026초

RF 마그네트론 스퍼터링법으로 성장시킨 0.5 % Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$(BCZT) 박막의 특성분석 (Characterization of 0.5 % Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$ Thin Films Grown by RF Magnetron Sputtering Method)

  • 최원석;박용섭;이준신;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.301-304
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    • 2002
  • We investigated the structural and electrical properties of Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$(BCZT) thin films with a mole fraction of x=0.2 and a thickness about 100 nm. BCZT films were prepared on Pt/Ti/$SiO_2$/Si substrate by a RF magnetron sputtering system. We have measured the thickness profile with Ar/$O_2$ ratio and the surface roughness. It was observed that the oxygen gas, which introduced during the film deposition, have an influence on the roughness of the film and the film roughness was reduced by annealing from 2.33 nm to 2.02 m (RMS at $500^{\circ}C$, Ar:6 scrim, $O_2$:6 sccm). We have found that annealing procedure after top electrode deposit can reduce the dissipation factor.

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RF 마그네트론 스퍼터링법으로 성장시킨 0.5% Ce-doped Ba(Zr0.2Ti0.8)O3 (BCZT) 박막의 열처리 특성분석 (Characterization of the Annealing Effect of 0.5 % Ce-doped Ba(Zr0.2Ti0.8)O3 Thin Films Grown by Rf Magnetron Sputtering Method)

  • 최원석;박용섭;이준신;홍병유
    • 한국전기전자재료학회논문지
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    • 제16권5호
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    • pp.361-364
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    • 2003
  • It was investigated that the structural and electrical Properties of Ce-doped Ba(Zr$_{x}$Ti$_{1-x}$ )O$_3$ (BCZT) thin films with a mole fraction of x=0.2 and a thickness about 100 nm. BCZT films were prepared on Pt/Ti/SiO$_2$/Si substrate by a RF magnetron sputtering system. We have measured the thickness profile with Ar/O$_2$ ratio and the surface roughness. It was observed that the oxygen gas, which introduced during the film deposition, have an influence on the roughness of the film and the film roughness was reduced by annealing from 2.33 nm to 2.02 nm (RMS at 500 $^{\circ}C$, Ar:6 sccm, $O_2$:6 sccm). It was found that annealing procedure after top electrode deposit can reduce the dissipation factor.

촉매습식산화에 의한 Ethylene Glycol의 분해 (Decomposition of Ethylene Glycol by Catalytic Wet Air Oxidation)

  • 안상준;최장승;이동근
    • 한국염색가공학회지
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    • 제13권4호
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    • pp.264-271
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    • 2001
  • Catalytic wet oxidation of ethylene glycol as refractory compound was studied in a batch slurry reactor using lwt% $Pt/A1_2O_3$, lwt% $Pt/TiO_2,\;Mn/CeO_2$(1:1) and 5wt% $Mn/Al_2O_3$. Experiments were conducted to investigate theeffects of temperature, initial ethylene glycol concentration, catalyst dosage and PH on the ethylene glycol decomposition. When compared with the uncatalyzed reaction, the use of catalysts could increase the rate of ethylene glycol decomposition. The lwt% $Pt/A1_2O_3$ catalyst was preferable to the other catalysts for the destructive oxidation of ethylene glycol. The reaction rate was first order with respect to initial concentration of ethylene glycol. In acidic condition the removal efficiency of ethylene glycol was good, but there was a significant leaching of platinum. Small amount of acetic acid, oxalic acid, masonic acid and formic acid as intermediates were detected during catalytic wet air oxidation of ethylene glycol.

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Cerium이 첨가된 $Bi_4Ti_3O_{12}$ 강유전체 박막의 구조적 특성 (The Structural Properties of $Bi_4Ti_3O_{12}$ Ferroelectric Thin Films doped with Cerium)

  • 한상욱;남성필;이성갑;배선기;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.236-237
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    • 2005
  • The structural properties of $(Bi,Ce)_4Ti_3O_{12}(BCT)$ thin films with post-annealing temperature were investigated. $(Bi,Ce)_4Ti_3O_{12}(BCT)$ thin films were deposited by RF sputtering method on Pt/Ti/$SiO_2$/Si substrates with optimum deposition condition. The $(Bi,Ce)_4Ti_3O_{12}(BCT)$ thin films was post-annealed at 600$^{\circ}C$, 650$^{\circ}C$, 700$^{\circ}C$, 750$^{\circ}C$, 800$^{\circ}C$ in furnace,respectively. Increasing the post-annealing temperature, the grain size, density and peak intensity of (117) and c-axis orientation were increased. The $(Bi,Ce)_4Ti_3O_{12}(BCT)$ thin films that annealed at 750$^{\circ}C$ exhibited well crystallized phase and had no vacancy and grain was uniform. but there are some secondary phases observed. At this time, the average thickness of $(Bi,Ce)_4Ti_3O_{12}(BCT)$ thin films was 2000 ${\AA}$.

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Preparation and Characterization of $Pd/CeO_2/Ta/Si$ model catalysts

  • 김도희;우성일
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.145-145
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    • 2000
  • M-CeO2 (M : noble metal) catalysts have been widely studied as three-way catalysts and methanol synthesis catalysts. Ceria is thought to play a number of roles in these catalysts. The Ce(IV)/Ce(III) redox pair may store/release gases under oxidizing/reducing conditions, extending the operational window. Additionally, metal-ceria interactions lead to several effects, including the dispersion of the active components and promoting the activation of molecules such as CO or NO. Pd is a promising component to current TWC formulations and behaves particularly well when compared with Pt and Rh-based catalysts for low-temperature oxidation of Co and hydrocarbon. However the effect of Pd-ceria interactions on the physicochemical properties of Pd and the redox properties of Ce is not elucidated yet. In order to know exactly about the metal-ceria interactions, the model study are expecting to give a better environment, resulting in the wide use of the surface science tools. The substrate was Si(100) wafer, on which Ta metal was sputtered as a thickness of 100nm. The CeO2 thin film of 30nm was deposited by using the magnetron sputtering. Spin coating and magnetron sputtering methods were used to make the Pd thin film layer. The prepared sample was investigated by in-situ XPS, AES, SEM and AFM analysis.

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Pulsed laser deposition 방법으로 증착된 $(Bi,Ce)_4Ti_3O_{12}$ 박막의 강유전 특성 (Characteristic of ferroelectric properties of $(Bi,Ce)_4Ti_3O_{12}$ thin films deposited by pulsed laser deposition)

  • 오영남;성낙진;윤순길;전민구;우성일;김창수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.168-171
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    • 2003
  • Bismuth layered structure, Cerium-substituted $Bi_4Ti_3O_{12}$ ($(Bi,Ce)_4Ti_3O_{12}$) thin films were prepared on the $Pt/TiO_2/SiO_2/Si$ substrates by the pulsed laser deposition method. We investigated the Ce-subsitituted effect on the grain orientation and ferroelectric properties. $Ce^{3+}$ ion substitution for $Bi^{3+}$ ion in perovskite layers of BTO decreased the deeree of c-axis orientation and increased the remanent polariation (2Pr). The structure and morphology of the films were characterized using X-ray diffraction and atomic force microscopy. The $(Bi,Ce)_4Ti_3O_{12}$ (BCT) thin films, which were annealed $700^{\circ}C\;and\;800^{\circ}C$ for 10min and 30min, showed a perovskite phase and dense microstructure. As the thickness of the BCT film was decresed that the ferroelectric properties of the BCT thin films were good.

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Thermal catalytic de-NOX 공정에서 첨가제가 촉매의 활성에 미치는 영향에 관한 연구 (Effect of Additives on Catalytic Activity in Thermal Catalytic De-NOx Process)

  • 이진구;김태원;최재순;김정호;이재수;장경욱;박해경
    • 한국대기환경학회지
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    • 제15권3호
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    • pp.249-255
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    • 1999
  • We sdudied effect of additives on catalytic activity in thermal catalytic de-NOx process which was composed of thermal reduction, catalytic reduction and catalytic oxidation stage. Pd-Pt/${\gamma}$-$Al_2O_3$ catalysts with the addition of transition metals(Co, Cu, Fe, Ni, W, Zn, Zr) and rare earth metals(Ce, Sr) were prepared by the conventional washcoating method. Those catalysts were characterized by CO pulse chemisorption, ICP, $N_2$ adsorption, SEM and XRD. The effect of catalyst additives on NOx removal for diesel emission was studied in thermal catalytic de-NOx process at reduction temperature(350~50$0^{\circ}C$), space velocity(5,000~20,000 $hr^{-1}$) and the engine load(0~120kW). The concentraton of CO, $CO_2$, NO and $NO_2$ in the exhaust gas increased with the engine load. On the other hand the concentration of $O_2$ decreased. The de-NOx activityof all prepared catalysts increased with respect to high CO and low $O_2$ level in the thermal reduction stage of the process. Insertion of Ce to Pt-Pd/${\gamma}$-$Al_2O_3$ catalyst showed the best activity of all the catalysts under these experimental conditions. De-NOx catalysts are effective to remove CO in addition to NOx in the catalytic reduction stage.

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수소분리용 치밀질 세라믹 멤브레인의 여과특성 (Filtering Characterization of Dense Ceramic Membrane for Hydrogen Separation)

  • 황광택;정훈
    • 신재생에너지
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    • 제1권4호
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    • pp.19-24
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    • 2005
  • 수소 여과용 치밀질 membrane의 제조는 기존의 SC($SrCeO_3$)보다 높은 여과특성을 가지는 BC($BaCeO_3$)구조의 재료를 이용하여 시편을 제조하였고, 시편의 물성은 기공율, 수분에 대한 내구성 그리고 여과 특성을 측정하였다. 우선 열적 안정성 및 수분에 대한 내구성 향상은 $Y_2O_3$를 0.1mol첨가 하였을 때 1% 이내의 기공율을 가지고 있었으며 수분에 대한 안정성을 위해 boiling test에서도 균열이 발생되지 않고 안정적인 것을 확인할 수 있었다. 또한 여과 특성을 향상시키기 위해 Ce과 치환이 가능하고 전도성을 향상시킬 수 있는 $Ga_2O_3$, $La_2O_3$을 치환하여 물성을 측정한 결과 $Ga_2O_3$은 0.05, $La_2O_3$ 0.1mol%가 최적이었으며, 이들 중 $Ga_2O_3$가 0.05mol 첨가 되었을 때 가장 높은 이온 전도도 값을 얻었으며, $La_2O_3$이 첨가된 경우가 다음으로 높게 나타났다. 전자 전도성을 높이기 위하여 Pt를 sol로 만들어 나노 입자로 분산 시키는 방법으로 실험을 실시 $500^{\circ}C$ 이상의 온도에서는 복합전도에 의해 전도도가 향상되어지는 것을 확인할 수 있다. 또한 이들 시편의 여과 특성을 측정한 전도도 측정의 결과와 동일한 결과를 얻을 수 있었다.

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