• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.181-184
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• 2001

Chemical Mechanical Polishing(CMP) of Shallow Trench Isolation(STI) structure in 0.18 m semiconductor device fabrication is studied. CMP process is applied for the STI structure with and without reverse moat pattern and End Point Detection (EPD) method is tested. To optimize the transistor properties related metal 1 parameters, we studied the correlation between CMP thickness of STI using high selectivity slurry, DOE of gate etch recipe, and 1st metal DC values. Remaining thickness of STI CMP is proportional to the thickness of gate-etch process and this can affect to gate profile. As CMP thickness increased, the N-poly foot is deteriorated, and the P-Poly Noth is getting better. If CD (Critical Dimension) value is fixed at some point, all IDSN/P values are in inverse proportional to CMP thickness by reason of so called Profile Effect. Weve found out this phenomenon in all around DOE conditions of Gate etch process and we also could understand that it would not have any correlation effects between VT and CMP thickness in the range of POE 120 sec conditions. As CMP thickness increased by 100 ${\AA}$, 3.2 u${\AA}$ of IDSN is getting better in base 1 condition. In POE 50% condition, 1.7 u${\AA}$ is improved, and 0.7 u${\AA}$ is improved in step 2 condition. Wed like to set the control target of CD (critical dimension) in gate etch process which can affect Idsat, VT property versus STI topology decided by CMP thickness. We also would like to decide optimized thickness target of STI CMP throughout property comparison between conventional STI CMP with reverse moat process and newly introduced STI CMP using high selectivity slurry. And we studied the process conditions to reduce Gate Profile Skew of which source known as STI topology by evaluation of gate etch recipe versus STI CMP thickness.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.319-320
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• 2009

In this study, high-quality Al-N doped p-type ZnO thin films were deposited on n-type Si (100) wafer or Si coated with buffer layer by DC magnetron sputtering in the mixture of $N_2$ and $O_2$ gas. The target was ceramic ZnO mixed with $Al_2O_3$ (2 wt%). The p-type ZnO thin film showed higher carrier concentration $2.93\times10^{17}cm^{-3}$, lower resistivity of $5.349\;{\Omega}cm$ and mobility of $3.99\;cm^2V^{-1}S^{-1}$, respectively. According to PL spectrum, the Al donor energy level depth ($E_d$) of Al-N codoped p-type ZnO film was reduced to about 51 meV, and the N acceptor energy level depth ($E_a$) was reduced to 63 meV, respectively.

• 대한수학회지
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• 제42권3호
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• pp.529-541
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• 2005

An operator T belonging to the algebra B(H) of bounded linear transformations on a Hilbert H into itself is said to be posinormal if there exists a positive operator $P{\in}B(H)$ such that $TT^*\;=\;T^*PT$. A posinormal operator T is said to be conditionally totally posinormal (resp., totally posinormal), shortened to $T{\in}CTP(resp.,\;T{\in}TP)$, if to each complex number, $\lambda$ there corresponds a positive operator $P_\lambda$ such that $|(T-{\lambda}I)^{\ast}|^{2}\;=\;|P_{\lambda}^{\frac{1}{2}}(T-{\lambda}I)|^{2}$ (resp., if there exists a positive operator P such that $|(T-{\lambda}I)^{\ast}|^{2}\;=\;|P^{\frac{1}{2}}(T-{\lambda}I)|^{2}\;for\;all\;\lambda)$. This paper proves Weyl's theorem type results for TP and CTP operators. If $A\;{\in}\;TP$, if $B^*\;{\in}\;CTP$ is isoloid and if $d_{AB}\;{\in}\;B(B(H))$ denotes either of the elementary operators $\delta_{AB}(X)\;=\;AX\;-\;XB\;and\;\Delta_{AB}(X)\;=\;AXB\;-\;X$, then it is proved that $d_{AB}$ satisfies Weyl's theorem and $d^{\ast}_{AB}\;satisfies\;\alpha-Weyl's$ theorem.

• Food Science and Biotechnology
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• 제18권3호
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• pp.610-617
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• 2009

The stability of corn oil-in-water emulsions coated by milk proteins, sodium caseinate (CAS), or whey protein concentrate (WPC), was compared under the environmental stress of pH change. Emulsions were prepared at 0.1 of protein:oil because the majority of droplets were relatively small ($d_{32}=0.34$ and $0.35\;{\mu}m$, $d_{43}=0.65$ and $0.37\;{\mu}m$ for CAS- and WPC-emulsions, respectively) and there was no evidence of depletion flocculation. As the pH of the emulsions was gradually dropped from 7 to 3, there was no significant difference in the electrical charges of the emulsion droplets between the 2 types of emulsions. However, laser diffraction measurements, microscopy measurements, and creaming stability test indicated that WPC-emulsions were more stable to droplet aggregation than CAS-emulsions under the same circumstance of pH change. It implies that factors other than electrostatic repulsion should contribute to the different magnitude of response to pH change.

• E2M - 전기 전자와 첨단 소재
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• 제3권4호
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• pp.325-331
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• 1990

본 연구는 텅스텐 소결에 저온 활성제로 작용하는 Ni-P 공정합금을 미량첨가하여 제조공정의 간단화를 통한 새로운 W-Cu계 전기접점제조를 목표로 하였다. 이를 위해 1회 용침공정을 통해 제조한 W(Ni-P)-Cu 합금에 대한 전기접점특성을 조사하여 접점의 미세구조 관점에서 논의하였다. Ni-P 합금첨가한 접점은 기존의 순수 W-Cu 합금에 비해 낮은 접촉저항 및 낮은 아크소모를 나타내는 우수한 접점성능을 보여주었다. 이것은 Ni-P합금이 Cu용침이 개시되기전 짧은 승온단계에서 분말간의 강한 결합과 Cu용침에 유리한 기공통로를 갖는 W 분말 골격체의 형성을 유도하기 때문인 것으로 판단된다.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2006년도 춘계종합학술대회
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• pp.1032-1036
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• 2006

In this study, we implement the potable blood gas analyzer measuring pH, $pCO_2\;and\;pO_2$ of the arterial blood. The implemented system by this study is divided into hardware and software part and also the hardware portion is parted by mechanism and electronic circuit mit. The system program is composed of operating, washing, correcting and measuring program. And to correct the system, two-point calibration method is used, one-point calibration method is also added for more accuracy, and system program is coded. For verifying the implemented system, We examine to response property of each electrode. And evaluate accuracy of the system using standard reagent and was construed as statistical.

• Journal of Microbiology and Biotechnology
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• 제10권2호
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• pp.161-168
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• 2000

Plasmid pLEX3 isolated from the recombinant cosmid library of Zoogloea ramigera 115 was found to be responsible for the restoration of the rugose colony phenotype. To confirm the essential region responsible for the complementation, subclones were constructed from plasmid pLEX3 and transformed into mutant strain Z. ramigera 115SLR. The recombinant plasmids pLEX10 and pLEX11 were shown to complement the slime-forming property of Z. ramigera 115SLR. In a compositional analysis of the exopolysaccharides from Z. ramigera 115, Z. ramigera 115SLR, and Z. ramigera 115SLR harboring plasmid pLEX11, the exopolysaccharides showed a similar composition with glucose, galactose, and side chain groups. The complete nucleotide sequence of the 3.25kb genocim DNA insert in plasmid pLEX11 was determined and its analysis identified two open reading frames which could encode two proteins. The gene products derived form the two open reading frames were confirmed by and in vivo transcription using a T7-RNA polymerase. The ORF1 produced a 30 kDa protein, whereas the ORF2 was found responsible for the complementation of the morphological mutation and produced a 14 kDa protein. An in vivo gene expression of plasmid pTEX10 showed another open reading frame encoding a 50 kDa protein. The gene products form ORF1 and ORF2 are regarded as novel proteins which do not show any homology with other proteins.

• Korean Journal of Mathematics
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• 제22권1호
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• pp.29-36
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• 2014

The limiting diffusion of special diploid model can be defined as a discrete generator for the rescaled Markov chain. Choi([2]) defined the operator of projection $S_t$ on limiting diffusion and new measure $dQ=S_tdP$. and showed the martingale property on this operator and measure. Let $P_{\rho}$ be the unique solution of the martingale problem for $\mathcal{L}_0$ starting at ${\rho}$ and ${\pi}_1,{\pi}_2,{\cdots},{\pi}_n$ the projection of $E^n$ on $x_1,x_2,{\cdots},x_n$. In this note we define $$dQ_{\rho}=S_tdP_{\rho}$$ and show that $Q_{\rho}$ solves the martingale problem for $\mathcal{L}_{\pi}$ starting at ${\rho}$.

• Carbon letters
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• 제16권2호
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• pp.101-106
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• 2015

We report a covalent functionalization of graphene nanoparticles (GnPs) employing 2,3,4-Tri-O-acetyl-${\beta}$-D-xylopyranosyl azide followed by fabrication of an epoxy/functionalized graphene nanocomposite and an evaluation of its thermo-mechanical performance. Successful functionalization of GnP was confirmed via thermal and spectroscopic study. Raman spectroscopy indicated that the functionalization was on the edge of the graphene sheets; the basal plane was not perturbed as a result of the functionalization. The epoxy/functionalized GnP composite system exhibited an increase in flexural modulus (~18%) and glass transition temperature (${\sim}10^{\circ}C$) compared to an un-functionalized GnP based epoxy composite.

• 한국전기전자재료학회논문지
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• 제31권5호
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• pp.313-319
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• 2018

This study introduces a new investigation report on the microstructural and electrical property changes of $ZnO-Zn_2BiVO_6-Mn_3O_4$ (ZZMn), where 0.33 mol% of $Mn_3O_4$ and 0.5 mol% of $Zn_2BiVO_6$ were added to ZnO (99.17 mol%) as liquid phase sintering aids. $Zn_2BiVO_6$ contributes to the decrease of sintering temperatures by up to $800^{\circ}C$, and segregates its particles at the grain boundary, while $Mn_3O_4$ enhances ${\alpha}$, the nonlinear coefficient, of varistor properties up to ${\alpha}=62$. In comparison, when the sintering temperature is increased from $800^{\circ}C$ to $1,000^{\circ}C$, the resistivity of ZnO grains decreases from $0.34{\Omega}cm$ to $0.16{\Omega}cm$, and the varistor property degrades. Oxygen vacancy ($V_o^{\bullet}$) (P1, 0.33~0.36 eV) is formed as a dominant defect. Two different kinds of grain boundary activation energies of P2 (0.51~0.70 eV) and P3 (0.70~0.93 eV) are formed according to different sintering temperatures, which are tentatively attributed to be $ZnO/Zn_2BiVO_6$-rich interface and ZnO/ZnO interface, respectively. Accordingly, this study introduces a progressive method of manufacturing ZnO chip varistors by way of sintering ZZMn-based varistor under $900^{\circ}C$. However, to procure a higher reliability, an in-depth study on the multi-component varistors with double-layer grain boundaries should be executed.