• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.10
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• pp.812-816
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• 2000

It is very important to understand the correlation of between inter dielectric(ILD) CMP process and various facility factors supplied to equipment to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD-CMP process was studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyze various facilities supplied at supply system. With facility shortage of D.I water(DIW) pressure, we introduced an adding purified $N_2$(P$N_2$)gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and P$N_2$gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and P$N_2$gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• Journal of the Korean institute of surface engineering
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• v.49 no.1
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• pp.69-74
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• 2016

In order to investigate the effect of NiO on the ethanol gas sensing performance of ${\alpha}-Fe_2O_3$ nanoparticles, NiO and ${\alpha}-Fe_2O_3$ nanoparticles are synthesized by hydrothermal method. The sensor with ${\alpha}-Fe_2O_3$ and NiO nanoparticles mixed at an optimum ratio of 7:3 showed 3.8 times improved sensing performance for 200ppm ethanol gas at $200^{\circ}C$. The enhanced gas sensing performance can be considered to be caused by pn heterojunction at the grain boundaries of ${\alpha}-Fe_2O_3$ and NiO nanopartcles.

• Journal of Ocean Engineering and Technology
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• v.11 no.3
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• pp.56-68
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• 1997

This work was intended to study the effect of a partial pressure ratio and a total pressure of reactive gases on the properties of TiC$_{x}$N$_{1-x}$ . coated layer. In this regard, various TiC$_{x}$N$_{1-x}$ coatings were synthesized with C2112 and N2 Mixture gas of different compositions by Arc Ion Plating process which has been highlighted for an industrial purpose. It was revealed from colors and X-ray diffraction patterns that the concentration of carbon of a TiC$_{x}$N$_{1-x}$ coating increases with a partial pressure ratio (PC$_{2}$H$_{2}$/PN$_{2}$) as well as a total pressure Of $C_{2}$H$_{2}$ and N$_{2}$ mixture gas. Accordingly, the hardness of TiC$_{x}$N$_{1-x}$ coated layer increased but the adhesion to the substrate of SKH 51 was degraded. On the other hand, the deposition rate was independent of a partial pressure ratio and a total pressure of mixture gas. It was found that a uniform gas distribution is critical for an industrial application since the composition of a coating depends strongly on the location of a substrate inside of the furnace. As a result of milling tests with different TiC$_{x}$N$_{1-x}$ coated end mills, the one which has a low carbon concentration was better than others studied in this work.d in this work.

• Journal of Energy Engineering
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• v.25 no.4
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• pp.159-169
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• 2016

In this study, the effects of MTBE contents as oxygenates in gasoline on exhaust emissions and fuel economy in MPI and GDi vehicles have been investigated. Various oxygen contents have been selected such as 0, 1.0, 2.3 and 2.7 wt%. FTP-75 and HWFET modes as fuel economy test methods which are widely used in Republic of Korea and US were applied to investigate exhaust emissions from the test vehicles. Emissions of CO, NMHC and NOx did not show significant correlation with oxygen contents in gasoline fuels, although having slight difference with these contents. In addition, CO2 emissions were not significantly changed with respect to oxygen content. But in case of warm-up and FTP-75 and HWFET modes including high speed regimes, CO2 emissions showed inverse correlation with oxygen contents. Particulate number concentration was inversely proportional to the oxygen contents, having the minimum value at the condition of 2.3 wt%. In case of fuel economy through carbon balance method, the highest value has been obtained at 2.3 wt% and there was positive correlation with oxygen contents and fuel economy.

• Journal of ILASS-Korea
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• v.23 no.4
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• pp.212-220
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• 2018

As increase the number of vehicles, the issue of greenhouse gas that was emitted by them became important. As a result, greenhouse gas (GHG) regulations are being strengthened and efforts are being actively made to reduce greenhouse gas emissions in the automotive industry. In the other hand, regulations for harmful emission of vehicles have been reinforced by step. Especially, the lastly applied step, so called Euro 6, not only decreased NOx limit down to half of Euro 5 but also introduced real driving emission limit for NOx and PN. It is a challenge for manufacturers to meet the recent GHG regulation as well as the latest emission regulation. To overcome these regulations a De-NOx after-treatment system is being applied to diesel vehicles that are known emitting the lowest GHG among conventional internal combustion engines. At the time of the introduction of Euro 6 emission standard in Korea, in the domestic fuel economy certification test, some diesel vehicles emitted more $CH_4$ than Euro 5 vehicles. As a result, it was confirmed that LNT-equipped vehicles emitted a high level $CH_4$ and the level exceeded the US emission standard. In order to determine the reason, various prior literature was investigated. However, it was difficult to find a detailed study on the methane increase with LNT. In this paper, to determine whether the characteristics of vehicles equipped with LNT the affects the above issue and other greenhouse gases, 6 passenger cars were tested on several emission test modes and ambient temperatures with a environment chamber chassis dynamometer. 2 cars of these were equipped with LNT only, other 2 cars had SCR only, and LNT + SCR were applied to remaining 2 cars. The test result shown that the vehicles equipped with LNT emitted more $CH_4$ than the vehicles with SCR only. Also, $CH_4$ tended to increase as the higher acceleration of the test mode. However, as the test temperature decreases, $CH_4$ tended to decreased. $CO_2$ was not affected by kinds of De-NOx device but characteristic of the test modes.