• Title/Summary/Keyword: $O_3$ concentration

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A Study on the Characteristics of the High Concentration Ozone Generator for the Semiconductor Wafer Cleaning with the Ozone Dissolved De-ionized Water (반도체 웨이퍼의 오존 수(水) 세정을 위한 고농도 오존발생장치 특성 연구)

  • 손영수;함상용;문세호
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.12
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    • pp.579-585
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

Response Characteristics of Electrochemical Non-enzyme Immunosensor using Fe3O4 Nanoparticle (Fe3O4 나노분말을 이용한 전기화학적 비효소 면역센서 응답특성)

  • Kim, Chang-Kyu;Lee, Gyoung-Ja;Uhm, Young-Rang;Lee, Min-Ku;Rhee, Chang-Kyu
    • Journal of Powder Materials
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    • v.16 no.3
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    • pp.180-184
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    • 2009
  • In this paper, the electrochemical non-enzyme immunosensor has been developed for the determination of salmonella antigen, using inverse voltammetry. For the estimation of salmonella antigen concentration, the $Fe_3O_4$ nanoparticles synthesized by microemulsion method were conjugated with salmonella antigen. Then, the immunocomplex between antibody immobilized on the transducer surface and antigen containing a magnetic nanoparticles was formed. From the linear relationship between the reduction peak current of Fe(III) and salmonella antigen concentration, it is suggested that the electrochemical non-enzyme biosensor is applicable to detect salmonella antigen in the concentration range of $10^1-10^5$ CFU/ml.

Effects of NaOH and Na2SiO3·9H2O Addition on Strength Development of Class F Fly Ash-Mortar (F급 플라이 애쉬-모르타르의 강도발현에 대한 NaOH과 Na2SiO3·9H2O 첨가의 영향)

  • Park, Sang-Sook;Kang, Hwa-Young;Han, Sang-Ho;Kang, Hee-Bog
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.9 no.4
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    • pp.261-269
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    • 2005
  • The object of this research is to produce alkali activated fly ash-cement using low calcium fly ash as substitute for portland cement. The experimental program included activation of fly ash by a strong base(NaOH) at different concentration, temperature, and liquid-to-fly ash ratios. To achieve for higher compressive strength of the hardened product, sodium meta silicate is added to the alkaline solution. From the factors considered on strength development, the ratio of liquid/fly ash, the activator concentration and temperature always result to be significative factors. The optimization studied show that the alkaline solution concentration of $NaOH(210g)+Na_2SiO_3{\cdot}9H_2O(30g)+H_2O=1L$ at $50^{\circ}C$ produces the best alkali activation effect for the low calcium fly ash. SEM and XRD patterns showed that the components of alkali-activated fly ash consist mainly of mullite, quartz and amorphous aluminosilicate.

Phase Change of Nanorod-Clustered $MnO_2$ by Hydrothermal Reaction Conditions and the Lithium-ion Battery Cathode Properties of $LiMn_2O_4$ Prepared from the $MnO_2$ (수열합성 조건에 따른 나노로드 클러스터형 $MnO_2$의 상변화와 이를 이용한 $LiMn_2O_4$의 리튬이온전지 양전극 특성)

  • Kang, Kun-Young;Choi, Min Gyu;Lee, Young-Gi;Kim, Kwang Man
    • Korean Chemical Engineering Research
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    • v.49 no.5
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    • pp.541-547
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    • 2011
  • Nanorod-clustered $MnO_2$ precursors with ${\alpha}$-, ${\beta}$-, and ${\gamma}$-phases are synthesized by hydrothermal reaction of $MnSO_45H_2O$ and $(NH_4)S_2O_8$. The formation of nanorod-clustered ${\beta}-MnO_2$ is particularly confirmed under the conditions of high reactant concentration and hydrothermal reaction at $150^{\circ}C$. The spinel $LiMn_2O_4$ nanorod-clusters are also prepared by lithiating the $MnO_2$ precursors, varying the concentration of lithiating agent ($LiC_3H_3O_2{\cdot}2H_2O$) and heat treatment temperature, and characterized for use as cathode material of lithium-ion batteries. As a result, the nanorod-clustered $LiMn_2O_4$ prepared from the ${\beta}-MnO_2$ at higher $LiC_3H_3O_2{\cdot}2H_2O$ concentration and the annealing at $800^{\circ}C$ is proven to show the cubic spinel structure and to achieve the high initial discharge capacity of 120 mAh/g.

Interpretation of Hydrothermal Synthesis of BaTiO3 Powder (BaTiO3 분말의 수열합성 해석)

  • Oh, Jung Kang;Seo, Kyung Won
    • Applied Chemistry for Engineering
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    • v.10 no.4
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    • pp.509-514
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    • 1999
  • In Preparing $BaTiO_3$ powder under hydrothermal conditions, effects of reaction period feedstock concentration and mixing rate on crystallinity, mean size and size distribution of particles were studied. Experimental results showed that the particle size became smaller with its narrow distribution as the reaction period and mixing rate increased, but feedstock concentration decreased in contrast with the results based on the classical nucleation-growth model. From these results, $BaTiO_3$ particles seem to be prepared hydrothermally through a multiple reaction procedure that includes dissolution, precipitation, hydrolysis-condensation, aggregation, diffusion and transformation.

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Experiment on Heat Transfer and Absorption Performance Enhancement for Binary Nanofluids (NH3/H2O + Nano-Particles) (이성분 나노유체 (NH3/H2O + 나노입자)의 열전달 및 흡수성능 촉진실험)

  • Lee, Jin-Ki;Jung, Chung-Woo;Kang, Yong-Tae
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.32 no.9
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    • pp.669-675
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    • 2008
  • The objectives of this paper are to examine the effect of nano-particles on the pool type absorption heat transfer enhancement and to find the optimal conditions to design a highly effective compact absorber for ammonia/water absorption system. The effect of $Al_2O_3$ nano-particles and carbon nanotube(CNT) on the absorption performance is studied experimentally. The experimental ranges of the key parameters are 20% of ammonia concentration, $0{\sim}0.08\;vol%$ (volume fraction) of CNT particles, and $0{\sim}0.06 \;vol%$ of $Al_2O_3$ nano-particles. For the ammonia/water nanofluids, the heat transfer rate and absorption rate with 0.02 vol% $Al_2O_3$ nano-particles were found to be 29% and 18% higher than those without nano-particles, respectively. It is recommended that the concentration of 0.02 vol% of $Al_2O_3$ nano-particles be the best candidate for ammonia/water absorption performance enhancement.

Degradation of toxic azo dye (AO7) using Fenton's process

  • Sharma, Ashish;Verma, Manisha;Haritash, A.K.
    • Advances in environmental research
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    • v.5 no.3
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    • pp.189-200
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    • 2016
  • This study aimed at advanced oxidation of hetero tri-functional reactive dye Acid orange 7 using photo-Fenton conditions in a lab-scale experiment. Decolourisation of Acid Orange 7 dye by Fenton's process was dependent on concentration of Hydrogen peroxide, Ferrous sulphate, pH, and contact time. A $2^3$ factorial design was used to evaluate the effects of these key factors: pH, Fe(II), and $H_2O_2$ concentration, for a dye concentration of 50 mg/L with COD of 340 mg/L at pH 3.0. The response function was removal of colour under optimised conditions; pH 3.0, [Fe(II)] 40.83 mg/L, [$H_2O_2$] 4.97 mmol/L; 13.6 min. of treatment resulting in 100% colour removal. The final COD of treated wastewater was nil suggesting that AOP is a potentially useful process of color removal and dye degradation/mineralisation of effluent having AO7. Minimum contact time for complete decolourisation was at 5 mmol/l $H_2O_2$ concentration. Increase in $FeSO_4$ (mg/l) concentration resulted in decrease of time for complete decolourisation. Box-Behnken Design was used to optimize the process variables. Maximum and minimum levels of pH (3-5), $H_2O_2$ (4-6 mmol/l), $FeSO_4$ (30-46 mg/l) and contact time (5-15 minutes) were used. The statistical analysis revealed a value of 0.88 for coefficient of regression ($R^2$) indicating a good fit of model. Calculated F-value was found higher than the tabulated value confirming to significance of the model. Based on student's t-test, Ferrous sulphate, pH, and contact time have a positive effect on the percent decolourisation of Acid Orange 7.

Synthesis of NiO-doped Al2O3 Powder by Spray Pyrolysis (분무열분해법에 의한 NiO 첨가 Al2O3 분체의 합성)

  • 박정현;조경식;김한태
    • Journal of the Korean Ceramic Society
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    • v.28 no.8
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    • pp.593-602
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    • 1991
  • Al2O3 and NiO-doped Al2O3 powders were prepared from the ethanol solution of Al (NO3)3$.$9H2O and Ni(NO3)2$.$6H2O by spray pylolysis method using two-fluid nozzle. As a result of spraying test with 0.3 mol/{{{{ iota }} concentration starting solution, mean droplet sizes varied with 8.99∼9.69$\mu\textrm{m}$ and those standard deviation were 4.57∼5.12. As-prepared powders which were synthesized at 1000$^{\circ}C$ have spherical shape, sizes of 0.1∼3.0$\mu\textrm{m}$ and specific surface area of 22.34∼24.20㎡/g. Most powders consisted of {{{{ gamma }}-Al2O3 phase and transforned into ${\alpha}$-A;2O3 phase by calcination at 1100$^{\circ}C$ for 1 hr. NiO-doped Al2O3 sintered bodies had better sinterability than those of pure Al2O3 and 0.3 wt% NiO-doped Al2O3 had near theoretical density and dense microstructure.

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Effects of Doping Concentration on the Properties of Ga-doped ZnO Thin Films Prepared by RF Magnetron Sputtering (Ga의 도핑농도에 따른 ZnO 박막의 특성)

  • Kim, Hyoung Min;Ma, Dae Young;Park, Ki Cheol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.12
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    • pp.984-989
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    • 2012
  • We have investigated the structural, electrical and optical properties of Ga-doped ZnO (GZO) thin films prepared by RF magnetron sputtering with laboratory-made ZnO targets containing 1, 3, 5, 7 wt% of $Ga_2O_3$ powder as a doping source. The GZO thin films show the typical crystallographic orientation with c-axis regardless of $Ga_2O_3$ content in the targets. The $3,000{\AA}$ thick GZO thin films with the lowest resistivity of $7{\times}10^{-4}{\Omega}{\cdot}cm$ are obtained by using the GZO ($Ga_2O_3$= 5 wt%) target. Optical transmittance of all films shows higher than 80% at the visible region. The optical energy band gap for GZO films increases as the carrier concentration ($n_e$) in the film increases.

A study on the change of chemical composition of sediment particles of terrace deposits - A case of fine sediments at Jeongdongjin area - (단구 퇴적층의 화학 조성 변화에 대한 연구 - 정동진 단구의 세립 물질을 사례로 -)

  • Kim, Jong Yeon
    • Journal of The Geomorphological Association of Korea
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    • v.23 no.2
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    • pp.29-45
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    • 2016
  • Chemical composition of fine sediments from Jeongdongjin area are analyzed with XRF method. The results are compared with previously reported results of sandstones of the nearest Simgok port. The weight percentage of $SiO_2$ of the samples are far lower than those of sandstones of Simgok. It is supposed to be happened by the selective elution of $SiO_2$ from the sediment layer of coastal terrace, as there's no evidence of selective input or precipitation of other elements from outside. As a result of chemical alteration or weathering of sediment at coastal terrace, weight percentage of $Al_2O_3$ and $Fe_2O_3$ of samples show far higher values than those of Simgok sandstone. In addition, the relative portion of $Al_2O_3$ and $Fe_2O_3$ are decreased to upward within outcrop of terrace sediment layers. It could be caused by the chemical weathering progress with time. However Chemical Index of alteration(CIA) of sediment samples are no larger than 90 and it could be interpreted that it would take over 100ka for total weathering of sediment in this area. Meanwhile the ratio of $SiO_2/Al2O_3$ of terrace sediment showed as 3.48~6.0 and it is far smaller than those of Simgok sandstones(23.9~49.0). The ratio of $SiO_2/Fe_2O_3$ of terrace sediment(19.19~55.85) showed similar pattern with $SiO_2/Al2O_3$ (Simgok sanstone: 119.6~601.8). The ratios have a weak trend of decreasing upwards within the outcrop, there also a huge difference in value among the samples. Chemical composition of reddish brown and gray layers which suspected as the result of psudogleization reveals that reddish brown parts have higher concentration of $Fe_2O_3$ than other parts, while there was no significant difference in concentration of $Al_2O_3$ and CaO.