• Journal of Sensor Science and Technology
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• v.23 no.5
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• pp.305-309
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• 2014

Well-ordered $TiO_2$ nanotubes with Au nanoparticles are a desirable configuration to enhance the gas sensing properties such as response and selectivity due to their high surface area to volume ratio and catalytic effect of Au nanoparticles. We have synthesized the well-ordered $TiO_2$ nanotubes directly on a Pt IDEs patterned $SiO_2/Si$ substrate and then decorated Au nanoparticles on inner and outer surface of $TiO_2$ nanotubes using electrodeposition method. The Au-decorated $TiO_2$ nanotubes shows ultrahigh response to $C2_H_5OH$ and the highest increasing ratio to $H_2$ compared with other gases.

• Journal of Sensor Science and Technology
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• v.11 no.6
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• pp.350-357
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• 2002

Micro gas sensor with single electrode was proposed for improving stability and sensitivity. Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass substrate and a $SnO_2$ sensing material was thermally evaporated on Pt electrode. $SnO_2$ was patterned by lift-off process and then thermally oxidized in $O_2$ condition for 1 hr., $600^{\circ}C$. The size of fabricated sensor was $1.9{\times}2.1\;mm^2$. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearity for wide range($0{\sim}10,000\;ppm$) of gas concentrations. And the sensor shows a good recovery characteristics of 1% deviation compared to initial resistance.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.11
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• pp.690-693
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• 2015

In this paper, in order to develop excellent Pb-free composition ceramics for ultrasonic sensor. The $SnO_2$-doped ($Na_{0.525}K_{0.443}Li_{0.037})(Nb_{0.883}Sb_{0.08}Ta_{0.037})O_3$)(abbreviated as NKL-NST) ceramics have been synthesized using the ordinary solid state reaction method. The effect of $SnO_2$-doping on their dielectric and piezoelectric properties was investigated. The ceramics doped with 0 wt% $SnO_2$ have the optimum values of piezoelectric constant($d_{33}$), piezoelectric figure of merit($d_{33}.g_{33}$), planar piezoelectric coupling coefficient($k_p$) and density : $d_{33}=195[pC/N]$, $d_{33}.g_{33}=5.62pm^2/N.kp=0.40$, $density=4.436[g/cm^3]$. suitable for duplex ultrasonic sensor application.

• Journal of Sensor Science and Technology
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• v.1 no.2
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• pp.107-116
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• 1992

The optimum base material was selected by the thermal decomposition temperature of $CH_{3}CN$ on the surface of various metal oxides, and the FT-IR analyses of its products. On the surface of $SnO_{2}$, $CH_{3}CN$ was initiated to decompose at $130^{\circ}C$ and produced a lot of products at $200^{\circ}C$. The products from the reaction were found to be $H_{2}O$, $NH_{3}$ and CO, but $N_{2}O$ has started to produce at $320^{\circ}C$. The sensing characteristics of $SnO_{2}$ sensor to $CH_{3}CN$ are influenced by the absorbed species which are produced by the oxidation reaction of $CH_{3}CN$ on the surface of metal oxide. The gaseous species produced from the surface of sensing material in the oxidation reaction were found to be CO, $NH_{3}$, $H_{2}O$ and $NO_{x}$ etc.. It was assumed that the amount of $NO_{x}$ play a great role to the determining sensing properties. In the condition of 170 ppm $CH_{3}CN$, the sensitivity and optimum operating temperature of $SnO_{2}$ were 70% and $300^{\circ}C$, respectively. In this research, the response time of $CH_{3}CN$ to $SnO_{2}/Al_{2}O_{3}/Pd$ sensor added with 0.2 wt % Pd was found about 10 sec and sensitivity was also found relatively high.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.4
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• pp.20-25
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• 2010

An integrated Mach-Zehnder interferometric sensor operating at 632.8 nm was designed and fabricated by the technology of planar rib waveguides. Rib waveguide based on silica system ($SiO_2-SiO_xN_y-SiO_2$) was geometrically designed to have single mode operation and high sensitivity. It was structured by semiconductor fabrication processes such as thin film deposition, photolithography, and RIE (Reactive Ion Etching). With the power observation, propagation loss measurement by cut-back method showed about 4.82 dB/cm for rib waveguides. Additionally the chromium mask process for an etch stop was employed to solve the core damaging problem in patterning the sensing zone on the chip. Refractive index measurement of water/ethanol mixture with this device finally showed a sensitivity of about $\pi$/($4.04{\times}10^{-3}$).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.252-252
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• 2009

In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si structure was fabricated for humidity sensor applications based on surface acoustic wave (SAW). In this structure, the ZnO film was used as sensing material layer. These ZnO and AlN(0002) were deposited by so-gel process and a pulse reactive magnetron sputtering, respectively. These experimental results showed that the obtained SAW velocity on AlN film was about 5128 m/s at $h/\lambda$=0.0125 (h and $\lambda$ is thickness and wavelength, respectively). For ZnO sensing layers coated on AlN, films have hexagonal wurtzite structure and nanometer particle size. The crystalline size of ZnO films annealed at 400, 500, and 600 $^{\circ}C$ is 10.2, 29.1, and 38 nm, respectively. Surface of the film exhibits spongy which can adsorb steam in the air. The best quality of the ZnO film was obtained with annealing temperature at 500 $^{\circ}Cis$. The change in frequency response (127.9~127.85 MHz) of the SAW humidity sensor based on ZnO/AlN structure was measured along the change in humidity (41~69%). The structural properties of thin films wereinvestigated by XRD and SEM.

• Environmental Engineering Research
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• v.25 no.3
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• pp.324-334
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• 2020

Tannery wastewater is known to contain high concentrations of organic compounds, pathogens, and other toxic inorganic elements such as heavy metals, nitrogen, sulfur, etc. Biological methods such as aerobic and anaerobic processes are unsuitable for tannery wastewater treatment due to its high salinity, and electrochemical oxidation offers a promising method to solve this problem. In this study, raw tannery wastewater treatment using DSA® Ti/RuO₂, Ti/IrO₂ and Ti/BDD electrodes with continuous flow systems was examined. Effects of current densities and electrolysis times were investigated, to evaluate the process performance and energy consumption. The results showed that a Ti/BDD electrode is able to reach higher treatment efficiency than Ti/IrO₂, and Ti/RuO₂ electrodes across all parameters, excluding Total Nitrogen. The main mechanism of tannery wastewater oxidation at a Ti/BDD electrode is based on direct oxidation on the electrode surface combined with the generation of oxidants such as °OH and Cl₂, while at DSA® Ti/RuO₂ and Ti/IrO₂ electrodes, the oxidation mechanisms are based on the generation of chlorine. After treatment, the effluents can be discharged to the environment after 6-12 h of electrolysis. Electrooxidation thus offers a promising method for removing the nutrients and non-biodegradable organic compounds in tannery wastewater.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.9
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• pp.1621-1625
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• 2010

Recently, due to increase in the usage of toxic gas and inflammability gas, the ability to monitor and precisely measurement of these gases is crucial in preventing the occurrence of various accidents. CuO doped and undoped $WO_3$ thick films gas sensors were prepared using screen-printing method on alumina substrates. A structural properties of $WO_3$:CuO thick films had monoclinic phase and triclinic phase of $WO_3$ together. Sensitivity of $WO_3$:CuO sensor at 2000 ppm of $CO_2$ gas and 50 ppm of $H_2S$ gas was investigated. 4 wt% Cu doped $WO_3$ thick films had the highest sensitivity of $CO_2$ gas and $H_2S$ gas.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.476-482
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• 1997

A portable electronic nose system has been fabricated and characterized using an oxide semiconductor gas sensor array and pattern recognition techniques such as principal component analysis and back-propagation artificial neural network. The sensor array consists of six thick-film gas sensors whose sensing layers are Pd-doped $WO_{3}$, Pt-doped $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$-doped $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$-doped $SnO_{2}$ + Pd coated layer, $Al_{2}O_{3}$-doped ZnO and $PdCl_{2}$-doped $SnO_{2}$. The portable electronic nose system consists of an 16bit Intel 80c196kc as CPU, an EPROM for storing system main program, an EEPROM for containing optimized connection weights of artificial neural network, an LCD for displaying gas concentrations. As an application the system has been used to identify 26 carbon monoxide/hydrocarbon (CO/HC) car exhausting gases in the concentration range of CO 0%/HC 0 ppm to CO 7.6%/HC 400 ppm and the identification has been successfully demonstrated.

• Journal of the Korean Applied Science and Technology
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• v.22 no.3
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• pp.281-288
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• 2005

The silica nanoparticles were used as support of catalyst, filling material, electronic assembler, thin film material, and sensor material. And, the titania nanoparticles were used as pigment, dielectric substance, sensor and photocatalyst. In this paper, the spherical composite particles of $TiO_2/SiO_2$with narrow size distribution and phase pure were synthesized by ultrasonic spray pyrolysis method from $TiOSO_4$ and colloidal silica solution. Using ultrasonic apparatus, this starting solution was vaporized to droplets, and these droplets were induced into tube furnace by carrier gas. The resulting composite powder was characterized by scanning electron microscopy, X-ray diffraction analysis, TG-DTA, in vitro sun protection factor(SPF) and BET surface area analysis.