• 제목/요약/키워드: $O_2$ plasma pre-treatment

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BSCCO 플라즈마 용사피막의 부분용융열처리 후 어닐링 시간에 따른 초전도 특성 (Characteristics of Plasma Sprayed BSCCO Superconductor Coatings with Annealing Time After Partial Melt Process)

  • 박정식;이선홍;박경채
    • 한국재료학회지
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    • 제24권2호
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    • pp.116-122
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    • 2014
  • $Bi_2Sr_2CaCu_2O_x$(Bi-2212) and $Bi_2Sr_2Ca_2Cu_3O_y$(Bi-2223) high-Tc superconductors(HTS) have been manufactured by plasma spraying, partial melt process(PMP) and annealing treatment(AT). A Bi-2212/2223 HTS coating layer was synthesized through the peritectic reaction between a 0212 oxide coating layer and 2001 oxide coating layer by the PMP-AT process. The 2212 HTS layer consists of whiskers grown in the diffusion direction. The Bi-2223 phase and secondary phase in the Bi-2212 layer were observed. The secondary phase was distributed uniformly over the whole layer. As annealing time goes on, the Bi-2212 phase decreases with mis-orientation and irregular shape, but the Bi-2223 phase increases because a new Bi-2223 phase is formed inside the pre-existing Bi-2212 crystals, and because of the nucleation of a Bi-2223 phase at the edge of Bi-2212 crystals by diffusion of Ca and Cu-O bilayers. In this study the spray coated layer showed superconducting transitions with an onset Tc of about both 115 K, and 50 K. There were two steps. Step 1 at 115 K is due to the diamagnetism of the Bi-2223 phase and step 2 at 50 K is due to the diamagnetism of the Bi-2212 phase.

Capstan용 용사코팅의 내마모 특성 향상 방안 (A Methodological Study of the Wear-Resistant Property Improvement on the Thermal Spray Coating for Capstan)

  • 어순철
    • 한국분말재료학회지
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    • 제7권2호
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    • pp.63-70
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    • 2000
  • Thermal spray coating process has proven to be effective at producing hard, dense, wear resistance coatings on the relatively mild substrates. Among several spraying techniques, HVOF (High Velocity Oxygen Fuel) and plasma coating processes, which are preferentially used for the wear resistance application such as capstans, have been applied in this study. The effects of pre-treatment, it-process and post-treatment parameters on the wear and mechanical properties of WC+12%Co, Cr3C2 and Al2O3 powder coatings have been investigated and correlated with the microstructures. The results indicated that the carbide coating was more preferable to the oxide coatings and the post-treatments consisting of vacuum annealing and sealing on carbide coatings led to significant improvements in wear resistance, adhesive strength and coating phase stabilization over the other processing techniques in this application.

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Effect of a Multi-Step Gap-Filling Process to Improve Adhesion between Low-K Films and Metal Patterns

  • Lee, Woojin;Kim, Tae Hyung;Choa, Yong-Ho
    • 한국재료학회지
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    • 제26권8호
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    • pp.427-429
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    • 2016
  • A multi-step deposition process for the gap-filling of submicrometer trenches using dimethyldimethoxysilane (DMDMOS), $(CH_3)_2Si(OCH_3)_2$, and $C_xH_yO_z$ by plasma enhanced chemical vapor deposition (PECVD) is presented. The multi-step process consisted of pre-treatment, deposition, and post-treatment in each deposition step. We obtained low-k films with superior gap-filling properties on the trench patterns without voids or delamination. The newly developed technique for the gap-filling of submicrometer features will have a great impact on inter metal dielectric (IMD) and shallow trench isolation (STI) processes for the next generation of microelectronic devices. Moreover, this bottom up gap-fill mode is expected to be universally for other chemical vapor deposition systems.

Quantitative Analysis of Heavy Metals in Packaging Papers

  • Jo, Byoung-Muk;Jeong, Myung-Joon
    • 펄프종이기술
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    • 제39권5호
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    • pp.45-51
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    • 2007
  • This study was carried out to investigate various heavy metal contents in packaging papers by pre-treatments for ICP-ES (Inductively Coupled Plasma Emission Spectrometry) analysis. Pre-treatment methods of heavy metals in this study include extraction, migration and decomposition methods (dry ashing, $HNO_3-HClO_4-HF,\;HNO_3,\;and\;H_2SO_4-HNO_3$). Test results were compared with conventional extraction (water) and migration (3% acetic acid) methods. The five representative heavy metals (Cd, As, Pb, Cr and Hg) were analyzed. For Cd, Hg, and As, the results were below detection limit of the instrumental technique. It was considered that the migration test was a better method compared to extraction test, but all the decomposition methods showed much higher detection values than the extraction or migration test. In case of recycled corrugated containers, 3% acetic acid solution extracted about 25% of chromium and 30% of lead compared to the content by decomposition methods. Among all decomposition methods, the nitric acid - perchloric acid - hydrofluoric acid treatment brought a slightly higher detection value than others, but there was no significant difference among them except sulfuric acid - nitric acid method.

표면 전처리 공정에 따른 투명전극 계면 특성 변화와 유기 태양전지 성능 및 안정성 향상 (Performance and Stability Enhancement of Organic Solar Cells by Surface Treatment Processes of Transparent Electrodes)

  • 이관용;김도현;박선주;김영주
    • 정보저장시스템학회논문집
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    • 제9권2호
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    • pp.42-47
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    • 2013
  • In this study, we have experimentally analyzed how the surface properties of transparent electrode layer influence the photovoltaic performance of bulk heterojunction organic solar cell by the contact angle measurement and X-ray photoelectron spectroscopy(XPS) observation. As a result, the power conversion efficiency of test devices improved from 0.64% to 1.83% and 2.15% by UV-ozone exposure and $O_2$ plasma treatment, respectively. Thus, we conclude that the surface activation process is very important for better performance and stability in addition to the cleaning process of carbonate residue on the surface.

수소 분리용 팔라듐계 분리막의 세라믹 코팅 영향 (Ceramic barrier coated Pd hydrogen membrane on a porous nickel support)

  • 이춘부;이성욱;박진우;김광호;황경란;박종수;김성현
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 추계학술대회 초록집
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    • pp.114.1-114.1
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    • 2010
  • A highly performed Pd-based hydrogen membrane has prepared successfully on a modified porous nickel support. The porous nickel support modified by impregnation method of $Al(NO_3)_3{\cdot}9H_2O$ (Aldrich Co.) over the nickel powder showed a strong resistance to hydrogen embrittlement and thermal stability. Plasma surface modification treatment was introduced as a pre-treatment process instead of conventional HCl wet activation. Ceramic barrier was coated on the external surface of the prepared nickel supports to prevent intermetallic diffusion and to enhance the affinity between the support and membrane. Palladium and copper were deposited at thicknesses of $4\mu}m$ and $0.5{\mu}m$, respectively, on a barrier-coated support by DC sputtering process. The permeation measurement was performed in pure hydrogen at $400^{\circ}C$. The single gas permeation of our membrane was two times higher than that of the previous membrane which do not have ceramic barrier.

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Interface Control to get Higher Efficiency in a-Si:H Solar Cell

  • Han, Seung-Hee;Kim, En-Kyeom;Park, Won-Woong;Moon, Sun-Woo;Kim, Kyung-Hun;Kim, Sung-Min
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.193-193
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    • 2012
  • In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

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계혈등 물추출물의 항산화 및 간보호효과 (Antioxidant Effect and Liver Protection Effect of Spatholobi Caulis Water Extract)

  • 이재준;최홍식;김승모
    • 대한본초학회지
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    • 제26권3호
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    • pp.47-56
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    • 2011
  • Objectives : This study investigated whether the water extract of Spatholobi Caulis (SCE) has the ability to protect hepatocyte against oxidative stress induced by tert-butylhydroperoxide (tBHP) in vitro and $CCl_4$ in vivo. Methods : In vitro, HepG2 cells pre-treated with Spatholobi Caulis water extract (1, 3, 10, $30{\mu}g$/ml) for 12h and further incubated with tBHP ($100{\mu}M$) for the next 12h. Cell viability was assessed by MTT assay. In vivo, rats were orally administrated with the aqueous extract of Spatholobi Caulis (SCE; 50, 100 mg/kg) for 4 days and then, injected with $CCl_4$ 1 mg/kg body weight to induce acute liver damage. Results : Treatment with SCE inhibited cell death induced by tBHP, as evidenced by alterations in the levels of the proteins associated with apoptosis:SCE prevented a decrease in $Bcl_2$, and cleavage of poly(ADP-ribose)polymerase and pro-caspase-3. Moreover, SCE inhibited the ability of tBHP to generate $H_2O_2$ production, thereby restoring GSH content. Moreover, SCE treatments in rats effectively decreased liver injuries induced by a single dose of $CCl_4$, as evidenced by decreases in hepatic degeneration and inflammation as well as plasma alanine aminotransferase and lactate dehydrogenase activities. Consistently, treatments of SCE also protected liver in rats stimulated by $CCl_4$, as indicated by restoration GSH and prevention of MDA in the liver. Conclusions : SCE has the ability 1) to protect hepatocyte against oxidative stress induced by tBHP and 2) to prevent $CCl_4$-inducible acute liver toxicity. Present findings may be informative not only in elucidating the pharmacological mechanism of Spatholobi Caulis, but in determining its potential application for oxidative cellular damage in the liver.

CIGSe2 박막태양전지용 Mo 하부전극의 물리·전기적 특성 연구 (A Study of Mo Back Electrode for CIGSe2 Thin Film Solar Cell)

  • 최승훈;박중진;윤정오;홍영호;김인수
    • 한국진공학회지
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    • 제21권3호
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    • pp.142-150
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    • 2012
  • CIGS 박막 태양전지 기판소재인 소다라임유리 표면에 플라즈마 전처리 후 DC 마그네트론 스퍼터링 방법으로 Mo 박막을 제조하였다. 증착압력과 증착시간 변화에 따른 Mo 박막의 물리적, 전기적 특성을 분석하였고, 셀렌화 처리 조건에 따른 $MoSe_2$ 생성 여부와 경향성을 연구하였으며, Mo 박막 두께에 따른 AZO/i-ZnO/CdS/CIGS/Mo/SLG 구조의 태양전지를 제조하여 그 특성을 분석 및 평가하였다. 증착압력이 4.9 mTorr에서 1.3 mTorr로 감소할수록 치밀하고 결정입자 사이의 공극이 적고, 증착속도가 감소하고 전기저항도가 낮은 Mo 박막이 증착되었다. 증착온도가 상온에서 $200^{\circ}C$로 증가할수록 Mo 박막은 치밀한 구조를 가지고 결정성은 향상되어 면저항이 낮게 나타났다. 셀렌화 시간이 길어질수록 Mo 박막 층은 줄어들고, $MoSe_2$ 층 생성두께가 커지는 것을 알 수 있었고, 열처리로 인해 결정화 되면서 전체 박막의 두께가 줄어들었으며, $MoSe_2$ 층의 배양성은 c축이 Mo 표면과 수직 방향으로 성장된 것을 알 수 있었다. Mo 박막의 두께가 1.2 ${\mu}m$와 0.6 ${\mu}m$인 AZO/i-ZnO/CdS/CIGS/Mo/SLG 구조로 이루어진 CIGS 박막 태양전지를 제조하였다. Mo 박막의 두께가 1.2 ${\mu}m$일 때 보다 0.6 ${\mu}m$일 때 CIGS 박막 태양전지의 변환 효율은 9.46%로 비교적 우수한 특성을 나타났다. CIGS 박막 태양전지에서 하부전극인 Mo 박막 특성은 유리기판 및 광흡수 층과의 계면 형성 따라 큰 영향을 미친다는 것을 알 수 있었고, 유리기판의 플라즈마 처리와 Mo 박막의 두께조절로 Na 효과 및 $MoSe_2$층 형성 제어함으로써 CIGS 박막 태양전지의 특성 개선에 효과를 가질 수 있었다.

레이저유도붕괴분광법을 활용한 토양의 정량분석 (Quantitative Elemental Analysis in Soils by using Laser Induced Breakdown Spectroscopy(LIBS))

  • 장용선;이계준;이정태;황선웅;진용익;박찬원;문용희
    • 한국토양비료학회지
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    • 제42권5호
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    • pp.399-407
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    • 2009
  • 레이저 유도붕괴 분광법(LIBS)은 물질상태(고체, 액체, 기체)에 상관없이 신체 접촉시 오염 우려 및 미량 시료도 전처리 없이 동시에 많은 종류의 원소 분석으로 분석과정이 단순하고 신속하게 분석이 가능하며, 소형화된 레이저의 개발로 시료의 직접적인 채취가 어려운 조건의 현장분석에도 적합하다. 농산물 안정성 평가나 친환경 농업 및 정밀농업을 위한 조사 등에 활용될 수 있는 비파괴 실시간 정량분석기술로서 LIBS 분석법의 토양분석 가능성을 평가하고자 표준광물, 미국의 표준기술연구소의 표준토양, 미국 테네시주 초지 및 밭토양을 대상으로 토양 구성성분의 정성 정량적 분석에 필요한 측정조건을 조사하고 이를 토대로 LIBS에 의한 농도값과 기존의 화학분석법을 통해 측정한 결과를 비교하였다. LIBS 측정은 펄스형 Nd:YAG 레이저(Minilite II, Continuum, Santa Clara, CA)에서 나오는 1064 nm 에너지 파장의 광원을 시편의 플라즈마를 생성시키는데 사용하였고, 25 mJ/pulse 여기 에너지 빔을 펄스폭 35 ns, 펄스 반복 주기 10 Hz, 노출시간 10 s 동안 시료의 표면에 조사하였다. LIBS 분광은 0.03 nm의 해상력으로 200 nm에서 600 nm의 영역에서 50 m 이하로 분쇄하여 원형 펠렛 형태로 압축시킨 시료를 10 rpm의 속도로 회전시키면서 상온 상압의 실험실 조건에서 수행되었다. LIBS를 이용한 토양 중 주요한 원소의 적정 파장(nm)은 Al(I) 309.2 nm, Ca(I) 422.6 nm, Fe(I) 406.4 nm, Mg(I) 285.2 nm, Na(I) 589.2 nm, Si(I) 288.2 nm, Ti(I) 398.9 nm 이었다. LIBS의 피크강도가 물질 중 원소의 농도가 증가됨에 따라 각 원소의 특정 파장대에서 일정하게 증가되는 것으로 나타나고 있으나 표준물질의 LIBS의 신호비와 원소비를 통해 측정된 검량곡선의 상관계수($r^2$)는 0.863에서 0.977의 범위로 원소별로 상이할 뿐만 아니라 0.98에 미치지 못하였다. 또한, 토양 중 분석대상원소에 대하여 기존 ICP-AES에 의한 표준방법으로 분석된 시료의 측정값과 비교하여 상대적인 오차는 대략적으로 (-)40%에서 80%이상이며, 평균오차는 32.2%로 표준척도 20% 이상을 초과하였다. LIBS에 의한 토양분석은 토양의 조성과 입자의 크기에 따른 매질효과(matrix effect)로 표준물질의 검량곡선에서 결정계수가 낮고, 원소별 함량도 기준의 표준방법과 비교할 때 오차가 컸다. 따라서 LIBS에 의한 토양분석은 정성적인 분석 수준의 정밀도를 보였으며, 토양 매질의 영향을 최소화하기 위하여 기존의 분쇄 펠렛형 시료조제 및 회전측정 이외의 다양한 토양매질의 표준물질(standard reference material)의 확보, 새로운 전처리 방법 및 측정상 방법개선 등 신뢰성 있는 정량 분석을 위한 노력이 필요할 것으로 사료된다.