• 제목/요약/키워드: $O_{3}$ concentration

검색결과 5,165건 처리시간 0.03초

반도체 웨이퍼의 오존 수(水) 세정을 위한 고농도 오존발생장치 특성 연구 (A Study on the Characteristics of the High Concentration Ozone Generator for the Semiconductor Wafer Cleaning with the Ozone Dissolved De-ionized Water)

  • 손영수;함상용;문세호
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권12호
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    • pp.579-585
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    • 2003
  • Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

Fe3O4 나노분말을 이용한 전기화학적 비효소 면역센서 응답특성 (Response Characteristics of Electrochemical Non-enzyme Immunosensor using Fe3O4 Nanoparticle)

  • 김창규;이경자;엄영랑;이민구;이창규
    • 한국분말재료학회지
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    • 제16권3호
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    • pp.180-184
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    • 2009
  • In this paper, the electrochemical non-enzyme immunosensor has been developed for the determination of salmonella antigen, using inverse voltammetry. For the estimation of salmonella antigen concentration, the $Fe_3O_4$ nanoparticles synthesized by microemulsion method were conjugated with salmonella antigen. Then, the immunocomplex between antibody immobilized on the transducer surface and antigen containing a magnetic nanoparticles was formed. From the linear relationship between the reduction peak current of Fe(III) and salmonella antigen concentration, it is suggested that the electrochemical non-enzyme biosensor is applicable to detect salmonella antigen in the concentration range of $10^1-10^5$ CFU/ml.

F급 플라이 애쉬-모르타르의 강도발현에 대한 NaOH과 Na2SiO3·9H2O 첨가의 영향 (Effects of NaOH and Na2SiO3·9H2O Addition on Strength Development of Class F Fly Ash-Mortar)

  • 박상숙;강화영;한상호;강희복
    • 한국구조물진단유지관리공학회 논문집
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    • 제9권4호
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    • pp.261-269
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    • 2005
  • 본 연구의 목적은 칼슘 함량이 낮은 플라이 애쉬를 이용하여 포틀랜트시멘트를 대신할 수 있는 알칼리활성 플라이 애쉬-시멘트를 제조하는데 있다. 플라이 애쉬의 활성화는 다양한 수산화나트륨 농도와 온도 그리고 liquid/fly ash 혼합비율에서 수행하였다. 좀 더 높은 압축강도를 가진 경화체를 얻기 위하여 규산나트륨을 알칼리 용액에 첨가하였다. 강도발현의 관점에서 볼 때, liquid/fly ash의 혼합비율과 활성화제 농도 그리고 온도는 항상 중요한 인자로 작용하였다. $NaOH(210g)+Na_2SiO_3{\cdot}9H_2O(30g)+H_2O=1L$로 구성된 알칼리 활성용액은 $50^{\circ}C$에서 칼슘 함량이 낮은 플라이 애쉬의 알칼리활성 효과를 가장 높게 나타냈다. 알칼리활성화된 플라이 애쉬는 주로 quartz와 mullite 그리고 무정형의 aluminosilicate로 구성되었음을 SEM과 XRD 분석결과에서 보여주었다.

수열합성 조건에 따른 나노로드 클러스터형 $MnO_2$의 상변화와 이를 이용한 $LiMn_2O_4$의 리튬이온전지 양전극 특성 (Phase Change of Nanorod-Clustered $MnO_2$ by Hydrothermal Reaction Conditions and the Lithium-ion Battery Cathode Properties of $LiMn_2O_4$ Prepared from the $MnO_2$)

  • 강근영;최민규;이영기;김광만
    • Korean Chemical Engineering Research
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    • 제49권5호
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    • pp.541-547
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    • 2011
  • $MnSO_45H_2O$$(NH_4)S_2O_8$의 수열반응으로 1차원 나노로드들이 침상으로 클러스터화된 구조의 $MnO_2$를 제조하고 그 모폴로지와 결정성을 분석하였다. 수열반응의 조건에 따라 ${\alpha}$-, ${\beta}$-, ${\gamma}-MnO_2$ 등의 전구체가 제조될 수 있는데, 고농도 반응물 및 높은 수열합성 온도($150^{\circ}C$)에서 전기화학적 활성이 우수한 나노로드 클러스터 ${\beta}-MnO_2$의 생성을 확인하였다. 또한 리튬화제 $LiC_3H_3O_2{\cdot}2H_2O$의 농도와 열처리 온도를 변화시키면서 $MnO_2$를 리튬화하여 스피넬계 $LiMn_2O_4$를 제조하고 리튬이온전지 양전극으로서의 특성을 조사하였다. 결과적으로 나노로드 클러스터형 ${\beta}-MnO_2$로부터 고농도 리튬화제와 $800^{\circ}C$ 열처리를 통해 제조한 $LiMn_2O_4$가 정방형 스피넬에 가장 가까운 구조임을 확인하였으며, 120 mAh/g의 우수한 초기 방전용량을 나타내었다.

BaTiO3 분말의 수열합성 해석 (Interpretation of Hydrothermal Synthesis of BaTiO3 Powder)

  • 오정강;서경원
    • 공업화학
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    • 제10권4호
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    • pp.509-514
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    • 1999
  • 수열합성법을 이용한 $BaTiO_3$ 미세분말제조시 반응시간, 출발물질농도와 교반속도 등이 입자의 결정성, 평균입경과 입도분포에 미치는 영향을 조사하였다. 실험결과 기존의 핵생성-입자성장 모델과는 상이하게도 반응시간과 교반속도가 증가할수록 또는, 출발물질의 농도가 감소할수록 입자크기는 감소하였으며, 입도분포도 좁았다. 이로부터 $BaTiO_3$ 결정입자는 수열합성시 용해, 가수분해-축합반응, 침전, 응집, 확산, 전이 등의 복합적인 반응경로를 거치는 것으로 판단되었다.

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이성분 나노유체 (NH3/H2O + 나노입자)의 열전달 및 흡수성능 촉진실험 (Experiment on Heat Transfer and Absorption Performance Enhancement for Binary Nanofluids (NH3/H2O + Nano-Particles))

  • 이진기;정청우;강용태
    • 대한기계학회논문집B
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    • 제32권9호
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    • pp.669-675
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    • 2008
  • The objectives of this paper are to examine the effect of nano-particles on the pool type absorption heat transfer enhancement and to find the optimal conditions to design a highly effective compact absorber for ammonia/water absorption system. The effect of $Al_2O_3$ nano-particles and carbon nanotube(CNT) on the absorption performance is studied experimentally. The experimental ranges of the key parameters are 20% of ammonia concentration, $0{\sim}0.08\;vol%$ (volume fraction) of CNT particles, and $0{\sim}0.06 \;vol%$ of $Al_2O_3$ nano-particles. For the ammonia/water nanofluids, the heat transfer rate and absorption rate with 0.02 vol% $Al_2O_3$ nano-particles were found to be 29% and 18% higher than those without nano-particles, respectively. It is recommended that the concentration of 0.02 vol% of $Al_2O_3$ nano-particles be the best candidate for ammonia/water absorption performance enhancement.

Degradation of toxic azo dye (AO7) using Fenton's process

  • Sharma, Ashish;Verma, Manisha;Haritash, A.K.
    • Advances in environmental research
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    • 제5권3호
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    • pp.189-200
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    • 2016
  • This study aimed at advanced oxidation of hetero tri-functional reactive dye Acid orange 7 using photo-Fenton conditions in a lab-scale experiment. Decolourisation of Acid Orange 7 dye by Fenton's process was dependent on concentration of Hydrogen peroxide, Ferrous sulphate, pH, and contact time. A $2^3$ factorial design was used to evaluate the effects of these key factors: pH, Fe(II), and $H_2O_2$ concentration, for a dye concentration of 50 mg/L with COD of 340 mg/L at pH 3.0. The response function was removal of colour under optimised conditions; pH 3.0, [Fe(II)] 40.83 mg/L, [$H_2O_2$] 4.97 mmol/L; 13.6 min. of treatment resulting in 100% colour removal. The final COD of treated wastewater was nil suggesting that AOP is a potentially useful process of color removal and dye degradation/mineralisation of effluent having AO7. Minimum contact time for complete decolourisation was at 5 mmol/l $H_2O_2$ concentration. Increase in $FeSO_4$ (mg/l) concentration resulted in decrease of time for complete decolourisation. Box-Behnken Design was used to optimize the process variables. Maximum and minimum levels of pH (3-5), $H_2O_2$ (4-6 mmol/l), $FeSO_4$ (30-46 mg/l) and contact time (5-15 minutes) were used. The statistical analysis revealed a value of 0.88 for coefficient of regression ($R^2$) indicating a good fit of model. Calculated F-value was found higher than the tabulated value confirming to significance of the model. Based on student's t-test, Ferrous sulphate, pH, and contact time have a positive effect on the percent decolourisation of Acid Orange 7.

분무열분해법에 의한 NiO 첨가 Al2O3 분체의 합성 (Synthesis of NiO-doped Al2O3 Powder by Spray Pyrolysis)

  • 박정현;조경식;김한태
    • 한국세라믹학회지
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    • 제28권8호
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    • pp.593-602
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    • 1991
  • Al2O3 and NiO-doped Al2O3 powders were prepared from the ethanol solution of Al (NO3)3$.$9H2O and Ni(NO3)2$.$6H2O by spray pylolysis method using two-fluid nozzle. As a result of spraying test with 0.3 mol/{{{{ iota }} concentration starting solution, mean droplet sizes varied with 8.99∼9.69$\mu\textrm{m}$ and those standard deviation were 4.57∼5.12. As-prepared powders which were synthesized at 1000$^{\circ}C$ have spherical shape, sizes of 0.1∼3.0$\mu\textrm{m}$ and specific surface area of 22.34∼24.20㎡/g. Most powders consisted of {{{{ gamma }}-Al2O3 phase and transforned into ${\alpha}$-A;2O3 phase by calcination at 1100$^{\circ}C$ for 1 hr. NiO-doped Al2O3 sintered bodies had better sinterability than those of pure Al2O3 and 0.3 wt% NiO-doped Al2O3 had near theoretical density and dense microstructure.

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Ga의 도핑농도에 따른 ZnO 박막의 특성 (Effects of Doping Concentration on the Properties of Ga-doped ZnO Thin Films Prepared by RF Magnetron Sputtering)

  • 김형민;마대영;박기철
    • 한국전기전자재료학회논문지
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    • 제25권12호
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    • pp.984-989
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    • 2012
  • We have investigated the structural, electrical and optical properties of Ga-doped ZnO (GZO) thin films prepared by RF magnetron sputtering with laboratory-made ZnO targets containing 1, 3, 5, 7 wt% of $Ga_2O_3$ powder as a doping source. The GZO thin films show the typical crystallographic orientation with c-axis regardless of $Ga_2O_3$ content in the targets. The $3,000{\AA}$ thick GZO thin films with the lowest resistivity of $7{\times}10^{-4}{\Omega}{\cdot}cm$ are obtained by using the GZO ($Ga_2O_3$= 5 wt%) target. Optical transmittance of all films shows higher than 80% at the visible region. The optical energy band gap for GZO films increases as the carrier concentration ($n_e$) in the film increases.

단구 퇴적층의 화학 조성 변화에 대한 연구 - 정동진 단구의 세립 물질을 사례로 - (A study on the change of chemical composition of sediment particles of terrace deposits - A case of fine sediments at Jeongdongjin area -)

  • 김종연
    • 한국지형학회지
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    • 제23권2호
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    • pp.29-45
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    • 2016
  • Chemical composition of fine sediments from Jeongdongjin area are analyzed with XRF method. The results are compared with previously reported results of sandstones of the nearest Simgok port. The weight percentage of $SiO_2$ of the samples are far lower than those of sandstones of Simgok. It is supposed to be happened by the selective elution of $SiO_2$ from the sediment layer of coastal terrace, as there's no evidence of selective input or precipitation of other elements from outside. As a result of chemical alteration or weathering of sediment at coastal terrace, weight percentage of $Al_2O_3$ and $Fe_2O_3$ of samples show far higher values than those of Simgok sandstone. In addition, the relative portion of $Al_2O_3$ and $Fe_2O_3$ are decreased to upward within outcrop of terrace sediment layers. It could be caused by the chemical weathering progress with time. However Chemical Index of alteration(CIA) of sediment samples are no larger than 90 and it could be interpreted that it would take over 100ka for total weathering of sediment in this area. Meanwhile the ratio of $SiO_2/Al2O_3$ of terrace sediment showed as 3.48~6.0 and it is far smaller than those of Simgok sandstones(23.9~49.0). The ratio of $SiO_2/Fe_2O_3$ of terrace sediment(19.19~55.85) showed similar pattern with $SiO_2/Al2O_3$ (Simgok sanstone: 119.6~601.8). The ratios have a weak trend of decreasing upwards within the outcrop, there also a huge difference in value among the samples. Chemical composition of reddish brown and gray layers which suspected as the result of psudogleization reveals that reddish brown parts have higher concentration of $Fe_2O_3$ than other parts, while there was no significant difference in concentration of $Al_2O_3$ and CaO.