• Title/Summary/Keyword: $N_2O$ Plasma

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Fabrication and Operating Properties of Nb Silicide-coated Si-tip Field Emitter Arrays (니오비움 실리사이드가 코팅된 실리콘 팁 전계 방출 소자의 제조 및 동작 특성)

  • Ju, Byeong-Kwon;Park, Jae-Seok;Lee, Sangjo;Kim, Hoon;Lee, Yun-Hi;Oh, Myung-Hwan
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.7
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    • pp.521-524
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    • 1999
  • Nb silicide was formed on the Si micro-tip arrays in order to improve field emission properties of Si-tip field emitter array. After silicidization of the tips, the etch-back process, by which gate insulator, gate electrode and photoresist were deposited sequentially and gate holes were defined by removing gradually the photoresist by $O_2$ plasma from the surface, was applied. Si nitride film was used as a protective layer in order to prevent oxygen from diffusion into Nb silicide layer and it was identified that the NbSi2 was formed through annealing in $N_2$ ambient at $1100^{\circ}C$ for 1 hour. By the Nb silicide coating on Si tips, the turn-on voltage was decreased from 52.1 V to 32.3 V and average current fluctuation for 1 hour was also reduced from 5% to 2%. Also, the fabricated Nb silicide-coated Si tip FEA emitted electrons toward the phosphor and light emission was obtained at the gate voltage of 40~50 V.

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DLC박막 증착시 전처리 가스 종류와 유량 변화에 따른 효과

  • Baek, Il-Ho;Lee, Won-Baek;Hong, Byeong-Yu;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.247-247
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    • 2010
  • DLC(diamond-like carbon)는 비정질 고상 탄소의 하나로 다이아몬드의 유사한 높은 경도, 내마모성, 윤활성, 전기절연성, 화학적 안정성을 가지고 있는 재료이다. 이러한 우수한 특성 때문에 DLC는 박막의 형태로 여러 종류의 보호코팅에 많이 응용되고 있다. DLC의 광범위한 응용에 있어 가장 큰 문제점은 박막이 갖는 높은 잔류응력과 이에 따른 기판과의 낮은 접착성으로 알려져 있다. 최근 연구에 의하면, plasma pre-treatment를 통해 PTFE기판에 DLC박막의 adhesion strength를 증진 시킬 수 있다고 보고하였다. 또한 ion beam technique를 이용하여 잔류응력을 줄이고 기판과의 접착력을 높일 수 있다는 것도 보고 되었다. 이에 기인하여 pre-treatment가 DLC합성에 잔류응력을 낮추고 기판과의 접착성을 높이는 효과를 보일 것이라고 가정하고 연구하였다. 본 연구에서 pre-treatment가 Diamond-like Carbon의 stainless steel 합성시 stress와 adhesion에 어떤 효과가 있는지 알아보기 위해, pre-treatment시와 synthesis of DLC film시에 13.56MHz 150W RF플라즈마 화학기상 증착 (RF-PECVD) 법을 통해 합성되었다. pre-treatment시에 H2(80 sccm), O2(10 sccm), N2(20 sccm)의 가스 종류를 다르게 하였고, synthesis of DLC film시에는 CH4 (20 sccm), H2 (80 sccm)가스의 유량을 고정하였다. 합성된 DLC 박막은 Contact Angle Analyze, Raman spectroscopy, Scratch tester를 이용하여 접촉각, D peak Position, G peak Position, ID/IG ratio, 접착력을 측정하였다.

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Effects of corn gluten hydrolyzates, branched chain amino acids, and leucine on body weight reduction in obese rats induced by a high fat diet

  • Bong, Ha-Yoon;Kim, Ji-Yeon;Jeong, Hye-In;Moon, Min-Sun;Kim, Joo-Hee;Kwon, O-Ran
    • Nutrition Research and Practice
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    • v.4 no.2
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    • pp.106-113
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    • 2010
  • In this study, we compared corn gluten hydrolyzates, BCAAs, and leucine for their effects on body weight reduction in high fat-induced obese rats in order to determine the major active components in the corn gluten hydrolyzates. After obesity was induced for 13 weeks with high fat diet, the overweight-induced SD rats (n = 64) were stratified according to body weight, randomly blocked into eight treatments, and raised for 8 weeks. Four groups were changed to a normal diet and the other groups remained on the high fat diet. Each of the groups within both diets was fed either casein, corn gluten hydrolyzates, leucine, or branched chain amino acids, respectively. Daily food intake, body weight gain, and food efficiency ratio were significantly lower in the corn gluten hydrolyzate groups compared to the other groups, regardless of the high fat diet or normal fat diet. The rats fed the corn gluten hydrolyzates diet had the lowest perirenal fat pad weights whereas muscle weight was significantly increased in the corn gluten hydrolyzates groups. Plasma triglyceride, hepatic total lipid, and total cholesterol contents were significantly reduced in the corn gluten hydrolyzates groups. Other lipid profile measurements were not significantly changed. Plasma triglyceride and hepatic total lipid were also significantly reduced in the BCAA and leucine groups. Leptin levels were significantly lower and adiponectin was significantly higher in the corn gluten hydrolyzates groups. Fasting blood glucose, insulin, C-peptide, and HOMA-IR levels were also significantly reduced in the corn gluten hydrozylates groups, regardless of fat level.

Characteristics of Organic Thin Film Transistors with Organic and Organic-inorganic Hybrid Polymer Gate Dielectric (유기물과 유무기 혼합 폴리머 게이트 절연체를 사용한 유기 박막 트랜지스터의 특성)

  • Bae, In-Seob;Lim, Ha-Young;Cho, Su-Heon;Moon, Song-Hee;Choi, Won-Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.12
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    • pp.1009-1013
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    • 2009
  • In this study, we have been synthesized the dielectric layer using pure organic and organic-inorganic hybrid precursor on flexible substrate for improving of the organic thin film transistors (OTFTs) and, design and fabrication of organic thin-film transistors (OTFTs) using small-molecule organic semiconductors with pentacene as the active layer with record device performance. In this work OTFT test structures fabricated on polymerized substrates were utilized to provide a convenient substrate, gate contact, and gate insulator for the processing and characterization of organic materials and their transistors. By an adhesion development between gate metal and PI substrate, a PI film was treated using $O_2$ and $N_2$ gas. The best peel strength of PI film is 109.07 gf/mm. Also, we have studied the electric characteristics of pentacene field-effect transistors with the polymer gate-dielectrics such as cyclohexane and hybrid (cyclohexane+TEOS). The transistors with cyclohexane gate-dielectric has higher field-effect mobility, $\mu_{FET}=0.84\;cm^2/v_s$, and smaller threshold voltage, $V_T=-6.8\;V$, compared with the transistor with hybrid gate-dielectric.

Escape of Lyβfrom Hot and Optically Thick Media

  • Chang, Seok-Jun;Lee, Hee-Won
    • The Bulletin of The Korean Astronomical Society
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    • v.42 no.1
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    • pp.33.2-33.2
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    • 2017
  • Symbiotic stars and quasars show strong far UV resonance doublets including O VI 1032 and 1038, which are known to be major coolants of astrophysical plasma with high temperature T > $10^5K$. We investigate the transfer of $H{\alpha}$ and $Ly{\beta}$ in an emission nebula of temperature T ~ $10^5$, where n=2 population is significant. Line photons of $H{\alpha}$ and $Ly{\beta}$ are transferred in the medium through spatial and frequency diffusion altering their identity according to the branching ratios. We adopt a Monte Carlo technique to describe the transfer of $H{\alpha}$ and $Ly{\beta}$ in an emission nebula with a uniform density and a simple geometrical figure. We find that the temperature of the emission nebula is the major controlling parameter to produce a nonnegligible flux of $Ly{\beta}$. In particular, when T exceeds $10^5K$ the number flux ratio may reach ~ 25% with line center optical depth of a few. We discuss the formation of broad $H{\alpha}$ wings from Raman scattering of $Ly{\beta}$ emergent from a hot emission nebula.

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Evolution of Magnetic Property in Ultra Thin NiFe Films (나노두께 퍼말로이에서의 계면효과에 의한 자기적 물성 변화)

  • Jung, Young-soon;Song, Oh-sung
    • Journal of the Korean Magnetics Society
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    • v.14 no.5
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    • pp.163-168
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    • 2004
  • We prepared ultra thin film structure of Si(100)/ $SiO_2$(200 nm)/Ta(5 nm)/Ni$_{80}$Fe$_{20/(l~15 nm)}$Ta(5 nm) using an inductively coupled plasma(ICP) helicon sputter. Magnetic properties and cross-sectional microstructures were investigated with a superconduction quantum interference device(SQUID) and a transmission electron microscope(TEM), respectively. We report that NiFe films of sub-3 nm thickness show the B$_{bulk}$ = 0 and B$_{surf}$=-3 ${\times}$ 10$^{-7}$(J/$m^2$). Moreover, Curie temperature may be lowered by decreasing thickness. Coercivity become larger as temperature decreased with 0.5 nm - thick Ta/NiFe interface intermixing. Our result implies that effective magnetic properties of magnetoelastic anisotropy, saturation magnetization, and coercivity may change abruptly in nano-thick films. Thus we should consider those abrupt changes in designing nano-devices such as MRAM applications.

Conversion of Cellulose into Polyols over Noble Metal Catalysts Supported on Activated Carbon (활성탄에 담지된 귀금속 촉매를 이용한 셀룰로우스의 폴리올로의 전환)

  • You, Su-Jin;Kim, Saet-Byul;Kim, Yong-Tae;Park, Eun-Duck
    • Clean Technology
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    • v.16 no.1
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    • pp.19-25
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    • 2010
  • In this work, the conversion of crystalline cellulose into polyols in the presence of hydrogen was examined over noble metal (Pt, Ru, Ir, Rh, and Pd) catalysts supported on activated carbon. For comparison, Pt/${\gamma}-Al_2O_3$ and Pt/H-mordenite were also investigated. Several techniques: $N_2$ physisorption, X-ray diffraction(XRD), inductively-coupled plasma-atomic emission spectroscopy (ICP-AES), temperature-programmed reduction with $H_2$ ($H_2$-TPR) and CO chemisorption were employed to characterize the catalysts. The cellulose conversion was not strongly dependent on the types of the catalyst used. Pt/AC showed the highest yields to polyols among activated carbon-supported noble metal catalysts, viz. Pt/AC, Ru/AC, Ir/AC, Rh/AC and Pd/AC.

Evaluation Effects of Spray-dried Egg Protein Containing Specific Egg Yolk Antibodies as a Substitute for Spray-dried Plasma Protein or Antibiotics in Weaned Pigs

  • Hong, J.W.;Kwon, O.S.;Min, B.J.;Lee, W.B.;Shon, K.S.;Kim, I.H.;Kim, J.W.
    • Asian-Australasian Journal of Animal Sciences
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    • v.17 no.8
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    • pp.1139-1144
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    • 2004
  • In Exp. 1, a total of 36 pigs (6.55$\pm$0.10 kg average initial body weight and 21 d average age) were used in a 14 d growth study to determine the effects of replacing spray-dried plasma protein (SDPP) with spray-dried egg protein containing specific egg yolk antibody (SDEP) on growth performance and nutrient digestibility in weaned pigs. The pigs were blocked by weight and assigned to treatments based on sex. There were three pigs per pen and four pens per treatment. Dietary treatments were 0, 3, or 6% SDEP and contained 6, 3, or 0% SDPP, respectively. Through the entire experimental period, average daily gain (ADG), average daily feed intake (ADFI), and gain/feed tended to decrease as the concentration of SDEP increased in the diets. However, there were no significant differences among the treatments (p>0.05). As the addition of SDEP in the diets increased, apparent digestibilities of dry matter (DM) and nitrogen (N) were decreased without significant (p>0.05). For Exp. 2, 36 pigs (2.63$\pm$0.04 kg average initial body weight and 10 d average age) were used in a 14 d growth study to determine the effects of antibiotic replacement with SDEP on growth performance and nutrient digestibility in early-weaned pigs. The pigs were blocked by weight and assigned to treatments based on sex. There were three pigs per pen and four pens per treatment. Dietary treatments included 1) ANTIBIOTIC (corn-dried whey-soybean meal based diet+0.08% antibiotics, 4 mg of tiamuline hydrogen fumarate; 10 mg of sulfadimidine per kg of complete diet), 2) SDEP0.1 (corndried whey-SBM based diet+0.1% SDEP), and 3) SDEP0.2 (corn-dried whey-SBM based diet+0.2% SDEP). ADG and gain/feed of pigs fed the SDEP0.2 diet were higher than for pigs fed the ANTIBIOTIC diet without significant (p>0.05). Pigs fed the diet with SDEP0.2 tended to have increased apparent digestibilities of DM and N compared to pigs fed the ANTIBIOTIC diet without significant (p>0.05). In conclusion, the dietary SDEP seemed to be partial replacing the SDPP portion of high nutrient dense diet for weaned pigs. Also, dietary SDEP seemed to be approximately 0.2% or more when the pigs fed the antibiotic-free diet for early-weaned pigs.

Low HDL cholesterol is associated with increased atherogenic lipoproteins and insulin resistance in women classified with metabolic syndrome

  • Fernandez, Maria Luz;Jones, Jennifer J.;Ackerman, Daniela;Barona, Jacqueline;Calle, Mariana;Comperatore, Michael V.;Kim, Jung-Eun;Andersen, Catherine;Leite, Jose O.;Volek, Jeff S.;McIntosh, Mark;Kalynych, Colleen;Najm, Wadie;Lerman, Robert H.
    • Nutrition Research and Practice
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    • v.4 no.6
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    • pp.492-498
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    • 2010
  • Both metabolic syndrome (MetS) and elevated LDL cholesterol (LDL-C) increase the risk for cardiovascular disease (CVD). We hypothesized that low HDL cholesterol (HDL-C) would further increase CVD risk in women having both conditions. To assess this, we recruited 89 women with MetS (25-72 y) and LDL-C ${\geq}$ 2.6 mmol/L. To determine whether plasma HDL-C concentrations were associated with dietary components, circulating atherogenic particles, and other risk factors for CVD, we divided the subjects into two groups: high HDL-C (H-HDL) (${\geq}$ 1.3 mmol/L, n=32) and low HDL-C (L-HDL) (< 1.3 mmol/L, n=57). Plasma lipids, insulin, adiponectin, apolipoproteins, oxidized LDL, Lipoprotein(a), and lipoprotein size and subfractions were measured, and 3-d dietary records were used to assess macronutrient intake. Women with L-HDL had higher sugar intake and glycemic load (P< 0.05), higher plasma insulin (P< 0.01), lower adiponectin (P< 0.05), and higher numbers of atherogenic lipoproteins such as large VLDL (P < 0.01) and small LDL (P<0.001) than the H-HDL group. Women with L-HDL also had larger VLDL and both smaller LDL and HDL particle diameters (P<0.001). HDL-C was positively correlated with LDL size (r=0.691, P<0.0001) and HDL size (r=0.606, P<0.001), and inversely correlated with VLDL size (r=-0.327, P<0.01). We concluded that L-HDL could be used as a marker for increased numbers of circulating atherogenic lipoproteins as well as increased insulin resistance in women who are already at risk for CVD.

Fabrication and characterization of silicon field emitter array with double gate dielectric (이중 게이트 절연막을 가지는 실리콘 전계방출 어레이 제작 및 특성)

  • 이진호;강성원;송윤호;박종문;조경의;이상윤;유형준
    • Journal of the Korean Vacuum Society
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    • v.6 no.2
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    • pp.103-108
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    • 1997
  • Silicon field emitter arrays (FEAs) have been fabricated by a novel method employing a two-step tip etch and a spin-on-glass (SOG) etch-back process using double layered thermal/tetraethylortho-silicate (TEOS) oxides as a gate dielectric. A partial etching was performed by coating a low viscous photo resist and $O_2$ plasma ashing on order to form the double layered gate dielectric. A small gate aperture with low gate leakage current was obtained by the novel process. The hight and the end radius of the fabricated emitter was about 1.1 $\mu\textrm{m}$ and less than 100$\AA$, respectively. The anode emission current from a 256 tips array was turned-on at a gate voltage of 40 V. Also, the gate current was less than 0.1% of the anode current.

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