• Title/Summary/Keyword: $N_2$ plasma treatment

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Effects of Deposition Parameters on TiN Film by Plasma Assisted Chemical Vapor Deposition(II) -Influence of TiCl4, N2 inlet Fraction on the TiN Deposition- (플라즈마 화학증착법(PACVD)에 의한 TiN증착시 증착변수가 미치는 영향(II) -TiCl4, N2의 입력분율을 중심으로-)

  • Rhee, B.H.;Shin, Y.S.;Kim, M.I.
    • Journal of the Korean Society for Heat Treatment
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    • v.2 no.4
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    • pp.11-18
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    • 1989
  • To investigate the influence of $TiCl_4$, $N_2$ inlet fraction on the TiN layer, TiN film was deposited onto the STC3 and STD11 steel from gas mixtures of $TiCl_4/N_2/H_2$ by the radio frequency plasma assisted chemical vapor deposition. The films were deposited at various $TiCl_4$, $N_2$ inlet fractions. The results showed that the film thickness was increased with $TiCl_4$ inlet fraction. However, while the thickness was increased with $N_4$ inlet fraction under 0.4 the thickness was decreased with increasing $N_2$ inlet fraction over 0.4. The density of deposited films was varied as $TiCl_4$, $N_2$ inlet fraction and its maximum value was about $5.6g/cm^3$. The contents of chlorine were increased with increasing $TiCl_4$ inlet fraction and nearly constant with increasing $N_2$ inlet fraction.

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Effect of Dietary Fish Oil on Lipid Content of Plasma and Liver in Rats (식이 중 어유의 섭취가 쥐의 혈액과 조직의 지질함량에 미치는 영향)

  • 남정혜
    • The Korean Journal of Food And Nutrition
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    • v.8 no.2
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    • pp.59-69
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    • 1995
  • This study designed to compare the hypolipidemic e(feats of n6 linoleic acid (LA), n3 w-linolenic acid(LL) and n3 eicosapentaenoic acid(EPA) and docosahexaenoic acid(DHA) In rats fed high fat (40% Cal) diet. Male Sprague-Dawley rats fed experimental diets for 6 weeks, which were different only in fatty acid composition. The dietary fats were beef tallow (BT) as a source of saturated fatty acid (SFA), corn oil(CO) for n6 LA, perilla oil (PO) for n3 a-LL and fish oil (FO) for n3 EPA+DHA. Plasma total cholesterol (T-chol) level was increased by n6 LA but decreased by n3 LL and n3 EPA+DHA and most effectively reduced by n3 EPA+DHA. Plasma triglyceride(TG ) level was reduced by n6 LA, but lipogenesis in liver was not affected by n6 LA. However, plasma TG level was lowered by n3 LL and EPA+DHA. Both lipogenic enzyme activity and liver TG level were also decreased by n3 PUFA. PO and FO groups were significantly higher in the relative Proportions of C20:5 and C22:6 of plasma and liver and lower in those of C20:4/C20:5 ratio. Overall, the lipid-lowering effect was in the order of n3 EPA+DHA >n3 LL > n6 LA and fish oil and perilla oil rich in n3 PUFA may have important nutritional applications in the prevention and treatment of hyperlipidemia.

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$Ca^{2+}$ Effect on Conversion of Exogenous 1-Aminocyclopropane-1-Carboxylic Acid to Ethylene in Vigna radiata Protoplasts

  • Seung-Eun Oh
    • Journal of Plant Biology
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    • v.37 no.3
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    • pp.271-276
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    • 1994
  • The possibility that 1-aminocyclopropane-1-carboxylic acid (ACC)-uptake may be dependent on the H+-gradient established across the plsma membrane was tested in protoplasts isolated from 2.5 day old mungbean hypocotyls. The ACC-induced ethylene production was inhibited when the H+-gradient was collapsed by the treatment with carbonycyamide-p-trifluro-methoxy-phenylhydrazone (FCCP). Moreover, the treatment with o-vanadate, a specific inhibitor of plasma membrane H+-ATPase, caused the inhibition of ethylene production. The ACC-induced ethylene production was inhibited by the treatemnt with verapamil (Ca2+-channel blocker), or ethylene glycol-bis($\beta$-aminoethyl ether) N, N, N', N'-tetraacetic acid (EGTA) (Ca2+-chelator). In contrast, the ehtylene production was stimulated by the application of A23187 (Ca2+ ionophore). The inhibitory effect of EGTA in the ethylene producton was magnified in the presence of A23187. From these results, we suggest that the external Ca2+ influx to the cytosol resulted in the stimulatin of ACC oxidase activity after ACC-uptake resulting from a H+-gradient across the plasma membrane.

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The Low Temperature Deposition of CrN Films by the AIP Method (아크 이온플레이팅법에 의한 저온 CrN 합성)

  • Cho, Yong K.;Kim, Sang K.;Lee, Won B.;Kim, Sung W.
    • Journal of the Korean Society for Heat Treatment
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    • v.20 no.2
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    • pp.78-83
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    • 2007
  • CrN coatings were deposited by cathodic arc ion plating method on the SKD11 steel substrates. Atmosphere temperature of $350^{\circ}C$, arc current of 90 A, nitrogen partial pressure of 1.0-5.3 Pa, and negative bias voltage of 30-135 V were selected. The characteristics of microstructure were investigated with XRD. Hardness, adhesion and friction coefficient measured by microhardness tester, scratch tester, and ball on disk tribometer. Microstructures depended on nitrogen partial pressure and bias voltage. The preferred orientation of the films was changed from (200) to (111) with decreasing pressure and increasing bias voltage. Adhesion properties related with microstructure, but microstructure changes slightly influenced on hardness and friction properties. The critical load.($Lc_1$) and hardness of CrN films deposited at 5.3 Pa, -30 V condition were 55 N(HF1), $2157{\pm}47\;Hk_{0.025}$. The friction coefficient were about 0.5 under dry condition.

Effects of Deposition Parameters on TiN Film by Plasma Assisted Chemical Vapor Deposition(I) -Influence of Temperature on the TiN Deposition- (플라즈마 화학 증착법(PACVD)에 의한 TiN 증착시 증착변수가 미치는 영향(I) -증착온도를 중심으로-)

  • Shin, Y.S.;Ha, S.H.;Kim, M.I.
    • Journal of the Korean Society for Heat Treatment
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    • v.2 no.4
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    • pp.1-10
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    • 1989
  • To investigate the influence of temperature on the TiN film, it was deposited on the STC-3 steel and Si-wafer from $TiCl_4/N_2/H_2$ gas mixture by using the radio frequency plasma assisted chemical vapor deposition. The deposition was performed at temperature of $400^{\circ}C-500^{\circ}C$. The results showed that crystalline TiN film was deposited over $480^{\circ}C$, and all specimens showed the crystalline TiN X-ray diffraction peaks after vacuum heat treatment for 3 hrs, at $1000^{\circ}C$, $10^{-5}torr$. While the film thickness was increased above $480^{\circ}C$, it was decreased under $480^{\circ}C$ as temperature increased. And the contents of titanium were increased and it of chlorine were decreased as temperature increased. Because temperature increase was attributed to the increase in the density of TiN film, surface hardness of TiN film was increased with temperature.

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Analysis of Ar Plasma Effects for Copper Nitride Passivation Formation via Design of Experiment (실험계획법을 통한 구리 질화물 패시베이션 형성을 위한 아르곤 플라즈마 영향 분석)

  • Park, Hae-Sung;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.26 no.3
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    • pp.51-57
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    • 2019
  • To protect the Cu surface from oxidation in air, a two-step plasma process using Ar and $N_2$ gases was studied to form a copper nitride passivation as an anti-oxidant layer. The Ar plasma removes contaminants on the Cu surface and it activates the surface to facilitate the reaction of copper and nitrogen atoms in the next $N_2$ plasma process. This study investigated the effect of Ar plasma on the formation of copper nitride passivation on Cu surface during the two-step plasma process through the full factorial design of experiment (DOE) method. According to XPS analysis, when using low RF power and pressure in the Ar plasma process, the peak area of copper oxides decreased while the peak area of copper nitrides increased. The main effect of copper nitride formation in Ar plasma process was RF power, and there was little interaction between plasma process parameters.

Electro-optical characteristics of MgO protective layer after RF plasma treatment using Ar, $O_2$ and $H_2$ gases

  • Son, Chang-Gil;Lee, H.J.;Jung, J.C.;Park, W.B.;Moon, M.W.;Oh, P.Y.;Jeong, J.M.;Ko, B.D.;Lee, J.H.;Lim, J.E.;Han, Y.G.;Lee, S.B.;Yoo, N.L.;Jeong, S.H.;Choi, E.H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1211-1214
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    • 2005
  • One of the important problems in recent AC-PDP technology is high efficiency. In this research, we have been investigated electro-optical characteristics of MgO protective layer after radio frequency(RF) plasma treatment using Ar, $O_2$, and $H_2$ gases. The breakdown voltage order was $O_2$ > Ar > Nontreatment > $H_2$. Also, brightness order was $O_2$ > Ar > Non-treatment > $H_2$. In this experiment, the best result was obtained after $O_2-plasma$ treatment.

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Advanced Microwave Plasma Technology for Liquid Treatment

  • Toyoda, Hirotaka;Takahashi, T.;Takada, N.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.121.1-121.1
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    • 2014
  • Recently, much attention has been given to plasma production under liquid and its applications [1]. However, most of plasma production techniques reported so far utilize high voltage dc, ac, rf or microwave power [2], where damage to discharge electrodes and small discharge volume are remained issues. As an alternative of plasma production method under liquid, we have proposed pulsed microwave excited plasma using slot antenna, where damage to the slot electrode can be minimized and plasma volume can be increased. We have also reported improvement of treatment efficiency with use of reduced-pressure condition during the discharge [3]. To realize low pressure conditions in liquid, various alternative technique can be considered. One possible technique is simultaneous injection of microwave power and ultrasonic wave. Ultrasonic wave induces pressure fluctuation with the wave propagation and is so far used for cavitation production in the water. We propose utilization of reduced pressure induced by ultrasonic cavitation for improvement of the plasma production. Correlation between the plasma production and the ultrasonic power will be discussed.

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PLASMA-SULFNITRIDING USING HOLLOW CATHODE DISCHARGE

  • Urao, Ryoichi;Hong, Sung-pill
    • Journal of Surface Science and Engineering
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    • v.29 no.5
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    • pp.443-448
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    • 1996
  • In order to plasma-sulfnitride by combining ion-nitriding of a steel and sputtering of MoS$_2$, chromium-molybdenum steel was plasma-sulfritrided using hollow cathode discharge with parallel electrodes which are a main of the steel and a subsidiary cathode of $MoS_2$. The treatment was carried out at 823K for 10.8ks under 665Pa in a 30% $N_2$-70% $H_2$ gas atmosphere. Plasma-sulfnitriding layers formed of the steel were characterized with EDX, XRD, micrographic structure observation and hardness measurement. A compound layer of 8-15$\mu\textrm{m}$ and nitrogen diffusion layer of about 400$\mu\textrm{m}$ were formed on the surface of plasma-sulfnitrided steel. The compound layer consisted of FeS containing Mo and iron nitrides. The nitrides of $\varepsilon$-$Fe_2_3N$ and $\gamma$'-$Fe_4N$ formed under the FeS. The thickness of compound layer and surface hardness were different with the gaps between main and subsidiary cathodes even in the same sulfnitriding temperature. The surface hardnesses after plasma-sulfnitriding were distributed from 640 to 830Hv. The surface hardness was higher in the plasma-sulfnitriding than the usual sulfnitriding in molten salt. This may be due to Mo in sulfnitriding layer.

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Effect of Dietary Fatty Acids on Fatty Acid Composition of Platelet Phospholipids, Thromboxane B2 Formation, and Platelet Aggregation in Men (식이 지방산이 혈소판 인지질의 지방산 조성, 혈장 Thromboxane B2의 농도 및 혈소판 응집에 미치는 영향)

  • 오은주
    • Journal of Nutrition and Health
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    • v.32 no.4
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    • pp.384-393
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    • 1999
  • The degree of platelet aggregation, thromboxane B2(TXB2)formation and fatty acid composition of platelet phospholipids(PL) were investigated in 24 healthy male subjects who for five weeks consumed either corn oil(CO) rich in linoleic acid(LA), perilla oil (PO) rich in $\alpha$-linoleic acid($\alpha$-LAN), or canola oil(CNO) rich in oleic acid(OA) as a major fat source. Total fat intake was 30% of total calories and prescribed oil intake of each dietary group was 50% of the total fat intake. In the CO group, significantly decreased contents of polyunsaturated fatty acids(PUFA), n-6 PUFA, n-3 PUFA and eicosapentanoic acid(EPA) were observed, and significantly increased contents of OA and saturated fatty acids(SFA) were observed in platelet PL after 3 weeks and 5 weeks of dietary treatment. In the PO group, contents of OA and docosahexanoic acid(DHA) were increased, and the ratio of n-6/n-3 was decreased significantly in platelet PL after dietary treatment. The CNO group showed significatnlty decreased contents of PUFA, P/S ratio, n-6 PUFA, LA,(EPA+DHA)/arachidonic acid(AA), and significantly increased SFA contents after 3 weeks of the oil-based diet. The dietary-induced effects on fatty acid composition of platelet PL were observed mostly after 3 weeks of the oil-based diet. The dietary-induced effects on fatty acid composition of platelet PL were observed mostly after 3 weeks. Plasma TXB2 levels were increased after 3 and 5 weeks of dietary treatment. However, only the CO and CNO groups showed significantly increased plasma TXB2 levles after 3 and 5 weeks of dietary treatment. However, only the CO and CNO groups showed significantly increased plasma TXB2 levels after 5 weeks of experimental diets, when compared with initial values. Degree of platelet aggregation increased only in the CO group after dietary treatment. As a result, at week 5 the degree of platelet aggregation of the CO group was significantly higher than those of the PO and CNO groups. Among the three oil-based diets, the PO-based diet seems to have beneficial effects on atherosclerosis by influencing plasma TXB2 levels and the degree of platelet aggregation, while the CO-based diet showed the most adverse effects. Our results imply that plasma TXB2 levels might be affected by dietary fatty acid composition.

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