• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1997년도 추계학술대회 논문집
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• pp.37-42
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• 1997

This paper describes result of experiment of parameters affecting the micro hole drilling time, kind of assisting gas and it's pressure. The result reveals that parameter value of 0.08J, 20Hz, dwell time of 300 microseconds can be a good machining condition to make micro hole diameter range of 50-70${\mu}{\textrm}{m}$, Assistant gas such air, O2, Ar, N2 was adapted. Assistant gas of air makes heat affected zone enlarge due to burning of material, also it makes hole irregular and damage because of refusion stick to caused by chemical reaction with Al2O3 ceramic material. O2(99.9%) has good characteristic to get good drilling and smooth surface on pressure of 0.2kgf/$\textrm{cm}^2$, but it is expensive. Ar, N2 makes material burn and crack severely and proved to be an appropriate but, Ar was better than N2.

• 반도체디스플레이기술학회지
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• 제22권2호
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• pp.35-39
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• 2023

Silicon oxide thin films have been deposited by plasma-enhanced chemical vapor deposition in SiH4 and N2O plasma along the variation of the gas flow ratio. Optical emission spectroscopy was employed to monitor the plasma and ellipsometry was employed to obtain refractive index of the deposited thin film. The atomic ratio of Si, O, and N in the film was obtained using XPS depth profiling. Fourier Transform Infrared Spectroscopy was used to analyze structures of the films. RI decreased with the increase in N2O/SiH4 gas flow ratio. We noticed the increase in the Si-O-Si bond angles as the N2O/SiH4 gas flow ratio increased, according to the analysis of the Si-O-Si stretching peak between 950 and 1,150 cm-1 in the wavenumber. We observed a correlation between the optical emission intensity ratio of (ISi+ISiH)/IO. The OES intensity ratio is also related with the measured refractive index and chemical composition ratio of the deposited thin film. Therefore, we report the added value of OES data analysis from the plasma related to the thin film characteristics in the PECVD process.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 추계학술대회 논문집
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• pp.97-101
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• 1995

GaN films were prepared on Si(111) substrates by hydride vapor phase epitaxy (HVPE) on HCl-NH$_3$-N$_2$gas system. Effects of HCl gas flow rate on the film investigate under deposition conditions of flow time of 10min, 20min, 30min. The deposition rate increased with increasing HCl gas flow rate in the range of 10cc/min to 40cc/min and deposition time. Strung (00.2) oriented GaN film was obtained at a lower HCl flow rate and improved of the surface morphology.

• Journal of Mechanical Science and Technology
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• 제19권6호
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• pp.1358-1365
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• 2005

Flue gas recirculation (FGR) is widely adopted to control NO emission in combustion systems. Recirculated flue gas decreases flame temperature and reaction rate, resulting in the decrease in thermal NO production. Recently, it has been demonstrated that the recirculated flue gas in fuel stream, that is, the fuel induced recirculation (FIR), could enhance much improved reduction in NO per unit mass of recirculated gas, as compared to conventional FGR in air. In the present study, the effect of dilution methods in air and fuel sides on NO reduction has been investigated numerically by using $N_2$ and $CO_2$ as diluent gases to simulate flue gases. Counterflow diffusion flames were studied in conjunction with the laminar flamelet model of turbulent flames. Results showed that $CO_2$ dilution was more effective in NO reduction because of large temperature drop due to the larger specific heat of $CO_2$ compared to $N_2$. Fuel dilution was more effective in reducing NO emission than air dilution when the same recirculation ratio of dilution gas was used by the increase in the nozzle exit velocity, thereby the stretch rate, with dilution gas added to fuel side.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1400_1401
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• 2009

In this paper describes the comparisons of the surface flashover characteristics according to the change of the insulation media by experimental GIS(Gas Insulated Switchgear) chamber in accordance with change of pressure(P) and electrode distance(d). The using insulation medias are $SF_6$, Dry-Air, I-Air(Imitation Air, $N_2$ : $O_2$ = 79[%] : 21[%]), $N_2:O_2$ mixture gas and pure $N_2$. In this study, in order to compare the properties $SF_6$ and order insulation gas, we investigated the properties of the various insulation media with a knife to knife electrode under ac high voltage application. The gas pressure was changed from 1 to 5[atm]. as a result, it was found that dielectric strength is $SF_6$ > I-Air > Dry-Air and the best environmental preservation gas is Dry-Air.

• 대한화학회지
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• 제7권2호
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• pp.128-132
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• 1963

A study has been made on the applicability of gas-liquid partition chromatography to the qualitative and quantitative analysis of complex mixture of gaseous hydrocarbons. While phthalate columns are widely used for this $purpose^9$, they separates neither saturated hydrocarbons from the unsaturated nor n-butane from isobutene or butene-1, therefore combined columns such as phthalate and dimethylsulfolane have been used for the perfect separation of gaseous hydrocarbons. It is shown by this study, however, that hydrocarbons having $C_1$ through $C_4$ can be separated with a 2-meters tetraethyleneglycol dimethylether column except ethane from ethylene, and trans-from cis-2-butene especially operated at $15^{\circ}C$$ using helium as the carrier gas. The column effluents were in order of methane, (ethane, ethylene), propane, propylene, isobutane, n-butane, isobutylene, butene-1, (trans-& cis-2-butene, isopentane), (butadiene-1, 3, n-pentane). Two kinds of liquified petroleum gases in market are analysed qualitatively and quantitatively. The results indicate that use of this 2-meters TEGDE column permits the separation and identification of all the commonly encountered aliphatic gaseous hydrocarbons.

• International Journal of Automotive Technology
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• 제4권1호
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• pp.9-19
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• 2003

Exhaust emissions were characterized for a fleet of 10 alternative-fuel vehicles (AFVx) including 5 compressed natural gas (CNG) vehicles. 3 liquefied petroleum gas (LPG) vehicles and 2 85% methanol/15% California Phase 2 gasoline (M85) vehicles. In addition to the standard regulated emissions and detailed speciation of organic gas compounds, Fourier Transform Infrared Spectroscopy (FTIR) was used to measure ammonia (NH$_3$) and nitrous oxide ($N_2$O) emissions. NH$_3$, emissions averaged 0.124 g/mi for the vehicle fleet with a range from <0.004 to 0.540 g/mi. $N_2$O emissions averaged 0.022 g/mi over the vehicle fleet with range from <0.002 to 0.077 g/mi. Modal emissions showed that both NH$_3$, and $N_2$O emissions began during catalyst light-off and continued as the catalyst reached its operating temperature. $N_2$O emissions primarily were formed during the initial stages of catalyst light-off. Detailed speciation measurements showed that the principal component of the fuel was also the primary organic gas species found in the exhaust. In particular, methane, propane and methanol composed on average 93%, 79%, and 75% of the organic gas emissions, respectively, for the CNG, LPG. and M85 vehicles.

• 센서학회지
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• 제8권3호
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• pp.291-297
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• 1999

텅스텐 박막의 RIE 플라즈마 에칭공정에서 에칭속도는 $SF_6$와 $N_2$ 가스와의 상대적인 비와 공정 변수들에 매우 민감하게 의존함을 알았다. 질소 첨가효과와 텅스텐 박막/PR과의 에칭 선택비에 관련된 애칭 profile 결과를 SEM 사진으로 나타내었다. $SF_6-N_2$ 가스 에칭 후 텅스텐 막 표면에 잔존하는 화합물을 XPS를 이용하여 그 종류와 화학적 결합상태를 조사하고, 남아있는 F 이온들은 플라즈마가 켜져 있는 상태에서 OES를 이용하여 측정함으로써 정확한 에칭 메커니즘을 규명하고자 하였다.

• 멤브레인
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• 제11권3호
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• pp.116-123
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• 2001

Polyimide-silica 하이브리드막을 제조하고 silica 함량이 막의 구조적 특성과 기체의 투과특성에 미치는 영향을 연구하였다. 하이브리드막은 N,N`-dimethyl acetamide(DMAc) 용매 속에서 1,2,4,5-benzenetetracarboxylicdianhydride(PMDA)와 4,4`-diaminodiphenyl oxide(ODA) 및 tetraethyoxysilane(TEOS)를 출발물질로 하여 졸-겔 공정으로 제조하였다. 제조한 막은 FT-IR, EDX, TGA 및 SEM에 의하여 구조적 특성을 분석하고, $25^{\circ}C$에서 ${N_2}, {O_2}, {H_2}, {CO_2} 및 ${CH_4}$ 기체에 대한 투과특성을 조사하였다. 하이브리드막은 높은 열적 안정성을 나타내었으며, polymide matrix에 silica입자가 균일하게 분포되어 있었고 silica 함량이 증가할수록 silica 입자의 크기가 증가하였다. 기체의 투과도계수는 silica 함량이 증가할수록 증가하였으나, 확산계수는 silica 함량에 무관하게 거의 일정하였다. 따라서 하이브리드막에 의한 투과도계수의 증가는 용해도계수가 증가하기 때문으로 생각되었다. 이들 기체에 대한 투과도계사구 증가함에도 불구하고, ${H_2}/{N_2}, ${H_2}/{O_2}와 ${H_2}/{CO_2}의 선택도가 증가하였다.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2013년도 제46회 KOSCO SYMPOSIUM 초록집
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• pp.45-46
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• 2013

Stabilization characteristics of highly $N_2$-diluted $CH_4-O_2$ flame in an axially two-section porous inert medium were experimentally investigated for its application to the waste gas scrubber in semiconductor manufacturing processes. The flame behaviors were observed with respect to the fuel and $N_2$ flow rates and the equivalence ratios. As a result, four kinds of flame behaviors such as stable, flashback crossing the interface, blowout and sudden extinction were observed. It was also found that there exists two flame regime divided by a critical fuel flow rate. In addition, the flame stability was discussed based on the $N_2$ index which means the abatement capacity of our combustor in scrubbing the waste gas from the semiconductor processes.