• Korean Journal of Materials Research
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• v.17 no.8
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• pp.437-441
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• 2007

Preparation and morphology control of $TiO_2$ nano powders for gas sensor applications are investigated. $TiO_2$ nanopowders with rutile and anatase structures were prepared by controlling the pH value of a precursor solution without any heat treatment. The mean particle size of $TiO_2$ powders were below 10nm. The prepared $TiO_2$ nano powders were hydrothermal treated by NaOH solution. The sample was washed in HCl solution. As a result and $TiO_2$ nanotubes were formed. The lengths of $TiO_2$ nanotube were $1{\mu}m$ and the diameters were 10nm. Crystal structure and microstructure of $TiO_2$ nanotube were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM). As-prepared $TiO_2$ nanotube powders have several advantages of nano particle size and high surface area and could be a prominent candidate for nano-sensors. The sensitivity of $TiO_2$ nanotube sensor was measured for toluene and NO in this study.

• Korean Journal of Materials Research
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• v.23 no.12
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• pp.667-671
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• 2013

We present an easy method of preparing two-dimensional (2D) periodic hollow tin oxide ($SnO_2$) hemisphere array gas sensors using polystyrene (PS) spheres as a template. The structures were fabricated by the sputter deposition of thin tin (Sn) metal over an array of PS spheres on a planar substrate followed by calcination at an elevated temperature to oxidize Sn to $SnO_2$ while removing the PS template cores. The $SnO_2$ hemisphere array structures were examined by scanning electron microscopy and X-ray diffraction. The structures were calcined at various temperatures and their sensing properties were examined with varying operation temperatures and concentrations of nitric oxide (NO) gas. Their gas-sensing properties were investigated by measuring the electrical resistances in air and the target gases. The measurements were conducted at different NO concentrations and substrate temperatures. A minimum detection limit of 30 ppb, showing a sensitivity of S = 1.6, was observed for NO gas at an operation temperature of $150^{\circ}C$ for a sample having an Sn metal layer thickness corresponding to 30 sec sputtering time and calcined at $600^{\circ}C$ for 2 hr in air. We proved that high porosity in a hollow $SnO_2$ hemisphere structure allows easy diffusion of the target gas molecules. The results confirm that a 2D hollow $SnO_2$ hemisphere array structure of micronmeter sizes can be a good structural morphology for high sensitivity gas sensors.

• Korean Journal of Materials Research
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• v.19 no.4
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• pp.192-197
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• 2009

Carbon nanotubes (CNT) were used as a catalyst support where catalytically active Pd and Pt metal particles decorated the outside of the external CNT walls. In this study, Pd and Pt nanoparticles supported on $HNO_3$-treated CNT were prepared by microwave-assisted heating of the polyol process using $PdCl_2$ and $H_2PtCl_6{\codt}6H_2O$ precursors, respectively, and were then characterized by SEM, TEM, and Raman. Raman spectroscopy showed that the acid treated CNT had a higher intensity ratio of $I_D/I_G$ compared to that of non-treated CNT, indicating the formation of defects or functional groups on CNT after chemical oxidation. Microwave irradiation for total two minutes resulted in the formation of Pd and Pt nanoparticles on the acid treated CNT. The sizes of Pd and Pt nanoparticles were found to be less than 10 nm and 3 nm, respectively. Furthermore, the $SnO_2$ films doped with CNT decorated by Pd and Pt nanoparticles were prepared, and then the $NO_2$ gas response of these sensor films was evaluated under $1{\sim}5\;ppm$ $NO_2$ concentration at $200^{\circ}C$. It was found that the sensing property of the $SnO_2$ film sensor on $NO_2$ gas was greatly improved by the addition of CNT-supported Pd and Pt nanoparticles.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.275-276
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• 2008

• Journal of the Korean Applied Science and Technology
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• v.13 no.3
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• pp.105-109
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• 1996

It is well known that the metallo- phthalocyanine (MPcs) are sensitive to toxic gaseous molecules such as $NO_2$ and also chemically and thermally stable, Therefore, lots of MPcs have been studied for the potential chemical sensor for $NO_2$ gas using quartz crystal microbalance(QCM) or electrical conductivity. In this study, ultra-thin films of octa(2-ethylhexyloxy)copper-phthalocyanine were prepared by Langmuir-Blodgett method and characterized by using UV-VIS absortion spectroscopy and ellipsometry. Transfer condition, and characterization of LB films were investigated and preliminary results of current-voltage(I-V) characteristics of these films exposed to $NO_2$ gas as a function of film thickness and temperature were discussed.

• Proceedings of the Korean Ceranic Society Conference
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• 2000.04a
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• pp.36.2-36.2
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• 2000

• Journal of IKEEE
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• v.13 no.4
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• pp.37-42
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• 2009

In this study, nanopower ZnO and $SnO_2$ as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and $NO_2$ sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped $SnO_2$ sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and $NO_2$ 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.166-169
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• 1996

It is well known that the metallo-phthalocyanines (MPcs) are sensitive to toxic gaseous molecules such as NO$_2$ and also chemically and thermally stable and it is recently reported that SnO$_2$ thin films have a selective sensitivity to NO$_2$ and SO$_2$ gas. Therefore, it is interesting to prepare phthalo-cyanine Langmuir-Boldgett(LB) films containing tin as a chemical sensor for NO$_2$ and SO$_2$ gas and test the selectivity with these tin containing LB films. First, in this study, ultra thin films of Octa (2-ethylhexyloxy) tin-phthalocyanine were prepared on various substrates by LB method. $\pi$-A isotherm and transfer characteristics of these films were investigated. The formation of these films was determined by ellipsometry. Intrinsic current-voltage(I-V) characteristics of these films were also measured.

• Applied Chemistry for Engineering
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• v.8 no.2
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• pp.332-338
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• 1997

$SnO_2$ as raw material of sensor for $NO_2$ detection was prepared by precipitating $SnCl_4$ solution with aqueous ammonia followed by calcining in air. The characterization of $SnO_2$ was carried out using FT-IR and XRD, and $SnO_2$ thick film sensor was fabricated by screen-printing method. The particle size of $SnO_2$ calcined at higher temperature increased due to the growth of crystalline. $SnO_2$ sensor fabricated by using $SnO_2$ sample calcined at $1000^{\circ}C$ followed by heat treatment at $700^{\circ}C$ exhibited excellent sensing characteristics and selectivity for $NO_2$ gas at the operating temperature of $250^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.315.2-315.2
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• 2014

Pt-functionalized ZnS nanowires were synthesized on Au-deposited c-plane sapphire substrates by thermal evaporation of ZnS powders followed by wet Pt coating and annealing. The $NO_2$ gas sensing properties of multiple-networked Pt-functionalized ZnS nanowire sensors were examined. Scanning electron microscopy showed the nanowires with diameters of 20-80 nm. Transmission electron microscopy and X-ray diffraction showed that the nanowires were wurtzite-structured ZnS single crystals. The Pt-functionalized ZnS nanowire sensors showed enhanced sensing performance to $NO_2$ gas at $150^{\circ}C$ compared to pristine ZnS nanowire sensors. Pristine and Pt-functionalized ZnS nanowire sensors showed responses of 140-211% and 207-488%, respectively, to 1-5 ppm $NO_2$, which are better than or comparable to those of many oxide semiconductor sensors. In addition, the underlying mechanism of the enhancement of the sensing properties of ZnS nanowires by Pt functionalization is discussed.