• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
• /
• pp.2013-2015
• /
• 2005

In this paper, Effect of $BaSrTiO_3/Li_2CO_3$ on low temperature sintering and dielectric property of thick films has been investigated for variable capacitor on high frequency. The thick films were fabricated by the tape casting and then the structural and dielectric properties as a function of an addition composition ratio and sintering temperature were studied. For the thick film sintered at $1050^{\circ}C$, it was densified to 96% of $BaSrTiO_3$ theoretical density by the addition of 10 $wt{\cdot}%$ $BaSrTiO_3/Li_2CO_3$. Dielectric constant increased and Curie temperature lowered with the increased of $BaSrTiO_3/Li_2CO_3$ content, which probably can be explained by the substitution of $Ba^{3+},Li^{1+}$ on $RaTiO_3$ lattice. The tunability and dielectric loss of the $BaSrTiO_3/Li_2CO_3$ thick film, sintered at $1350^{\circ}C$, were about 26% and 0.234 at $10{\sim}15MHz$, respectively.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2000년도 하계학술대회 논문집
• /
• pp.920-923
• /
• 2000

All solid-state thin film supercapacitor(TFSC) based on $RuO_2$ electrode was fabricated. Ruthenium oxide$(RuO_2)$ thin film was deposited on Pt/Ti/Si subsrate by d.c. magnetron sputtering. LiPON(lithium phosphorus oxynitride) thin film were deposited by r.f. reactive sputtering. X-ray diffraction patterns of $RuO_2$ and LiPON films revealed that crystal structures of both films were amorphous. To decrease resistivity of $RuO_2$ thin film, $RuO_2$ thin film was deposited with $H_2O$ vapor. In order to decide the maximum ionic conductivity, the LiPON films were prepared by various sputtering condition. The maximum ionic conductivity was $9.5\times{10}^7S/cm$. A charge-discharge measurements showed the capacity of $3\times{10-2}\;F/cm^2-\mu{m}$ for the as-fabricated TFSC. The discharging efficiency was decreased after 500 cycles by 40 %.

• 전기화학회지
• /
• 제2권1호
• /
• pp.46-49
• /
• 1999

Electron-beam 증발장치를 이용하여 리튬 박막 2차 전지 양극용 lithium cobalt oxide 박막을 제조하였다. Stainless steel -기판 위에 입혀진 $LiCoO_2$ 박막은 열처리 과정을 거쳐 잘 발달된 hexagonal 구조의 (003)면을 나타냈으며, 3.9 V 부근에서 전위 평탄 영역이 나타났다. $LiCoO_2$, 박막은 증착속도가 증가함에 따라 Li/co 조성비가 양론비에 근접하였으며, $15{\AA}/s$의 증착속도로 제작한 경우 높은 방전용량을 나타내었다. 열처리 온도가 증가함에 따라 용량이 증가하여 $700^{\circ}C$에서 최대 값을 나타내었으나, 그 이상의 온도에서는 기판과의 반응 때문에 방전용량이 현저히 감소하였다. 박막 내부의 리튬과 코발트의 불균일한 조성은 초기 방전용량의 감소를 가져왔다.

• 전기화학회지
• /
• 제3권1호
• /
• pp.44-48
• /
• 2000

상온에서 DC-magnetron sputtering으로 증착한 비정질의 $V_2O_5$ 박막을 양극물질로 하여 $V_2O_5/LIPON/Li$으로 구성된 박막형 리튬이차전지를 제작하였다. $V_2O_5$의 양극특성은 액체전해질을 이용한 half cell 구조에서 평가하였으며, $Ar/O_2$ 분압비의 변화에 따라 제작된 $V_2O_5$ 양극은 분압비 80/20에서 가장 좋은 특성을 보였다. 자체 제작한 $Li_3PO_4$ 타겟을 사용하여 RF-sputtering으로 순수한 질소 분위기 하에서 양극 위에 고체전해질 LIPON 박막을 형성하였으며, 1.2-4.0V vs. Li 구간에서 리튬에 대해 반응성이 없는 안정한 화합물임을 확인하였다. 음극으로 쓰인 약 $2{\mu}m$두께의 금속리튬박막은 진공 열 증착법으로 제조하였으며, $V_2O_5/LIPON/Li$의 박막형 리튬이차전지는 $1.2\~3.5V$ 구간에서 초기에 약 $150{\mu}A/cm^2{\mu}m$의 높은 방전용량을 나타내었다.

• 대한화학회지
• /
• 제41권11호
• /
• pp.594-599
• /
• 1997

RF 스피터링법을 써서 $Li_{2x}Ni_{1-x}O$ 박막을 제조하였으며, 그 과정에서 기판의 온도$(50/230^{\circ}C)와$ 분위기 $(Ar/O_2)$를 변수로써 막의 미세구조를 조절하였다. 투과전자현미경을 이용한 막 구조 분석에 의해 낮은 기판 온도와 $O_2$ 조건에서 막의 조성입자가 작아짐을 관찰하였고, $50^{\circ}C/O_2$ 하에서 얻이진 $Li_{2x}Ni_{1-x}O$ 박막은 약 $80\AA$ 크기의 입자로 이루어져 있었다. 전기화학적 조건 하에서 $Li_{2x}Ni_{1-x}O$ 박막의 변색현상을 조사한 결과, 박막의 미세구조 발달에 의해 $Li^+$ 이온의 가역적 수용량이 증가하고, 결과적으로 전기변색 기능이 향상됨을 알 수 있엇다. 50 $^{\circ}C/O_2$ 하에서 얻어진 170 nm 두께의 $Li_{2x}Ni_{1-x}O$ 박막은 30 mC/$cm^2$의 $Li^+$ 이온 수용력과 함께 약 1.3의 흡광밀도(OD)를 나타내었다.

• 전기화학회지
• /
• 제8권1호
• /
• pp.37-41
• /
• 2005

Ar공정 분압에 따라 스퍼터링된 $LiCoO_2$박막 양극의 $400^{\circ}C$저온 열처리를 통한 전기화학적 및 미세구조적 특성을 연구하였다. Ar분압이 변화함에 따라 양극 박막의 미세구조 및 조성이 변화하였으며, Ar분압이 증가할수록 $LiCoO_2$ 박막의 안정성 및 전기화학적 특성이 개선되었다. 순환전류전위법 및 정전류 충방전 시험에 의해 전극반응의 가역성 및 안정성 등을 고찰하였으며, 박막의 조성, 결정성, 표면 특성 등 물리적 특성은 ICP-AES, XRD, SEM 및 AFM을 통해 분석하였다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
• /
• pp.15-17
• /
• 2005

In this study, tunable dielectric materials are important for resonator, variable capacitor, phased array antenna and other devices application. In this paper, Dielectric constant increased and tuning range increased with the increased of $BaSrTiO_3/Li_{2}CO_{3}$ content, which probably can be explained by the substitution of Ba3+, Li1+ on BaTiO3 lattice. The tunability and dielectric loss of the $BaSrTiO_2/Li_{2}CO_{3}$ thick film, sintered at $1150^{\circ}C$, were about 43 % and 0.234 at 10$\sim$15 MHz, respectively. In case of BaSrTi/MgO, Dielectric constant decreased and tenability increased with the added of $BaSrTiO_3/MgO$. The ferroelectrics properties were distinct when adding Li to BST ceramic thick film, and paraelectrics pattern was distinct when adding Mg.

• 한국표면공학회지
• /
• 제30권4호
• /
• pp.255-261
• /
• 1997

Thin film batteries can be used as a micro power source for electronic in which minute power is needed. In this study, lithium phosphorous oxynitride(LIPON) thin films were deposited as an eletrolyte for lithium ion batteries using RF magentron sputtering of lithium phosphate in N2. Ti was also added into the LIPON films as a second network former to enhance the ioinc conductivity of the films. The optimum conditions for LIPON film deposition were sought and the electrolyte with the conductivity of $2.5 \times 10^{-6}$S/cm was obtained at the condition of RF power 4.4 W/$\textrm{cm}^2$, process pressure 10 mtorr and pure nitrogen ambience. Furthermore, the conductivity of LIPON films was increased from $2.5 \times 10^{-6}$S/cm to $8.6 \times 10^{-6}$S/cm by the doping of 2.4at.% Ti. It was also found that by adding Ti to LIPON films, Li content was increased and nitrogen content that reported having the cross-linking effect on LIPON films was also increased as confirmed XPS.

• 한국재료학회지
• /
• 제31권11호
• /
• pp.614-618
• /
• 2021

As the size of market for electric vehicles and energy storage systems grows, the demand for lithium-ion batteries (LIBs) is increasing. Currently, commercial LIBs are fabricated with liquid electrolytes, which have some safety issues such as low chemical stability, which can cause ignition of fire. As a substitute for liquid electrolytes, solid electrolytes are now being extensively studied. However, solid electrolytes have disadvantages of low ionic conductivity and high resistance at interface between electrode and electrolyte. In this study, Li₇La₃Zr₂O₁₂ (LLZO), one of the best ion conducting materials among oxide based solid electrolytes, is fabricated through RF-sputtering and various electrochemical properties are analyzed. Moreover, the electrochemical properties of LLZO are found to significantly improve with co-sputtered Li₂O. An all-solid thin film battery is fabricated by introducing a thin film solid electrolyte and an Li₄Ti₅O₁₂ (LTO) cathode; resulting electrochemical properties are also analyzed. The LLZO/Li₂O (60W) sample shows a very good performance in ionic conductivity of 7.3×10^-8 S/cm, with improvement in c-rate and stable cycle performance.

• 한국전기전자재료학회논문지
• /
• 제11권2호
• /
• pp.106-110
• /
• 1998

The $LiNbO_3$ thin films were prepared directly on Si(100) substrates by conventional RF magnetron spurttering system for nonvolatile memory applications. RTA(Rapid Thermal Annealing) treatment was performed for as-deposited films in an oxygen atmosphere at 600 $^{\circ}C$ for 60 s. The rapid thermal annealed films were changed to poly-crystalline ferroelectric nature from amorphous of as-deposition. The resistivity of the ferroelectric $LiNbO_3$ film was increased from a typical value of $1{\sim}2{\times}10^8{\Omega}{\cdot}cm$ before the annealing to about $1{\times}10^{13}{\Omega}{\cdot}cm$ at 500 kV/cm and reduced the interface state density of the $LiNbO_3/Si$ (100) interface to about $1{\times}10^{11}/cm^2{\cdot}eV$. Ferroelectric hysteresis measurements using a Sawyer-Tower circuit yielded remanent polarization ($P_r$) and coercive field ($E_c$) values of about 1.2 ${\mu}C/cm^2$ and 120 kV/cm, respectively.