• Title/Summary/Keyword: $LiNbO_3$

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Electrical and Structural Properties of $LiNbO_3/Si$ Structure by RF Sputtering Method (RF 스퍼터링법을 이용한 $LiNbO_3/Si$구조의 전기적 및 구조적 특성)

  • Lee, Sang-Woo;Kim, Kwang-Ho;Lee, Won-Jong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.2
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    • pp.106-110
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    • 1998
  • The $LiNbO_3$ thin films were prepared directly on Si(100) substrates by conventional RF magnetron spurttering system for nonvolatile memory applications. RTA(Rapid Thermal Annealing) treatment was performed for as-deposited films in an oxygen atmosphere at 600 $^{\circ}C$ for 60 s. The rapid thermal annealed films were changed to poly-crystalline ferroelectric nature from amorphous of as-deposition. The resistivity of the ferroelectric $LiNbO_3$ film was increased from a typical value of $1{\sim}2{\times}10^8{\Omega}{\cdot}cm$ before the annealing to about $1{\times}10^{13}{\Omega}{\cdot}cm$ at 500 kV/cm and reduced the interface state density of the $LiNbO_3/Si$ (100) interface to about $1{\times}10^{11}/cm^2{\cdot}eV$. Ferroelectric hysteresis measurements using a Sawyer-Tower circuit yielded remanent polarization ($P_r$) and coercive field ($E_c$) values of about 1.2 ${\mu}C/cm^2$ and 120 kV/cm, respectively.

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Two-wave mixing in Ce:$BaTIO_3$, Mgo:$LiNbO_3$ and :$LiNbO_3$ crystals (Ce:$BaTIO_3$, Mgo:$LiNbO_3$와 Fe:$LiNbO_3$ 결정에서의 이광파혼합 실험)

  • 주원제;박주형;곽장만;오차환;송석호;한양규;김필수
    • Korean Journal of Optics and Photonics
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    • v.9 no.6
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    • pp.423-427
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    • 1998
  • Two wave mixing experiments in $LiNbO_3$, $BaTiO_3$ are carried out, and the characteristics as optical information processing device are investigated. Examined crystals are commonly used ones, such as 0.03% mol Ce-doped $BaTiO_3$, 0.03% mol Fe-doped $LiNbO_3$, and 6% mol MgO-doped $LiNbO_3$. $Ar^+$ ion laser is used as the writing beam, and He-Ne Laser is used as the reading beam. The recording-decay and erasing characteristics of diffraction gratings, the time constants, and also the angular selectivities are measured for each crystals and compared.

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Structure and Electrical Properties of 0.85NaNbO3-0.15LiNbO3 Ceramics (0.85NaNbO3-0.15LiNbO3 세라믹스의 구조 및 전기적 특성)

  • Jeon, Chang Jun;Jeong, Young Hun;Yun, Ji Sun;Nam, Joong Hee;Paik, Jong Hoo;Cho, Jeong Ho
    • Journal of Sensor Science and Technology
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    • v.23 no.2
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    • pp.105-109
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    • 2014
  • Structure and electrical properties of $0.85NaNbO_3-0.15LiNbO_3$ ($(Li_{0.15}Na_{0.85})NbO_3$) ceramics were investigated as a function of sintering temperature. $(Li_{0.15}Na_{0.85})NbO_3$ ceramics were prepared by conventional solid state processing. A main phase of the orthorhombic perovskite structure and secondary phase of $LiNbO_3$ were confirmed for all sintered specimens. Dense $(Li_{0.15}Na_{0.85})NbO_3$ ceramics were obtained at sintering temperature above $1050^{\circ}C$. With increasing sintering temperature, the electromechanical coupling factor ($k_p$), piezoelectric constant ($d_{33}$) and relative dielectric constant (${\varepsilon}_r$) of the sintered specimens increased, while the mechanical quality factor ($Q_m$) decreased. These results are due to the increase of grain size and crystallite size of orthorhombic perovskite structure. Based on the temperature dependence of ${\varepsilon}_r$, stable piezoelectric properties were expected because no phase transition found up to $300^{\circ}C$. Typically, kp of 18%, $d_{33}$ of 34.7 pC/N, ${\varepsilon}_r$ of 135, and $Q_m$ of 62.8 were obtained for the specimens sintered at $1200^{\circ}C$ for 5 h.

Characteristic changes of Ti layer on $Ti:LiNbO_3$ from various diffusion temperature and gas during $Ti:LiNbO_3$ optical waveguides fabrication ($Ti:LiNbO_3$ 광도파로 제작 동안 확산온도 및 분위기에 따른 Ti 층의 특성변화)

  • 양우석;이승태;김우경;박우정;윤대호;이한영
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.141-141
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    • 2003
  • 전기-광 효과를 이용한 광변조기, 스위치 등의 소자 구현을 위해 고품질의 Ti:LiNbO$_3$ 광도파로 제작은 필수적이다. LiNbO$_3$ 광도파로는 양자교환(APE) 및 Ti 확산 법으로 제조할 수 있으며 전자의 경우 ne 는 증가, no는 감소되는 경향이 있어 편광도 파로의 제작에 용의하며 후자의 경우 ne 와 no 모두 증가하는 도파로 특성을 갖는다. 이러한, 도파로 소자의 특성 향상을 위해서는 Li out-diffusion 이 억제된 손실이 적은 도파로 제작이 필수적이다. 본 연구에서는 Ti 내부 확산법을 이용한 LiNbO$_3$ 광도파로를 확산분위기를 조건으로 하여 제작하였으며, 온도에 따른 각 이온의 반응 메커니즘에 관하여 관찰하였다.

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Growth and Characterization of $K_3LiNb_6O_{17}$ Single Crystals

  • Tae Hoon Kim;Seong Hyun Kim;Min Su Jang;Jung Nam Kim;Ji Hyun Ro
    • The Korean Journal of Ceramics
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    • v.6 no.3
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    • pp.272-275
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    • 2000
  • Starting from the stoichiometric composition of $K_2$CO$_3$: Li$_2$CO$_3$: Nb$_2$O$_5$=3 : 2 : 5 with the mole ratio, $K_3$LiNb$_6$O$_17$ 17/ single crystals were grown using the Czochralski method. Although the starting melt composition corresponds to the $K_3$Li$_2$Nb$_5$O$_15$ crystals, the chemical composition of the as grown crystals appears to be $K_2.95$Li$_1.33$Nb$_6.17$O$_17$ or $K_2.60$Li$_1.17$Nb$_{5.44}$ 5.44/O$_{15}$ which relatively contain fewer Li ions than $K_3$Li$_2$Nb$_5$O$_15$ crystals. We investigated the influence of the deficiency of the Li ions in the tetragonal tungsten bronze structure through the measurements of DE loop, temperature dependent dielectric constant, differential thermal analysis and temperature dependent X-ray diffraction pattern.

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Periodically domain inversion and optical properties of low-loss Ti : $LiNbO_3$ waveguides (저손실 Ti : $LiNbO_3$ 광도파로의 주기적 분극 반전과 광학특성)

  • Yang, W.S.;Kwon, S.W.;Lee, H.M.;Kim, W.K.;Yoon, D.H.;Lee, H.Y.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.16 no.2
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    • pp.49-52
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    • 2006
  • Periodic electric field assisted poling low loss (${\sim}0.1dB/cm$) single-mode Ti-diffused waveguides in $LiNbO_3$ has been achieved using a periodically patterned electrode on the +Z surface of Ti : $LiNbO_3$ crystal and homogeneous LiCl solution. Using selective chemical etching, we confirmed the periodic (${\sim}16{\mu}m$) domain inverted structure and measured SH (second harmonic) properties of fabricated periodically poled Ti : $LiNbO_3$ waveguides.

The optimum condition of the powder synthesis and sintering for the floatign zone crystal growth of $LiNbO_3$ (Floating zone법에 의한 $LiNbO_3$ 단결정 성장을 위한 최적 원료분말 합성 및 소결 조건)

  • Cho, Hyun;Shim, Kwang-Bo;Auh, Keun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.2
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    • pp.121-128
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    • 1996
  • The optimum conditons were experimentally established for the powder synthesis and sintering of the feed-rods for $LiNbO_3$ crystal growth by a floating zone method. At the lower synthesis temperatures(700, $ 800^{\circ}C$) the minor amounts of $Li_2CO_3$ and $Nb_2O_5$ were present in the synthesized $LiNbO_3$ powder and at the higher temperature the particle size increased which is not favorable for the sintering process for the feed-rods. $LiNbO_3$ powder synthesized at $950^{\circ}C$ for 12 hours was found to be the best because it contains only the$LiNbO_3$ phase with the small particle size and uniform particle size distribution. As the sintering temperature and the soaking time increase, the sintered feed-rods exhibited the higher sintered density and grain growth phenomena. The $LiNbO_3$ feed rods sintering at $1100^{\circ}C$ for 2 hours were found to have the best microstructure for the precursor feed-rods of the floating zone crystal growth because of their higher density, small grain size and uniform particle size distribution. As the sintering temperature and the soaking time increase, the sintered feed-rods exhibited the higher sintered density and grain growth phenomena. The $LiNbO_3$ feed rods sintering at $1100^{\circ}C$ for 2 hours were found to have the best microstructure for the precursor feed-rods of the floating zone crystal growth because of their density, small grain size and uniform grain size distribution.

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$[Li_{1-5x}Nb_{5(x-y)}Mg(or Zn)_{5y}]Nb_{1-4x+3y}O_3$단결정의 결합 및 물성에 관한 연구

  • 김기현;심광보;오근호
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1997.10a
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    • pp.129-133
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    • 1997
  • 본 연구에서는 LiNbO$_3$ 단결정 소재의 광손상에 대한 저항성을 향상시키는 첨가물로 잘 알려져 이쓴 MgO 및 ZnO를 첨가하여 육성한 조화용융조성(congruent melting composition)의 LiNbO$_3$ 단결정의 domain 구조는 이들 dopants를 첨가함에 따라 single domain에서 ring 형태의 주기적인 domains으로 변화함을 확인하였고, 첨가된 이온이 domain 형성에 미치는 영향을 전자현미경(SEM-WDS)으로 관찰하였다. 또한, 육성한 [Li1-5xNb5(x-y)Mg(or Zn)5y]Nb1-4x+3yO3 단결정들의 유전율(전이온도) 변화 및 광학적 특성[광투과율, 굴절률]을 측정하여 undoped LiNbO$_3$단결정과 비교하였다. 첨가물을 첨가함에 따라 전이온도는 약 20~3$0^{\circ}C$정도 증가하였으며, 10-3 order의 굴절률 변동치를 나타내었다. 또한, 육성된 결정들의 투과율은 대체로 70~80%를 나타내었고, 첨가물을 첨가함에 따라 흡수단과 OH- 흡수 band는 단파장쪽으로 각각 약 5~10nm, 40nm이동됨을 확인하였다. 이는 LiNbO$_3$단결정의 광손상 저항성이 향상되었음을 간접적으로 보여주는 결과이다.

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Microwave Dielectric Properties of $0.7Ca(Li_{1/4}Nb_{3/4})O_3-0.3CaTiO_3$ Ceramics Added with zinc-borosilicate Glass Frit (Zinc-borosilicate Glass Frit 첨가에 따른 $0.7Ca(Li_{1/4}Nb_{3/4})O_3-0.3CaTiO_3$ 세라믹스의 마이크로파 유전 특성)

  • Yoon, Sang-Ok;Kim, Kwan-Soo;Jo, Tae-Hyun;Oh, Chang-Yong;Kim, Chan-Hang;Shim, Sang-Heung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.371-374
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    • 2004
  • 저온동시 소성용(low temperature co-fired ceramics, LTCC) 마이크로파 유전체을 만들기 위해 $Ca(Li_{1/4}Nb_{3/4})O_3$ 마이크로파 유전체 세라믹스에 zinc-borosililcate glass를 첨가하여 소결 특성과 마이크로파 유전 특성을 조사하였다. $Ca(Li_{1/4}Nb_{3/4})O_3$$0.7Ca(Li_{1/4}Nb_{3/4})O_3-0.3CaTiO_3$에 zinc-borosilicate를 $5{\sim}30wt%$ 첨가하여 소결한 결과 $875{\sim}925^{\circ}C$에서 동시 소성이 가능한 것으로 확인되었으며 zinc-borosilicate glass의 함량이 증가할수록 저온에서 소성이 가능하였지만 과량의 액상과 2차상이 형성되면서 유전율과 품질계수가 저하되는 경향을 나타내었다. $Ca(Li_{1/4}Nb_{3/4})O_3$에 5wt%의 zinc-borosilicate를 첨가하여 $900^{\circ}C$에서 소성한 결과 가장 우수한 유전 특성$(\epsilon_r=17.45,\;Q{\times}f_0=5487)$을 나타내었고, 유전율을 높이기 위해 $CaTiO_3$를 0.3mol% 첨가한 $0.7Ca(Li_{1/4}Nb_{3/4})O_3-0.3CaTiO_3$에 10wt%의 zinc-borosilicate를 첨가하여 $925^{\circ}C$에서 소성한 결과 가장 우수한 유전특성$(\epsilon_r=44.92,\;Q{\times}f_0=5567)$을 나타내었다.

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Dry Etching of patternedLiNbO3Waveguides for the High-speed Optical Modulator fabrication (초고속 광변조기 제작을 위한 LiNbO3도파로의 건식식각)

  • 양우석;김우경;이승태;박우정;장현수;윤대호;이한영
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.8
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    • pp.731-735
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    • 2003
  • Ti-indiffused LiNbO$_3$waveguide have been used to various high speed optical device based on electro-optic effect such as modulators, switches, and sensor, etc. In order to high speed modulation of optical modulator have, one of the further devices, needed to increasing of electrode surrounding air by LiNbO$_3$dry etching because of impedance matching for optical and RF phase velocity between waveguide and electrode. We studied property of LiNbO$_3$dry etching after waveguide patterning lot optical modulation by using neutral loop discharge (NLD) plasma.