Electrical and Structural Properties of $LiNbO_3/Si$ Structure by RF Sputtering Method
(RF 스퍼터링법을 이용한 $LiNbO_3/Si$ 구조의 전기적 및 구조적 특성)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.11 no.2
- /
- pp.106-110
- /
- 1998